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Article history: Synthesis and characterization of structural, magnetic and nanomechanical properties of Ni-doped AlN
Received 6 October 2013 films deposited by magnetron sputtering are reported. The films exhibited ferromagnetism with a Curie
Received in revised form 26 March 2014 temperature above 400 K. The observed room temperature saturation magnetization tended to decrease
Accepted 28 March 2014
with increasing Ni concentration, which has the maximum 4.56 emu/cm3. The nanomechanical analysis
Available online 5 April 2014
testified that the degradation of crystalline quality in the films with high Ni content results in the
decreasing hardness, Young’s modulus and slight decrease of friction coefficient. Al1xNixN films for
Keywords:
x = 0.021 exhibited favorable nanomechanical properties and outstanding ferromagnetism which confirm
Ni-doped AlN films
Ferromagnetic
the possible application in spin electronics.
Nanomechanical Ó 2014 Elsevier B.V. All rights reserved.
Magnetron sputtering
http://dx.doi.org/10.1016/j.jallcom.2014.03.178
0925-8388/Ó 2014 Elsevier B.V. All rights reserved.
56 J. Xiong et al. / Journal of Alloys and Compounds 606 (2014) 55–60
thickness of Ni doping and AlN film is about 5–10 nm and 100 nm, respectively, for corresponding to (1 0 0) of the AlN structure in the pattern, which
each layer. The whole films had a thickness of about 600 nm. The dopant concentra-
indicates all the films has the hexagonal wurtzite structure with-
tion of Ni was controlled by varying the sputtering time, which was 15 min for AlN
film and 2–8 s for Ni doping, respectively. Both the beginning and the end of the
out any other impurity phases such as NiN, Ni2N3, NiO, Ni2O3 or
layers are AlN films to prevent Ni atoms from permeation to substrate and Ni clusters. The lattice constants a as a function of Ni contents
oxidation. are shown in Table 1. It can be seen from the table that the
The dopant concentration of Ni was determined by X-ray fluorescence (XRF, (1 0 0) peak position shifts to higher angles as Ni concentration
XRF 1800). Structural properties were characterized by field emission scanning
from 2.1 to 8.2 at.% and the lattice parameter, a, slightly shrinks
electron microscopy (SEM, JSM-7100F), X-ray diffraction (XRD, D8 Advance) and
atomic force microscope (AFM, Nanoscope IIIA). Photoluminescence (PL) spectra with the increase of Ni doped concentration, probably due to the
of the samples were collected at RT excited by the 250 nm line of a Xe lamp as exci- Ni substitution for Al. This tendency has been found in Si-doped
tation source at RT. The magnetic property was performed on a superconducting AlN films and provides the clear evidence that the doping ions
quantum interference device magnetometer (SQUID, MPMS XL-7) which features
were incorporated into the substitutional sites in the AlN structure
a sensitivity of 108 emu. Nanomechanical properties including nanohardness
and scratch were measured by Nanoindenter (Hysitron TI 950). The hardness (H)
[19]. However, the tendency is in the opposite direction of Cr-
and Young’s modulus (E) of Al1xNixN films were determined adopting Oliver and doped AlN films, in which the c-axis lattice constant decreases as
Pharr model from the load–displacement curves with a diamond Berkovich inden- a function of Cr doping concentration [20]. A possible reason for
ter tip. During the nanoscratch tests, the load was ramped from 0 to 8 mN in 10 s the different tendency could be the orientation of the film, since
and the scratch length was set as 15 lm with spherical indenter. The coefficient
the AlN (0 0 2) oriented in the Cr-doped films but AlN (1 0 0) in
of friction was calculated by dividing the lateral force encountered during the
scratch by the normal force. At least 5 independent indents and scratches were con- our present work. It also can be observed that the intensity of
ducted for each sample. An in situ imaging analysis was used to observe the surface (1 0 0) peaks was decreased with increasing Ni concentration. The
morphologies around the scratch marks after the nanoscratch. decreasing crystalline property may be due to the Ni doping
induced defects in the AlN films.
Moreover, the Scherrer’s formula shown below was employed
3. Results and discussion to estimate the average grain size of Ni-doped AlN (1 0 0) films
[21]:
Cross-sectional SEM image of the 2.1 at.% Ni-doped specimen
indicates that the monolayer and homogeneity structure of AlN 0:9k
D¼ ð1Þ
films, as shown in Fig. 1(a). Fig. 1(b) shows the typical XRD pattern B cos h
for Al1xNixN thin films with different Ni concentrations deposited where D, k; B and h are denoted as the average grain size, the wave-
on p-type (1 0 0) Si substrate. There is only one sharp peak, length of the X-ray (1.5406 Å), the full-width at half-maximum of
(1 0 0) peak, and the corresponding diffraction angle, respectively.
Thus, the estimated average grain sizes of 2.1, 4.7, 6.4 and 8.2 at.%
Ni-doped AlN (1 0 0) films are 43.2, 35.1, 28.7, and 25.6 nm, respec-
tively, indicating a decreasing average grain size with increasing Ni
concentration.
The AFM measurement technique was employed to discuss the
effect of Ni concentrations on the surface morphology of Ni-doped
AlN films. Fig. 2 shows the three-dimensional surface morpholo-
gies acquired over a 1 lm 1 lm area. It can be seen that the sur-
face of AlN thin film with 2.1 at.% Ni doping is relatively smooth
(Fig. 2(a)). As Ni concentration increasing to 8.2 at.% the grain size
of AlN films reduced and the surface roughness increased obvi-
ously. The result is in agreement with the result of XRD. The root
mean square (RMS) surface roughness of 2.1, 4.7, 6.4 and 8.2 at.%
doped AlN films are 2.48 nm, 3.46 nm, 6.61 nm and 7.46 nm,
respectively. Since the XRD result illustrates no exist of secondary
phase in Ni-doped AlN film, this indicates that more Ni atoms dis-
solving into the AlN lattice brought down the surface activity of the
grains and leaded to uneven nucleation, therefore, the grain
growth was inhibited and the surface roughness was increased. A
similar trend of increasing surface roughness or decreasing grain
size with increasing doping content is reported for Fe-doped ZnO
film [22] and Na-doped CdS film [23].
The photoluminescence (PL) spectra of undoped and Ni doped
samples were carried out to confirm that the Ni incorporated into
the AlN lattice indeed (Fig. 3) for some transition metal doped AlN
materials were expected to have strong luminescence properties
[24]. No emission peak was found in the spectrum range of 300–
460 nm. However, obvious blue emission peaks located at
Table 1
Variation of peak position, and lattice parameter of the samples with Ni doped
concentration.
Fig. 2. Three-dimensional AFM images of Al1xNixN thin films for x = (a) 0.021, (b) 0.047, (c) 0.064 and (d) 0.082 in an area of 1 lm 1 lm.
Fig. 6. (a) Load–displacement curves and (b) hardness and Young’s modulus of Al1xNixN (1 0 0) films for x = 0.021, 0.047, 0.064 and 0.082 at 8 mN load.
J. Xiong et al. / Journal of Alloys and Compounds 606 (2014) 55–60 59
4. Conclusion
elastic modulus evolution with the grain size was also observed in In summary, we reported the structural, magnetic and nanome-
Fe60Co20B20 films by Chen and Chang [34]. In their case, the chanical properties in Ni-doped AlN films with various Ni concen-
decrease of hardness and elastic modulus with the thermal anneal- trations deposited by magnetron sputtering. The magnetic and
ing time was explained by the increasing grain size and surface nanomechanical properties of Al1xNixN films were observed to
roughness of the film. It should be also noted that the values of be strongly dependent on the Ni concentration. The maximum RT
hardness of our Ni-doped AlN (1 0 0) films are higher than those Ms and Hc obtained were about 4.56 emu/cm3 and 111 Oe, respec-
of the reported (0 0 2) and (1 0 3) oriented AlN films, which are tively, for Al0.979Ni0.021N films, which also exhibited the maximum
12 GPa and 21.4 GPa, respectively [35,36]. hardness, Young’s modulus and optimal coefficient of friction. The
The calculated coefficient of friction of Al1xNixN (1 0 0) films as magnetization measurement indicated that the Curie temperature
a function of x is plotted in Fig. 7 and the corresponding in situ is higher than 400 K. It is expected that the room temperature
Fig. 8. The in situ images of Al1xNixN (1 0 0) films, for x = (a) 0.021, (b) 0.047, (c) 0.064 and (d) 0.082, after nanoscratch test at a constant normal load of 8 mN.
60 J. Xiong et al. / Journal of Alloys and Compounds 606 (2014) 55–60
ferromagnetic Ni-doped AlN films with stable mechanical proper- [15] H. Li, H.Q. Bao, B. Song, W.J. Wang, X.L. Chen, Solid State Commun. 148 (2008)
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from Nature Science Foundation of China (61106070, 61274010 [21] Z. Ullah, S. Atiq, S. Naseem, J. Alloys Comp. 555 (2013) 263–267.
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