‫ߛג‬໏ၚᆌ‫ڦ‬uF‫ߌد‬ഗᇑံ৊‫ڦ‬ኴႜഗ੦዆

रຍ၎঳ࢇ
ग़Ԣ300ms * ‫ߛڦ‬໏੦዆ࢅ‫ֶگ‬უ‫ۯ‬ፕ༬Ⴀă
ํ၄କ੦዆ଉ‫ײ‬ඪ
ᅪยۨࠀీĂ‫ۉ‬ᇸ‫ۉ‬ୟᇑాև‫ۉ‬ୟ၎߰૗(ႜᄽ๯‫ڪ)ظ‬Lj৊ᅃօ
༵ߛକᅟᆩႠă
(
* ǖMQV9005/9200/9050B,Cྺ500ms,MQV0050/0200/0500/1000J,Kྺ700ms)
ߛႠీຕጴ๕ዊଉୁଉ੦዆ഗCMQ-VဣଚLj
֑ᆩକMEMS႙ୁଉ‫ߌد‬ഗ‫ံڦ‬ൻਸ݀ኁazbilࠅິLj

‫܀‬૬ਸ݀‫ߌྲגڦ‬ඤୁଉ‫ߌد‬ഗȝFDŽMicro Flow ® Džă
CMQ-V๑ᆩȝF‫ߌد‬ഗ‫ڦ‬๼‫߀ࢅ؜‬৊႙PID੦዆໙݆ઠ੦዆Բ૩݅ă

ํ၄କߛ໏੦዆Ă‫ֶگ‬უ‫ۯ‬ፕĂ੗੦‫ڪ੻ྷݔ‬Lj
ྜඇ஢ፁॖ‫܋‬Ⴔ൱ă
ႎሺକ 5mL/minĂ20mL/minĂ50mL/min ྲၭୁଉ႙ऐዖLj
৊ᅃօྊ੻କᆌᆩ‫ྷݔ‬ă

ํ၄କံ৊‫ڦ‬੦዆໙݆ ੗੦‫੻ྷݔ‬
ຕጴ‫ۉ‬ୟև Բ૩‫݅ىۉ‬

F‫ߌد‬ഗ‫ڦ‬঳ࠓࢅ༬‫ۅ‬
ူᆴ֨࿒‫ߌد܈‬ഗ(Rd) ॠ֪ᇱ૙
1.7mm
ฉᆴ֨࿒‫ߌد܈‬ഗ(Ru)
ሞ࿮ୁ‫ۯ‬ጒༀူLjᅜेඤഗྺዐ႐‫ڦ‬࿒‫ݴ܈‬ք๟ፑᆸ‫; ڦ׬ܔ‬
߰ఈ
ܸሞᆶୁ‫ۯ‬ጒༀူLj
ेඤഗฉᆴ֨‫ڦ‬࿒‫ူ܈‬ইLj
ူᆴ֨‫ڦ‬࿒‫܈‬ฉืLj ᇑഘ༹኱থথ‫ة‬Lj
ᅺُํ၄କ‫ߛג‬໏֪ଉ
A Aď ࿒‫ݴ܈‬ք‫׬ܔڦ‬Ⴀԥ೦࣋ă ‫ߌد‬ഗև
ኄ߲࿒ֶ‫ڞ‬ዂฉူᆴ‫ڦ‬࿒‫ߌد܈‬ഗDŽӣূԋఈDž‫ڦ‬ፆኵփཞLj
࣍ৣ࿒‫ߌد܈‬ഗ
(Rr) ᆯُ੗֪‫؜‬ฉူᆴ࿒ֶLjժᆯُऺ໙‫؜‬ዊଉୁ໏DŽ໏‫ ܈‬ġ ௢‫܈‬Džă
ࡂೌ
ेඤഗ(Rh)
0.5mm

࿒‫ݴ܈‬ք ࿒‫ݴ܈‬ք
A-Aď೪௬ FLOW
FLOW
߰ఈ
Rr Ru Rh
Rd
ࡂೌ ‫ܔ‬ᆌ੻ଉ‫ڦײ‬ უ໦࢔ၭ‫ڦ‬
ాഹ
ံ৊‫ڦ‬ኝୁ঳ࠓ ኱၍ୁୟ
࿮ୁ‫ۯ‬ጒༀ ᆶୁ‫ۯ‬ጒༀ

01
 CMQ-Vဣଚ!\12ၜᆫ‫^ۅ‬

փ܏݀ቛLjํ၄କ300ms‫ߛڦ‬໏੦዆Ⴀీ ੗੍‫ڦ‬੦዆ࠀీ
ํ၄କ‫੺ڦ׉ג‬໏੦዆LjٗඇԿጒༀ‫ڟ‬࿘ۨᇀยۨኵईՎ߸ยۨୁ
Քጚ႙
ଉ‫ڟٳ‬ႎ‫ڦ‬ยۨୁଉኻႴ411ntăଷྔLj࣏੗ᅜߛ໏ၚᆌ1ْ֨ഘ༹ ৛ ‫܈‬: ±0.5%FS/±1.0%FS
02
უ૰‫ڦ‬Վ‫ۯ‬Ljॽ‫ܔ‬2ْ֨ୁଉ‫ڦ‬ᆖၚ੦዆ሞፌၭ၌‫܈‬ă ዘްႠ: ±0.25%FS/±0.5%FS

ߛ৛‫܈‬႙(ৈ၌ᇀՔጚഘ༹႙)
Ŷୁଉ༬Ⴀ཮ ৛ ‫܈‬: ±1.0%SP
ዘްႠ: ±0.5%SP

੗੦‫ ྷݔ‬1~100%FS
řၘဦࡀ߭൩֖९P3ă%SP՗๖၎‫ܔ‬ᇀยۨኵ‫ڦ‬ဃֶă

੦዆ਸ๔

Ԣᆶ‫ׂڦ޷ݿ‬೗ንඹ Քጚࡀ߭न੗‫ֶگ‬უ‫ۯ‬ፕ
ׂ೗ንඹԈઔᅃ༹๕၂๖႙Ă‫ݴ‬૗๕၂๖႙ - Քጚഘ༹႙Ăൠഘ / ࡜ CMQ-V ဣଚփ֑ᆩუ૰໦฿‫ڦٷ‬றဦ࠶ࠓሰLjํ၄କമ໯࿄ᆶ‫گڦ‬
ഘ႙Ă
༬๺ഘ༹႙ă੗ߵ਍ᆩ཰჋ስፌ๢ࢇ‫ׂڦ‬೗ă ֶუ੦዆ă
༬՚๢ࢇᇀ‫گ‬უ඘ഘ੦዆ᆌᆩ
( ૩ ) ണࡰĂ
ԝ࠼‫ڨ‬Ă
ᆑ࠼‫ׂิڦڨ‬၍‫ڪ‬

‫د‬ཥഘ༹ዊଉୁଉऺ‫ࠓڦ‬ሰ ፌႎഘ༹ዊଉୁଉऺ‫ࠓڦ‬ሰ

ՔጚದԢ‫ీࠀ޷ݿڦ‬ ኧ‫׼‬QDՊ‫ײ‬ഗཚრ
ՔጚದԢୁଉ၂๖Ăેऺऺ໙‫ీࠀڦ޷ݿڪ‬ă࿮ႴPLC‫تॲ෉ڪ‬ ՔጚದԢକՍ૧‫ ڦ‬PC Պ‫ײ‬ഗཚრࠀీă
૙Ljन੗ൟ຿‫ܔ‬ᆌ࠽‫ڦݘ‬ᆩ཰ă
๑ᆩଷ๳‫ڦ‬Պ‫ ॲ෉ײ‬MLP100 ৽ీሞ‫ۉ‬

ዷᄲࠀీ సฉ৊ႜ߳ዖยۨLjժ੗ᅜཚࡗ‫ۉ‬సࣃ௬

Ɣୁଉ၂๖ࠀీ Ɣୁଉેऺࠀీ Ɣ݅ோਸԿጒༀ၂๖ࠀీ ƔୁଉOK၂๖·๼‫ీࠀ؜‬ ॔๫ୁଉ൵๞‫ڪ‬ሏႜጒༀă( ੗ॽ֑ण‫ڟ‬

Ɣ݅ோൻ‫ୁۉۯ‬၂๖ࠀీ Ɣୁଉ၂๖‫ڇ‬࿋·ၭຕ‫ۅ‬࿋ዃՎ߸ࠀీ
Ɣ‫ܠ‬SPยۨࠀీ(8߲) Ɣ݅ோഽ዆ਸԿࠀీ Ɣ݅ோጲ‫ీࠀ܏࠲ۯ‬ ‫ڦ‬ຕ਍ԍ٪ྺ CSV ࿔ॲ )
Ɣഘ༹ዖૌൎ࣑ࠀీ Ɣഘ༹ዖૌยۨࠀీ(CFඪᅪยۨ) Ɣ੦዆ଉ‫ײ‬ඪᅪยۨࠀీ
ƔSPၽೢ(ൡঙ)ยۨࠀీ Ɣ࣐஥ഔ‫ ీࠀۯ‬Ɣ੦዆ຶ൶ยۨࠀీ
Ɣྔևਸ࠲๼෇ࠀీ(੗৊ႜSPՎ߸Ăഘ༹ዖૌൎ࣑Ăଉ‫ײ‬ൎ࣑‫)ڪ‬
Ɣ๚ॲ๼‫ୁ(؜‬ଉᅴ‫׉‬Ă‫ۯ‬ፕૌ႙) ƔԒয়๼‫؜‬

֡ፕ‫ݛ‬Ս‫ڦ‬6Ӏ౧Ă‫ڦ޷ݿ‬၂๖ࠀీLjन๑ሞ੦዆ఇ๕ᄺ੗৊ႜSPՎ߸ ๑ᆩጆᆩ USB ཚრ

‫ۉ‬મ৽ీ࢔‫ݛ‬Ս‫૶ں‬
থ‫ ڟ‬PC ฉƽ
(MLP100 ޹ຌ೗ )

(၂๖·֡ፕև)

02
 7 ኧ‫ܠ׼‬ዖ๼෇๼‫؜‬႑ࡽ 8 ๑ᆩཚᆩ35Wed‫ۉ‬ᇸࠃ‫ۉ‬
Ԩጎዃ‫ۉ‬ᇸ‫ۉ‬ୟࢅాև‫ڦ‬ఇె‫ۉ‬ୟक़֑ൽକ߰૗‫ٯ‬แă֑ᆩPLC‫ڪ‬
ཚࡗఇె๼෇๼‫؜‬ઠ੦዆‫߲ܠ‬Ԩጎዃ้Ljन๑PLC֨‫ڦ‬ఇెఇ੷߳
ཚ‫ڢ‬क़ுᆶ߰૗Ljᄺ੗ᅜࠌᆩ‫ۉ‬ᇸăन๑փ๟௅1໼‫ݴۼ‬՚ದዃ‫ۉ‬
ᇸLjᄺփࣷᅺᆾ࣮‫ۉ‬ୟܸ݀ิࠤቱăଷྔLj࣏੗ᅜ๑ᆩAC๢ದഗ
(100ċ240VacLjଷࠔ)ă

24Vdc

ጆᆩAC ๢ದഗ

‫ۉ‬უ႑ࡽ(0ċ5VdcLj1ċ5Vdc)
(੗ཚࡗยۨ৊ႜൎ࣑)
‫ୁۉ‬႑ࡽ(4ċ20mALj0ċ20mA)

ਸ࠲๼෇(3‫)ۅ‬๚ॲ๼‫(؜‬2‫)ۅ‬
RS-485ཚ႑ࠀీ(჋ၜ),ጆᆩ዇ీՊ‫ײ‬ഗথ੨

9 ༵ߛҾጎ‫ڦ‬ጲᆯ‫܈‬ 10 ੻ᇘ‫ڦ‬ඹႹ࿒‫ྷݔ܈‬
ᅃ༹๕၂๖႙‫ڦ‬၂๖ೡ‫ݛ‬ၠ੗180‫܈‬჉ገă CMQ-V ๟௬ၠᅃӯ߾ᄽ๨‫ׂڦׇ‬೗Lj
੗ሞ -10 ċ +60ą‫ৣ࣍ڦ‬࿒‫܈‬Ă
ഘ༹࿒‫ူ܈‬๑ᆩă

o
180

11DFණኤ 12 KDTT໓ᇸ༹ဣ
CEණኤׂ೗ CMQ-V ਏԢׂᄽरຍጹࢇჺ৯໯‫ڦ‬නԨࡔॆՔጚࢅ JCSS ዊଉ໓
ᇸ༹ဣă
*JCSSǖJapan Calibration Service System නԨၯጚ‫ޜ‬ခ༹ဣ

ࡔॆՔጚ

ࡔॆ݆ۨऺଉॠۨऐࠓ

ҮጲԠܻՔጚഗਏ

ॠֱጎዃ

ׂ೗

03
DNR.Wဣଚ\ᆌᆩ૩^

৛௢ฏፊ੣඘Բ੦዆ ኈ੣ጎዃዐ‫ڦ‬ഘ༹ୁଉ੦዆
• ᅂৗԝ‫ڨ‬ • ॸ‫܆‬
• ୙໎‫ڨ‬ • ‫ݒ‬ᆌႠॸ‫ݒڦ܆‬ᆌഘ༹੦዆
• ի૱े߾ฏፊ • ኈ੣ഹუ૰੦዆
• ണࡰ • ‫گ‬ኖഛუഘ༹(H2OĂHMDSO)


ఈ
⚻
2
㜨
ⳳぎ
1
⚻ ఈ
$U


⇻⇨

ぎ⇨

➗⇨

߳ዖ๬ᄓጎዃ ୗాഘ‫ݳ‬੦዆
• ߳ዖೠॏጎዃ • ‫ۉ‬ጱևॲฏ঳ୗ
• ഘ༹‫ݴ‬ဆᅏ • า༐ୗ
• ಢᄢ֣ • ཽआୗ

ῑ ♝
෍‫ݏ‬ ⏫⺇

䅵 ఼
य़࡯ Ӵᛳ
⇻⇨
䅵 ⇨ԧ
PH ⏫⺇
 ⇻Ҿ
⇻⇨ ⒊

⇨ԧ
ぎ⇨ ๲⺇

఼
ⓨㅫ
CP
఼
᥻ࠊ

04
 ࡀ߭ᅃબ՗

Քጚഘ༹/ၭୁଉ႙(ၘဦాඹ൩֖ለCP-SS-1862C)
႙ࡽ MQV9005 MQV9020 MQV9200 MQV9500 MQV0002 MQV0005 MQV0020 MQV0050(B,C) MQV0100
݅ோ‫ݛ‬๕ Բ૩‫݅ىۉ‬
݅ோ‫ۯ‬ፕ փཚ‫้ۉ‬-࠲(N.C.)
5.00mL/min 20.0mL/min 200mL/min 0.500L/min 2.00L/min 5.00L/min 20.0L/min 50.0L/min 100.0L/min
Քጚඇଉ‫ୁײ‬ଉ ጀ1
(Քጒ) (Քጒ) (Քጒ) (Քጒ) (Քጒ) (Քጒ) (Քጒ) (Քጒ) (Քጒ)
ഘ༹ዖૌ ੣ഘ/‫ڌ‬ഘ(N2)Ăᄟഘ(O2)Ăᩨഘ(Ar)Ăܾᄟࣅ༐(CO2)Ă
੣ഘ/‫ڌ‬ഘ(N2)Ă
੣ഘ/‫ڌ‬ഘ(N2)Ăᄟഘ(O2)Ă ᄟഘ(O2)Ă
‫׭‬๨ீഘ13A(LNGǖ45MJ/m3)Ă‫׭‬๨ீഘ13A(LNGǖ46MJ/m3)Ăትഘ100%(CH4)Ă
ᩨഘ(Ar) ᩨഘ(Ar)Ă
եྛ100%(C3H8)Ăۡྛ100%(C4H10) ܾᄟࣅ༐(CO2)
‫ڍ‬๟Ljփࡤ୰ഘĂ଼ࣝĂ໗‫߅ڦݴׯ์ޫڪ‬ሳഘ༹ă൐փࡤ‫פݹ‬Ăᆳ࿽‫ڦ‬ൣলഘ༹ă ጀ3
੦዆ ၚᆌႠ ยۨ±2%FSᅜాྺ0.5s(TYP.) ยۨ±2%FSᅜాྺ0.3s(TYP.)
(Քጚֶუူ) (ٗඇԿጒༀ‫ڟ‬੦዆ਸ๔้ᅜतሞ੦዆ዐ߸߀କย้ۨ)
৛‫܈‬ ጀ4 ᷛ‫ޚ‬ѻક
ᷛ‫ޚ‬ѻક˖±0.5%FS(0%FS”˭”50%FS) ±1%FS
(Քጚ࿒‫܈‬ǃ
±1%FS ±1%FS(50%FS<˭”100%FS) (0%FS”˭”80%FS)
ՔጚֶუူLjQǖୁଉ) փ‫ܔ‬ᆌߛ৛‫܈‬
催㊒ᑺક˖±0.2%FS(0%FS”˭<20%FS) ±2%FS
(80%FS<˭”100%FS)
±1%SP(20%FS”˭”100%FS) ⊼5
ϡᇍᑨ催㊒ᑺ
უ૰ Ղᄲֶუ ጀ6 5kPa 30kPa 50kPa 5kPa 50kPa 5kPa 50kPa 100kPa 250kPa
‫ۯ‬ፕֶუ‫ྷݔ‬ ጀ7
(Tǖ‫ۯ‬ፕ࿒‫)܈‬ 300kPaᅜူ 400kPaᅜူ

ඹႹ෇੨უ 0.5MPa(՗უ) ጀ8
࿒‫܈‬ ඹႹ‫ۯ‬ፕ࿒‫ྷݔ܈‬ -10ċ+60ą
โ‫܈‬ ඹႹ‫ۯ‬ፕโ‫ྷݔ܈‬ 10ċ90%RH(࿮঳୞)

ఇె๼‫ ؜‬๼‫؜‬႑ࡽ 0ċ5Vdc/1ċ5Vdc/0ċ20mAdc/4ċ20mAdc(੗ൎ࣑)

Ԓয়Ă ๼‫؜‬ຕ
๚ॲ๼‫؜‬ Ԓয়๼‫؜‬ǖ1‫ۅ‬Ă๚ॲ๼‫؜‬ǖ2‫ۅ‬

ྔևൎ ๼෇ዖૌĂ๼෇ຕ
࣑๼෇ ྔև3܎ൎ࣑๼෇ǖ1‫ۅ‬Ăྔևথ‫ۅ‬๼෇(2܎ൎ࣑)ǖ3‫ۅ‬

ཚრ ‫ݛ‬๕ ƗጆᆩՊ‫ײ‬ഗཚრ ጀ10 ƘRS-485ཚრ(3၍๕) ጀ11

‫ۉ‬ᇸ ‫ۨܮ‬ 24V dc, ፌ‫ٷ‬ၩࡼ‫ୁۉ‬300mA
߰૗ ‫ۉ‬ᇸ࣮ୟࢅ๼෇๼‫࣮؜‬ୟኮक़߰૗
থഘև֌ዊ SUS316Ă༬‫ޘ‬୉Ă‫ޘ‬ၞঌĂ
SUS316Ă༬‫ޘ‬୉Ă‫ޘ‬ၞঌ
ಲࡂի૱Ăࡂ
૶থ‫ݛ‬๕ 9/16-18 UNF Rc1/4
1/4 SwagelokĂ1/4 VCR 9/16-18 UNF ĂRc1/4Ă 1/4 SwagelokĂ1/4 VCR
3/8 Swagelok
Ҿጎጩ๞ ຤ೝҾጎLj‫ڍ‬๟ൎကॽยۨ၂๖և‫ڦ‬௬‫ူו‬ă
ዊଉ ሀ1.1kg ሀ1.2kg
ණኤ CEණኤׂ೗

Քጚഘ༹/ዐୁଉ႙(ၘဦాඹ൩֖ለCP-SS-1863C)
႙ࡽ MQV0050(JĂK) MQV0200 MQV0500
݅ோ‫ݛ‬๕ Բ૩‫݅ىۉ‬
݅ோ‫ۯ‬ፕ փཚ‫้ۉ‬-࠲(N.C.)
Քጚඇଉ‫ୁײ‬ଉ ጀ1 50.0L/min(Քጒ) 200L/min(Քጒ) 500L/min(Քጒ)
ഘ༹ዖૌ
੣ഘ/‫ڌ‬ഘ(N2)Ăᄟഘ(O2)Ăᩨഘ(Ar)Ăܾᄟࣅ༐(CO2)Ă‫׭‬๨ீഘ13A(LNGǖ45MJ/m3)Ă‫׭‬๨ீഘ13A(LNGǖ46MJ/m3)Ă
ትഘ100%(CH4)Ăեྛ100%(C3H8)Ăۡྛ100%(C4H10)
‫ڍ‬๟Ljփࡤ୰ഘĂ଼ࣝĂ໗‫߅ڦݴׯ์ޫڪ‬ሳഘ༹ă൐փࡤ‫פݹ‬Ăᆳ࿽‫ڦ‬ൣলഘ༹ă

੦዆ ၚᆌႠ ยۨ±2%FSᅜాྺ0.7s(TYP.)
(Քጚֶუူ) (ٗඇԿጒༀ‫ڟ‬੦዆ਸ๔้ᅜतሞ੦዆ዐ߸߀କย้ۨ)
৛‫܈‬ ጀ4 ᷛ‫ޚ‬ѻક˖±0.5%FS(0%FS”˭”40%FS)
±1%FS(40%FS<˭”80%FS)
(Քጚ࿒‫܈‬ǃ ±1.5%FS(80%FS<˭”100%FS)

ՔጚֶუူLjQǖୁଉ) 催㊒ᑺѻક ⊼5˖

±0.3%FS(0%FS”˭<25%FS)
փ‫ܔ‬ᆌߛ৛‫܈‬ ±1.2%SP(25%FS”˭<80%FS)
±1.5%SP(80%FS”˭”100%FS)
უ૰ Ղᄲֶუ ጀ6 10kPa 100kPa 150kPa
‫ۯ‬ፕֶუ‫ ྷݔ‬ጀ7
300kPaҹϟ(-10ą”T”40ą) 300kPaҹϟ(-10ą”T”35ą)
(Tǖ‫ۯ‬ፕ࿒‫)܈‬
100kPaᅜူ 180kPaҹϟ(40ą<T”60ą) 240kPaҹϟ(35ą<T”50ą)

(ཉॲǖ‫ۉ‬ᇸ‫ۉ‬უ=24.0V) ጀ9
ඹႹ෇੨უ 0.5MPa(՗უ) ጀ8
࿒‫܈‬ ඹႹ‫ۯ‬ፕ࿒‫ྷݔ܈‬ -10ċ+60ą -10ċ+50ą
โ‫܈‬ ඹႹ‫ۯ‬ፕโ‫ྷݔ܈‬ 10ċ90%RH(࿮঳୞)

ఇె๼‫ ؜‬๼‫؜‬႑ࡽ 0ċ5Vdc/1ċ5Vdc/0ċ20mAdc/4ċ20mAdc(੗ൎ࣑)

Ԓয়Ă ๼‫؜‬ຕ
Ԓয়๼‫؜‬ǖ1‫ۅ‬Ă๚ॲ๼‫؜‬ǖ2‫ۅ‬
๚ॲ๼‫؜‬
ྔևൎ ๼෇ዖૌĂ๼෇ຕ
ྔև3܎ൎ࣑๼෇ǖ1‫ۅ‬Ăྔևথ‫ۅ‬๼෇(2܎ൎ࣑)ǖ3‫ۅ‬
࣑๼෇
ཚრ ‫ݛ‬๕ ጆᆩՊ‫ײ‬ഗཚრ ጀ10ĂRS-485ཚრ(3၍๕) ጀ11
‫ۉ‬ᇸ ‫ۨܮ‬ 24V dc, ፌ‫ٷ‬ၩࡼ‫ୁۉ‬400mA 24V dc, ፌ‫ٷ‬ၩࡼ‫ୁۉ‬500mA
߰૗ ‫ۉ‬ᇸ࣮ୟࢅ๼෇๼‫࣮؜‬ୟኮक़߰૗
থഘև֌ዊ SUS316Ă༬‫ޘ‬୉Ă‫ޘ‬ၞঌ
૶থ‫ݛ‬๕ 3/4-16 UNF ĂRc1/2Ă 1/2 SwagelokĂ3/8 VCRĂ
Ҿጎጩ๞ ຤ೝҾጎLj‫ڍ‬๟ൎကॽยۨ၂๖և‫ڦ‬௬‫ူו‬ă
ዊଉ ሀ3.5kg
ණኤ CEණኤׂ೗

05
༬๺ഘ༹႙(ၘဦాඹ൩֖ለCP-SS-1864C)
႙ࡽ MQV9200 MQV9500 MQV0002 MQV0005 MQV0020 MQV0050(B,C) MQV0200 MQV0500
݅ோ‫ݛ‬๕ Բ૩‫݅ىۉ‬
݅ோ‫ۯ‬ፕ փཚ‫้ۉ‬-࠲(N.C.)
Քጚඇଉ‫ୁײ‬ଉ ጀ1 200mL/min 0.500L/min 2.00L/min 5.00L/min 20.0L/min 50.0L/min 200L/min 500L/min
(Քጒ) (Քጒ) (Քጒ) (Քጒ) (Քጒ) (Քጒ) (Քጒ) (Քጒ)
ഘ༹ዖૌ ੣ഘ/‫ڌ‬ഘ(N2)Ăᄟഘ(O2)Ăᩨഘ(Ar)Ăܾᄟࣅ༐(CO2)Ăᅚඎ(C2H2)Ăҽഘ(NH3) ጀ2
‫ڍ‬๟Ljփࡤ୰ഘĂ଼ࣝĂ໗‫߅ڦݴׯ์ޫڪ‬ሳഘ༹ă൐փࡤ‫פݹ‬Ăᆳ࿽‫ڦ‬ൣলഘ༹ă
ҽഘྺ୞‫ۅ‬ሞ-20ąᅜူ‫߅ڦ‬ሳഘ༹ă ጀ3
੦዆ ၚᆌႠ ยۨ±2%FSᅜాྺ0.3s(TYP.) ยۨ±2%FSᅜాྺ0.7s(TYP.)
(Քጚֶუူ) (ٗඇԿጒༀ‫ڟ‬੦዆ਸ๔้ᅜतሞ੦዆ዐ߸߀କย้ۨ)
৛‫܈‬ ጀ4 ±0.5%FS(0%FS” ˭”40%FS)
±0.5%FS(0%FS”˭”50%FS)
(Քጚ࿒‫܈‬ǃ ±1%FS(40%FS<˭”80%FS)
±1%FS(50%FS<˭”100%FS ±1.5%FS(80%FS<˭”100%FS
ՔጚֶუူLjQǖୁଉ)
უ૰ Ղᄲֶუ ጀ6 50kPa 5kPa 50kPa 5kPa 50kPa 100kPa 150kPa
‫ۯ‬ፕֶუ‫ ྷݔ‬ጀ7 300kPaҹϟ 300kPaҹϟ
(Tǖ‫ۯ‬ፕ࿒‫)܈‬ ˉ10ą”T”40ą) ˉ10ą”T”35ą)
300kPaᅜူ 180kPaҹϟ 240kPaҹϟ
(40ą<T”60ą (35ą<T”50ą
(ཉॲǖ‫ۉ‬ᇸ‫ۉ‬უ=24.0V) ጀ9
ඹႹ෇੨უ 0.5MPa(՗უ) ጀ8
࿒‫܈‬ ඹႹ‫ۯ‬ፕ࿒‫ྷݔ܈‬ -10ċ+60ą
โ‫܈‬ ඹႹ‫ۯ‬ፕโ‫ྷݔ܈‬ 10ċ90%RH(࿮঳୞)

ఇె๼‫ ؜‬๼‫؜‬႑ࡽ 0ċ5Vdc/1ċ5Vdc/0ċ20mAdc/4ċ20mAdc(੗ൎ࣑)

Ԓয়Ă ๼‫؜‬ຕ
Ԓয়๼‫؜‬ǖ1‫ۅ‬Ă๚ॲ๼‫؜‬ǖ2‫ۅ‬
๚ॲ๼‫؜‬
ྔևൎ ๼෇ዖૌĂ๼෇ຕ
ྔև3܎ൎ࣑๼෇ǖ1‫ۅ‬Ăྔևথ‫ۅ‬๼෇(2܎ൎ࣑)ǖ3‫ۅ‬
࣑๼෇
ཚრ ‫ݛ‬๕ ጆᆩՊ‫ײ‬ഗཚრ ጀ10 ĂRS-485ཚრ(3၍๕) ጀ11
‫ۉ‬ᇸ ‫ۨܮ‬ 24Vdc, ፌ‫ٷ‬ၩࡼ‫ୁۉ‬300mA 24Vdc, ፌ‫ٷ‬ၩࡼ‫ୁۉ‬400mA 24Vdc, ፌ‫ٷ‬ၩࡼ‫ୁۉ‬500mA
߰૗ ‫ۉ‬ᇸ࣮ୟࢅ๼෇๼‫࣮؜‬ୟኮक़߰૗
থഘև֌ዊ SUS316Ă༬‫ޘ‬୉ĂEPDM(ᅚဗեဗၞঌ)
૶থ‫ݛ‬๕ Rc1/4Ă 1/4SwagelokĂ1/4 VCRĂ 1/2Swagelok
Ҿጎጩ๞ ຤ೝҾጎLj‫ڍ‬๟ൎကॽยۨ၂๖և‫ڦ‬௬‫ူו‬ă
ዊଉ ሀ1.2kg ሀ3.5kg
ණኤ EN61326-1ǖ1997/A1ǖ1998/A2ǖ2001/A3ǖ2003

ൠഘ·࡜ഘ႙(ၘဦాඹ൩֖ለCP-SS-1836C)
႙ࡽ MQV9020 MQV9050 MQV9500 MQV0005 MQV0010 MQV0050 MQV0200 MQV0500 MQV1000
݅ோ‫ݛ‬๕ Բ૩‫݅ىۉ‬
݅ோ‫ۯ‬ፕ փཚ‫้ۉ‬-࠲(N.C.)
Քጚඇଉ‫ୁײ‬ଉ ጀ1 20.0mL/min 50.0mL/min 0.500L/min 5.00L/min 10.00L/min 50.0L/min 200L/min 500L/min 1000L/min
(Քጒ) (Քጒ) (Քጒ) (Քጒ) (Քጒ) (Քጒ) (Քጒ) (Քጒ) (Քጒ)
ഘ༹ዖૌ ൠഘ(H2)Ă࡜ഘ(He)
‫ڍ‬๟Ljփࡤ୰ഘĂ଼ࣝĂ໗‫߅ڦݴׯ์ޫڪ‬ሳഘ༹ă൐փࡤ‫פݹ‬Ăᆳ࿽‫ڦ‬ൣলഘ༹ă ጀ3
੦዆ ၚᆌႠ ยۨ±2%FSᅜాྺ0.5s(TYP.) ยۨ±2%FSᅜాྺ0.3s(TYP.) ยۨ±2%FSᅜాྺ0.7s(TYP.)
(Քጚֶუူ) (ٗඇԿጒༀ‫ڟ‬੦዆ਸ๔้ᅜतሞ੦዆ዐ߸߀କย้ۨ)
৛‫܈‬ ጀ4 ±0.5%FS ±1.0%FS
(0%FS”˭”50%FS) ±0.5%FS(0%FS”˭”40%FS)
(Քጚ࿒‫܈‬ǃ ±1.0%FS (0%FS”˭”80%FS)
±1.0%FS ±1.0%FS(40%FS<˭”80%FS)
(0%FS”˭”100%FS ±2.0%FS
ՔጚֶუူLjQǖୁଉ) (50%FS<˭”100%FS ±2.0%FS(80%FS<˭”100%FS
(80%FS<˭”100%FS
უ૰ Ղᄲֶუ ጀ6 ൠഘ: 2.5kPa ൠഘ: 10kPa ൠഘ: 20kPa ൠഘ: 80kPa ൠഘ: 20kPa ൠഘ: 100kPa ൠഘ: 40kPa ൠഘ: 150kPa
࡜ഘ: 5kPa ࡜ഘ: 20kPa ࡜ഘ: 40kPa ࡜ഘ: 150kPa ࡜ഘ: 40kPa ࡜ഘ: 180kPa ࡜ഘ: 80kPa ࡜ഘ: 250kPa
‫ۯ‬ፕֶუ‫ྷݔ‬ 300kPaҹϟ
ˉ10ą”˰”40ą)
(Tǖ‫ۯ‬ፕ࿒‫)܈‬ጀ7 180kPaҹϟ
300kPaҹϟ(-10ą”T”60ą)
(40ą<˰”60ą)
ᴵӊ˖⬉⑤⬉य़
=24.0V⊼10
ඹႹ෇੨უ 0.5MPa㸼य़) ⊼8
࿒‫܈‬ ඹႹ‫ۯ‬ፕ࿒‫ྷݔ܈‬ -10ċ+60ą
โ‫܈‬ ඹႹ‫ۯ‬ፕ࿒‫ྷݔ܈‬ 10ċ90%RH(࿮঳୞)

ఇె๼‫ ؜‬๼‫؜‬႑ࡽ 0ċ5V/1ċ5V/0ċ20mA /4ċ20mA(੗ൎ࣑)

Ԓয়Ă ๼‫؜‬ຕ
Ԓয়๼‫؜‬ǖ1‫ۅ‬Ă๚ॲ๼‫؜‬ǖ2‫ۅ‬
๚ॲ๼‫؜‬
ྔևൎ ๼෇ዖૌĂ๼෇ຕ
ྔև3܎ൎ࣑๼෇ǖ1‫ۅ‬Ăྔևথ‫ۅ‬๼෇(2܎ൎ࣑)ǖ3‫ۅ‬
࣑๼෇
ཚრ ‫ݛ‬๕ ጆᆩՊ‫ײ‬ഗཚრ ጀ10Ă RS-485ཚრ(3၍๕) ጀ11
‫ۉ‬ᇸ ‫ۨܮ‬ 24Vdc, ፌ‫ٷ‬ၩࡼ‫ୁۉ‬300mA 24Vdc, ፌ‫ٷ‬ၩࡼ‫ୁۉ‬400mA
߰૗ ‫ۉ‬ᇸ࣮ୟࢅ๼෇๼‫࣮؜‬ୟኮक़߰૗
থഘև֌ዊ SUS316Ă༬‫ޘ‬୉Ă‫ޘ‬ၞঌĂ
ಲࡂի૱Ăࡂ SUS316Ă༬‫ޘ‬୉Ă‫ޘ‬ၞঌ

૶থ‫ݛ‬๕ 1/ Rc1/2Ă1/2Swagelok Ă3/8VCRĂ

4 SwagelokĂ1/4 VCR Rc1/4Ă 1/4 SwagelokĂ1/4 VCRĂ9/16-18 UNF Ă
3/4-16 UNF
Ҿጎጩ๞ ຤ೝҾጎLj‫ڍ‬๟ൎကॽยۨ၂๖և‫ڦ‬௬‫ူו‬ă
ዊଉ ሀ1.1kg ሀ1.2kg ሀ3.5kg
ණኤ CEණኤׂ೗
Ŷ⊼1) mL/min੠L/min㸼⼎ᤶㅫЎ20ņǃ101.325kPa(1Ͼ໻⇨य़)ϟⱘ↣ߚ䩳ⱘԧ⿃⌕䞣(mL/min੠L/min)DŽ෎‫⏽ޚ‬ᑺгৃব᳈Ў0ņǃ25ņǃ35ņDŽℸ໪ˈৃ᥻ࠊⱘ⌕䞣䞣⿟ؐ䱣⇨ԧ⾡㉏ব࣪DŽ䇋খ䯙䰘㸼
1DŽŶ⊼2)⡍⅞⇨ԧൟⱘഎড়ˈ䇋࣓Փ⫼Ϟ䗄⇨ԧҹ໪ⱘ⇨ԧDŽ৺߭ˈՓ⫼ⱘOൟ೜ⱘᆚᇕᗻৃ㛑ফᤳDŽŶ⊼3)䇋࣓䅽ᓖ⠽⌕ܹᴀ㺙㕂‫ݙ‬DŽབᵰㅵ䘧‫ⱘݙ‬䪕䫜ǃ∈Ⓢǃ⊍䳒੠㉝ᇬㄝ⌕ܹ㺙㕂‫ˈݙ‬ӮՓẔ⌟ǃ᥻ࠊ
ѻ⫳䇃Ꮒˈ៪㗙ᤳണᴀ㺙㕂DŽᓖ⠽ৃ㛑Ӯ⌕ܹⱘഎড়ˈ䇋೼ᴀ㺙㕂ⱘϞ␌ջ䆒㕂ৃ䰸এ0.1ȝmҹϞᓖ⠽ⱘ䖛Ⓒ఼ǃ਌䳒఼ˈᅮᳳ䖯㸠⚍Ẕ੠ѸᤶDŽŶ⊼4)Փ⫼ぎ⇨/∂⇨ঞ⇻⇨(⇻⇨ᇍᑨѻક)ᯊⱘ㊒ᑺDŽ݇ѢՓ
⫼݊ᅗ⇨ԧᯊⱘ㊒ᑺˈ䇋ൖ䆶ᴀ݀ৌDŽŶ⊼5)±x.x%SP㸼⼎ⳌᇍѢ⌕䞣䆒ᅮؐⱘ᥻ࠊ⌕䞣ⱘ㊒ᑺDŽŶ⊼6)᥻ࠊܼ䞣⿟⌕䞣ᯊⱘ᳔ᇣᏂय़DŽ(ᴵӊ˖ߎষय़࡯=0kPa(㸼य़)Ŷ⊼7)䖒ϡࠄᖙ㽕Ꮒय़ᯊгৃࡼ԰DŽ(Ԛ
ᰃˈৃ᥻ࠊⱘ⌕䞣㣗ೈӮবᇣDŽ䆺㒚‫ݙ‬ᆍ䇋খ䯙㾘ḐкSP-SS-1836/1862/1863/1864(䯔䮼ܼᓔᯊⱘᏂय़Ϣ⌕䞣ⱘ݇㋏)DŽŶ⊼8)བ㽕೼ܹষय़࡯໻Ѣ0.5MPa(㸼य़)ⱘഎড়Փ⫼ᯊˈ䇋ൖ䆶ᴀ݀ৌDŽŶ⊼9)᳔໻ࡼ
԰Ꮒय़಴⬉⑤⬉य़㗠ᓖDŽŶ⊼10)䳔㽕঺ଂⱘϧ⫼㓪⿟఼䕃ӊࣙ(MLP100A100)DŽŶ⊼11)ҙ䰤ᏺRS-485䗮䆃ࡳ㛑ⱘൟোՓ⫼DŽ

06
 ࡀ߭ᅃબ՗

Ŷ޹՗1
Քጚഘ༹႙ ੦዆ୁଉଉ‫ײ‬ᇑยۨ•၂๖‫ݴ‬Ր୲(‫)้׍؜‬ [‫ڇ‬࿋˖ MQV9005ĂMQV9020ĂMQV9200˖mL/min(Քጒ)Ǘഄ໲ऐዖ˖L/min(Քጒ)]
MQV9005 MQV9020 MQV9200 MQV9500 MQV0002 MQV0005
੦዆ୁଉ ยۨ·၂๖‫ݴ‬Ր୲ ੦዆ୁଉ ยۨ·၂๖‫ݴ‬Ր୲ ੦዆ୁଉ ยۨ·၂๖‫ݴ‬Ր୲ ੦዆ୁଉ ยۨ·၂๖‫ݴ‬Ր୲ ੦዆ୁଉ ยۨ·၂๖‫ݴ‬Ր୲ ੦዆ୁଉ ยۨ·၂๖‫ݴ‬Ր୲
‫ྷݔ‬ ጀ2 ‫ྷݔ‬ ጀ2 ‫ྷݔ‬ ጀ2 ‫ྷݔ‬ ጀ2 ‫ྷݔ‬ ጀ2 ‫ྷݔ‬ ጀ2
ഘ༹ዖૌ

੣ഘ/‫ڌ‬ഘ 0.10ċ5.00 0.02 0.2ċ20.0 0.1 2ċ200 1 0.004ċ0.500 0.002 0.02ċ2.00 0.01 0.04ċ5.00 0.02
ᄟഘ 0.10ċ5.00 0.02 0.2ċ20.0 0.1 2ċ200 1 0.004ċ0.500 0.002 0.02ċ2.00 0.01 0.04ċ5.00 0.02
ᩨഘ 0.10ċ5.00 0.02 0.2ċ20.0 0.1 2ċ200 1 0.004ċ0.500 0.002 0.02ċ2.00 0.01 0.04ċ5.00 0.02
ܾᄟࣅ༐ í í í í 1.0ċ120.0 0.5 0.003ċ0.300 0.001 0.010ċ1.200 0.005 0.03ċ3.00 0.01
‫׭‬๨ீഘ13A
í í í í 2ċ200 1 0.004ċ0.500 0.002 0.02ċ2.00 0.01 0.04ċ5.00 0.02
(LNG:45MJ/m3)
‫׭‬๨ீഘ13A
í í í í 2ċ200 1 0.004ċ0.500 0.002 0.02ċ1.60 0.01 0.04ċ5.00 0.02
(LNG:46MJ/m3)
ोྛ100% í í í í 2ċ200 1 0.004ċ0.500 0.002 0.02ċ2.00 0.01 0.04ċ5.00 0.02
եྛ100% í í í í 0.6ċ60.0 0.2 0.002ċ0.160 0.001 0.006ċ0.600 0.002 0.02ċ1.60 0.01
ۡྛ100% ጀ1 í í í í 0.4ċ50.0 0.2 1.0ċ120.0 0.5 0.004ċ0.400 0.002 0.010ċ1.200 0.005

MQV0020 MQV0050(B,C) MQV0100 MQV0050(J, K) MQV0200 MQV0500

੦዆ୁଉ ยۨ·၂๖‫ݴ‬Ր୲ ੦዆ୁଉ ยۨ·၂๖‫ݴ‬Ր୲ ੦዆ୁଉ ยۨ·၂๖‫ݴ‬Ր୲ ੦዆ୁଉ ยۨ·၂๖‫ݴ‬Ր୲ ੦዆ୁଉ ยۨ·၂๖‫ݴ‬Ր୲ ੦዆ୁଉ ยۨ·၂๖‫ݴ‬Ր୲
‫ྷݔ‬ ጀ2 ‫ྷݔ‬ ጀ2 ‫ྷݔ‬ ጀ2 ‫ྷݔ‬ ጀ2 ‫ྷݔ‬ ጀ2 ‫ྷݔ‬ ጀ2
ഘ༹ዖૌ

੣ഘ/‫ڌ‬ഘ 0.2ċ20.0 0.1 0.4ċ50.0 0.2 1.0ċ100.0 0.5 0.4ċ50.0 0.2 2ċ200 1 4ċ500 2
ᄟഘ 0.2ċ20.0 0.1 0.4ċ50.0 0.2 1.0ċ100.0 0.5 0.4ċ50.0 0.2 2ċ200 1 4ċ500 2
ᩨഘ 0.2ċ20.0 0.1 0.4ċ50.0 0.2 1.0ċ100.0 0.5 0.4ċ50.0 0.2 2ċ200 1 4ċ500 2
ܾᄟࣅ༐ 0.10ċ12.00 0.05 0.3ċ30.0 0.1 1.0ċ80.0 0.5 0.3ċ30.0 0.1 1.0ċ120.0 0.5 4ċ400 2
‫׭‬๨ீഘ13A
0.2ċ20.0 0.1 0.4ċ50.0 0.2 í í 0.4ċ50.0 0.2 2ċ200 1 4ċ500 2
(LNG:45MJ/m3)
‫׭‬๨ீഘ13A
0.2ċ20.0 0.1 0.4ċ50.0 0.2 í í 0.4ċ50.0 0.2 2ċ200 1 4ċ400 2
(LNG:46MJ/m3)
ोྛ100% 0.2ċ20.0 0.1 0.4ċ50.0 0.2 í í 0.4ċ50.0 0.2 2ċ200 1 4ċ500 2
եྛ100% 0.06ċ6.00 0.02 0.2ċ16.0 0.1 í í 0.2ċ16.0 0.1 0.6ċ60.0 0.2 2ċ200 1
ۡྛ100% ጀ1 0.04ċ4.00 0.02 0.10ċ10.00 0.05 í í 0.10ċ12.00 0.05 0.4ċ40.0 0.2 2ċ160 1
ጀ1)MQV9500‫ڦ‬ഘ༹ዖૌยۨྺۡྛ100%้Ljୁଉ၂๖‫ڇ‬࿋ྺ(mL/min)ă
ጀ2)๑ᆩఇె႑ࡽ৊ႜยۨ๼෇ࢅୁଉ๼‫้؜‬Lj‫ݴ‬Ր୲ࣷ‫ߛ༵ޗٷ‬Lj൩‫ؽ‬კԨࠅິă

Ŷ޹՗2
༬๺ഘ༹႙ ੦዆ୁଉଉ‫ײ‬ᇑยۨ•၂๖‫ݴ‬Ր୲(‫)้׍؜‬ [‫ڇ‬࿋˖MQV9200˖mL/min(Քጒ)Ǘഄ໲ऐዖ˖L/min(Քጒ)]
MQV0020 MQV0050(B,C) MQV0100 MQV0050(J, K) MQV0200 MQV0500
੦዆ୁଉ ยۨ·၂๖‫ݴ‬Ր୲ ੦዆ୁଉ ยۨ·၂๖‫ݴ‬Ր୲ ੦዆ୁଉ ยۨ·၂๖‫ݴ‬Ր୲ ੦዆ୁଉ ยۨ·၂๖‫ݴ‬Ր୲ ੦዆ୁଉ ยۨ·၂๖‫ݴ‬Ր୲ ੦዆ୁଉ ยۨ·၂๖‫ݴ‬Ր୲
‫ྷݔ‬ ጀ2 ‫ྷݔ‬ ጀ2 ‫ྷݔ‬ ጀ2 ‫ྷݔ‬ ጀ2 ‫ྷݔ‬ ጀ2 ‫ྷݔ‬ ጀ2
ഘ༹ዖૌ

ᅚඎ(C2H2) 1.0ċ120.0 0.5 0.003ċ0.300 0.001 0.010ċ1.200 0.005 0.03ċ3.00 0.01 0.10ċ12.00 0.05 0.3ċ30.0 0.1
ҽഘ(NH3) 2ċ160 1 0.004ċ0.400 0.002 0.02ċ1.60 0.01 0.04ċ4.00 0.02 0.2ċ16.00 0.1 0.4ċ40.0 0.2
ᄟഘ 2ċ200 1 0.004ċ0.500 0.002 0.02ċ2.00 0.01 0.04ċ5.00 0.02 0.2ċ20.0 0.1 0.4ċ50.0 0.2
ᩨഘ 2ċ200 1 0.004ċ0.500 0.002 0.02ċ2.00 0.01 0.04ċ5.00 0.02 0.2ċ20.0 0.1 0.4ċ50.0 0.2
ܾᄟࣅ༐ 1.0ċ120.0 0.5 0.003ċ0.300 0.001 0.010ċ1.200 0.005 0.03ċ3.00 0.01 0.10ċ12.00 0.05 0.3ċ30.0 0.1

MQV0200 MQV0500
੦዆ୁଉ ยۨ·၂๖‫ݴ‬Ր୲ ੦዆ୁଉ ยۨ·၂๖‫ݴ‬Ր୲
‫ྷݔ‬ ጀ2 ‫ྷݔ‬ ጀ2
ഘ༹ዖૌ

ᅚඎ(C2H2) 1.0ċ120.0 0.5 4ċ400 2

ҽഘ(NH3) 2ċ160 1 4ċ400 2
੣ഘ/‫ڌ‬ഘ 2ċ200 1 4ċ500 2
ᩨഘ 2ċ200 1 4ċ500 2
ܾᄟࣅ༐ 1.0ċ120.0 0.5 4ċ400 2

Ŷ޹՗3
ൠഘ•࡜ഘ႙ ੦዆ୁଉଉ‫ײ‬ᇑยۨ•၂๖‫ݴ‬Ր୲(‫)้׍؜‬ [‫ڇ‬࿋˖MQV9020ĂMQV9050˖mL/min(Քጒ)Ǘഄ໲ऐዖ˖L/minDŽՔጒDž]
MQV9020 MQV9050 MQV9500 MQV0005 MQV0010 MQV0050
੦዆ୁଉ ยۨ·၂๖ ੦዆ୁଉ ยۨ·၂๖ ੦዆ୁଉ ยۨ·၂๖ ੦዆ୁଉ ยۨ·၂๖ ੦዆ୁଉ ยۨ·၂๖ ੦዆ୁଉ ยۨ·၂๖
‫ྷݔ‬ ‫ݴ‬Ր୲ ‫ྷݔ‬ ‫ݴ‬Ր୲ ‫ྷݔ‬ ‫ݴ‬Ր୲ ‫ྷݔ‬ ‫ݴ‬Ր୲ ‫ྷݔ‬ ‫ݴ‬Ր୲ ‫ྷݔ‬ ‫ݴ‬Ր୲
ഘ༹ዖૌ

ൠഘ 0.2ċ20.0 0.1 0.4ċ50.0 0.2 0.004ċ0.500 0.002 0.04ċ5.00 0.02 0.10ċ10.00 0.05 0.4ċ50.0 0.2

࡜ഘ 0.2ċ20.0 0.1 0.4ċ50.0 0.2 0.004ċ0.500 0.002 0.04ċ5.00 0.02 0.10ċ10.00 0.05 0.4ċ50.0 0.2

MQV0200 MQV0500 MQV1000

੦዆ୁଉ ยۨ·၂๖ ੦዆ୁଉ ยۨ·၂๖ ੦዆ୁଉ ยۨ·၂๖
‫ྷݔ‬ ‫ݴ‬Ր୲ ‫ྷݔ‬ ‫ݴ‬Ր୲ ‫ྷݔ‬ ‫ݴ‬Ր୲
ഘ༹ዖૌ

ൠഘ 2ċ200 1 4ċ500 2 10ċ1000 5

࡜ഘ 2ċ200 1 4ċ500 2 10ċ1000 5

Ŷ߳ૌ႙‫ܔڦ‬ᆌഘ༹ዖૌᅃબ՗
ഘ༹ዖૌ
O႙ං֌ዊ ‫ߌد‬ഗ
੣ഘ/‫ڌ‬ഘ ᄟഘ ᩨഘ ܾᄟࣅ༐ ‫׭‬๨ீഘ13A ोྛ100% եྛ100%

Քጚഘ༹႙ ‫ޘ‬ၞঌ Քጚ

༬๺ഘ༹႙ ᅚဗեဗၞঌ Քጚ

ൠഘ/࡜ഘ႙ ‫ޘ‬ၞঌ ൠഘ/࡜ഘጆᆩ

ഘ༹ዖૌ
O႙ං֌ዊ ‫ߌد‬ഗ
ۡྛ100% ҽഘ ᅚඎ ൠഘ ࡜ഘ

Քጚഘ༹႙ ‫ޘ‬ၞঌ Քጚ

༬๺ഘ༹႙ ᅚဗեဗၞঌ Քጚ

ൠഘ/࡜ഘ႙ ‫ޘ‬ၞঌ ൠഘ/࡜ഘጆᆩ

ጀ ࠲ᇀ๟‫ޏ‬੗ᅜ๑ᆩฉຎᅜྔ‫ڦ‬ഘ༹ዖૌLj൩‫ؽ‬კԨࠅິă

07
႙ࡽࠓ‫ׯ‬
ŶՔጚഘ༹႙
ၭୁଉ
एԨ ୁଉ ഘ༹ ޹े ޹े ޹े ޹े ޹े
ऐ႙ ֌ଙ ૶থ ޹ࡽ ాඹ
႙ࡽ ଉ‫ײ‬ ዖૌ ࠀీ1 ࠀీ2 ࠀీ3 ࠀీ4 ࠀీ5
MQV ຕጴ๕ዊଉୁଉ੦዆ഗCMQ-Vဣଚ
9005 0.10ċ5.00mL/min(Քጒ) (ጀ1)
9020 0.2ċ20.0mL/min(Քጒ) (ጀ1)
9200 2ċ200mL/min(Քጒ) (ጀ1)
9500 0.004ċ0.500L/min(Քጒ) (ጀ1)
0002 0.02ċ2.00L/min(Քጒ) (ጀ1)
0005 0.04ċ5.00L/min(Քጒ) (ጀ1)
0020 0.2ċ20.0L/min(Քጒ) (ጀ1)
0050 0.5ċ50.0L/min(Քጒ) (ጀ1)
0100 1.0ċ100.0L/min(Քጒ) (ጀ1)
B ᅃ༹๕၂๖႙
C ‫ݴ‬૗๕၂๖႙
S SUS316
R Rc1/4DŽ9005Ă9020႙փ੗჋ስDž
S 1/4Swagelok (0100႙ྺ3/8Swagelok)
V 1/4VCR (0100႙փ੗჋ስ)
U 9/16-16 UNF (9005Ă9020႙փ੗჋ስ)
N ੣ഘ/‫ڌ‬ഘ(੗Վ߸ྺഄ໱Քጚഘ༹) (ጀ2)
S ᄟഘ (ጀ3)
0 ࿮
0 ࿮
1 ޹‫ټ‬RS-485(CPL)ཚ႑ࠀీ
0 ࿮
0 ࿮
1 থഘև্ᆳ‫ت‬૙
0 ࿮
D ޹֪๬Ԓߢ
Y ޹ዊଉ߶ጷኤ௽ກ
ዐୁଉ 0 ׂ೗ӲԨ

एԨ ୁଉ ഘ༹ ޹े ޹े ޹े ޹े ޹े
ऐ႙ ֌ଙ ૶থ ޹ࡽ ా ඹ
႙ࡽ ଉ‫ײ‬ ዖૌ ࠀీ1 ࠀీ2 ࠀీ3 ࠀీ4 ࠀీ5
MQV ຕጴ๕ዊଉୁଉ੦዆ഗCMQ-Vဣଚ
0050 0.4ċ50.0L/min(Քጒ) (ጀ1)
0200 2ċ200L/min(Քጒ) (ጀ1)
0500 4ċ500L/min(Քጒ) (ጀ1)
J ᅃ༹๕၂๖႙(௬क़؅٫150mm)
K ‫ݴ‬૗๕၂๖႙(௬क़؅٫150mm)
S SUS316
R Rc1/2
S 1/2Swagelok
V 3/8VCR
U 3/4-16 UNF
N ੣ഘ/‫ڌ‬ഘ(੗Վ߸ྺഄ໱Քጚഘ༹) (ጀ2)
S ᄟഘ (ጀ3)
0 ࿮
0 ࿮
1 ޹‫ټ‬RS-485(CPL)ཚ႑ࠀీ
0 ࿮
0 ࿮
1 থഘև্ᆳ‫ت‬૙
0 ࿮
D ޹֪๬Ԓߢ
Y ޹ዊଉ߶ጷኤ௽ກ
ၭୁଉߛ৛‫ׂ܈‬೗ 0 ׂ೗ӲԨ

एԨ ୁଉ ഘ༹ ޹े ޹े ޹े ޹े ޹े
ऐ႙ ֌ଙ ૶থ ޹ࡽ ా ඹ
႙ࡽ ଉ‫ײ‬ ዖૌ ࠀీ1 ࠀీ2 ࠀీ3 ࠀీ4 ࠀీ5
MQV ຕጴ๕ዊଉୁଉ੦዆ഗCMQ-Vဣଚ
9200 2ċ200mL/min(Քጒ) (ጀ1)
9500 0.004ċ0.500L/min(Քጒ) (ጀ1)
0002 0.02ċ2.0L/min(Քጒ) (ጀ1)
0005 0.04ċ5.00L/min(Քጒ) (ጀ1)
0020 0.2ċ20.0L/min(Քጒ) (ጀ1)
0050 0.4ċ50.0L/min(Քጒ) (ጀ1)
B ᅃ༹๕၂๖႙
C ‫ݴ‬૗๕၂๖႙
S SUS316
R Rc1/4
S 1/4Swagelok
V 1/4VCR
1 ੣ഘ/‫ڌ‬ഘ
2 ᄟഘ (ጀ3)
S ߛ৛‫܈‬
0 ࿮
1 ޹‫ټ‬RS-485(CPL)ཚ႑ࠀీ
0 ࿮
0 ࿮
1 থഘև্ᆳ‫ت‬૙
Y ޹ዊଉ߶ጷኤ௽ກ
ዐୁଉߛ৛‫ׂ܈‬೗ 0 ׂ೗ӲԨ

एԨ ୁଉ ഘ༹ ޹े ޹े ޹े ޹े ޹े
ऐ႙ ֌ଙ ૶থ ޹ࡽ ా ඹ
႙ࡽ ଉ‫ײ‬ ዖૌ ࠀీ1 ࠀీ2 ࠀీ3 ࠀీ4 ࠀీ5
MQV ຕጴ๕ዊଉୁଉ੦዆ഗCMQ-Vဣଚ
0200 2ċ200L/min(Քጒ) (ጀ1)
0500 4ċ500L/min(Քጒ) (ጀ1)
J ᅃ༹๕၂๖႙(௬क़؅٫150mm)
K ‫ݴ‬૗๕၂๖႙(௬क़؅٫150mm)
S SUS316
R Rc1/2
S 1/2Swagelok
V 3/8VCR
1 ੣ഘ/‫ڌ‬ഘ
2 ᄟഘ (ጀ3)
S ߛ৛‫܈‬
0 ࿮
ጀ1) L/min(Քጒ)՗๖࣑໙ྺ20ņĂ1߲‫ٷ‬ഘუူ‫ڦ‬੣ഘୁଉă 1 ޹‫ټ‬RS-485(CPL)ཚ႑ࠀీ
ᄺ੗ॽ֖੊࿒‫܈‬Վ߸ྺ1ņĂ36ņई46ņăଷྔLjୁଉ 0 ࿮
!!!!ଉ‫ײ‬ໜഘ༹ዖૌܸՎࣅă 0 ࿮
ጀ2) ‫้׍؜‬ยۨྺ੣ഘ/‫ڌ‬ഘă‫ڍ‬๟Lj੗Վ߸ยۨྺഄ໱Քጚ‫ܔ‬ᆌഘ༹(ᩨഘĂܾᄟࣅ༐Ă 1 ഘ༹থ‫ة‬և্ᆳ‫ت‬૙
‫׭‬๨ீഘLNG(45MJ/m3Ă46MJ/m3)Ăोྛ100%Ăեྛ100%Ăۡྛ100%)ă Y ޹ዊଉ߶ጷኤ௽ກ
ጀ3) ഘ༹ዖૌ჋ስᄟഘ้Ljথഘևᆌ֑ൽ্ᆳ‫ت‬૙(ᄟഘ্ᆳ)Ljኄ๟Քጚ‫ت‬૙‫ݛ‬๕ă 0 ׂ೗ӲԨ

08
 ႙ࡽࠓ‫ׯ‬
Ŷ ༬๺ഘ༹႙
ၭୁଉ
एԨ ୁଉ ഘ༹ ޹े ޹े ޹े ޹े ޹े
ऐ႙ ֌ଙ ૶থ ޹ࡽ ాāඹ
႙ࡽ ଉ‫ײ‬ ዖૌ ࠀీ1 ࠀీ2 ࠀీ3 ࠀీ4 ࠀీ5
MQV ຕጴ๕ዊଉୁଉ੦዆ഗDNR.Wဣଚ
9200 2ċ200mL/min(Քጒ) (ጀ1)
9500 0.004ċ0.500L/min(Քጒ)(ጀ1)
0002 0.02ċ2.00L/min(Քጒ) (ጀ1)
0005 0.04ċ5.00L/min(Քጒ) (ጀ1)
0020 0.2ċ20.0L/min (Քጒ) (ጀ1)
0050 0.4ċ50.0L/min(Քጒ) (ጀ1)
B ᅃ༹๕၂๖႙(௬क़؅٫ǖ90mm)
C ‫ݴ‬૗๕၂๖႙(௬क़؅٫ǖ90mm)
S SUS316
R Rc1/4
S 1/4Swagelok
V 1/4VCR
E ༬๺႙ഘ༹(௢‫ހ‬ං֌ዊǖEPDM)(ጀ2)
0 ࿮
0 ࿮
1 ޹‫ټ‬RS-485(CPL)ཚ႑ࠀీ
0 ࿮
1 থഘև্ᆳ‫ت‬૙
0 ࿮
D ޹֪๬Ԓߢ
Y ޹ዊଉ߶ጷኤ௽ກ
ዐୁଉ 0 ׂ೗ӲԨ

एԨ ୁଉ ഘ༹ ޹े ޹े ޹े ޹े ޹े
ऐ႙ ֌ଙ ૶থ ޹ࡽ ా ඹ
႙ࡽ ଉ‫ײ‬ ዖૌ ࠀీ1 ࠀీ2 ࠀీ3 ࠀీ4 ࠀీ5
MQV ຕጴ๕ዊଉୁଉ੦዆ഗDNR.Wဣଚ
0200 2ċ200L/min(Քጚ)(ጀ1)
0500 4ċ500L/min(Քጚ)(ጀ1)
J ᅃ༹๕၂๖႙(௬क़؅٫150mm)
K ‫ݴ‬૗๕၂๖႙(௬क़؅٫150mm)
S SUS316
S ༬๺႙ഘ༹(௢‫ހ‬ං֌ዊǖEPDM)(ጀ2)
E 3/8VCR
ጀ1)L/min(Քጒ)՗๖࣑໙ྺ20ąĂ101.325kPa(1߲‫ٷ‬ഘუ) 0 ࿮
ူ‫ڦ‬௅‫ݴ‬ዓ‫༹ڦ‬ओୁଉ(mL/minࢅL/min)ăُྔLjୁଉଉ‫ײ‬ໜ 0 ࿮
ഘ༹ዖૌՎࣅܸՎࣅă 1 ޹‫ټ‬RS-485(CPL)ཚ႑ࠀీ
0 ࿮
ጀ2)‫ܔ‬ᆌഘ༹ዖૌৈ၌ᇀҽഘĂᅚඎĂ‫ڌ‬ഘĂ੣ഘĂᩨഘĂܾᄟࣅ༐ă
1 ഘ༹থ‫ة‬և্ᆳ‫ت‬૙
ُྔLj‫้׍؜‬ยۨྺ੣ഘ/‫ڌ‬ഘLj൩ံยۨഘ༹ዖૌց‫׋‬ဣຕࢫም๑ᆩă ࿮
0
D ޹֪๬Ԓߢ
Y ޹ዊଉ߶ጷኤ௽ກ
0 ׂ೗ӲԨ

एԨ ୁଉ ഘ༹ ޹े ޹े ޹े ޹े ޹े
ऐ႙ ֌ଙ ૶থ ޹ࡽ ాāඹ
႙ࡽ ଉ‫ײ‬ ዖૌ ࠀీ1 ࠀీ2 ࠀీ3 ࠀీ4 ࠀీ5
MQV ຕጴ๕ዊଉୁଉ੦዆ഗDNR.Wဣଚ
9020 0.2ċ20.0mL/min(Քጒ)(ጀ1)
9050 0.4ċ50.0mL/min(Քጒ)(ጀ1)
9500 0.004ċ0.500L/min(Քጒ)(ጀ1)
0005 0.04ċ5.00L/min(Քጒ)(ጀ1)
0010 0.10ċ10.00L/min(Քጒ)(ጀ1)
0050 0.4ċ50.0L/min(Քጒ)(ጀ1)
0200 2ċ200L/min(Քጒ)(ጀ1)
B ᅃ༹๕၂๖႙(௬क़؅٫ǖ90mm)
C ‫ݴ‬૗๕၂๖႙(௬क़؅٫ǖ90mm)
S SUS316
R Rc1/4(9020ࢅ9050փీ჋ስ)
S 1/4Swagelok
V 1/4VCR
U 9/16-18 UNF(9020ࢅ9050փీ჋ስ)
H ൠഘ/࡜ഘ
0 ࿮
0 ࿮
1 ޹‫ټ‬RS-485(CPL)ཚ႑ࠀీ
0 ࿮
1 থഘև্ᆳ‫ت‬૙
0 ࿮
D ޹֪๬Ԓߢ
Y ޹ዊଉ߶ጷኤ௽ກ
0 ׂ೗ӲԨ
ዐୁଉ

ຕጴ๕ዊଉୁଉ੦዆ഗDNR.Wဣଚ
Քጒ
Քጒ

ጀ1DžL/min(Քጚ)՗๖࣑໙ྺ20ņĂ
1߲‫ٷ‬ഘუူ‫ڦ‬ൠഘୁଉă
ጀ2Dž‫้׍؜‬ยۨྺൠഘLj‫ڍ‬੗Վ߸ྺ࡜ഘă

থഘև

Ŷ޹՗3 ଷࠔ೗
ׂ೗ఁ‫׬‬ ႙ ࡽ ాඹ
‫ټ‬ጆᆩ૶থഗમ၍ 81446681-001 20ႊՌೝ‫ۉ‬મ 2m
‫ټ‬ጆᆩ૶থഗમ၍ 81446951-001 20ႊೡԸ‫ۉ‬મ 5m
AC๢ದഗ 81446957-001 ࡀ߭ǖ35Wed 650mA
Վ߸ยۨᆩ‫ۉ‬࿋ഗ 81446683-002 ‫ټ‬ຕጴ‫܈‬ಎ 5kȍ 10ං
‫ݴ‬૗၂๖ഗԍࢺ߃ 81446858-001 ຏኬ઀ॐ
PCՊ‫ײ‬ഗ෉ॲԈ MLP100A100 ጆᆩ෉ॲĂጆᆩ‫ۉ‬મ
09
ྔႚ؅٫཮(mm)

Քጚഘ༹/༬๺ഘ༹႙ MQV9005/9020/9200/9500/0002/0005/0020/0050B,C/0100
MQV9020/9050/9500/0005/0010/0050/0200B,C

MQV0050J,K/ MQV0200J,K
ൠഘ·࡜ഘMQV0500/1000
MQV0500J,K ௬ӱਸ੥؅٫

10