Diffusio n Pu m ps

Fully Optimized Jet

Using our long and varied experience Varian designs and produces vapor jets that deliver the highest
throughput, pressure stability, and tolerable foreline pressure available, while reducing backstreaming
to a minimum.

Diffusion
Pumps

Built for Production Volumes

Our success is in helping you meet the exacting requirements of your production process.
Our pumps deliver superior pumping at high pressure and high gas flow conditions, and handle gas load
variations that are typical of large volume production.

Robust Boiler Design

Through optimized boiler design, Varian pumps are stable and reliable under widely varying operating
conditions. This temperature stability prolongs fluid life as well.
Thermal protection switches prevent system over-temperature conditions.

Low Cost of Ownership

By providing the highest throughput available per unit of power, reduced cooling water requirements,
and rugged, durable stainless steel construction, Varian delivers large volume pumping at the lowest total
cost to you.

World-class Service, Training and Support

Varians application consulting capability makes use of our unparalleled experience to identify the
optimal solution for you. And we invite you to take advantage of our industry leading worldwide service
and support programs and award winning Vacuum Training classes to maximize system uptime and
productivity.

Varian, Inc. Vacuum Technologies

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