VL5091 MEMS AND NEMS LTP C

3003
OBJECTIVES:
 Tointroducetheconceptsofmicroelectromechanical devices.
 Toknowthefabrication processofMicrosystems.
 Toknowthedesignconceptsof microsensors andmicroactuators.
 Tofamiliarizeconcepts of quantum mechanicsand nanosystems.
UNITI OVERVIEW 9
NewtrendsinEngineeringandScience:MicroandNanoscalesystems,IntroductiontoDesignofMEMSandNE
MS,MEMSandNEMS–
Applications,Devicesandstructures.MaterialsforMEMS:Silicon,siliconcompounds,polymers, metals.
UNITII MEMSFABRICATIONTECHNOLOGIES 9
Microsystemfabricationprocesses:Photolithography,IonImplantation,Diffusion,Oxidation.Thinfilmdepositi
ons:LPCVD,Sputtering,Evaporation,Electroplating;Etchingtechniques:Dryandwetetching,electrochemic
aletching;Micromachining:BulkMicromachining,SurfaceMicromachining,HighAspect-
Ratio(LIGAandLIGA-like)Technology;Packaging:Microsystemspackaging,Essentialpackaging
technologies,Selectionofpackagingmaterials.

UNITIII MICRO SENSORS 9

MEMSSensors:DesignofAcousticwavesensors,resonantsensor,Vibratorygyroscope,CapacitiveandPiezo
ResistivePressuresensors-engineeringmechanicsbehindtheseMicrosensors.Casestudy:Piezo-
resistivepressuresensor.

UNITIV MICROACTUATORS 9
DesignofActuators:Actuationusingthermalforces,ActuationusingshapememoryAlloys,Actuationusingpiez
oelectriccrystals,ActuationusingElectrostaticforces(Parallelplate,Torsionbar,Combdrive
actuators),MicromechanicalMotorsandpumps.Casestudy:Comb driveactuators.

UNITV NANOSYSTEMSANDQUANTUMMECHANICS 9
AtomicStructuresandQuantumMechanics,MolecularandNanostructureDynamics:SchrodingerEquationa
ndWavefunctionTheory,DensityFunctionalTheory,NanostructuresandMolecularDynamics,Electromagne
ticFieldsandtheirquantization,MolecularWiresandMolecularCircuits.

TOTAL:45PERIODS
OUTCOMES:
At the end ofthis course, the student shouldbe ableto:
 Discuss microsensors
 Explain microactuators
 Outline nanosystems andQuantummechanics
REFERENCES:
1. ChangLiu, “Foundations ofMEMS”,PearsoneducationIndialimited, 2006.
2. MarcMadou,“FundamentalsofMicrofabrication”,CRCpress1997
3. Stephen D. Senturia,”MicrosystemDesign”, KluwerAcademic Publishers,2001
4. Sergey EdwardLyshevski,“MEMSandNEMS:Systems,Devices,andStructures”CRC
Press,2002.
5. Tai RanHsu ,"MEMSandMicrosystemsDesignandManufacture”,TataMcGrawHill,2002