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Paolo Biagioni
NFO-9, Lausanne – September 10-15, 2006 3
Already seen…
Paolo Biagioni
NFO-9, Lausanne – September 10-15, 2006 4
Outline
• Fabrication techniques:
i) electron beam lithography (EBL)
ii) focused ion beam (FIB)
iii) nano imprint lithography (NIL)
• Gain media
Paolo Biagioni
NFO-9, Lausanne – September 10-15, 2006 5
Electron beam lithography (1)
Paolo Biagioni
NFO-9, Lausanne – September 10-15, 2006 6
Electron beam lithography (2)
Paolo Biagioni
NFO-9, Lausanne – September 10-15, 2006 7
Electron beam lithography (3)
Paolo Biagioni
NFO-9, Lausanne – September 10-15, 2006 8
Electron beam lithography (4)
Paolo Biagioni
NFO-9, Lausanne – September 10-15, 2006 9
Focused ion beam (1)
Paolo Biagioni
NFO-9, Lausanne – September 10-15, 2006 10
Focused ion beam (2)
FIB apparatus
Paolo Biagioni
NFO-9, Lausanne – September 10-15, 2006 11
Focused ion beam (3)
Paolo Biagioni
NFO-9, Lausanne – September 10-15, 2006 12
Focused ion beam (4)
Paolo Biagioni
NFO-9, Lausanne – September 10-15, 2006 13
Focused ion beam (5)
Paolo Biagioni
NFO-9, Lausanne – September 10-15, 2006 14
Nano imprint lithography (1)
Pattern design
Master fabrication
• Large-scale production
Substrate preparation • Very cost-effective
• Structuring resolution ~ 10 nm
Imprinting
Paolo Biagioni
NFO-9, Lausanne – September 10-15, 2006 15
Stripe waveguides (1)
• Au stripes prepared by Electron Beam Lithography
• SPP excited via Kretschmann geometry
(propagation distance decreases
• Imaging with SNOM collection with decreasing stripe width)
air
metal
n>1
Leaky Bound
Paolo Biagioni
NFO-9, Lausanne – September 10-15, 2006 19
V-groove waveguides (1)
Mode profiles
Infinite groove, 1st mode Infinite groove, 2nd mode Wedge Finite groove, 1st mode
Paolo Biagioni
NFO-9, Lausanne – September 10-15, 2006 20
V-groove waveguides (2)
• Au V grooves prepared by
Focused Ion Beam milling
•SPP excited via fiber
• Imaging with far-field scattering
or SNOM collection
Topography
(fringes due to
interference
SNOM between free-space
and guided waves)
Prop. length
Mode width
Paolo Biagioni
NFO-9, Lausanne – September 10-15, 2006 26
V-groove waveguides (8)
Towards smoother waveguides
Top view
• Au V grooves prepared by
Nano imprint lithography
Side view
metal
(characterization by SNOM)
Paolo Biagioni
NFO-9, Lausanne – September 10-15, 2006 31
Modulation in plasmonic waveguides (1)
Sample
Results
Paolo Biagioni
NFO-9, Lausanne – September 10-15, 2006 37
Impedance analysis of waveguides
∞
Z0 = V/I
V= E∙ ds I= H ∙ ds
-∞
Field nodes
Field maxima
l
Resonance condition:
L L=nl/2
n=1
A n=2
n=1 n=2
n=3
n=3 n=4
n=4
n=5
n=6
L n=7
Paolo Biagioni
NFO-9, Lausanne – September 10-15, 2006 39
Waveguide Fabry-Perot resonators (2)
L L
Paolo Biagioni
NFO-9, Lausanne – September 10-15, 2006 40
Waveguide Fabry-Perot resonators (3)
Fabry-Perot resonator