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Reticle Features: 19-25-05430 Rev. A
Reticle Features: 19-25-05430 Rev. A
Reticle Features
19-25-05430 Rev. A
Introduction
The UT524A test reticle is a 6X6X0.250 reticle used on the AP300I/Unity Platform
steppers for calibration and stepper set-up purposes. It is designed to support the a 34x26 mm field
size. Set-up of the MVS and AFAS systems is also supported.
Specifications:
SUBSTRATE :
FILM :
CD SPECIFICATION:
The 2.0um lines are specified to a tolerance of +/- 0.05um; Mean to Nominal
RESOLUTION:
ARRAY PLACEMENT:
(Measured chrome-side up from the lower-left corner of the mask)
1 location in (X) to be 12.00 0.50 mm
2 locations in (Y) to be 102.530 0.50 mm
Field 1 (continued):
Fifteen cells, 2mm x 2mm, containing lines and contacts ranging from 8 to 100
microns. See drawing on page 10.
Special 2x2mm cells with short-step focus structures at X-11, Y-5; X-11, Y-25;
X-1,Y-13; X11,Y-5, and X11, Y-25. See drawing on page 12.
-0.600mm
0.140mm
0.140mm
-0.750mm
Box-in-frame
Triple-line
design- 2
locations per
field
Single-line
design- 6
locations per
field
10
MVS targets
MVS targets
MVS Windows
11
12
13