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7 g, 5 g, 18 g Single-/
Dual-Axis iMEMS Accelerometer
ADXL103/ADXL203
Data Sheet
FEATURES
GENERAL DESCRIPTION
APPLICATIONS
Vehicle dynamic controls
Electronic chassis controls
Platform stabilization/leveling
Navigation
Alarms and motion detectors
High accuracy, 2-axis tilt sensing
Vibration monitoring and compensation
Abuse event detection
+5V
VS
VS
ADXL203
ADXL103
AC
AMP
DEMOD
OUTPUT
AMP
CDC
SENSOR
AC
AMP
OUTPUT
AMP
OUTPUT
AMP
SENSOR
RFILT
32k
COM
DEMOD
ST
RFILT
32k
XOUT
COM
CX
ST
RFILT
32k
YOUT
XOUT
CY
CX
03757-001
CDC
Figure 1.
Rev. E
Document Feedback
ADXL103/ADXL203
Data Sheet
TABLE OF CONTENTS
Features .............................................................................................. 1
Applications ....................................................................................... 1
Performance ................................................................................ 13
Specifications..................................................................................... 3
REVISION HISTORY
1/14Rev. D to Rev. E
4/10Rev. A to Rev. B
9/11Rev. C to Rev. D
Added AD22293, AD22035, and AD22037 ............... Throughout
Changes to Application Section and General Description
Section ................................................................................................ 1
Changes to Table 1 ............................................................................ 3
Deleted Figure 13 and Figure 14: Renumbered Sequentially ..... 7
Deleted Figure 17 and Figure 22..................................................... 8
Added Figure 19 to Figure 24; Renumbered Sequentially .......... 9
Added Figure 25 to Figure 34........................................................ 10
Added All Models Section, Figure 35 to Figure 38 .................... 12
Changes to Figure 39 ...................................................................... 13
Changes to Ordering Guide .......................................................... 16
Changes to Automotive Products Section ................................... 16
2/06Rev. 0 to Rev. A
Changes to Features ..........................................................................1
Changes to Table 1.............................................................................3
Changes to Figure 2 ...........................................................................4
Changes to Figure 3 and Figure 4 ....................................................5
Changes to the Performance Section ..............................................9
4/04Revision 0: Initial Version
5/10Rev. B to Rev. C
Changes to Figure 24 Caption....................................................... 12
Added Automotive Products Section........................................... 12
Rev. E | Page 2 of 16
Data Sheet
ADXL103/ADXL203
SPECIFICATIONS
TA = 40C to +125C, VS = 5 V, CX = CY = 0.1 F, acceleration = 0 g, unless otherwise noted. All minimum and maximum specifications
are guaranteed. All typical specifications are not guaranteed.
Table 1.
Parameter
SENSOR
Measurement Range1
Nonlinearity
Package Alignment Error
Alignment Error (ADXL203)
Cross-Axis Sensitivity
SENSITIVITY (RATIOMETRIC)2
Sensitivity at XOUT, YOUT
Sensitivity Change Due to
Temperature3
ZERO g BIAS LEVEL (RATIOMETRIC)
0 g Voltage at XOUT, YOUT
Initial 0 g Output Deviation
From Ideal
0 g Offset vs. Temperature
NOISE
Output Noise
Noise Density
FREQUENCY RESPONSE4
CX, CY Range5
RFILT Tolerance
Sensor Resonant Frequency
SELF TEST6
Logic Input Low
Logic Input High
ST Input Resistance to GND
Output Change at XOUT, YOUT
OUTPUT AMPLIFIER
Output Swing Low
Output Swing High
POWER SUPPLY (VDD)
Operating Voltage Range
Quiescent Supply Current
Turn-On Time7
Test Conditions
Each axis
ADXL103/ADXL203
Min
Typ
Max
Min
1.7
% of full scale
0.2
1
0.1
1.5
X to Y sensor
1.25
AD22293
Typ Max
6
0.2
1
0.1
1.5
AD22035/AD22037
Min
Typ
Max
18
1.25
0.2
1
0.1
1.5
1.25
Unit
g
%
Degrees
Degrees
%
Each axis
VS = 5 V
VS = 5 V
960
1000
0.3
1040
293
312
0.3
331
94
100
0.3
106
mV/g
%
Each axis
VS = 5 V
VS = 5 V, 25C
2.4
2.5
25
2.6
2.4
2.5
50
2.6
2.4
2.5
125
2.6
V
mg
0.1
0.8
0.3
1.8
1
110
1
200
<4 kHz, VS = 5 V
0.002
24
32
5.5
10
40
0.002
24
32
5.5
ST 0 to ST 1
No load
No load
4
30
450
0.05
50
750
1100
0.2
4.5
4.8
3
0.7
20
10
40
50
250
375
0.2
4.5
4.8
3
0.7
20
mg/C
2
mV rms
g/Hz
rms
10
40
F
k
kHz
130
0.002
24
32
5.5
1
4
30
125
0.05
6
1.1
4
30
60
0.05
6
1.1
50
80
100
V
V
k
mV
0.2
4.5
4.8
V
V
3
0.7
20
6
1.1
V
mA
ms
Rev. E | Page 3 of 16
ADXL103/ADXL203
Data Sheet
Rating
3500 g
3500 g
1.2 m
0.3 V to +7.0 V
(COM 0.3 V) to
(VS + 0.3 V)
Indefinite
JA
120C/W
JC
20C/W
Device Weight
<1.0 gram
ESD CAUTION
55C to +125C
65C to +150C
tP
TP
TEMPERATURE
RAMP-UP
TL
tL
TSMAX
TSMIN
tS
RAMP-DOWN
03757-102
PREHEAT
t25C TO PEAK
TIME
Sn63/Pb37
3C/second maximum
Pb-Free
3C/second maximum
100C
150C
60 seconds to 120 seconds
150C
200C
60 seconds to 150 seconds
3C/second
3C/second
183C
60 seconds to 150 seconds
240C + 0C/5C
10 seconds to 30 seconds
6C/second maximum
6 minutes maximum
217C
60 seconds to 150 seconds
260C + 0C/5C
20 seconds to 40 seconds
6C/second maximum
8 minutes maximum
Rev. E | Page 4 of 16
Data Sheet
ADXL103/ADXL203
ADXL203
TOP VIEW
(Not to Scale)
TOP VIEW
(Not to Scale)
VS
VS
+X
COM 3
4
NC
XOUT
ST 1
NC
NC 2
NC
COM 3
+Y
+X
4
NC
XOUT
YOUT
NC
03757-003
NC 2
8
7
03757-002
ST 1
NOTES
1. NC = NO CONNECT. DO NOT CONNECT TO THIS PIN.
NOTES
1. NC = NO CONNECT. DO NOT CONNECT TO THIS PIN.
Pin No.
1
2
3
4
5
6
7
8
Mnemonic
ST
NC
COM
NC
NC
NC
XOUT
VS
Description
Self Test
Do Not Connect
Common
Do Not Connect
Do Not Connect
Do Not Connect
X Channel Output
3 V to 6 V
Pin No.
1
2
3
4
5
6
7
8
Rev. E | Page 5 of 16
Mnemonic
ST
NC
COM
NC
NC
YOUT
XOUT
VS
Description
Self Test
Do Not Connect
Common
Do Not Connect
Do Not Connect
Y Channel Output
X Channel Output
3 V to 6 V
ADXL103/ADXL203
Data Sheet
25
10
30
25
35
35
40
30
25
20
15
10
03757-012
0.80
0.70
0.60
0.50
0.10
0.20
0.30
25
20
15
10
03757-015
SENSITIVITY (V/g)
Rev. E | Page 6 of 16
1.06
1.05
1.04
1.03
1.02
1.01
1.00
0.99
0.98
0.97
0.94
SENSITIVITY (V/g)
0.96
1.06
1.05
1.04
1.03
1.02
1.01
1.00
0.99
0.98
0.97
30
0.95
0.96
0.40
40
0.95
0.50
0.94
0.60
0.70
0.80
0.40
03757-014
0.80
0.70
0.60
0.50
0.40
0.30
0.20
0.10
0.20
0.30
0.40
0.60
0.50
0.70
0.80
0.10
03757-011
10
0.30
10
15
0.20
15
20
20
0.10
25
PERCENT OF POPULATION (%)
0.10
0.02
0.04
0.06
0.10
0.08
0.08
03757-013
0.10
0.08
0.06
0.02
0.04
0.06
0.08
0.10
0.04
03757-010
15
0.06
10
20
0.04
15
0.02
20
0.02
25
Data Sheet
ADXL103/ADXL203
2.60
1.03
2.58
1.02
2.56
SENSITIVITY (V/g)
2.52
2.50
2.48
2.46
2.44
1.01
1.00
0.99
03757-016
TEMPERATURE (C)
45
45
40
40
35
30
25
20
15
10
5
0
80
90
100 110 120 130
X AXIS NOISE DENSITY (mg/Hz)
140
120
110
90
100
80
70
60
50
40
30
20
35
30
25
20
15
10
03757-008
50
03757-007
50
70
10
TEMPERATURE (C)
60
10
20
50
30
0.97
130
120
110
90
100
80
70
60
50
40
30
20
10
10
20
30
40
50
2.40
130
03757-004
0.98
2.42
40
VOLTAGE (1V/g)
2.54
5
0
60
150
70
80
90
100 110 120 130
Y AXIS NOISE DENSITY (mg/Hz)
Rev. E | Page 7 of 16
140
150
Data Sheet
45
40
40
35
30
25
20
15
10
25
20
15
10
5
1.00
0.95
0.90
0.85
0.80
0.75
0.70
0.65
0.90
90
0.80
0.75
0.70
0.65
0.60
03757-103
3V
70
60
50
40
30
20
10
Rev. E | Page 8 of 16
900
800
700
600
500
CURRENT (A)
1000
TEMPERATURE (C)
400
200
130
120
110
100
90
80
70
60
50
40
30
20
10
10
20
30
40
50
0.50
80
300
0.55
5V
03757-018
0.85
VOLTAGE (1V/g)
0.60
0.50
0.40
0.55
1.00
0.95
0.90
0.85
0.80
0.75
0.70
0.65
0.60
0.55
0.50
0.45
0.40
30
0.45
35
03757-019
45
03757-017
ADXL103/ADXL203
10
10
0.387
50
40
30
20
Rev. E | Page 9 of 16
SENSITIVITY (V/g)
1.2
1.0
0.8
0.6
0.4
0.2
2.57
2.56
2.55
2.54
2.53
2.52
2.51
2.50
2.49
2.48
2.47
2.46
2.45
2.44
03757-119
03757-022
60
0.387
70
0.377
80
0.367
80
0.357
90
0.347
0.337
0
0.2
0.327
10
0.4
15
0.6
25
0.317
0.307
0.8
10
0.297
20
2.43
30
1.0
40
50
1.2
20
03757-117
2.57
2.56
2.55
2.54
2.53
2.52
2.51
2.50
2.49
2.48
2.47
2.46
2.45
2.44
2.43
0.287
70
1.2
1.0
0.8
0.6
0.4
0.2
0.2
0.4
0.6
0.8
1.0
03757-021
SENSITIVITY (V/g)
0.377
0.367
0.357
0.347
0.337
0.327
0.317
0.307
0.297
0
1.2
0.287
Data Sheet
ADXL103/ADXL203
AD22293
70
60
50
40
30
20
10
25
20
15
10
60
50
40
30
20
ADXL103/ADXL203
Data Sheet
60
50
50
35
30
30
03757-108
50
40
30
03757-009
3.0
2.5
2.0
1.5
1.0
0.5
3.0
3.5
03757-106
3.0
2.5
1.5
2.0
1.0
0.5
0.5
1.0
0
1.5
0
2.5
2.0
10
0.5
10
15
1.0
15
20
1.5
20
25
2.5
25
2.0
PERCENT OF POPULATION
35
3.0
20
20
PERCENT OF POPULATION
25
15
10
15
10
Rev. E | Page 10 of 16
103
03757-110
SENSITIVITY (mV/g)
102
101
100
99
97
103
0
03757-107
SENSITIVITY (mV/g)
102
101
100
99
98
97
98
PERCENT OF POPULATION
PERCENT OF POPULATION
20
10
50
50
03757-105
40
30
20
10
10
20
30
10
40
10
20
10
20
30
20
30
40
30
40
40
PERCENT OF POPULATION
60
50
PERCENT OF POPULATION
ADXL103/ADXL203
45
35
40
15
0.100
0.060
03757-114
03757-111
0.100
0.095
0.090
0.085
0.080
0.075
0
0.070
0.065
0.095
10
0.090
10
20
0.085
15
25
0.080
20
30
0.075
25
35
0.070
30
0.065
PERCENT OF POPULATION
40
0.060
PERCENT OF POPULATION
Data Sheet
101.0
90
25C
80
105C
PERCENT OF POPULATION
100.0
99.5
99.0
98.5
98.0
60
50
40
30
20
Rev. E | Page 11 of 16
960
03757-113
920
CURRENT (A)
940
900
880
860
820
840
800
0
780
125
740
100
760
25
50
75
TEMPERATURE (C)
720
700
25
680
97.5
50
70
10
03757-112
SENSITIVITY (mV)
100.5
ADXL103/ADXL203
Data Sheet
40
35
35
5.0
4.0
3.0
2.0
09781-026
09781-023
5.0
4.0
3.0
2.0
1.0
2.0
1.0
3.0
4.0
1.0
10
10
15
1.0
15
20
2.0
20
25
3.0
25
30
4.0
30
5.0
40
5.0
ALL MODELS
0.9
0.8
VS = 5V
VOLTAGE (V)
0.6
0.5
VS = 3V
0.3
50
50
TEMPERATURE (C)
100
150
09781-027
0.4
09781-024
CURRENT (mA)
0.7
TIME
Rev. E | Page 12 of 16
Data Sheet
ADXL103/ADXL203
THEORY OF OPERATION
The ADXL103/ADXL203 are complete acceleration measurement
systems on a single, monolithic IC. The ADXL103 is a singleaxis accelerometer, and the ADXL203 is a dual-axis accelerometer.
Both parts contain a polysilicon surface-micro-machined sensor
and signal conditioning circuitry to implement an open-loop
acceleration measurement architecture. The output signals are
analog voltages that are proportional to acceleration. The
ADXL103/ADXL203 are capable of measuring both positive and
negative accelerations from 1.7 g to at least 18 g. The
accelerometer can measure static acceleration forces, such
as gravity, allowing it to be used as a tilt sensor.
The sensor is a surface-micromachined polysilicon structure
built on top of the silicon wafer. Polysilicon springs suspend the
structure over the surface of the wafer and provide a resistance
against acceleration forces. Deflection of the structure is measured
using a differential capacitor that consists of independent fixed
plates and plates attached to the moving mass. The fixed plates
are driven by 180 out-of-phase square waves. Acceleration deflects
the beam and unbalances the differential capacitor, resulting in an
output square wave whose amplitude is proportional to acceleration.
Phase-sensitive demodulation techniques are then used to rectify
the signal and determine the direction of the acceleration.
PERFORMANCE
Rather than using additional temperature compensation circuitry,
innovative design techniques have been used to ensure that
high performance is built in. As a result, there is essentially no
quantization error or nonmonotonic behavior, and temperature
hysteresis is very low (typically less than 10 mg over the 40C
to +125C temperature range).
Figure 11 shows the 0 g output performance of eight parts
(x and y axes) over a 40C to +125C temperature range.
Figure 13 demonstrates the typical sensitivity shift over
temperature for VS = 5 V. Sensitivity stability is optimized for
VS = 5 V but is still very good over the specified range; it is
typically better than 1% over temperature at VS = 3 V.
PIN 8
XOUT = 1g
YOUT = 0g
TOP VIEW
(Not to Scale)
PIN 8
XOUT = 0g
YOUT = 1g
XOUT = 0g
YOUT = 0g
PIN 8
XOUT = +1g
YOUT = 0g
EARTHS SURFACE
Rev. E | Page 13 of 16
03757-028
PIN 8
XOUT = 0g
YOUT = +1g
ADXL103/ADXL203
Data Sheet
APPLICATIONS INFORMATION
POWER SUPPLY DECOUPLING
For most applications, a single 0.1 F capacitor, CDC, adequately
decouples the accelerometer from noise on the power supply.
However, in some cases, particularly where noise is present at
the 140 kHz internal clock frequency (or any harmonic thereof),
noise on the supply can cause interference on the ADXL103/
ADXL203 output. If additional decoupling is needed, a 100
(or smaller) resistor or ferrite beads can be inserted in the supply
line of the ADXL103/ADXL203. Additionally, a larger bulk
bypass capacitor (in the 1 F to 22 F range) can be added in
parallel to CDC.
Capacitor (F)
4.7
0.47
0.10
0.05
0.027
0.01
SELF TEST
The ST pin controls the self test feature. When this pin is set to VS,
an electrostatic force is exerted on the beam of the accelerometer.
The resulting movement of the beam allows the user to test if
the accelerometer is functional. The typical change in output is
750 mg (corresponding to 750 mV). This pin can be left opencircuit or connected to common in normal use.
Never expose the ST pin to voltages greater than VS + 0.3 V. If
the system design is such that this condition cannot be guaranteed
(that is, multiple supply voltages are present), a low VF clamping
diode between ST and VS is recommended.
Peak-to-Peak Value
2 rms
4 rms
6 rms
8 rms
Rev. E | Page 14 of 16
CX, CY
(F)
0.47
0.1
0.047
0.01
RMS Noise
(mg)
0.4
1.0
1.4
3.1
Peak-to-Peak Noise
Estimate (mg)
2.6
6
8.4
18.7
Data Sheet
ADXL103/ADXL203
Rev. E | Page 15 of 16
ADXL103/ADXL203
Data Sheet
OUTLINE DIMENSIONS
0.087
0.078
0.069
0.020
0.015
0.010
(R 4 PLCS)
0.028
0.020 DIA
0.012
1
0.180
0.177 SQ
0.174
0.106
0.100
0.094
0.075 REF
R 0.008
(8 PLCS)
0.008
0.006
0.004
TOP VIEW
R 0.008
(4 PLCS)
0.054
0.050
0.046
(PLATING OPTION 1,
SEE DETAIL A
FOR OPTION 2)
BOTTOM VIEW
0.077
0.070
0.063
0.019 SQ
DETAIL A
(OPTION 2)
05-21-2010-D
0.203
0.197 SQ
0.193
0.030
0.025
0.020
ORDERING GUIDE
Model1, 2
ADXL103CE
ADXL103CEREEL
ADXL103WCEZB-REEL
AD22035Z
AD22035Z-RL
AD22035Z-RL7
ADW22035Z
ADW22035Z-RL
ADW22035Z-RL7
ADXL203CE
ADXL203CE-REEL
ADXL203WCEZB-REEL
ADXL203EB
AD22293Z
AD22293Z-RL
AD22293Z-RL7
ADW22293ZA
AD22037Z
AD22037Z-RL
AD22037Z-RL7
ADW22037Z
ADW22037Z-RL
ADW22037Z-RL7
1
2
Axes
1
1
1
1
1
1
1
1
1
2
2
2
Device
Generic
ADXL103
ADXL103
ADXL103
ADXL103
ADXL103
ADXL103
ADXL103
ADXL103
ADXL103
ADXL203
ADXL203
ADXL203
g-Range
1.7
1.7
1.7
18
18
18
18
18
18
1.7
1.7
1.7
Specified
Voltage (V)
5
5
5
5
5
5
5
5
5
5
5
5
Temperature Range
40C to +125C
40C to +125C
40C to +125C
40C to +125C
40C to +125C
40C to +125C
40C to +125C
40C to +125C
40C to +125C
40C to +125C
40C to +125C
40C to +125C
2
2
2
2
2
2
2
2
2
2
ADXL203
ADXL203
ADXL203
ADXL203
ADXL203
ADXL203
ADXL203
ADXL203
ADXL203
ADXL203
5
5
5
5
18
18
18
18
18
18
5
5
5
5
5
5
5
5
5
5
40C to +125C
40C to +125C
40C to +125C
40C to +125C
40C to +125C
40C to +125C
40C to +125C
40C to +125C
40C to +125C
40C to +125C
Package Description
8-Terminal Ceramic LCC
8-Terminal Ceramic LCC
8-Terminal Ceramic LCC
8-Terminal Ceramic LCC
8-Terminal Ceramic LCC
8-Terminal Ceramic LCC
8-Terminal Ceramic LCC
8-Terminal Ceramic LCC
8-Terminal Ceramic LCC
8-Terminal Ceramic LCC
8-Terminal Ceramic LCC
8-Terminal Ceramic LCC
Evaluation Board
8-Terminal Ceramic LCC
8-Terminal Ceramic LCC
8-Terminal Ceramic LCC
8-Terminal Ceramic LCC
8-Terminal Ceramic LCC
8-Terminal Ceramic LCC
8-Terminal Ceramic LCC
8-Terminal Ceramic LCC
8-Terminal Ceramic LCC
8-Terminal Ceramic LCC
Package
Option
E-8-1
E-8-1
E-8-1
E-8-1
E-8-1
E-8-1
E-8-1
E-8-1
E-8-1
E-8-1
E-8-1
E-8-1
E-8-1
E-8-1
E-8-1
E-8-1
E-8-1
E-8-1
E-8-1
E-8-1
E-8-1
E-8-1
AUTOMOTIVE PRODUCTS
The ADXL103W, ADW22035, ADXL203W, ADW22293, and ADW22037 models are available with controlled manufacturing to support
the quality and reliability requirements of automotive applications. Note that these automotive models may have specifications that differ
from the commercial models; therefore, designers should review the Specifications section of this data sheet carefully. Only the automotive grade
products shown are available for use in automotive applications. Contact your local Analog Devices account representative for specific
product ordering information and to obtain the specific Automotive Reliability reports for these models.
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