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ERU Test Metod
ERU Test Metod
L I max
1 Introduction t clamp (2)
Vclamp VDD
Microelectronic devices such as integrated smart power
products are not replaceable in our technology-oriented
society nowadays. They are required for numerous 2 Testing the Clamping Capability
applications in the fields of automotive, industry,
telecommunications, and electronic data processing [1]. Destructive single pulse stress tests on integrated power
The term “smart power” refers to a device that contains switches have to be performed to define the SOA. There
built-in protection functions like short circuit protection are multiple methods for acquiring information about the
or peak-voltage clamping for switching off inductive maximum energy capability of DUTs. A generalized
loads, in addition to the power switch [2]. analytical approach valid for arbitrary pulse shapes and
Automotive smart power devices are often connected to based on technological properties of the semiconductor
inductive loads like injection coils. When these would require knowledge of the transient device
inductances are switched off, the stored inductive energy temperature during the power pulse, as destruction of the
has to be dissipated. The inductance reacts to the current power DMOS is related to its peak junction temperature.
decrease by raising its terminal voltage. If the DUT is However this is not directly measurable and thus needs
unprotected, voltage and energy are limited by the to be computed from a thermal model, usually by FEM
avalanche capability of the device. To prevent the device (finite element method) simulation [5]. – Two empirical
from entering the avalanche mode, a Zener clamping techniques to determine the SOA for application relevant
structure is typically implemented as a protection pulse shapes, relying solely on electrical measurements,
function (see Figure 1). The clamping voltage (Vclamp) is will be described in this work in paragraph 2.3 and 2.4.
higher than the operating voltage (VDD) but lower than The test assembly can either be built up with real coils
the breakdown voltage of the device. [3,4] as described in paragraph 2.1 or can employ an
electronic load. In any case, the test circuit must be able
to provide high power and high energy during the
clamping operation. A current source unit, which meets
these demands, is presented in paragraph 2.2.
Figure 4. Block diagram of ERU test circuit Figure 6. Rectangular stress pulses (ERU method)
The current amplitude is increased in 10 mA steps. In During the destructive tests the clamping voltage and
Figure 6 only four sample stress pulses are visualized. the current is measured and analyzed. The pulse power
The destruction pulse has an energy of 236.5 mJ (test and energy is calculated for each pulse. For short pulses,
performed at -45 °C). the maximum energy capability is nearly independent of
As described in paragraph 2.2, the load is a controlled pulse shape – a comparison for 610 µs rectangular and
current source unit and the stress pulse can take on triangular shaped pulses is shown in Figure 8. The
arbitrary shapes. For an application relevant load following analyses are therefore limited to a set of
condition, a triangular ramp current pulse may be rectangular stress pulses.
chosen.
3.1 Pulse Energy over Pulse Width
Since the current is ramped up in minor steps, the
energy level of the last non-destructive pulse can be used
in order to obtain the SOA limit. Measured energy
values are displayed in Figure 9 for the given set of pulse
widths and temperatures. As the diagram employs a
double logarithmic scale, the trend lines appear linear,
indicating a power law relationship [10]. Energy
capability increases with pulse width, but decreases with
ambient temperature, as expected.
Figure 8. Comparison of triangular ramp and Figure 10. Power derating curve and estimated
rectangular shaped pulses destruction temperature.
Based on the assumption that the destruction defining the SOA over a wide temperature range for
temperature is a property of the device technology and devices of the same type was proposed.
thus independent of the applied pulse shape and width of
the destructive power pulse, a simple linearized model Acknowledgements
based on the thermal impedance Zth may be applied
The Federal Ministry of Economics and Labor of the
Eq. (3) [10].
Republic of Austria and the Carinthia Economic Fund
(KWF) jointly funded this work.
T
Zth (t pulse ) (3)
Pmax References
where [1] W. Pribyl, "Integrated Smart Power Circuits,
Technology, Design and Application", in ESSCIRC
T Tdestr Tcase (P max) (4)
'96, Neuchatel, Switzerland, 1996.
[2] J.P. Stengl and J. Tichanyi, Leistungs MOS-FET
Tcase (Pmax) is the initial case temperature of the DUT, Praxis, 2nd ed. Munich: Pflaum Verlag, 1992.
before the destructive power pulse is applied. Tdestr is the [3] W. Kanert, "Reliability Challenges for Power
junction temperature, at which the DUT is destroyed. It Devices under Active Cycling", in 2009 IEEE
can be estimated from the common intersection point of International Reliability Physics Symposium,
the power versus temperature lines in Figure 10, where Montreal, 2009, pp. 409-415.
the device would hypothetically be destroyed by [4] M. Denison, Single Stress Safe Operating Area of
applying 0 W of electrical power. Thermal impedance DMOS Transistors integrated in Smart Power
for the tested pulse widths may then be calculated from Technologies. Bremen, Germany: University of
the slope of temperature versus power according to Bremen, 2006, PhD thesis.
Eq. (3). Results based on a least squares fit are shown in [5] V. Kosel, R. Sleik and M. Glavanovics, "Transient
Figure 11. Non-linear Thermal FEM Simulation of Smart
Power Switches and Verification by
Measurements", in Therminic 2007, Budapest,
2007, pp. 110-114.
[6] K. Fischer and K. Shenai, "Electrothermal effects
during unclamped inductive switching (UIS) of
power MOSFET's", IEEE Transactions on Electron
Devices, vol. 44, no. 5, pp. 874 - 878, May 1997,
DOI: 10.1109/16.568052.
[7] H. Eder, "Development of a Repetitive Clamping
Test System Hardware for Smart Power Switches",
Carinthia University of Applied Sciences, Villach,
Diploma Thesis 2006.
[8] M. Glavanovics and H. Köck, "A new Cycle Test
Figure 11. Power switch transient thermal impedance System emulating Inductive Switching
as extracted from SOA test data Waveforms", in European Conference on Power
Electronics and Applications, Aalborg, Denmark,
With this approach, the destruction temperature at the 2007.
common intersection for the described pulse set was
[9] M. Glavanovics, V. Kosel and T. Smorodin,
found to be about 420 °C. Based on the knowledge of the
"Flexible Active Cycle Stress Testing of Smart
destruction temperature and thermal impedances, the
Power Switches", Microelectronics Reliability, vol.
SOA for the tested device type may be predicted for
47, pp. 1790-1794, 2007.
arbitrary operating points around the measured range of
test pulses and ambient temperatures between -45 °C and [10] M. Glavanovics and H. Zitta, "Thermal Destruction
+125 °C. Testing: an Indirect Approach to a Simple Dynamic
Thermal Model of Smart Power Switches", in
ESSCIRC 2001, Villach, 2001.
4 Conclusion
A high power and high energy test circuit for testing the
clamping capability of smart power devices was
introduced. Based on the destruction data for a set of test
pulses applied to DUTs under a well defined
environment, the thermal impedance model was used to
estimate the destruction temperature. A method for