MEMS COMPONENTS

[Original graphic courtesy of

Khalil Najafi, University of
Michigan]
 Sensors, Transducers and
Actuators
• A sensor is a device that receives and responds to a signal.
• Transducers change one form of energy into another form of
energy.
 A microphone converts sound into electrical impulses
 A loudspeaker converts electrical impulses into sound
 A solar cell converts light into electricity
 A thermocouple converts thermal energy into electrical energy
 An incandescent light bulb produces light by passing a current through a filament
 An electric motor is a transducer for conversion of electricity into mechanical energy or
motion
• Actuators
 An actuator is something that actuates or moves something and is a device that converts
energy into motion.
• There are many types of sensors, transducers, and actuators found
in microelectromechanial systems (MEMS).
Out-of-Plane Accelerometer

SEM courtesy of Khalil Najafi, University of Michigan, Silicon Wet Etching Presentation]
 Out-of-Plane Accelerometers
• MEMS accelerometers convert motion to electrical
energy.
• An out-of-plane accelerometer consists of an inertial
mass suspended by fabricated springs.
• Forces affect this mass as a result in an acceleration or
inclination.
• The forces cause the mass to be deflected from its
nominal position.
• The deflection of the mass is sensed as a change in
capacitance between the proof mass (moveable
electrode) and a fixed electrode.
Lateral In-Plane Accelerometer

Elect rode 2
Springs (Tether)

Elect rode 1
Cs
[Original graphics courtesy of Khalil Najafi,
University of Michigan, Capacitive Sensors
Presentation]
Lateral In-Plane Accelerometer
• Lateral in-plane accelerometers sense the lateral
movement of a proof mass (moveable electrode) as
it moves parallel to the plane of the substrate.
• As the mass moves due to an acceleration,
inclination, or deceleration, the capacitance
between the mass fingers and the fingers of the
stationary electrodes changes.
• The amount of change in capacitance represents
the amount of movement.
• The figure illustrates how the space between the
fingers of the mass and the electrodes is seen as a
capacitance.
 3-Axes Accelerometer

Out-of-plane
Device

Polysilicon
In-plane Connectors
Devices

[Graphic courtesy of Khalil Najafi, University of Michigan]

 3-Axes Accelerometers
• An inertial sensor might have three accelerometers,
one for x, y, and z directions.
• The sensor in the diagram has two in-plane
accelerometers for the x and y movements and an
out-of-plane accelerometer for the z movement.
• The MEMS sensor uses the accelerometers’
movements to monitor the acceleration and/or
inclination of an object (e.g. cars, computers,
cameras)
• Movement is sensed by a change in capacitance
between the proof mass (moveable electrode) and a
fixed electrode.
MEMS Cantilevers
[Cantilever array developed by and printed with
permission of Seyet LLC]
 MEMS Cantilevers
• The microcantilever is one of the most versatile transducers
in MEMS sensors.
• It can convert pressures, chemical reactions, changes in
mass, and temperatures to outputs such as changes in
frequency, resistance, or angular deflection of light reflected
off its surface.
• To detect a specific target molecule, the cantilever is
fabricated with a probe coating on one or both surfaces as
shown in the graphic.
• The probe coating is a chemically sensitive layer that
provides specificity for molecular recognition.
• The left graphic shows viruses (red spheres) being adsorbed
by a cantilever coating of a specific antibody (blue).
Surface Reactions on Cantilevers /
Beams
 Surface Reactions on Cantilevers
• Surface reaction is when the analytes are confined to the
surface of the probe coating.
• The figure shows a coating as a monolayer of probe molecules
on top of a gold layer.
• The reaction is chemisorption of the analytes on the cantilever's
surface.
• Notice how the analytes are confined to the surface. The
reaction at the surface causes thermal expansion of the probe
coating. Because the gold layer is not experiencing the same
thermal stress as the surface, it tends not to expand. This
mismatch results in a bending of the cantilever.
• This same reaction can be seen by making a cantilever out of
layers of two different metals. When heated, the two metals will
react differently, resulting in an upward or downward bend.
 Strain Gauge (A piezoelectric
transducer)

Strain

R = ρ (L / (Wt), where R is resistance, L is length, W is width, and t is thickness

Total Resistance = n * R, where n is the number of legs in the gauge
 Strain Gauge (A piezoelectric
transducer)
So how do MEMS measure the amount of “bend” in a cantilever or
beam? How about a strain gauge?
• A strain gauge can be made by depositing a metal on a region
of a non-conductive solid that experiences strain (stress).
• The change in the resistance of the metal legs of the gauge
provides a measure of the strain.
• The gauge pattern can have one or more “gauge legs” that will
stretch due to strain.
• By connecting the gauge to an electrical circuit, the sensor can
measure any change in the gauge’s resistance by a change in
current.
Each leg of the gauge has a resistance R, with a total resistance
of n*R (n being the total number of legs in the gauge).
Examples of MEMS with Strain Gauges
 Examples of MEMS Strain Gauges

• Microcantilever sensors use strain gauges or piezoresistive

layers fabricated into the microcantilever. (Top image)
• The bottom image of the diaphragm and strain gauges is
actually a Wheatstone bridge MEMS circuit with four resistors
(two fixed and two variable).
– The bottom right picture is the electrical drawing of a Wheatstone
Bridge.
– The variable resistors are the strain gauges. Notice that their placement
on the diaphragm is such that they will experiences the greatest amount
of stress when the diaphragm flexes.
– The two resistors on the edge of the diaphragm are considered “fixed”
since they will experience a negligible amount of stress.
– The pads are the input and output nodes for the circuit.
Example of MEMS Strain Gauge
(Pressure Sensor)

Example of a Diaphragm MicroPressure Sensor

[University of New Mexico, MTTC]
Electrode Transducers
 Electrode Transducers

• Just like cantilevers, electrodes can be used as transducers to

sense analytes in a sample.
• This electrode transducer consists of a piezoelectric (PZT)
layer and a probe coating.
• Just like with the cantilever, the probe coating detects and
captures the target molecules.
• A chemical reaction causes the probe coating to expand (or
contract).
• The PZT layer expands with the coating. This creates a
change in the PZT resistance.
Surface Acoustic Wave (SAW)
Sensors

Delay Line
 Surface Acoustic Wave (SAW)
Sensors
Surface Acoustic Wave (SAW) sensors are currently used as electronic filters,
delay lines, and resonators in communication systems. They are being tested
for use as biosensors, torque and pressure sensors, and humidity and gas
sensors.
• A SAW uses two interdigited transducers (IDT) (an input and an output) to
sense a shift in the frequency of an input wave after it travels across a
“delay line.”
• The delay line could be a sensing film or probe coating that identifies and
captures target molecules (e.g. a specific gas or biomolecule such as a
virus).
• The input IDT generates the original wave. The output IDT measures a shift
in frequency caused by the analytes on the sensing film.
• When the wave hits the output IDT, it causes a mechanical shift in the
transducer fingers which is sensed as a voltage change. [“Design and Fabrication of Novel
SAW Bio/Chemical sensor in CMOS.” Tigli, Zaghloul. George Washington University. IEEE 2005]
Electrostatic Actuators

[Original graphic courtesy of Khalil Najafi, University of Michigan]

 Electrostatic Actuators
Many applications require the generation of forces vertical and parallel
to the wafer’s surface.
• The top actuator, the varying gap actuator, uses an electrostatic
actuation to produce a vertical movement of the mass. An
electrical signal is applied to the fixed electrode which creates
movement in the moveable electrode. (Opposites attract, likes
repel)
• Comb drive actuators are used to generate forces parallel to the
wafer surface. In the actuator, we have a lateral movement – the
fingers of the moveable electrode move farther into or out of the
fixed electrode.
• Both electrostatic actuators can produce variable movement with
the applications of a variable voltage allowing for precise
positioning of devices such as pop-up micromirrors.
Electrostatic Comb Drives

Comb drives of a 3-layer polysilicon

microengine are shown here. The
springs in the center provide the
restoring force, returning the
electrostatic comb teeth to their
original position.
[Image courtesy of Sandia National
Laboratories,
www.mems.sandia.gov.]
 Electrostatic Comb Drives
• A common MEMS actuator is the linear comb drive, also
called an interdigitated comb drive.
• A comb drive consists of two combs that face each other
such that their teeth interlock as shown in the Scanning
Electron Microscope (SEM) image.
• One comb is fixed or anchored; the second comb is
moveable and attached to a spring. During operation, each
comb acts as an electrode.
• Comb drive fabrication ensures that the teeth of the two
combs do not touch and are always mechanically and
electrically separate.
 Comb Drive Operation

Fixed comb

Moveable comb

Travel stop Spring

Comb drive showing Travel Stops and Springs of a Comb drive

[Images courtesy of Sandia National Laboratories, www.mems.sandia.gov]
 Comb Drive Operation
• Comb drives move due to electrostatic interactions, those
interactions that cause opposite charges to attract and like
charges to repel.
• One comb is grounded.
• A positive voltage is applied to the other comb.
• Electrons move from ground to the tips of the grounded
comb’s teeth.
• The opposing charges pull the moveable comb linearly into
the fixed comb.
• When the voltage is removed, the tension of the spring
returns the moveable comb back to its resting position.
 MEMS Electrodes

This MEMS switch is actuated when a voltage is

applied to the pull down electrode. Such switches
are used in RF (radio frequency) applications.

This technology is called digital light processing or

DLPTM, a trademark owned by Texas Instruments,
Inc. Electrodes are used to move the mirror into
the ON (into the light) or OFF (away from the light)
position. [Image courtesy of Texas Instruments]
 MEMS Electrodes
In MEMS, electrodes have many uses. Other slides show
electrodes used as chemical sensors and as teeth or combs in
accelerometers and comb drives, respectively. Other
applications of MEMS electrodes include the following:
• Detect the flow of electrons as in a Scanning Electron
Microscope
• Conduct current between points (e.g. switches)
• Transmitter / Receiver (e.g. pacemakers, retinal implants,
neural probes)
• Actuators to create movement when voltage is applied
and/or removed (e.g. digital mirrors, cantilevers, comb
drives)
 Micropumps

The diagram illustrate a nonmechanical pump

used in bubblejet print heads. A heater is used
The pump in the picture is less than one fourth the size
to evaporate the ink, forming a bubble. The
of existing insulin-pump devices. Once tested and
bubble pushes the ink below it out of the
approved this pump will be encased in a nearly
nozzle. When the heater is turned off, capillary
invisible patch placed on the skin.
action allows the ink to refill the reservoir.
[Printed with permission from Debiotech SA]
 Micro and Nanopumps
MEMS pumps are used in
• drug delivery systems,
• ink jet print heads,
• lab-on-a-chip (LOC), and
• microfluidic research (just to name a few).

Just like larger pumps, micropumps can be mechanical or non-

mechanical. Actuation of micropumps include electrostatic,
pneumatic, electromagnetic, piezoelectric, heaters, electro-
osmotic flow, and ultrasonics.
Diaphragm Micropumps
 Diaphragm Micropumps

• Diaphragm micropumps have moving parts that create

changes in pressure within the pump. These pressure changes
cause the fluid to flow.
• A popular use of the diaphragm pump is the inkjet printer
shown in the graphic. In this inkjet print head, piezoelectric
crystals initiate the pumping action of the micropump by
moving a diaphragm up and down.
– As the diaphragm moves up, ink flows from the reservoir into the ink
jet head where the pressure is lower.
– When the diaphragm moves down, the pressure increases and the ink
is pushed out the nozzle.
Batteries
The left graphic illustrates a MEMS battery for
use in vivo (internal) to power components of
a retinal prosthesis. The image below shows
the artificial retina (an electrode microarray
placed on retina.)
[Images courtesy of Sandia National
Laboratories]
 MEMS Batteries
Sandia National Laboratories has designed a battery that can be
used in vivo (internal) to power the components of a retinal
prosthetics. (See Images)
“A team of in the Georgia Tech School of Materials Science and
Engineering has developed a nanogenerator that converts
motion into electrical current. The nanogenerator is an array of
tiny filaments-zinc oxide nanowires that produce continuous
direct-current electricity from mechanical energy. Safe enough
for use in biomedical applications, the nanoscale generator could
generate energy from internal vibrations and even blood flow.”
(“Science of the Small”. Courtney Howard. Military and
Aerospace Electronics. June 2007.)
MEMS Valves
 MEMS Valves
• Microvalves can be used to control the flow of gases or liquids.
• Microvalves are used in MEMS where fluid flow is required to be
turned On or Off.
• MEMS valves are normally electrostatic devices, but pressure
and temperature actuated valves are being developed.
• The graphic shows a piezoelectric unimorph actuator in the
actuated state (top). This valve operates by applying a voltage
across the piezoelectric (PZT) layer. This leads to an uneven
temperature change in the two cantilever layers due to different
materials with different temperature coefficients. The result is
an upward bending of the cantilever creating an opening
between the inlet and fluidic channel.
 ACKNOWLEDGEMENTS
Copyright 2009 - 2010 by the Southwest Center for Microsystems
Education and The Regents of the University of New Mexico.
Southwest Center for Microsystems Education (SCME)
800 Bradbury Drive SE, Suite 235
Albuquerque, NM 87106-4346
Phone: 505-272-7150
Website: www.scme-nm.org email contact: mpleil@unm.edu

The work presented was funded in part by the National Science

Foundation Advanced Technology Education program, Department
of Undergraduate Education grants: 0830384.