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Keywords: Polycrystalline In4Se3: Sn thin films are prepared on glass substrate by reactive evaporation under a vacuum of
Sn doped In4Se3 thin films 10−5 mbar. The characterizations of the samples are done using XRD, FESEM, XPS and UV-Vis-NIR spectro-
Reactive evaporation photometer. The optical band gap shift of the sample, above the carrier concentration of 1.833 × 1017 cm−3, is
Burstein-moss effect well described by Burstein-Moss model. The resistivity of the samples is found to decrease as a result of Sn
incorporation. Our results show that in all samples, impurity scattering and lattice vibration scattering are the
main factors affecting the electrical properties. Photoconductivity studies at room temperature show that visible
photoresponsivity of the films increases with increase in Sn concentration. These improvements in optoelec-
tronic properties facilitate the usefulness of such films in device applications.
∗
Corresponding author.
E-mail address: anuroop@cusat.ac.in (R. Anuroop).
https://doi.org/10.1016/j.mssp.2019.03.020
Received 31 December 2018; Received in revised form 22 February 2019; Accepted 17 March 2019
1369-8001/ © 2019 Elsevier Ltd. All rights reserved.
R. Anuroop and B. Pradeep Materials Science in Semiconductor Processing 98 (2019) 19–28
Table 1
Impingement rate of In, Se and Sn in the prepared samples.
Name Impingement rate (atoms cm−2 s−1)
In Se Sn
15 15
Sample A 2.7 × 10 2.0 × 10 –
Sample B 1.18 × 1014
Sample C 2.23 × 1014
20
R. Anuroop and B. Pradeep Materials Science in Semiconductor Processing 98 (2019) 19–28
Table 2
Comparison of the observed ‘d’ values from XRD data with standard ‘d’ values.
Name d330 (Å) d040 (Å) d431 (Å) d820 (Å) d930 (Å)
Observed Std. Observed Std. Observed Std. Observed Std. Observed Std.
Sample A 3.19 3.20 3.11 3.08 2.33 2.31 1.82 1.83 1.58 1.57
Sample B 3.19 3.20 3.11 3.08 2.33 2.31 1.82 1.83 1.58 1.57
Sample C 3.19 3.20 3.12 3.08 – – – – 1.58 1.57
Table 3
Texture coefficients of the prepared samples from XRD data.
Name Tc (330) Tc (040) Tc (431) Tc (820) Tc (930)
Table 4
3.3. Electrical studies
Structural parameters of In4Se3: Sn samples from X-ray diffraction analysis.
Electrical properties of the prepared samples are investigated at Name D (nm) ε ρ (lines m−2)
room temperature using Hall measurement technique carried out under Sample A 42 1.25 × 10−3 5.67 × 1014
van der Pauw geometry. The results are shown in Table 5. Sample B 37 1.34 × 10−3 7.31 × 1014
The data indicates that both undoped and Sn doped sample contains Sample C 27 2.49 × 10−3 1.37 × 1015
n-type carriers. As the dopant concentration is increased, the mobility
increases slightly and the resistivity decreases. In addition, Hall mea-
surements show that Sn doped In4Se3 has a carrier concentration almost Therefore main factors affecting the electrical properties in the present
one order higher than that of the undoped sample. These results con- case are lattice vibration scattering and impurity scattering [37].
firm that the incorporated Sn atoms replaced some In atoms and acted
as electron donors in In4Se3 lattice. The temperature dependence of dc
3.4. XPS analysis
conductivity of In4Se3: Sn samples in continuous heating cooling cycles
are shown in Fig. 4.
XPS analysis is performed to study the mechanism responsible for
Shape of the curves indicates that in the measured temperature
the change in electrical properties of Sn doped In4Se3 thin films.
range all samples show semiconducting nature and follows thermally
Figs. 5–7 shows full scan XPS survey spectra and high resolution XPS
activated Arrhenius conduction mechanism. From the slope of the
spectra of In 3d, Se 3d, Sn 3d and O 1s in the prepared samples.
heating cooling curves, the activation energy of the charge carriers
To find out the atomic composition, elemental analysis is performed
responsible for the electronic transport is obtained (Table 6).
using the XPS data. The results are shown in Table 8.
Decrease in activation energy with increase in dopant concentration
Elemental analysis shows that undoped In4Se3 sample is Se-rich. To
clearly indicates the formation of new donor levels nearer to the con-
determine the oxidation states of individual elements present in the
duction band. To find the effect of grain boundary scattering on the
samples, the spectral data are further analyzed (See Figs. 5–7 and Fig.
transport properties, the mean free path of electrons l in In4Se3: Sn films
S1 of the supplementary material). The obtained binding energies from
are determined using [36].
In 3d5/2, Sn 3d5/2, Se 3d and O 1s core-level photoelectron spectra in
h 3N 1/3 the samples are shown in Table 9.
l= µ Deconvoluted XPS spectrum of In 3d5/2 in the samples contain main
2e (3)
peaks at 444.11–444.24 eV (corresponds to In0 [38]) and
Here h is the Planck's constant, N is the free carrier concentration, μ is 444.92–445 eV (assigned to In+ in InBr [39]. The binding energy of Se
the mobility and e is the charge of electron. The l values corresponding 3d at 53.71–53.78 eV confirms the existence of Se2− in the prepared
to different dopant concentrations are given in Table 7. samples [40]. This suggests that In4Se3 crystal structure contains
In all prepared samples, the mean free path is much lower compared bonding of atoms with mixed valency [41]. The deconvoluted XPS
to the crystallite size obtained from structural studies. This means that spectrum of Sn 3d5/2 in the doped samples are at 484.27–484.46 eV
grain boundary scattering is not dominant in these samples [36]. (Sn0 [42]), 485.61–485.69 eV (Sn2+ [43]) and 486.27–486.43 eV (Sn4+
21
R. Anuroop and B. Pradeep Materials Science in Semiconductor Processing 98 (2019) 19–28
Fig. 3. FESEM image of (a) Sample A, (b) Sample B and (c) Sample C.
Table 5
Hall measurement results in In4Se3: Sn thin films.
Name Resistivity ρ (Ω cm) Mobility μ (cm2 V−1s−1) Carrier concentration N (cm−3) Carrier type n or p
16
Sample A 59.56 2.08 5.025 × 10 n
Sample B 16.26 2.34 1.640 × 1017 n
Sample C 3.11 2.84 7.077 × 1017 n
22
R. Anuroop and B. Pradeep Materials Science in Semiconductor Processing 98 (2019) 19–28
Table 6 concentration in the film with doping [53]. So the refractive index of
Variation of dc activation energy with the sample can be controlled by Sn doping concentration. It can be seen
doping. that the extinction coefficient k of all samples decreases gradually with
Name Ea (eV) increase in wavelength. This indicates that the transparency of the film
increases as the wavelength increases, which are evident from the
Sample A 0.22 transmission spectrum. The optical band gap of In4Se3: Sn samples are
Sample B 0.20
determined using Tauc's relation [54] given by
Sample C 0.14
( h ) = A (h Eg )r (4)
Fig. 5. (a) Full scan XPS survey spectrum of Sample A. High resolution XPS spectra of (b) In 3d (c) Se 3d and (d) O 1s in sample A.
23
R. Anuroop and B. Pradeep Materials Science in Semiconductor Processing 98 (2019) 19–28
Fig. 6. (a) Full scan XPS survey spectrum of Sample B. High resolution XPS spectra of (b) In 3d (c) Se 3d (d) Sn 3d and (e) O 1s in sample B.
value of effective mass determined), the conduction band critical den- 3.6. Photoconductivity studies
sity Nc in In4Se3 thin film is determined using the relation [37].
The photoconductivity of In4Se3: Sn samples are studied using two
3/2
2 mkT probe method. For ohmic contact, silver paste is applied on the film
Nc = 2
h2 (6) surface with an illumination area of 1 cm2. A constant bias of 10 V is
applied across the film surface to stabilize the current. After the stabi-
The obtained value of Nc is 1.833 × 1017 cm−3. When the carrier lization period, the current values are recorded in the following se-
concentration increases above Nc, the lowest states in the conduction quences. 60 s in dark, 60 s under illumination and 60 s in dark. The time
band will commence to fill with electrons [57]. This give rise to an evolution of photoconductivity of In4Se3: Sn films are shown in Fig. 11.
increment in the energy gap (Burstein-Moss shift) given by Ref. [58]. It is observed that when the samples are exposed to light, the
photocurrent increases rapidly and reaches to a saturation value. The
h2N 2/3 conductivity is found to decay rapidly when the light is switched off. In
E=
8 2/3m (7) the present case photoconductivity decay follows exponential law with
decay time constant τd. Photoconductivity decay of the prepared sam-
Hall measurement results shows that the carrier concentration N of
ples is shown in the inset of Fig. 11. The decay time constant τd is
Sample C is greater than conduction band critical density Nc. The value
evaluated from the exponential fit to the experimental data points
of ΔE calculated for this sample using equation (7) is 0.037 eV. Optical
(represented as solid red curve). The photosensitivity S in the samples
studies show that the band gap energy in Sample C is blue shifted by
is determined using the relation
0.04 eV, which is consistent with Burstein-Moss theory of band filling.
24
R. Anuroop and B. Pradeep Materials Science in Semiconductor Processing 98 (2019) 19–28
Fig. 7. (a) Full scan XPS survey spectrum of Sample C. High resolution XPS spectra of (b) In 3d (c) Se 3d (d) Sn 3d and (e) O 1s in sample C.
Table 8 I
S =
Elemental composition of In4Se3: Sn samples from XPS analysis. Idark (8)
Name Atomic compositions (at%)
where I = Ilight Idark . The amount of photocurrent generated per unit
In Se Sn time/unit illumination intensity will give the Photoresponsivity R of
the material [59].
Sample A 56.26 43.74 0
Sample B 54.89 43.44 1.67
Sample C 55.43 42.12 2.45 I
R =
PS (9)
Table 9
Binding energies calculated from In 3d5/2, Sn 3d5/2, Se 3d and O 1s peaks of In4Se3: Sn Samples.
Name Binding Energy (eV)
In 3d5/2 Sn 3d5/2 Se 3d O 1s
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R. Anuroop and B. Pradeep Materials Science in Semiconductor Processing 98 (2019) 19–28
where P is the intensity of incident illumination (100 mW/cm2), S is Depending on the method of preparation, the traps are created in
the effective illumination area. The evaluated time constants, photo- thin films due to surface states, point defects, localized stress or the
sensitivity and photoresponsivity are shown in Table 10. impurities [61]. The trap depth E can be evaluated from the probability
The results show that the prepared samples are photosensitive with p of an electron escaping from the trap using the relation [62,63].
Sample C showing the highest photoresponsivity. This is due to the
increase in carrier concentration due to doping, which resulted in an p = se E / kT
(10)
increase of photogenerated carriers. Similar results have also been re-
ported for Sn doped β–Ga2O3 thin films [60]. here s , E, k and T are frequency factor (attempt to escape frequency)
which is of the order of 109 per second at room temperature, trap depth,
Fig. 9. Tauc plot of (a) Sample A, (b) Sample B and (c) Sample C.
26
R. Anuroop and B. Pradeep Materials Science in Semiconductor Processing 98 (2019) 19–28
Fig. 11. Time evolution of photoconductivity of (a) Sample A, (b) Sample B and (c) Sample C.
Table 10 the formation of SnIn3+ or SnIn+ donor level. Room temperature pho-
Photoconductivity parameters of In4Se3: Sn samples. toconductivity measurements suggest that the decay follows ex-
Name Decay time Sensitivity S Responsivity Rλ Trap depth E
ponential function with single time constant. Our study shows that Sn
τd (s) (10−6AW−1) (eV) doping in In4Se3 enhances the photoresponsivity significantly. This at-
tractive optoelectronic properties of Sn doped In4Se3 films imply a
Sample A 0.84 0.44 15.9 0.534 potential for optoelectronic device applications.
Sample B 1.12 0.51 107.3 0.542
Sample C 0.41 0.30 274.6 0.516
Acknowledgment
Boltzmann constant and absolute temperature respectively. The prob- Anuroop R would like to thank University Grants Commission
ability p is calculated using the relation (UGC), Govt. of India F:25-1/2013-14(BSR)/5-22/2007 (BSR) for fi-
nancial assistance in the form of Basic Scientific Research fellowship
I = I0 e pt (11) (UGC-BSR Fellowship).
where I is the photocurrent at any instant of time and I0 is the current at
Appendix A. Supplementary data
the moment of interruption of light. The p values are determined from
the decay portion of the photoconductivity curve. Here it is assumed
Supplementary data to this article can be found online at https://
that E and s are temperature independent, the electrons freed from the
doi.org/10.1016/j.mssp.2019.03.020.
traps undergo radiative transition only and are not re-trapped again
[63]. The trap depth corresponding to different dopant concentration in
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