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High-speed growth and photoluminescence of porous anodic alumina films with controllable interpore distances
over a large range
Appl. Phys. Lett. 91, 073109 (2007); 10.1063/1.2772184
Microstructural and optical properties of SnO 2 thin films grown on heavily doped n- InP (100) substrates
Appl. Phys. Lett. 79, 2187 (2001); 10.1063/1.1403663
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APPLIED PHYSICS LETTERS 89, 201118 共2006兲
Thickness monitoring is an indispensable growth control ing a SEM 共LEO 1530VP兲. The PL was excited by a He–Cd
in chemical vapor deposition. Moreover, thickness is also an laser 共325 nm兲.
important parameter in material characterization. There are We investigated two typical samples of porous alumina,
many methods for thickness measuring. Atomic force micro- which were anodized respectively from polished and unpol-
scope 共AFM兲, scanning electron microscope 共SEM兲, and ished Al foils. Figure 1 shows the laser-excited PL spectra of
transmission electron microscope 共TEM兲 are common de- these two samples, which the spectra feature with two sub-
vices to obtain thickness data, but making a TEM sample is bands of 2.66 共F center兲 and 3.06 eV 共F+ center兲.13,14 How-
somewhat a tedious work. Other measuring methods include ever, the spectrum b of the polished sample is surprisingly
spectral reflectance or transmittance, x-ray diffraction, and different from that of the unpolished sample. The emission
ellipsometry. However, the above methods have restrictions. intensity presented evident oscillations in a period of about
For example, spectral transmittance can only be used to mea- 0.095 eV. Note that polishing Al foil or not before anodizing
sure transparent substrate, and ellipsometry is not suitable for is the only difference between the two samples. Therefore
measureing porous films because the effective refractive in- the surface roughness should be the key factor to the PL
dex varies with the porosity of porous films. oscillation. On the other hand, using a laser to excite PL is
We report a photoluminescence 共PL兲 study on the porous also important in obtaining the PL oscillation.
alumina films.1–6 The study reveals that the evident oscilla- Figure 2 shows the PL spectra of the polished samples
tions exposed on the laser-excited PL spectrum, designated with different thicknesses. The related parameters are listed
as PL oscillation, contains information related to the film in Table I which show two trends: 共1兲 the oscillating period is
thickness and effective refractive index. Detailed analysis in- inversely proportional to the film thickness; 共2兲 the product
dicated that this structure sensitivity could be used for mea- of thickness and oscillation period is nearly constant, 3.8
suring thickness and refractive index. It should be noted that ⫻ 105 nm meV, with an average deviation of 5.2% for all
a similar explanation on the PL oscillation in porous Si has samples. This is the typical character of a plane-parallel cav-
been reported previously.7
Porous alumina film with periodic nanopore lattice is
widely used as a template or mask in the fabrication of
mesostructures.8–12 It also acts as an insulator host to sustain
the functional material on many occasions. Moreover, porous
alumina film can emit strong blue light.13,14 Thus the study is
valuable in optical applications, and it is helpful in elucidat-
ing some confused explanations on luminescence spectra.
In our experiment, porous alumina film was made by
anodizing Al foils 共99.999%, 0.5 mm thick兲. After annealing
under N2 ambient at 450 ° C for 4 h, Al foil was ultrasoni-
cally degreased in acetone for 5 min, and then it was elec-
trochemically polished in a mixture solution of HClO4 and
C2H5OH with a volume ratio of 20:80. The polished Al foil
was placed on the anode 共Cu plate兲 and anodized under con-
stant dc 40 V in 0.3M oxalic acid at 5 ° C. A Pt wire served
as the cathode. Serial samples were made with different an-
odizing durations ranging from 10 min to 8 h. For compari-
son, the unpolished Al foils were also used in anodization.
The mean surface roughness was measured using AFM FIG. 1. PL spectra of the porous alumina films. The samples were anodized
共NanoScope IIIa兲. The sample morphology was observed us- for 5 h from the unpolished Al foils 关sample 共a兲兴 and 1 h from the polished
Al foil 关sample 共b兲兴, respectively. The surface mean roughness of the unpol-
ished and polished Al foils were 38 and 9 nm, respectively, measured by
a兲
Electronic mail: yshi@nju.edu.cn AFM over a scan area of 3 m2.
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0003-6951/2006/89共20兲/201118/3/$23.00 89, 201118-1 © 2006 American Institute of Physics
129.105.215.146 On: Thu, 18 Dec 2014 13:01:41
201118-2 Huang et al. Appl. Phys. Lett. 89, 201118 共2006兲
FIG. 2. 共Color online兲 PL spectra of the porous alumina films with the same measure region 共2.25– 3.54 eV兲, and the absorption coeffi-
pore diameter but different thicknesses 共samples 1–7, from the lower to the cient is very small. With these facts, the mode spacing ⌬E
upper; note Table I兲. All samples were anodized from polished Al foils. The can be deduced from formula 共1兲 as ⌬E = hc / 2nL, or nL
PL spectrum of sample 4 is also highlighted in Fig. 1 关sample 共b兲兴. The
inserted SEM image of porous alumina film indicates a porosity of 8%. The = hc / 2⌬E, where h is Planck’s constant 共6.626⫻ 10−34 J s兲, c
scale bar is 200 nm. is the speed of light 共2.998⫻ 108 m / s兲, and nL is generally
defined as the optical length of the material.
ity where the oscillation period corresponds to the difference Figure 4 shows the linear dependence between the thick-
between two longitudinal modes. Note that the pore diameter ness of the porous alumina films 共L兲 and the optical lengths
of the porous alumina is about 30 nm 共insert, Fig. 2兲. This 共nL兲 calculated from the data in Table I. It is valuable be-
diameter corresponds to a cell tip 共barrier layer兲 of about cause the slope of the fitted line represents the refractive
100 nm. Therefore, the plane approximation is reasonable; index of the porous alumina film, which was 1.66 in our
i.e., the porous alumina film is a Fabry-Pérot cavity since the experiment. For comparison, the Bruggeman equation16 also
size of the barrier layer is much less than the wavelength of gives an access to the effective refractive index neff of the
the emitting light. complex material,
The origin of the PL oscillation related to the Fabry-
2 2 2
Pérot cavity is schematically shown in Fig. 3. We deduced nalumina − neff 1 − neff
共1 − p兲 2 2 +p 2 = 0, 共2兲
that the oscillation should result from the interference be- nalumina + 2neff 1 + 2neff
tween the emitting wave 共1兲 and its round-trip reflected wave
共1⬘兲. In general, the separation of longitudinal modes of a where nalumina is the refractive index of the matrix phase of
Fabry-Pérot cavity of length L reads as15 alumina 共1.67兲,17 and the porosity p is the percentage of the
minor phase of the air columns 共pores兲. Considering the
2 structure geometry of the porous alumina film, the porosity p
⌬ ⬇ , 共1兲 can be obtained from the statistic of the pore area using a
2L关n − 共dn/d兲兴
top-view SEM image; in our experiment, it is typically 8%
where n is the refractive index of the sample of porous alu- 共insert, Fig. 2兲. These data result in an effective refractive
mina, dn / d is the material dispersion and L is the sample index neff of 1.62 from the Bruggeman equation. This result
thickness. Note that the separation ⌬E of two neighboring matches the coefficient of average deviation of 2% to 1.66
oscillating peaks is almost constant. This phenomenon hints extracted from the PL oscillation.
that the effective refractive index of the sample should In conclusion, the dominant oscillations shown in the
change a little for the light with photon energy ranging from laser-excited PL spectrum of the porous alumina film can be
3.54 to 2.25 eV 共350– 550 nm兲; thus the material dispersion ascribed to the interference within a Fabry-Pérot optical cav-
共dn / d兲 can be treated as zero. The reliability of this suppo- ity, where the separation between two neighboring oscilla-
sition was also strengthened by the following facts: the band tions is highly sensitive to the film thickness and refractive
gap of alumina is much bigger than the photon energy of the index. Because the material dispersion 共dn / d兲 is zero under
TABLE I. Parameter dependence of the PL oscillation 共the thickness was measured using SEM兲.
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