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Article history: To explain the initiation mechanism of alternating current in an electric circuit containing the dynamic
Received 1 June 2016 capacitor a model of mechanic- electrical transformation is suggested to use. In such a model, electric
Received in revised form charges disposed between the capacitor plates serve as a cause of measured signal in contrast to the
15 November 2016
contact potential difference, which is considered as the main base in the Kelvin’s model. If one of the
Accepted 11 December 2016
plates moves periodically, then the conditions of the charges screening are changed and thereby the
Available online 21 December 2016
capacitor recharging current is arise. The measuring is based on compensation of the recharging current
by current, which generated by a source of electromotive force (EMF). The compensation voltage depends
Keywords:
Kelvin method on both the distribution of ions or dipoles over the studied surface and the charges creating the surface
Contact potential difference potential barrier. This voltage is independent on the bulk electro-physical characteristics of a solid.
Work function © 2016 Elsevier B.V. All rights reserved.
Mechanic-electrical transformer
Semiconductor surface
http://dx.doi.org/10.1016/j.apsusc.2016.12.085
0169-4332/© 2016 Elsevier B.V. All rights reserved.
72 Yu.S. Zharkikh, S.V. Lysochenko / Applied Surface Science 400 (2017) 71–76
Fig. 3. Dependence of compensation voltage UCB on doses number n of charge Fig. 4. Dependences of compensation voltage UCB on doses number n of charge
deposited onto surface SiO2 of thickness 25 nm. deposited onto surface SiO2 of thickness 8,8 nm. Points • and are those mea-
sured without and under illumination of the sample, respectively. Arrows show the
transitions from accumulation to inversion (n = 2) and vice versa (n = 17).
dipoles density inside layer N can be conditionally divided onto two
components:
N = n1 + n2 (12)
where n1 and n2 are dipole densities that causing the screening 2.2. Experimental research of signal in the circuit of dynamic
charges q1 and q2 which are accumulated in upper and lower plates capacitor with charged plane in its gap
of the capacitor (Fig. 2).
Mutually coordinated relationships between n and q can be Functioning of the mechanic-electrical transformation (MET)
found if to proceed from the assumption that electric field strength has been modeled with using pSi–SiO2 structures. Corona charging
of charges distributed on a capacitor plate must coincide with method was used for depositing ions on the surface thermal SiO2
electric field strength of the dipole field that induces the charges at atmospheric pressure [11,12]. The amount of the charge Q was
accumulation. By equating values of E given by formulas (4) and gradually increased by adding identical doses controlled by time of
(11), we find: deposition. Compensation voltage values UCB were measured by the
pn1 pn2 Kelvin method after each adding of the charge. In this experiment,
q1 = , q2 = (13) the oxide served as d2 gap in Fig. 1. Dependence of UCB on number
d1 d2
of doses n of the deposited charge was studied using 20 samples
xTaking into account that the potential difference U (x) = with SiO2 thickness of 8–25 nm [13]. All the obtained dependencies
E (x) dx, and using formula (11), we calculate a voltage drops demonstrated analogous shapes as that shown in Fig. 3.
0
between poles of the dipoles and plates of the capacitor: In the picture, two parts with opposite inclination are seen at
the UCB (n) dependence: the LHS one was obtained by gradually
pn1 2d1 pn2 2d2 increasing of positive charge density Q deposited onto SiO2 surface,
U1 = ln , U2 = ln (14)
ε0 l ε0 l whereas the RHS segment – under a changed sign of the deposited
charge. If a single deposition dose was Qd , so charge Q(n) = nQd
Since the presence of dipole layer can’t lead to originating of a corresponds to every n. Considering this, data of Fig. 3 show the
potential difference between the capacitor plates (U1 + U2 = 0 (2)) dependence UCB (Q). It is seen that this dependence is a linear one
then we obtain from (14): and, hence, in the experiments the mechanic-to-electric transfor-
mations are realized in the conditions that meet formula (9). Values
n1 ln2d2 /l
= (15) of the single deposition dose Qd are determined from inclinations
n2 ln2d1 /l
of the linear parts of the UCB (Q) dependencies (considering ε2 = 4).
Further calculation procedure to find compensation voltage UCB It is ascertained that under the deposition of positive and nega-
is similar to that considered above in item 2.1.1: at first, from (4), tive charges these doses have constituted, respectively, 2,6·1011
(11)–(15), we find dependence q1 (t); then we do differentiate this and 6,7·1011 elementary charges per cm2 . Note the variation span
dependence thus determining current ĩQ and, by equating it with of UCB constitutes about 10 V on this structure. For a real Si surface
this span does not exceed 1 V [14–16]. This corresponds to the fact
current ĩB (formula (7)), under the condition d1 » d2 , we obtain:
that thickness of residual oxide on such a surface is by an order of
pN ln2d2 /l magnitude lesser than on the studied sample.
UCB = (16) Results of investigation of dependencies UCB (n,Q) added with
ε0 ln2d1 /l + ln2d2 /l
laser illumination (0.63 m) of the sample are shown in Fig. 4
The elementary calculations demonstrated in this paragraph are It is seen that under the illumination, absolute value of
based on the fundamental laws of electricity. These are made specif- compensation voltage UCB decreases. The incident illumination
ically for simplest models to give a clear non-complicated idea on leads to initiation of surface photovoltage Uph . In this situation,
the mechanism of signal initiation in the dynamic capacitor. From UCB = UB + Uph and, therefore, lesser voltage UB must come from
the point of view of electrical engineering, dynamic capacitor is battery B, which is measured by voltmeter V (Fig. 1).
a transformer of mechanical energy of vibrator into the energy of Note, results of such measurements give information on the
electric current. Work of moving the capacitor plate is spent on semiconductor surface space charge region. The presence of illumi-
changing the pattern of electric field inside the gap and this is nation – induced photovoltage indicates inversion and its absent
accompanied by flowing of charges between the capacitor plates shows on accumulation regimes in the region [14]. From data of
(see the Graphical abstract). Current of electrons ĩQ that emerges in Fig. 4, we can conclude that if 2 < n < 17 then an accumulation layer
the outer circuit during this process is circuited by the displacement is formed at the interface of Si–SiO2 , and the inversion layer there’s
current through the capacitor. inside of this span.
74 Yu.S. Zharkikh, S.V. Lysochenko / Applied Surface Science 400 (2017) 71–76
function measurements as compared with the emission methods. eration region. The same parameters also determine the MET
A simple explanation of this fact is that MET-generated signal in a signal value. Compensation voltage, measured by the dynamic
dynamic capacitor is caused by the external field of a dipole, which capacitor method, reflects only properties of the surface poten-
is essentially weaker than the dipole’s internal field influencing on tial barrier (the electron affinity energy), and does not depend
the emission currents. on electro-physical characteristics of solids body. Independence
In the mechanism of surface barrier formation, see Fig. 5a, elec- of the work function on the doping degree of semiconductors is
trons of the charged layer do not take part in formation of the ascertained in a series of studies of atomically – clean surfaces.
dipoles. The electrons can free moving in the plane of this layer. 3. Dipoles of the potential barrier differently affect on the work
MET-generated PD value UCB in this case meets formula (8). It is function and on value of voltage measured by the dynamic
seen that UCB depends only on parameters of the layer (Q and d2 ) capacitor method: work function which determined by the emis-
that forms the surface potential barrier. The barrier’s height cor- sion methods depends on inside dipole electric field strength,
responds to electron affinity energy , which is necessary for the whereas the MET signal is determined by a far weaker outer
electron to escape from the conduction zone to vacuum. field of the dipole. This may lead to incorrectness of the Kelvin
In the emission methods, work function W is measured from method, since the work function is established by superposi-
Fermi level energy EF . For the thermal emission, electron takes tion of results of two fundamentally different methods: values of
energy from a heated solid, first to transit from the Fermi level emission work function of the reference electrode are combined
to the conduction zone and after that add energy for subsequent with MET signal values.
exit to vacuum (W = + EF ). 4. The dynamic capacitor method provides an effective means for
During the study of metals, both the methods must give the elucidation of charges distribution above the surface of a solid.
same results, since in metals the edge of conduction zone practically Its technological application is based upon the high sensitivity
coincides with the Fermi level and W ≈ . In semiconductors, EF of the method to detection of charges.
may be essentially below the conduction zone edge, and that is
why W values obtained by the two methods may considerably be
different.
When studying materials of different EF , only electron affin-
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