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The electrical performances of organic field-effect tran- we used three different polymer semiconductors of regio-
sistors 共OFETs兲 have significantly improved in the past de- regular poly共3-hexylthiophene兲 共P3HT兲, poly共2,5-bis共3-
cade and flexible active-matrix organic light-emitting diode hexadecylthiophene-2-yl兲thieno关3,2-b兴thiophene兲 共pBTTT兲,
共OLED兲 displays with an OFET backplane have recently and poly共9,9-dioctylfluorene-co-bithiophene兲 共F8T2兲, whose
been demonstrated.1 However, further improvement in the ionization potentials were 4.9 eV,8 5.1 eV,9 and 5.5 eV,10
performances of OFETs remains necessary to realize high respectively. Their chemical structures are shown in Fig.
output current and high frequency devices, and enhancement 1共b兲. A heavily doped Si wafer with a thermally grown SiO2
in the charge mobility of organic semiconductors is espe- layer whose thickness was 200 or 50 nm was used as a sub-
cially crucial. An alternative approach for improving OFET strate. Ti/Au source-drain electrodes with different L
performances is the downscaling of channel lengths 共L兲, 共1 m – 30 nm兲 were patterned on the SiO2 surface using
which are currently several tens of micrometer, into the sub- electron beam lithography and a lift-off technique. The bot-
micrometer regime. The output current and operational fre- tom thin Ti layer 共1–2 nm兲 was employed to promote the
quency of FET devices are well known to be, respectively, adhesion of the Au layer to the underlying SiO2 surface. The
proportional to L−1 and L−2, and the shrinkage of the L is channel width 共W兲 was scaled to maintain W / L = 10 in order
therefore a critical issue for enhancing OFET characteristics to adjust the dimension of output current in the devices hav-
as well as realizing high-integrated OFET circuits. However, ing different L. A scanning electron microscope 共SEM兲 im-
it has been reported that short-channel OFETs typically suf- age of a fabricated electrode with L = 30 nm is displayed in
fer from high space-charge limited current 共SCLC兲, which is Fig. 1共c兲. The substrate was ultrasonically cleaned in acetone
caused by the application of a high source-drain electric field and 2-propanol, followed by UV/ O3 cleaning. Then the SiO2
to the organic semiconductor channel and which significantly surface was chemically modified with self-assembled mono-
degrades transistor characteristics 关parabolic drain current- layers 共SAMs兲 of phenethyltrichlorosilane or octadecyl-
voltage 共Id-Vd兲 characteristics without current saturation and trichlorosilane 共ODTS兲 to enhance the field-effect mobility.11
increase in the off current兴.2–5 Recently, such short-channel For the pBTTT FETs, ODTS SAMs were used.12 Finally, the
effects in OFETs have been found to strongly depend on the semiconductor layers were deposited on the substrate sur-
device architecture and can be suppressed by inserting an faces by spin coating or drop casting from a toluene solution,
insulating mesa structure between source and drain followed by annealing at 100 ° C in vacuum to remove dop-
electrodes6 or by using ultrathin gate dielectrics.7 ants such as O2 and H2O from the semiconductor layers. The
In this letter, we investigate the influence of channel ma- I-V measurements of the fabricated OFETs were performed
terials on the electrical characteristics of short-channel in vacuum in a probe station 共Desert Cryogenics TTP-4兲 us-
OFETs. Bottom-contact p-type OFETs with L ranging from ing source meters 共Keithley 2611 and 2400兲 at room tem-
1 m to 30 nm were fabricated using polymer semiconduc- perature.
tors with different ionization potentials. The short-channel Figure 1共d兲 shows the output characteristics of P3HT
effects in OFETs can be reduced by increasing the ionization FETs with L of 1 m, 100 nm, and 30 nm. The SiO2 thick-
potential of organic semiconductors. The transistor opera- ness was 200 nm. As the channel length decreases, the Id-Vd
tions are demonstrated in OFETs with 30 nm length chan- characteristics become parabolic and the Id at the gate volt-
nels. age of Vg = 0 V increases. Such behavior is consistent with
Figure 1共a兲 shows a schematic diagram of the fabricated the previous results in the literature3 and has been explained
bottom-contact OFET devices. For the channel materials, by the increase in the bulk current due to SCLC.13 In the
P3HT FETs, the source-drain Au electrodes form Ohmic con-
a兲
Electronic mail: nagase@pe.osakafu-u.ac.jp. tact to the P3HT semiconductors,10 and the application of the
b兲
Electronic mail: naito@pe.osakafu-u.ac.jp. Vd to the submicrometer channel leads to an extremely high
FIG. 1. 共Color online兲 共a兲 Schematic diagram of fabricated bottom-contact OFET device. 共b兲 Chemical structures of polymer semiconductors used in this
study. 共c兲 A SEM image of source-drain electrodes with L = 30 nm. Output characteristics of 共d兲 P3HT FETs, 共e兲 pBTTT FETs, and 共f兲 F8T2 FETs on
200-nm-thick SiO2 dielectrics with channel lengths of 1 m, 100 nm, and 30 nm.
source-drain electric field, resulting in significant contribu- resulting increase in the effectiveness of the gate electric
tion of SCLC to Id. field at the channel region leads to the enhancement in the
Figures 1共e兲 and 1共f兲 show the output characteristics of Vg-induced current modulation in nanochannel OFETs. The
pBTTT and F8T2 FETs on 200-nm-thick SiO2 dielectrics decrease in saturation current observed in F8T2 FETs with
with different L, respectively. The parabolic Id-Vd character- shorter channel lengths reflects the increase in the contribu-
istics as observed in the P3HT FETs are significantly sup- tion of the contact resistance to the channel resistance in
pressed, and pBTTT and F8T2 FETs with L = 1 m exhibit shorter channel devices; if this is not the case, current level
standard transistor characteristics with Id saturation. These comparable to that of longer channel devices should be ob-
results are attributed to the formation of Schottky barriers for served in the shorter channel devices because of the same
hole injection in the pBTTT and F8T2 FETs caused by the W / L ratio.
potential difference between the work function of source Au To gain insight into the influence of the energy barrier at
electrode 共4.9 eV兲 and the ionization potential of the polymer the electrode/organic semiconductor contacts on the electri-
semiconductors, which leads to contact-limited charge trans- cal characteristics of short-channel OFETs, we examined
port and suppresses the SCLC. electrode modification with pentafluorothiophenol 共PFT兲
It can be seen in Fig. 1共e兲 that the pBTTT FET with L SAMs in pBTTT FETs. Figure 2 shows the output character-
= 100 nm shows parabolic Id-Vd characteristics and low cur- istics of short-channel pBTTT FETs with PFT-modified Au
rent modulation whereas the pBTTT FET with L = 30 nm electrodes on 200-nm-thick SiO2 dielectric. The output cur-
exhibits linear Id-Vd characteristics and enhanced current rent is significantly altered from that of the devices with
modulation. Similar enhancement in the current modulation nonmodified Au electrodes 关Fig. 1共e兲兴 and displays strong
by shrinking the L is observed in F8T2 FETs and the F8T2 parabolic behaviors with low Vg modulation. It has been re-
FETs with L = 30 nm exhibits clear Id saturation behavior
despite using thick SiO2 gate dielectrics 共200 nm兲, as shown
Drain current (PA)
Drain current (nA) Vg (V) 10-6 enhance field-effect mobility since the charge transport in
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