Diffusion

Pumps

Diffusio n Pu m ps

Vacuum Furnaces
Vacuum furnace applications require pumps that are
capable of achieving stable pressures in high gas flow
environments. Additionally, furnace operators need shorter
cycle times to accomplish efficient processing of heattreated material batches.
Furnace operators derive these benefits from Varian vapor
diffusion pumps, because the high throughput and low
backstreaming rates of the pumps accommodate high
material outgassing and allow higher cross-over pressures
for shorter cycle times.
Metallizing
In web and roll coating systems, Varian diffusion pumps
have the ability to pump high gas loads making them the
perfect choice for continuous production applications.
Large Area Coating / Thin Film Deposition
Due to its simplicity, high performance and low initial costs,
the diffusion pump remains a primary pumping mechanism
for large area coating systems. The large pumps used

in this application come equipped with sight glass and drain

assemblies and are also available with ASA or ISO flanges.
Coatings (Optical, Electronics, Protective)
With low ultimate pressure, high speed, high throughput
and high tolerable forepressure, Varian diffusion pumps are
the best choice for developmental and production systems.
Molecular Beams
The foreline ejector stage provides high tolerable
forepressure and a large surface area for efficient degassing
of compressed fluid, while the foreline baffle minimizes
fluid loss even under high throughput conditions.
All Varian pumps incorporate an ejector stage as well as full
fractionating jets. HS Series pumps create high speed and low
ultimate pressure, high throughput and high tolerable forepressure and low backstreaming combine to make the
HS series the best diffusion pump. Additionally, pumps are
equipped with full thermal protection.

Varian, Inc. Vacuum Technologies

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