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Electromechanical Systems in Microtechnology and Mechatronics – Electrical,

Mechanical and Acoustic Networks, their Interactions and Applications

Book · January 2011

DOI: 10.1007/978-3-642-10806-8

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 A. Lenk, R.G. Ballas, Karl Mayer Textilmaschinenfabrik GmbH, Obertshausen, Germany; R.
Werthschützky, TU Darmstadt, Darmstadt, Germany; G. Pfeifer
Electromechanical Systems in Microtechnology and
Mechatronics
Electrical, Mechanical and Acoustic Networks, their Interactions and Applications

Series: Microtechnology and MEMS

▶ Text book for students of graduate and postgraduate level in the

fields of microtechnology and precision engineering, technical
acoustics, mechatronics, automation engineering Reference
book for engineers working in different fields of industries, e.g.
measurement and sensor technology, automation engineering,
precision engineering, medical engineering, communication
engineering Combination with FEM

Electromechanical systems consisting of electrical, mechanical and acoustic subsystems

are of special importance in various technical fields, e.g. precision device engineering,
2011, XXIV, 472 p.
sensor and actuator technology, electroacoustics and medical engineering. Based on
a circuit-oriented representation, providing readers with a descriptive engineering
design method for these systems is the goal of this textbook. It offers an easy and fast
Printed book
introduction to mechanical, acoustic, fluid, thermal and hydraulic problems through the
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▶ *139,05 € (D) | 142,94 € (A) | CHF 186.50 element method (FEM): the combination of the advantages of both description methods
results in novel approaches, especially in the higher frequency range. The book offers
numerous current examples of both the design of sensors and actuators and that of direct
eBook
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Contents

List of Symbols . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . xv

Part I Focus of the Book

1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 Focus of the Book . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2 Fields of Application and Examples for Electromechanical
Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.3 Design of Electromechanical Systems . . . . . . . . . . . . . . . . . . . . . . 9
1.4 Simulation Methods for Electromechanical Systems . . . . . . . . . 10
1.4.1 Historical Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.4.2 Design Methods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

2 Electromechanical Networks and Interactions . . . . . . . . . . . . . 15

2.1 Signal Description and Signal Transmission in Linear
Networks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
2.1.1 The Circular Function as Basic Module for Time
Functions of Linear Networks . . . . . . . . . . . . . . . . . . . . . . 16
2.1.2 Fourier Expansion of Time Functions . . . . . . . . . . . . . . . . 20
2.1.3 The Fourier Transform . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
2.1.4 The Laplace Transform . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
2.2 Electrical Networks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
2.3 Mechanical Networks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
2.4 Interactions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
2.4.1 Mechanical Interactions . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
2.4.2 Electromechanical Interactions . . . . . . . . . . . . . . . . . . . . . 46
2.5 Structured Network Representation of Linear Dynamic
Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56
2.6 Basic Equations of Linear Networks . . . . . . . . . . . . . . . . . . . . . . . 58
x Contents

Part II Network Representation of Systems with Lumped and

Distributed Parameters

3 Mechanical and Acoustic Networks with Lumped

Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
3.1 Mechanical Networks for Translational Motions . . . . . . . . . . . . . 62
3.1.1 Arrangements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62
3.1.2 Coordinates . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
3.1.3 Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
3.1.4 Rules of Interconnection . . . . . . . . . . . . . . . . . . . . . . . . . . . 74
3.1.5 Isomorphism between Mechanical and Electrical
Circuits . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
3.1.6 Representation of Transient Characteristics of Mass
Point Systems in the Frequency Domain (BODE
diagram) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79
3.1.7 Network Representation of Mass Point Systems . . . . . . . 85
3.1.8 Sample Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
3.2 Mechanical Networks for Rotational Motions . . . . . . . . . . . . . . . 99
3.2.1 Coordinates . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100
3.2.2 Components and System Equations . . . . . . . . . . . . . . . . . 101
3.2.3 Isomorphism between Mechanical and Electrical
Circuits . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102
3.2.4 Sample Application for a Rotational Network . . . . . . . . 106
3.3 Acoustic Networks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 107
3.3.1 Coordinates . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 108
3.3.2 Acoustic Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 109
3.3.3 Network Representation of Acoustic Systems . . . . . . . . . . 110
3.3.4 Real Acoustic Components . . . . . . . . . . . . . . . . . . . . . . . . . 114
3.3.5 Isomorphism between Acoustic and Electrical Circuits . 120
3.3.6 Sample Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 120

4 Abstract Linear Network . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 129

4.1 Coordinates . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 129
4.2 Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 130
4.3 Nodal and Loop Rules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 132
4.4 Characteristics of the Abstract Linear Network . . . . . . . . . . . . . . 132

5 Mechanical Transducers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 137

5.1 Translational-Rotational Transducer . . . . . . . . . . . . . . . . . . . . . . 137
5.1.1 Rigid Rod . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 137
5.1.2 Bending Rod . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 141
5.2 Mechanical-Acoustic Transducer . . . . . . . . . . . . . . . . . . . . . . . . . . 146
5.2.1 Ideal and Real Mechanical-Acoustic Piston Transducers 147
5.2.2 General Elastomechanical-Acoustic Plate Transducer . . . 149
 Contents xi

5.3 Characteristics of Selected Mechanical-Acoustic Transducers . . 155

6 Mechanical and Acoustic Networks with Distributed

Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 165
6.1 Representation of Mechanical Systems as one-dimensional
Waveguides . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 165
6.1.1 Extensional Waves within a Rod . . . . . . . . . . . . . . . . . . . . 166
6.1.2 Approximate Calculation of the Input Impedance . . . . . 172
6.1.3 Approximate Representation of an Impedance at
Resonance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 177
6.1.4 Approximated two-port Network Representation at
Resonance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 178
6.1.5 Flexural Vibrations within a Rod . . . . . . . . . . . . . . . . . . . 183
6.2 Network Representation of Acoustic Systems as Linear
Waveguides . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 192
6.3 Modeling of Transducer Structures with Finite Network
Elements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 195
6.3.1 Ultrasonic Microactuator with Capacitive Diaphragm
Transducer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 195
6.3.2 Fluid-filled Pressure Transmission System of a
Differential Pressure Sensor . . . . . . . . . . . . . . . . . . . . . . . . 198
6.4 Combined Simulation with Network and Finite Element
Methods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 202
6.4.1 Applied Combination of Network Methods and Finite
Element Methods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 204
6.4.2 Combined Simulation using the Example of a Dipole
Bass Loudspeaker . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 209
6.4.3 Combined Simulation using the Example of a
Microphone with Thin Acoustic Damping Fabric . . . . . . 216

Part III Electromechanical Transducers

7 Electromechanical Interactions . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229

7.1 Classification of Electromechanical Interactions . . . . . . . . . . . . . . 229
7.2 Network Representation of Electromechanical Interactions . . . 233

8 Magnetic Transducers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 247

8.1 Electrodynamic Transducer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 247
8.1.1 Derivation of the Two-Port Transducer Network . . . . . . . 247
8.1.2 Sample Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 251
8.2 Electromagnetic Transducer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 267
8.2.1 Derivation of the Two-Port Transducer Network . . . . . . . 268
8.2.2 Sample Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 275
8.3 Piezomagnetic Transducer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 285
xii Contents

8.3.1 Derivation of the Two-Port Transducer Network . . . . . . 286

8.3.2 Sample Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 296
8.3.3 Piezomagnetic Unimorph Bending Elements . . . . . . . . . . 302
8.3.4 Example of a Parametric Magnetoelastic Bending
Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 308

9 Electrical Transducers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 313

9.1 Electrostatic Transducer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 313
9.1.1 Electrostatic Plate Transducer . . . . . . . . . . . . . . . . . . . . . . 313
9.1.2 Sample Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 323
9.1.3 Electrostatic Diaphragm Transducer . . . . . . . . . . . . . . . . 331
9.1.4 Sample Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 334
9.1.5 Electrostatic Solid Body Transducers . . . . . . . . . . . . . . . . 339
9.1.6 Sample Application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 341
9.2 Piezoelectric Transducers with Lumped Parameters . . . . . . . . . 345
9.2.1 Model Representation of the Piezoelectric Effect . . . . . . . 345
9.2.2 Piezoelectric Equations of State and Circuit Diagram
for Longitudinal Coupling . . . . . . . . . . . . . . . . . . . . . . . . . 348
9.2.3 General Piezoelectric Equations of State . . . . . . . . . . . . . 350
9.2.4 Piezoelectric Transducers and Corresponding
Equivalent Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 353
9.2.5 Piezoelectric Bending Bimorph Elements . . . . . . . . . . . . 358
9.2.6 Piezoelectric Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . 360
9.2.7 Sample Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 365
9.3 Piezoelectric Transducer as one-dimensional Waveguide . . . . . . 370
9.3.1 Transition from Lumped Parameters to the Waveguide
using the Example of an Accelerometer . . . . . . . . . . . . . . 371
9.3.2 Piezoelectric Longitudinal Oscillator as Waveguide . . . . 375
9.3.3 Piezoelectric Thickness Oscillator as Waveguide . . . . . . 375
9.3.4 Sample Applications of Piezoelectric Longitudinal and
Thickness Oscillators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 381
9.3.5 Piezoelectric Beam Bending Element as Waveguide . . . 392
9.3.6 Sample Applications of Piezoelectric Beam Bending
Elements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 393

10 Reciprocity in Linear Networks . . . . . . . . . . . . . . . . . . . . . . . . . . . 413

10.1 Reciprocity Relations in Networks with only One Physical
Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 413
10.2 Reciprocity Relations in General Linear Two-Port Networks . . 415
10.3 Electromechanical Transducers . . . . . . . . . . . . . . . . . . . . . . . . . . . . 417
10.4 Mechanical-Acoustic Transducers . . . . . . . . . . . . . . . . . . . . . . . . . . 420
 Contents xiii

Part IV Appendix

A Characteristics of Selected Materials . . . . . . . . . . . . . . . . . . . . . . 425

A.1 Material Characteristics of Crystalline Quartz . . . . . . . . . . . . . . . 425
A.2 Piezoelectric Constants of Sensor Materials . . . . . . . . . . . . . . . . . 426
A.3 Characteristics of Metallic Structural Materials . . . . . . . . . . . . . . 427
A.4 Material Characteristics of Silicon and Passivation Layers . . . . 428
A.4.1 Comparison of Main Characteristics of Silicon, Silicon
Dioxide and Silicon Nitride Layers . . . . . . . . . . . . . . . . . . . 428
A.4.2 Characteristics of Silicon Dioxide Layers . . . . . . . . . . . . . . 429
A.4.3 Characteristics of Silicon Nitride Layers . . . . . . . . . . . . . . 430
A.5 Characteristics of Ceramic Structural Materials . . . . . . . . . . . . . 431
A.6 Material Characteristics of Selected Polymers . . . . . . . . . . . . . . . 432
A.7 Characteristics of Plastics as Structural Materials . . . . . . . . . . . 433
A.8 Composition and Material Characteristics of Selected Glasses . 434
A.9 Material Characteristics of Metallic Solders and Glass Solders . 435
A.10 Sound Velocity and Characteristic Impedance . . . . . . . . . . . . . . . 436

B Signal Description and Transfer within Linear Networks . . 437

B.1 Fourier Expansion of Time Functions . . . . . . . . . . . . . . . . . . . . . . 437
B.1.1 Estimate of Approximation Error with Numerical
Analyses of Fourier Series . . . . . . . . . . . . . . . . . . . . . . . . . . 437
B.1.2 Sample Application for the Periodic Iteration of
Singular Processes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 440
B.2 Ideal Impulse and Step Functions . . . . . . . . . . . . . . . . . . . . . . . . . 442
B.2.1 Problem Definition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 442
B.2.2 Ideal Impulses and their System Response . . . . . . . . . . . . 443
B.2.3 The Ideal Step Function and its System Response . . . . . 448
B.3 The Convolution Integral . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 449

References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 453

Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 459
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