Professional Documents
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PHYSICS
Professor P. Lorenzini
Polytech’Nice Sophia
Electronics Department
Ph. Lorenzini
Semiconductors Physics 2
University of Nice (France)
Objectives
• To Understand the interest of semiconductors in the
production of electronic components
• To Understand transport mechanisms and physical
processes governing the operation of electronics devices.
• Mastering DC and AC operations of the basic PN junction
• To Have all the basics to understand the behavior of
electronic active devices
Ph. Lorenzini
Semiconductors Physics 3
University of Nice (France)
Plan
bibliography
• C. Kittel, « physique de l’état solide », dunod université, 5° ed., 1983
• Crystalline bonds
• distinction:
• At the macroscopic level:
• If the glass temperature is raised, there is a gradual transition from the solid to
the liquid state without bearing condition.
• For a crystal, there is a temperature plateau caused by coexistence (change)
phase.
• At the microscopic level:
• Amorphous: random distribution of the atoms
• Crystal: spatial periodic distribution of atoms.
Ph. Lorenzini
Semiconductors Physics 8
University of Nice (France)
(from Neamen)
Crystal bond
• What are the strengths that allow atoms bond together and form such
structures?
Electronegativity
• Electronegativity: it is the ability of an atom to attract
electrons shared in a covalent bond.
The electronegativity En
between two bonded atoms
could be null, low or high.
•ΔEN ~ 0: the electrons are equally
distributed
•ΔEN ~ 1: electrons are closest to
the most electronegative atom.
•ΔEN is high, the electrons are not
shared
Ph. Lorenzini
Semiconductors Physics 11
University of Nice (France)
Crystal bond
• 4 differents types: • One commun point:
• ionic
Metallic bond
• Most chemical elements have a more or less
pronounced metallic behavior.
• Built up from elements with few valence electrons
compared to their period or energy level
• Example:
• Sodium (Na) 1s22s22p63s1
• Cuivre (Cu) 1s22s22p63s23p63d104s1
Ph. Lorenzini
Semiconductors Physics 13
University of Nice (France)
Configuration du Cu
(1s22s22p63s23p63d104s1)
Ph. Lorenzini
Semiconductors Physics 14
University of Nice (France)
Metallic bond
• Outers electrons not strongly linked to atom
• Tis atom can « free » this (these) electron (s)
• nucleus+core electrons look like to a set of positives charges positive ions
with saturated outer layer
• The cohesion is ensured by the negatively charged electron cloud
• Bonding’s force Coulomb attraction
• Weak bonds softer materials and low melting temperature
Ph. Lorenzini
Semiconductors Physics 15
University of Nice (France)
Metallic bond
Electron-Sea Model: A metal crystal is viewed as a three-dimensional array
of metal cations immersed in a sea of delocalized electrons that are free to
move throughout the crystal.
Ph. Lorenzini
Semiconductors Physics 16
University of Nice (France)
Covalent bond
• Crystals belong to column IV of periodic
table
• Hydrogen like bonds
• Hydrogen:
• 1 outer electron
• To complete the layer, try to « find, accept » an
extra electron
• A second electron from another Hydrogen will
allow to share outer electrons
• We get H2 molecule
H H
+ H
H
H2
Ph. Lorenzini
Semiconductors Physics 17
University of Nice (France)
Covalent bond
• Example : Silicon
• 4 valence (outer) electrons Si
Covalent bond
Ionic bond
• Association of a strongly electronegative chemical element (7e)
and a strongly electropositive element (1e): ex NaCl
• The elements in group 1 of the periodic table tend to lose their
one electron (become positively charged) while the elements in
group VII gain one electron and become negatively charged
the two ions experience coulomb attraction
3s²3p5
3s1
Ionic bond
• The strengh of cohesion is due to the Coulomb
attraction of the two ions ionic bond
• In fact, binding is "identical" to the covalent bond
except that atoms are very differents (not the same
column)
• Ionic/covalent border is not sharp: depends on the
electronic nature of the associated elements Col I – VII
mainly ionic
• Col II-VI 80% ionic 20% covalent (CdTe)
• Col III-V 60% ionic 40% covalent (GaAs, GaP, InP)
• Col IV-IV essentielly covalent (Si, Ge)
Ph. Lorenzini
Semiconductors Physics 21
University of Nice (France)
Ionic bond
Crystal geometry
• The building block which is repeated infinitely, to
produce the crysal,may be a single atom or quite
complex (protein) : this is the basis.
• For Si,Ge basis : one atom
• For GaAs basis : 2 atoms
• For molecular atom basis : Protein 104-105 at.!!
Crystal geometry
+ =
Crystal geometry
directions
• Bravais Postulat : it exists in the
crystal a set of points Pn with
exactly the same microscopic ’ ’’
environment that P0 (origin pt) ie
that the atomic landscape seen
from Pn is the same as P0 in P0
magnitude and direction. This P1’ Pn
set of points is a set of P1
congruent points or vertex (top)
of the lattice
• Bravais lattice: it is a sample of P2
the lattice that shows all the
translations of the lattice. There
are 14 different lattices
Ph. Lorenzini
Semiconductors Physics 26
University of Nice (France)
• Method :
• Take the intercepts of the plane along the axis
• x1 (distance / origin = x1.a ) in units of lattice constant a
• x2 (distance / origin = x2.b ) in units of lattice constant b
• x3 (distance / origin = x3.c in units of lattice constant c
• Take the reciprocal of the intercepts
• Reduce them to the smallest integers (in the same ratio !)
• We get the Miller indices
• Example:
• x1=4, x2=1, x3=2
• ¼ , 1, ½
• 1,4,2 (h,k,l) =(1,4,2)
Crystallographic direction
• Any line through two points of the lattice defines a crystallographic
direction. It’s defined by 3 indices h,k,l smallest integers having the
same relationship to each other that the components of a vector
collinear to the line.
• Notation: [h,k,l]
• Paricular cases : one direction [h,k,l] is orthogonal to the plane of
same indexes (h,k,l) or [h,k,l] is the axial vector of the plane (h,k,l) .
Ph. Lorenzini
Semiconductors Physics 29
University of Nice (France)
(a,0,0) ou (1,0,0)
Some examples.
z
(From McMurry and Fay)
y
Ph. Lorenzini
Semiconductors Physics 31
University of Nice (France)
Rhomboédric centered
Tetragonal
Ph. Lorenzini
Semiconductors Physics 32
University of Nice (France)
sc bcc
fcc
Hexagonal
Structure
fcc
Structure
a1
a2
a3
y
a1 a3
x
a2
a1 a x a
a1 ( x y z )
2
a2 a y or: a
a2 ( x y z )
2
a
a3 ( x y z ) a
a3 ( x y z )
2 2
Ph. Lorenzini
Semiconductors Physics 38
University of Nice (France)
a
a
1 4 1 / 4 2 2
surface density 5.66 1014
at.cm
aa 2 (5 10 8 cm) 2 2
Ph. Lorenzini
Semiconductors Physics 40
University of Nice (France)
• fcc
• Two atom basis
• Looks like two fcc
shifted/deplaced by ¼
diagonal
• Each atom has 4
nearest neighbors
(tetragonal bond)
Ph. Lorenzini
Semiconductors Physics 41
University of Nice (France)
f (r l ) f (r )
Ph. Lorenzini
Semiconductors Physics 43
University of Nice (France)
2
f ( x) An e 2inx / a
Ag e igx
avec g n n g m 1
n g a
Ph. Lorenzini
Semiconductors Physics 44
University of Nice (France)
• verification
1
igx
f ( x) Ag e igx Ag f ( x )e dx
g
a cellule
f ( x l ) Ag eig ( x l ) Ag eigx eigl f(x) Ag eigx
g
2
e igl
1 gl n l1a nl1 2 integer 2
a
Ph. Lorenzini
Semiconductors Physics 45
University of Nice (France)
a2 a3 a3 a1 a1 a2
b1 2 b2 2 b3 2
(a1 , a2 , a3 ) (a1 , a2 , a3 ) (a1 , a2 , a3 )
bi .a j 2 ij with ij 0 if i j , ij 1 if i j
Ph. Lorenzini
Semiconductors Physics 46
University of Nice (France)
l’
l’’
Ph. Lorenzini
Semiconductors Physics 48
University of Nice (France)
• From these two geometrical results, we see that the simplest way of
characterizing the planes of a lattice is by their normals, expressed as
vectors of the reciprocal.
Ph. Lorenzini
Semiconductors Physics 50
University of Nice (France)
g hb
1 k b 2 l b3
We get g. l 2 hn kp lq 2N ; verified for all points belong
to this plane. If we choose a point with p=q=0, we get n=N/h, so,
N
d1 a1
the choosen plane cut axis a1 at . Same relation with
d2 and d3. h
N N N N N N En unité des
d1 a1 , d 2 a2 , d 3 a3 d '1 , d '2 , d '3 vecteurs de
h k l h k l base
3 4 5
2 2
Example : d '1 , d '2 , d '3
2
, , 3,4,5 h, k , l
3 4 5 2 2 2
We obtain the same indexes for g (normal to the plane) and for the plane !
Ph. Lorenzini
Semiconductors Physics 51
University of Nice (France)
[3,1,0]
d2
[1,0,0]
d1
Ph. Lorenzini
Semiconductors Physics 52
University of Nice (France)
(a) (b)
Ph. Lorenzini
Semiconductors Physics 54
University of Nice (France)
2d hkl sin n
2
d hkl . ON 2 d hkl with ON vector of RL
ON
2 sin 2
ON 2
2. n and wave vector k ,1 , k .1 sin
ON ON
k .1 k ON k ON ON
2. 2 2 n 2k n ON , or k n
ON ON ON ON ON 2
Ph. Lorenzini
Semiconductors Physics 56
University of Nice (France)
Introduction:
• The diffraction of waves (k = 2 by a crystal is present
in two domains :
• Cristallography:
• X Rays difraction:
hc hc 12,4
E h A
E E (keV )
• Neutrons diffraction
Wave – particle duality (de Broglie)
• Electrons diffraction
h p2 h2 h 12
deBroglie E 2 e (A)
p 2mn / e 2 mn / e 2me E E (eV )
Ph. Lorenzini
Semiconductors Physics 59
University of Nice (France)
Generality:
Generality:
• The second field of interest :
• Solid state physics: on utilise la condition de Bragg (maximum
d’intensité diffractée) pour déterminer les électroniques qui ne
peuvent se propager dans le cristal (elles sont diffractées!). On
associe à chacune des ces satisfaisant à la loi de Bragg une
bande d’énergie pour l’électron qu’on appelle bande interdite
(« gap »). We use the Bragg condition (maximum diffracted
intensity) to determine the electronic wave length that can not
propagate in the crystal (they are diffracted!). Is associated with
each of those satisfying the Bragg's law an energy band for the
electron, called band gap (or "gap").
Ph. Lorenzini
Semiconductors Physics 61
University of Nice (France)
Bragg’s law
• Elementary method (see previous chapter)
ON
2d hkl sin n 2k n ON , or k n
2
Example 1: 1D net
N
RD
a
2a
RR
O N
|ON|/2 • if –a < k < /a, wave is not diffracted. This
k is the first Brillouin zone
O
• if k = ± /a, wave is diffracted, k is in the
limit of the first Brillouin zone
Ph. Lorenzini
Semiconductors Physics 62
University of Nice (France)
A2
a2
1° ZB ┴ A1 (// a2) A1
a1
Reciprocal latticeR
Direct lattice
Waves with
wavevector inside the
1° ZB ┴ A2 (// a1)
Brillouin zone can
propagate in the
crystal.
Ph. Lorenzini
Semiconductors Physics 63
University of Nice (France)
http://en.wikipedia.org/wiki/Brillouin_zone
Ph. Lorenzini
Semiconductors Physics 64
University of Nice (France)
k k
D
r
r R cos( ρ, ) R
Ph. Lorenzini
Semiconductors Physics 67
University of Nice (France)
R
ik i ( k r t )
e e r R cos( ρ, ) R
Fsc (r ) fF0
r
it ik . ik R ik cos( , R )
fF0 e e
Fsc (r ) Fsc ( R)
R
Ph. Lorenzini
Semiconductors Physics 68
University of Nice (France)
F ( R)
p R
e
F0 ei k R e it i k . p
fp
F ( R)
F0ei k R e it
R
f
p
p e
i k . p
Ph. Lorenzini
Semiconductors Physics 69
University of Nice (France)
F ( R)
F0 ei k R e it
R
f
p
p e
i k . p
0 ?
• For a large number of sites (identical atoms) and this is
the case, the sum is zero if : p .k 2n
2
k
k: // of incident beam
k’: // of scattered beam
k’ G
k
RR
Ph. Lorenzini
Semiconductors Physics 72
University of Nice (France)
j
p
Ph. Lorenzini
Semiconductors Physics 73
University of Nice (France)
F ( R)
F0 ei k R e it
R
fp
p e
i k . p
F0 ei k R e it
R
p j
f j exp i ( p j ).k
• We describe the scattering from each of the basis j atom by a factor fj (
depending of the nature of the atom)
• The summation is separated into two summations – one over the lattice
sites (4 in FCC !) and one over the atoms in the basis (2 in the diamond !)
F0ei k R e it
F ( R)
R
exp i
p
p .k f j exp i j .k
j
F0ei k R e it
F ( R)
R
exp i
p
p .k f j exp i j .k
j
j .k j .G
j x j a y j b z j c et G h A k B l C
j .G ( x j a y j b z j c) .(h A k B l C )
j .G 2 ( x j h y j k z j l )
p .G 2 ( x p h y p k z p l )
Ph. Lorenzini
Semiconductors Physics 75
University of Nice (France)
2 differents atoms in
the basis Each node have two diffrents atoms we have to
modify the relation
Powder sample:
Thousands of small „crystals“ (1 - 10 µm)
=> Statistical orientation of crystallites
1 monocrystal 1 plane (hkl) has
=> Bragg‘s condition most likely valid for each
the « right » angle of Bragg 1 lattice plane (in fact all the planes present in the
scattered beam crystal)
=> Constructive interference of diffracted beams
Ph. Lorenzini
Semiconductors Physics 81
University of Nice (France)
• Powder method:
• R: radius of the Debye –Scherrer chamber
• W= R : half perimeter of the chamber
S1 2 R1
Measure S1 allow to determine the Bragg angle
Ph. Lorenzini
Semiconductors Physics 82
University of Nice (France)
• Powder method:
X-ray detector
Intensity (c/s)
Ph. Lorenzini
Semiconductors Physics 83
University of Nice (France)
• Powder method:
/
kT
/
M. Planck : He postulates that the energy exchange between
matter and radiation are not made continuously but by
indivisible and discrete quantities: quanta of energy. He shows
that the relationship between energy and frequency is given by:
En =n.h
M. Planck : energy and frequency are dependent allowed
modes are more and more difficult to populate. In the cavity, (
the black body), atoms in the wall act as oscillators with a
frequency and the atom’s energy is given by:
En =n.h
∑ /
∑ / / 1
Ph. Lorenzini
Semiconductors Physics 89
University of Nice (France)
h h
mv p
Ph. Lorenzini
Semiconductors Physics 93
University of Nice (France)
Wave mechanics
• The relation of de Erwin Schrödinger:
Ph. Lorenzini
Semiconductors Physics 94
University of Nice (France)
Wave mechanics
• the relation of Schrödinger:
the motion of a particle is described by a wave function (r,t) and
the norm squared of this function represents the probability of
presence or density on a point r. the functions (r,t) obey to the
Schrödinger’s relation:
2 (r , t )
(r , t ) V (r , t ) (r , t ) i
2m t
Wave mechanics
• One particular point for this lecture is concerning steady state (stationary
state) where the potential energy V=V(r) applied to the particle is time
independent. We have to determine the time-dependent portion and the
position-dependent by using the technique of separation of variables. We
assume that we can write the wave function:
(r , t ) (r ) (t )
• r) is only position dependent
• t) is only time dependent
2 1 2 ( x) 1 (t )
V ( x ) i
2m ( x) x 2
(t ) t
Ph. Lorenzini
Semiconductors Physics 96
University of Nice (France)
Schrödinger equation:
2 1 2 ( x) 1 (t )
V ( x ) i
2m ( x) x 2
(t ) t
g(x) f(t)
• Since the left side is a function of position x only and the right side is a
function of time t only, the only solution is that the both terms are equal to a
constant. On the other hand, we see by dimensional analysis of the right side
that the constant is an energy:
E
1 (t ) i t
i E (t ) Ae
(t ) t
Schrödinger equation:
• The time independent part of Schrödinger equation can be writen
as:
2 2 ( x)
V ( x) ( x) E ( x)
2m x 2
iE
• with : ( x, t ) ( x) exp( t)
( x) dx 1
2
• Limits boudaries:
Schrödinger’s equation:
e dk
ikx it
( x, t ) Ae
k 0 k / 2
V0
2m( E V0 ) 2k 2
k E V0
with 2 or 2m
( x, t ) Aeikx e it
( x, t ) ( x, t ) ( x, t ) A cste
2 * 2 2
t0 t1 time
• the probability of presence is independent of x and time, which is far from being
"reasonable" from a physical point of view
Ph. Lorenzini
Semiconductors Physics 103
University of Nice (France)
Ae
ikx it E1
( x, t ) e dk V0
k1 k / 2
k
• We suppose A=cste (hyp) k1 –k/2 k1
• at t=0:
k1 k / 2 k / 2
ik1 x i ( k k1 ) x i ( k k1 ) x
( x,0) Ae e dk Ae ik1 x
e d (k k1 )
k1 k / 2 k / 2
kx )
1 k / 2 sin(
( x,0) Aeik1x . e i ( k k1 ) x Aeik1x k 2
ix
k / 2
k
x
2
Ph. Lorenzini
Semiconductors Physics 104
University of Nice (France)
sin 2
z k x
( x,0) A k avec z
22 2
z 2
2
2 4
x1 x 2 x1
1,0
k k
0,8
x k 4
2
0,6
[sin(z)/z]
0,4
0,2
By improving the law of amplitude (instead
of A=cte) , one would get the Heisenberg’s
equation:
x k 2
0,0
-3 -2 -1 0 1 2 3
z ( in unity of )
Ph. Lorenzini
Semiconductors Physics 105
University of Nice (France)
i k t1 ikx ik1 x i1t1 i ( k k1 ) x i ( k 1 ) t1
( x, t1 ) Ae e dk Ae e e e d (k k1 )
k1 k / 2 k / 2
d
Taylor series : k 1 k (k k1 ) ...
dk k1
k / 2 d
i ( k k1 ) k t1
dk k1
( x, t1 ) Aeik1x e i1t1 e i ( k k1 ) x
e d (k k1 )
k / 2
k / 2
d
we take x' x k t1 ( x, t1 ) Aeik1x e i1t1 ei ( k k1 ) x d (k k1 )
'
dk k1 k / 2
d
x t1
dk k1
dP
x0 (t=0) x1 (t=t1) x
d
vg
dk k1
Ph. Lorenzini
Semiconductors Physics 107
University of Nice (France)
2k 2
2 2 E V0
v (k ) 2m
k v T v
dE d 2 k1 p1
hk h v g
from de Broglie ( p k ) dk k1 dk k1 m m
2
p
E We get v
ω E E ²k ² m
v or E V0
k p p k 2m
this term should not exist (!)
1 k V0 1 p V0 V =cst
v 0 no action on the motion of the
2 m k 2 m p particle; absurd because v=p/m
Ph. Lorenzini
Semiconductors Physics 108
University of Nice (France)
2 ( x) 2m 2mE
( E V ( x )) ( x ) 0 we set k
Particule x 2 2 2
with energy
E Region II: (x)=Acos(kx)+Bsin(kx)
Region I et III: (x)=0
Continuity at x=0 and x=a
A=0
Bsin(ka)=0 k=n/a
probability between 0 and a must be 1:
2 2
B= ou i
a a
Ph. Lorenzini
Semiconductors Physics 109
University of Nice (France)
2 nx 2 n 2 2
( x) sin with n 1, 2, 3, ... E En with n 1, 2, 3, ...
a a 2ma 2
Particule
with energy
E
Ph. Lorenzini
Semiconductors Physics 110
University of Nice (France)
21 ( x) 2m V(x)
2 E1 ( x) 0 Incident
x 2
Particules
• Region II (0<E<V0)
V0
2mE
1 ( x) A1e B1e ikx ikx
avec k
2 Region I Region II
2 2 ( x) 2m
2 (V0 E ) 2 ( x) 0
x 2
x=0
x x 2m(V0 E )
2 ( x) A2 e B2 e avec
2
Ph. Lorenzini
Semiconductors Physics 111
University of Nice (France)
Flux of reflected
particles (cm-2 s-1) 2
V0
vr B1 B1* vr B1
R
vi A1 A1 vi A1
*
Region I Region II
2m 1 mv
k mv ² vi vr k
m
2
R 1
2
2mE
1 ( x) A1e B1e
ikx ikx
with k
2
2m
2 ( x) A2 e x B2e x with 2
(V0 E )
3 ( x) A3eikx X
B3e ikx
• Transmission coefficient :
Free electron
• Free electron energy potential is zero everywhere V(x)=0:
2 ( x) 2m
2 E ( x) 0
x 2
• Solution of this differential equation is given by:
i 2mE i 2mE
( x) A exp x B exp x
• And :
E i i
( x, t ) ( x) exp(i t ) A exp ( x 2mE Et ) B exp ( x 2mE Et )
Ph. Lorenzini
Semiconductors Physics 115
University of Nice (France)
Free electron
E i i
( x, t ) ( x) exp(i t ) A exp ( x 2mE Et ) B exp ( x 2mE Et )
+x -x
Sommerfeld Model
• A. Sommerfeld considers one unidirectional crystal (1D) with length
L
• The electrons are bound to the crystal by the Coulomb attraction
forces.
• The electrons are trapped they can not get out
crystal
V0
1 2 3
-L/2 0 +L/2
Ph. Lorenzini
Semiconductors Physics 117
University of Nice (France)
Sommerfeld potential
• Simplification: we get closer to reality by considering that the wave
function associated with the electron cancels to the limits (± L / 2)
electrons can not escape from the crystal
• steps:
• Find solutions of Schrodinger’s equation
• Keep only those that meet/fit conditions of continuity
• Built a wave packet for a better representation of reality
Ph. Lorenzini
Semiconductors Physics 118
University of Nice (France)
Sommerfeld potential
• Solution for region 2 (idem free electron):
2 ( x) 2m 2mE 2k 2
2 E ( x) 0 ( x) Aeikx k E
x 2
2 2m
• Continuity conditions: E
• real: cancel in ± L/2
Aeikx cc Aeikx cc V0
2 2
cosinus
sinus
A cos(kx) A sin( kx)
• Cosinus solutions
L 2 k
cos k 0 k (2 p 1) k
2 L L
• Sinus solutions Wave vector is quatified
L 2 2 Energy too !!
sin k 0k p k
2 L L
Ph. Lorenzini
Semiconductors Physics 119
University of Nice (France)
Sommerfeld potential
• :Born–von Karman boundary condition (BVK condition)
• The idea is to consider that at the scale of electronic wavelength, the
crystal size is infinite we assimilates the one-dimensional crystal of
length L to a circle of perimeter L: we "forget" the boundary conditions
• The position at x and x+L is the same:
e ikx e ik ( x L )
e ikL 1 kL p 2 We get the previous result : k
and E are again quantified
2
k p
L
Ph. Lorenzini
Semiconductors Physics 120
University of Nice (France)
Sommerfeld potential
• Sommerfeld Electron: E
• Suppose electron at k0: the order of
L is 108Å (1 cm) we assume that
the wave packet with a width k can
be considered as a continuum
because: 2 2
k 10 7 /A
L 108
• Electron velocity: k0 k
d 2k 2 k0 –k/2
vg and E k0 +k/2
dk k0 2m
k 0 p 0
vg
m m
Ph. Lorenzini
Semiconductors Physics 121
University of Nice (France)
Sommerfeld potential E
• Sommerfeld electron:
• Electron acceleration:
dE
+
-
Velec
k0 k
Sommerfeld potential
• Sommerfeld electron:
• Electron Accélération :
If we define:
F dv g
and F gradV0 Fext 1 1 d 2E 2k 2
m dt 2 2 because E V0
(=0, V0=cste) -qEelec m dk k 2m
0
dv g d 1 dE
qEelec and v g
dt dk k0 dk k0
dv g F 1 1 d 2E
dv g dv g dk avec
dt m m 2 dk 2 k
dt dk dt 0
1 d 2 E dk 1 d 2 E F
2 2 2 F
dk k dt dk k m
0 0
dk0
F
dt
Ph. Lorenzini
Semiconductors Physics 123
University of Nice (France)
Sommerfeld potential
dvg F 1 1 d 2E
avec 2 2
dt m m dk k
0
• e : electronic charge e2
V (r )
• permitivity of free space 4 0 r
2m0
2 (r , , ) 2
( E V (r )) (r , , ) 0
• and:
1 1 2
r²
r ² r r r ² sin r ²
2
1 2m0
sin 2 ( E V (r )) 0
r ² sin
Ph. Lorenzini
Semiconductors Physics 126
University of Nice (France)
sin 2 R 1 ² sin
r² sin
R r r 2
2m0
r ² sin ² 2 ( E V ) 0
• We may writte
1 2
1 im
avec m 0,1,2,...
m² e
2 2
Be careful : m is not the mass, is a constant obtained via separation of variables technique
Ph. Lorenzini
Semiconductors Physics 127
University of Nice (France)
1 1 r
100 e a0
a0
4 0 2 0
a0 0,529 A Bohr radius
m0 e 2
• Common writing:
• s state l=0
• p state l=1
• d state l=2
• Electronic states:
• 1s 2s 2p 3s 3p 3d …
Ph. Lorenzini
Semiconductors Physics 129
University of Nice (France)
Sommerfeld model
• conclusion:
• Specific heat explained
• Ohm’s law explained (see futher)
• …
• We can’t explain the difference between the conductivity of an
insulator and a metal
metal
1032 !!!
insulator
plan
• Formation of energy bands
• Periodicity of the crystal
• Pseudo wave vector or crystal wave vector k
• Bloch waves
• Kronig-Penney model
• Energy band diagram in k space
Ph. Lorenzini
Semiconductors Physics 132
University of Nice (France)
1 isolated
hydrogen
atom
2 adjacent
hydrogen
atom
Ph. Lorenzini
Semiconductors Physics 133
University of Nice (France)
3p2
3s2
Ph. Lorenzini
Semiconductors Physics 134
University of Nice (France)
Energy
band
3s2 3p2 Antibonding states (4N)
N atomes Conduction
3p2 band
Forbidden band
Valence
3s2 band
V ( x) V ( x a)
(from Neaman)
Ph. Lorenzini
Semiconductors Physics 138
University of Nice (France)
V ( x L) V ( x)
( x L) ( x)
The crystal being periodic with a period a, the crystal properties are the same at x
and at x + a. It is the same for the wave function, and also for the density
probability for the electron.
Ph. Lorenzini
Semiconductors Physics 139
University of Nice (France)
2
• We introduce K p , so we get:
L
( x a) eiKa ( x)
• K is not a real wave vector, it only represents a phase shift between two
waves
• K is quantified. It takes N values separated by2 and has the same values
2 L
each
a
Ph. Lorenzini
Semiconductors Physics 141
University of Nice (France)
( x ) u ( x )e iKx
x with u ( x) u ( x a )
Ph. Lorenzini
Semiconductors Physics 142
University of Nice (France)
2 2
( x) Ae ikx
k and x
• Bloch’s wave:
2
( x ) u ( x )e iKx
Kp and Kx arg(u ( x))
L
unknown
Ph. Lorenzini
Semiconductors Physics 143
University of Nice (France)
2 2
(u ( x ) e ikx
) V u ( x ) e ikx
E u ( x ) e ikx
2m x 2
0
• To solve the problem we have to know perfectly the form of the potential
energy ( not trivial !). A simplified model could give us an idea
concerning energy band structure.
Ph. Lorenzini
Semiconductors Physics 144
University of Nice (France)
III
• Zone I : 0<x<a V(x)=0
• Zone II: -b<x<0 V(x)=V0
Ph. Lorenzini
Semiconductors Physics 146
University of Nice (France)
i x i x 2mE
I ( x) Ae Be avec
• Region II (the barrier): 2
x x 2m(V0 E )
II ( x) Ce De avec
2
• Continuity of the wave function (and its first derivative) at a and -b: be
carreful of the phase shift at -b
Ph. Lorenzini
Semiconductors Physics 148
University of Nice (France)
2 2
cos k (a b) sin( a ) sinh(b) cos( a ) cosh(b)
2
Reminder !! : k is a pseudo wave vector (crystal vector)!!
Ph. Lorenzini
Semiconductors Physics 149
University of Nice (France)
sin a mV0ba
P cos a cos ka avec P
a 2
Ph. Lorenzini
Semiconductors Physics 150
University of Nice (France)
sin a
P cos a f ( a ) cos (ka)
a
f(a)
2n
a
Ph. Lorenzini
Semiconductors Physics 151
University of Nice (France)
Plot E(k)
2mE
E
2 2
2
2m
a
sin a
• ka=0 1 P cos a
a
We deduce a value of thus of
energy E1.
• ka= a=
We deduce a value of =a thus
of energy E2.
2mE2
2
a
Ph. Lorenzini
Semiconductors Physics 152
University of Nice (France)
Energy bands
• As the partcle is propagating in a periodic potential (crystal potential), we have
to introduce the notion/concept of allowed energy bands, separated to each
other by forbidden energy band ( ) where we can not find particles.
(From Neaman)
Concept of direct band gap : when the minimum of the upper band and the
maximum of the lower band are localised on the same k value, we speak about
direct band gap. This arrive in the center of zone (k=0) and in the edge zone
(k=±/a ). Remind: this model is a 1D model, so a simpler model than the real
model, but it’s enough to introduce the energy band concept.
Ph. Lorenzini
Semiconductors Physics 154
University of Nice (France)
dE dE d sin a
??? butP cos a cos ka
dk d dk a
OK ! sin a
d[P cos a ]
d [cos ka] d [cos ka] dk a
d dk d d
dE
We can show taht at center and at the edge of Brillouin zone, 0
dk 0,
a
Ph. Lorenzini
Semiconductors Physics 155
University of Nice (France)
Effective mass
• Near the bottom ( or top) of an extremum: (Taylor’s serie , second
order)
dE 1 d 2E
E k E ( 0) ( k 0) ( k 0) 2
dk k 0 2! dk 2
k 0
=0
1 d 2E k
2 2
1 1 d 2
E
E k E( 0 ) k 2 E( 0 ) with 2
2 dk 2 k 0
2 m * m * dk 2
(0)
Effective mass
• The effective mass is a parameter that relates the quantum
mechanical results to the classical results).
dvg F 1 1 d 2E
avec 2 2
dt m* m * dk k
0
Ph. Lorenzini
Semiconductors Physics 157
University of Nice (France)
2k 2
E k E( 0 )
2m1*
• Ek >E(0)=Eminimum
1st rule: the effective mass at the bottom band is a positive parameter
top:
2k 2
Ek EMax
2m2*
2nd rule: the effective mass at the top
band is a negative parameter
Ph. Lorenzini
Semiconductors Physics 158
University of Nice (France)
2k 2
E Emin
2m *
The quantum states density is the
number of modes (states, places) per
unit of energy and by unit length (L=1!): électrons
dN 2m * 1
g1D ( E ) ( E Emin ) 2 J -1m 1
dE
Ph. Lorenzini
Semiconductors Physics 161
University of Nice (France)
« Surface » of an (2 )
2
Allowed states are allways quantized.
elementary state Lx Ly
Energy at the edge of the band (
conduction or valence) is approximated
by:
2k 2
E Emin
2m *
2m * 2m * ky
The density of states is given by ( with
Lx x Ly x Lz=1 ie per volume): kx
3/ 2
dN 2m*
g 3 D(E) 4π 2 (E Emin )1 / 2 J -1m -3 bottom
dE h
top
= (Emax E)1 / 2
Ph. Lorenzini
Semiconductors Physics 163
University of Nice (France)
3D states density
Emax
??
Emin
g(E)
a a
The effective masses are not the same and the
approximation of m * only applies on band edge!
Ph. Lorenzini
Semiconductors Physics 164
University of Nice (France)
Si
Eg
(0 0 0.85)
Eg
GaAs
Ph. Lorenzini
Semiconductors Physics 166
University of Nice (France)
synthesis
• Crystal periodic potential
• introduction of energy band concept
j q ni vi q vi
i i
• At 1 dim:
j q vi
i
Ph. Lorenzini
Semiconductors Physics 169
University of Nice (France)
E0
• Rule 1: the contribution to the current for a full band is allways zero.
k k
t=0 t=t1>0
k0 q
k0 t1
Now all velocities are not
balaced/compensated! J (t1 ) 0 0
Ph. Lorenzini
Semiconductors Physics 174
University of Nice (France)
k k
t2>t1 t3>t2
J (t 2 ) 0 0 J (t3 ) 0 0 !!!
Strange ! Electric field is constant and current is alternatively
changing (its sign), function of the time !!
Ph. Lorenzini
Semiconductors Physics 175
University of Nice (France)
dk 2 1 2
T a
q q
dt a T q
dk0
q grad (V ( x)) q random force
dt
• This force gives random pulse(similar to forces during impacts with « impureties »)
k k0 q
'
0 t
time time
Ph. Lorenzini
Semiconductors Physics 178
University of Nice (France)
k k
k0 k0 k’0
time=0, elec=0
time≠0 , elec≠0
k k0 q
'
0 t
Ph. Lorenzini
Semiconductors Physics 179
University of Nice (France)
E k 0 Ec
2 k02
vg
1 dE
k k0' k0 q
• :
* 0
2m1* dk k0 m1
j q v gi -q k i 0
m1*
• ≠ :
i i
i
j q v gi -q *
m1
'
i k i -q m*
1
x elec
i ki q m* n
2
j qµ n n elec with µ n q 0
m *
1 It’s Ohm’s law
j n elec Mobility (cm²/Vs)
Ph. Lorenzini
Semiconductors Physics 180
University of Nice (France)
Np N p
j q vgi q vgi (q vgi )
i 1 i 1 i 1 Positive
p charge!
0 q vgi
Full band i 1
Ph. Lorenzini
Semiconductors Physics 181
University of Nice (France)
E
Real crystal in Bloch-Brillouin
model
k
• Almost full band:
E (b)
Concept of the Hole (a)
• Drift current:
2m * m*
elec=0 J q k0 0
m*
p elec q elec
2
elec≠0 J q * 0 k q * p
m2 i 1 m2
q
J q p µ p elec with µ p
m2*
Ph. Lorenzini
Semiconductors Physics 183
University of Nice (France)
J qnµn qpµ p
BC BV
Ph. Lorenzini
Semiconductors Physics 185
University of Nice (France)
Semiconductor or insulator?
• Same energy band diagram? The only difference is the value of the
bandgap. If Eg larger than 3.5/4 eV insulator
Isolant , semiconducteur semiconducteur
T= 0 K T≠0K
Ph. Lorenzini
Semiconductors Physics 186
University of Nice (France)
Metal ?
• T=0K ou T≠ 0K
Summary:
• Metal:
• Very low resistivity
• When the temperature is lowering, the conductivity increases
• Insulator:
• No conduction even at high temperature
• Bandgap higher than 3.5 eV
• Semiconductor:
• Bandgap lower than 3 eV
• The conductivity is not a monotone function of the temperature.
CHAPITER 8
Statistical mechanics : Fermi – Dirac
function and Maxwell – Boltzmann
function
Ph. Lorenzini
Semiconductors Physics 189
University of Nice (France)
The statistics
• Maxwell – Boltzmann
• Distinguishable particle
• Gas molecules at fairly low pressure
• Bose – Einstein
• Indistinguishable particle
• Several particles permitted in each quantum state
• Photons, Phonons
• Fermi – Dirac
• Indistinguishable particle
• Only one particule in each quantum state (Pauli principle
• Electron in the crystal, solids
The statistics
• Solving methods:
n particles
Quantum states
ni
n2
n1
indistinguishables distinguishables
• Conditions :
• Number of particles is constant : n i n
n E
i
• Internal energy is constant : i i E
• Indistinguishables or distinguishables ? i
Maxwell – Boltzmann
• Distinguishable
• Each state can be occupied by unlimited number of particles
• Equilibrium state is the one which is the most probable
Distinguishable or not
(1 « ball » in each case Pauli)
Distinguishable undistinguishable
gi !
( g i N i )!
gi !
N i !( g i N i )!
Undistinguishable
« Bose » « Pauli »
( N i g i 1)!
( g i 1)! N i !
gi !
N i !( g i N i )!
E4
gi!
E3
N i !( g i N i )!
E2
Electrons density on
E1
energy level E
Number of energy levels
n
gi! n( E ) 1
P f (E)
i 1 N i !( g i N i )!
g (E) E EF
1 exp
kT
States density on
Fermi level
energy level E
Ph. Lorenzini
Semiconductors Physics 196
University of Nice (France)
T = 0K
EF
T> 0K
Ph. Lorenzini
Semiconductors Physics 198
University of Nice (France)
Temperature dependance
E1 E2 E3 E4 E5
EF
Approximation FD MB ?
• The use of FD is not
always easy in calculus
• In which conditions can
we approximate FD by
MB ?
• Condition:
Approximation FD MB ?
E
EF -E EF +E
For E < EF, it’s easy to show that the unoccupation probility 1-f(E) is the
same at EF - E than the occupation probability f(E) at EF + E.
1 f ( E F E ) f ( EF E )
The point f(E) = 0,5 is the center of symmetry for the curve.
Ph. Lorenzini
Semiconductors Physics 201
University of Nice (France)
E E E
EF
EF
dn(E)/dE
g(E) f(E)
CHAPITER 10
The semiconductor in equilibrium
Ph. Lorenzini
Semiconductors Physics 203
University of Nice (France)
• No external forces:
• No applied voltage
• No magnetic field
• No gradient of temperature
Ph. Lorenzini
Semiconductors Physics 204
University of Nice (France)
Ec max
n0 g c ( E ) f ( E )dE
Ec min
Ev max
p0 g v ( E )(1 f ( E ))dE
Ev min
Ph. Lorenzini
Semiconductors Physics 205
University of Nice (France)
n0 and p0 equations
• hypothesis: EF is 3kT (or more) below CB and is 3KT
above BV we can use MB function.
• n0 relations:
E EF
Ec max 4 (2m )* 3/ 2
( )
n0 g c ( E ) f ( E )dE n
E EC e kT
dE
Ec min Ec min h3
3/ 2
( Ec E F ) 2m kT *
n0 N C exp avec N C 2 n
kT h
2
Ph. Lorenzini
Semiconductors Physics 207
University of Nice (France)
n0 and p0 equations
3/ 2
( Ec E F ) 2m kT *
n0 N C exp with N C 2
n
kT h
2
3/ 2
( E F Ev ) 2m kT *
with NV 2 p
p0 NV exp
kT h 2
kT kT
n p ni T
Ph. Lorenzini
Semiconductors Physics 210
University of Nice (France)
( Ec EFi ) ( EFi Ev )
n0 N C exp p0 NV exp
kT kT
2 EFi N C ( Ec Ev )
exp exp kT
kT NV
Ec Ev 1 N V Ec E v 3 mv* Ec Ev
E Fi kT ln kT ln * E Fi
2 2 NC 2 4 mc 2
~10 meV
Ph. Lorenzini
Semiconductors Physics 211
University of Nice (France)
Bipolar conduction
By adding a small amounts of
specific dopants, we can alter the
conduction process and we can Hole
favor conduction by electrons or
holes
E external Field
Ph. Lorenzini
Semiconductors Physics 212
University of Nice (France)
Some semiconductors
• Data (300K):
mc* mv* NC NV Eg ni
m0 m0 (1019 cm-3) (1019 cm-3) (eV) (cm-3)
Si 1,06 0,59 2,7 1,1 1,12 1,5x1010
Ge 0,55 0,36 1 0,5 0,66 2,4x1013
GaAs 0,067 0,64 0,04 1,3 1,43 2x106
GaN 0,2 1,4 0,223 4,6 3,39
4H-SiC 1,69 2,49 2,86
InP 0,073 0,87 0,05 2 1,27
Ph. Lorenzini
Semiconductors Physics 215
University of Nice (France)
ni as a function of
temperature
Eg
ni N c N v exp( )
2kT
• In an intrinsic SC:
Eg
• ni is not a constant ni N c N v exp(
2kT
)
• ni increases as:
• Eg decreases
• Temp increases
Ph. Lorenzini
Semiconductors Physics 216
University of Nice (France)
Doping of semiconductors
• Exponential variation of the
intrinsic carrier density
• If ni>1015cm-3, the • Remark: n x p product
semiconductor is not is independant of Fermi
suitable for electronic
devices level (except Boltzmann
• We can decrease ni by approximation is valid)
using large band gap
material (SiC, GaN, valid even the SC is
Diamond)
doped
Ph. Lorenzini
Semiconductors Physics 217
University of Nice (France)
Semiconductor doping
• Allow to change and control electrical properties of semiconductor
• Doping impurities will change the relation n = p:
Semiconductor doping
• Case of Silicon (col IV)
• If we introduce doping impureties from column V:
• For example N, As or P 5 valence electrons ie one extra electron
compared to the Silicon.
e-
P
P
neutral Ionised +
Semiconductor doping
• Column V atom : analogy with the hydrogen atom
• The extra electron does not belong to VB !
• The extra electron does not belong to CB !
• Where is its energetic position? Between the both of them !!
sc m0
y
• Rydberg mq 4
R 13,6eV
2(4 0 vacuum ) 2
Ph. Lorenzini
Semiconductors Physics 221
University of Nice (France)
1 0,5 m0
R 13,6
*
y 40meV
(12) 2
m0
• Experimental measurements :
• P => 44 meV
• As => 49 meV
• Sb => 39 meV
• Bi => 67 meV
Ph. Lorenzini
Semiconductors Physics 222
University of Nice (France)
compounds SC
GaAs or InP (III-V)
VI substitutes to As => Se, Te
IV substitutes to Ga => Si, C, Sn
m*=0,05 m0 EC – ED = 5 meV !!
Ph. Lorenzini
Semiconductors Physics 223
University of Nice (France)
B
P
+e
neutral Negatively
Ionised
Free quantum state: we can show that this energy level is very close to
the valence band. Same calculation than « donor » level.
Ph. Lorenzini
Semiconductors Physics 226
University of Nice (France)
m0e 4 13.6
En 2 eV
2(4 0 )
2 2
n
• Introduction of modified
Rydberg:
m* 0
2
Ed EC 13.6
m0
Few examples
Ph. Lorenzini
Semiconductors Physics 227
University of Nice (France)
p >> n
We get :
13,6 mv* B => 45 meV
Ea EV 2 Al => 57 meV
sc m0 Ga => 65 meV
In => 160 meV
Ph. Lorenzini
Semiconductors Physics 228
University of Nice (France)
f D (E) f (E)
Ph. Lorenzini
Semiconductors Physics 229
University of Nice (France)
ND
nD N D f D ( E D )
1 ED EF
1 exp( )
2 kT
• Or :
nd N d N d
Ph. Lorenzini
Semiconductors Physics 230
University of Nice (France)
1
f A (E)
E EF
1 2 exp( )
kT
1 g : degeneracy factor
f (E)
E EF 1: intrinsic
1 g exp( ) 2 ou 4: acceptor
kT ½: donor
Ph. Lorenzini
Semiconductors Physics 231
University of Nice (France)
NA
nA N A f A ( E A )
E EF
1 4 exp( A )
kT
• or:
NA
p A N A nA N A N
1 EF E A
A
1 exp( )
4 kT
Ph. Lorenzini
Semiconductors Physics 232
University of Nice (France)
e p ND e n NA
• Simplification : NA = 0 (n type)
n p N D
( Ec E F ) ( E F Ev ) ND
N C exp - NV exp
kT kT 1 2 exp( ED EF )
kT
Ph. Lorenzini
Semiconductors Physics 233
University of Nice (France)
Eg
ni N D kT
2 ln[ NcNv
1/ 2
/ ND ]
kT must be around Eg/10
( Ec E F ) ND
N C exp - 0
kT E
1 2 exp( D E F
)
kT
Ph. Lorenzini
Semiconductors Physics 234
University of Nice (France)
1 Nd ( Ec Ed ) / kT
1/ 2
E F E D kT ln 1 1 8 e
4 Nc
• kT<<Ec‐Ed
Ec Ed 1 Nd Ec E d
EF kT ln , E F (T 0) E Fmax N C N D /2
2 2 2NC 2
• Ec‐Ed <kT<Eg
NC
( Taylor’s series of the square root) EF E c kT ln
ND
Ph. Lorenzini
Semiconductors Physics 235
University of Nice (France)
Conduction Band
EC
ED
Fermi Level
EC EV
2
Temperature
Ph. Lorenzini
Semiconductors Physics 236
University of Nice (France)
• T « middle range » - - - - - - - - -
Exhaustion/saturation of donors
• « High » Température
intrinsic
+++++++++++++++++
Ph. Lorenzini
Semiconductors Physics 237
University of Nice (France)
Complete ionization of
donors
3 régimes:
•Extrinsic (Freeze out)
•saturation
•Intrinsic
Ph. Lorenzini
Semiconductors Physics 238
University of Nice (France)
( E fi E f )
n0 ni exp
kT
( E f E fi )
p0 ni exp
kT
Ph. Lorenzini
Semiconductors Physics 239
University of Nice (France)
SC doping: n type
Ph. Lorenzini
Semiconductors Physics 242
University of Nice (France)
SC doping: p type
Ph. Lorenzini
Semiconductors Physics 243
University of Nice (France)
n0 N A p0 N D
• Ionisation totale:
n
2
n0 N A p0 N D avec p0 i
n0
• Soit:
n 0 ( N D N A )n0 n 0
2 2
i
• On obtient:
(ND N A ) ( N D N A )2
n0 ni2
2 4
Ph. Lorenzini
Semiconductors Physics 245
University of Nice (France)
Ef – Efi difference
Nd n type
E f Ei kT ln
ni eFi
Na
Ei E f kT ln p type
ni
Ph. Lorenzini
Semiconductors Physics 246
University of Nice (France)
Ef – Efi difference
• We can then express the density of electrons and holes at
equilibrium by :
n ni e ( E F E Fi ) / kT
ni e e Fi / kT
Boltzmann
approximation
p ni e ( E F E Fi ) / kT
ni e e Fi / kT
with:
eFi EF EFi 0 N type
Plan:
• Recombination and generation processes
• Currents in semiconductors
• Current density relations
• Continuity Equations
• Debye length
• Poisson’s Equation
• Dielectric relaxation time constant
Ph. Lorenzini
Semiconductors Physics 249
University of Nice (France)
p n
rp rn
p n
p p0 p n n0 n n0
• In low injection regime, majority caririer density is not
modified.
Ph. Lorenzini
Semiconductors Physics 252
University of Nice (France)
1 np ni2 Shockley‐Read
r
m 2ni p n relation
where m is characteristic of the trap
• If the both processes are present:
1 1 1
m n( p)
Ph. Lorenzini
Semiconductors Physics 253
University of Nice (France)
x i
np
1 n 2
ni
r r 0 Net generation rate.
p x
m 2ni x n 2 m Charge carriers are
created
Ph. Lorenzini
Semiconductors Physics 254
University of Nice (France)
Light excitation
P type
Ph. Lorenzini
Semiconductors Physics 255
University of Nice (France)
Surface effects
Ph. Lorenzini
Semiconductors Physics 257
University of Nice (France)
Currents in semiconductor
o
l vth. 100 A
• Mean time between collisions
0.1 ps
Ph. Lorenzini
Semiconductors Physics 258
University of Nice (France)
drift velocity
Drift current
• Drift current:
• Between two collisions, electrons are uniformly accelerated
• Acceleration: qE / m *
• velocity: v qE / m* µE
• Mobility: µ q / m * Si : 1500 cm2/Vs
GaAs: 8500 cm2/Vs
In0.53Ga0.47As:11000 cm2/Vs
Ph. Lorenzini
Semiconductors Physics 260
University of Nice (France)
Drift current
Mobility versus temperature
Ph. Lorenzini
Semiconductors Physics 262
University of Nice (France)
Saturation velocity
• saturation velocity of electrons (« overshoot »)
Currents in semiconductors
• Diffusion current:
• Origin: electrons (or holes) density gradient
• Diffusion from a region from high concentration toward a region of
low concentration.
• 1st law of Fick:
dx time unit and volume unit (flow)
Ph. Lorenzini
Semiconductors Physics 266
University of Nice (France)
Currents in semiconductors
D cm² / s
n, p
Ph. Lorenzini
Semiconductors Physics 267
University of Nice (France)
Currents in semiconductors
J T J cond J diff J n J p
dn dp
J T (neµn peµp ) E e( Dn Dp )
dx dx
• D and μ express the ability of carriers to move. There is a
relationship between them : it’s the Einstein relation:
D kT
µ e
Ph. Lorenzini
Semiconductors Physics 268
University of Nice (France)
dn( x, t ) J n ( x x) J n ( x)
Ax A RG
dt e e
dn( x, t ) dJ n ( x) x
Ax A RG
dt dx e
We obtain the continuity equations for
electrons and holes:
dn( x, t ) 1 dJ n dp ( x, t ) 1 dJ p
rn g n rp g p
dt e dx dt e dx
Ph. Lorenzini
Semiconductors Physics 269
University of Nice (France)
dn d n n n0
2
Dn 2
J n (diff ) eDn
dn dt dx n
dx
dp dp d2 p p p0
J p (diff ) eD p Dp 2
dx dt dx p
Ph. Lorenzini
Semiconductors Physics 270
University of Nice (France)
d 2 (n n0 ) n n0 n n0
dx 2 D n n L2n
d 2 ( p p0 ) p p0 p p0
Diffusion length : represents the
dx 2
D p p L2p mean distance an electron (a hole)
can travel before it recombines
L D
• Solutions:
n n n
Lp D p p with a hole (an electron)
Ln or Lp >> VLSI devices
Poisson’s equation
d 2V dE ( x)
dx 2 dx sc
• In the SC, two types of charges (fixes and mobiles):
d 2V e
p ( x ) n ( x ) N
( x ) N
A ( x)
dx 2
sc D
Mobile Charges Fixe Charges
(electrons and holes ) (ionised dopants)
Ph. Lorenzini
Semiconductors Physics 272
University of Nice (France)
Debye length
d 2 Fi
dx 2
e
sc
N
d ( x ) ni e e Fi / kT
d 2 Fi e 2 N d e
N d ( x)
sc kT sc
Fi
dx 2
Ph. Lorenzini
Semiconductors Physics 273
University of Nice (France)
Debye length
• Physical meaning ?
• Solution of the differential equation :
x sc kT
Fi A exp avec LD
LD e2 N D
• The energy bands can’t vary abruptly (and in the same
maner the carrier density), but need few LD (if Nd=1016 cm-3,
LD=0.04µm). In this region, an electric field appears.
Ph. Lorenzini
Semiconductors Physics 274
University of Nice (France)
n 1 J n E
or J n E E / n et en / sc
t e x x
d’où
n n
Solution: n(t ) exp(t / n sc )
t n sc
PN Homojunction
• Non linear device
• rectifier devices (composants redresseur)
• 2 devices reach the same results:
• PN Junction(this chapter)
• Schottky barrier or Metal / SC contact (next chapter)
Ph. Lorenzini
Semiconductors Physics 277
University of Nice (France)
1st Step: diffusion mechanism
Flat Fermi level:
No current / thermal equilibrium
E int
Ph. Lorenzini
Semiconductors Physics 278
University of Nice (France)
« built in potential VB i »
Vbi VN VP
dp ( x)
Holes current equation: J P ( x) e P p ( x) E ( x) D p 0
dx
p 1 dp ( x) e dV ( x) 1 dp( x)
or E ( x) or
Dp p ( x ) dx kT dx p( x) dx
kT pp
Integrating from P to N region: Vbi ln( )
e pn
kT N N
finally: VD Vbi ln ( A 2 D )
e ni
Ph. Lorenzini
Semiconductors Physics 279
University of Nice (France)
d 2V ( x) ( x)
dx 2 sc
In N and P region:
d 2V (x) e
ND 0 x WN
dx 2
sc
d 2V (x) e
NA WP x 0
dx 2
sc
-WP -WN
Ph. Lorenzini
Semiconductors Physics 280
University of Nice (France)
eN D eN A
En ( x ) ( x W N) EP ( x) ( x W P)
sc sc
Continuity of Field on x=0:
N DW N N AWP
eN DW N eN AW P
EM
sc sc
-WP -WN
Ph. Lorenzini
Semiconductors Physics 281
University of Nice (France)
V (Wn ) V (W p ) Vd
2 sc 2 sc
2 sc ND
W p (Vd ) Vd
e N A (N A N D )
2 sc NA
Wn (Vd ) Vd
e ND (N A ND )
2 sc N D N A
W (Vd ) Vd -WP WN
e NAND
WARNING: WHEN A VOLTAGE V IS
APPLIED ON P SIDE, VBI HAVE TO
BE REPLACED BY VBI - V
Ph. Lorenzini
Semiconductors Physics 283
University of Nice (France)
BIASED PN JUNCTION
simplifying assumptions :
Depletion layer with no free carriers (e‐ and h+)
Low injection
Boltzmann’s approximation
Drop voltage only in depletion layer
No generation‐recombination mechanisms present
Ph. Lorenzini
Semiconductors Physics 284
University of Nice (France)
BIASED PN JUNCTION
• Foward Biasing
• Positive voltage on P
• lowering of built in
potential
• Diffusion mechanism
dominates
• High current
Ph. Lorenzini
Semiconductors Physics 285
University of Nice (France)
BIASED PN JUNCTION
Fdiff e-
• Forward biasing
• Lowering of built in Field due to
opposite external field
• Electrons injected from N to P
regions: minoritary carriers
injection
• High current due to full
« reservoir »
Fdiff h+
Ph. Lorenzini
Semiconductors Physics 286
University of Nice (France)
Forward Biasing
Eext
Ph. Lorenzini
Semiconductors Physics 287
University of Nice (France)
Jonction PN sous polarisation
Fconde‐
• Reverse Biasing
• Global Electric Field increases
(External Field added to built in
Field)
• Injection of electrons from P to
N and holes injection from N to
P: majority carriers injection
• Low current ( leak current) due
to empty « reservoir »
Fcond h+
Ph. Lorenzini
Semiconductors Physics 288
University of Nice (France)
PN Junction under biasing
At equilibrium, null current two components compensate between it. Taken
separately, the magnitude of these components 104 A / cm² (ie 1A for typical diode)
and at low injection I is of the order of few mA (max 10mA)
e dV ( x) 1 dp( x)
kT dx p( x) dx
Ph. Lorenzini
Semiconductors Physics 289
University of Nice (France)
eV A ni2 eV A eV A ni2 eV A
p ' n p n exp( ) exp( ) n' p n p exp( ) exp( )
kT ND kT kT NA kT
eVa
n * p p p * nn n exp(
'
p
'
n
2
i )
kT
Ph. Lorenzini
Semiconductors Physics 290
University of Nice (France)
1017
1016
Na= 1E17 cm-3
1015 Vd=0.7 V
1014
1013
1012
P'(Wn) (cm-3)
1011
1010
109
108
107
106
105
104
0,0 0,1 0,2 0,3 0,4 0,5 0,6 0,7
Va (V)
Ph. Lorenzini
Semiconductors Physics 291
University of Nice (France)
• Distribution is geometry
dependant
n' ( x ) n p n p (e kT
1)e n' ( x) n p ( e 1)( x 'c x )
dp
General case pn
eVa
xc x
p' ( x) p n (e 1) sh
kT
dn L
sh( ) p
Lp
np eVa x xc'
n' ( x ) n p (e kT 1) sh
dp Ln
sh( )
Ln
Ph. Lorenzini
Semiconductors Physics 293
University of Nice (France)
dp ( x) dn( x)
J p ( x) eD p J n ( x) eDn
dx dx
Hypothesis : no G‐R process in depletion layer (ZCE)
J (V ) J p ( W p ) J n (W p ) J p (Wn ) J n (W p )
Short (Narrow) region
eni2 D P eni2 Dn
JS
NDdn N Ad p
Long region
eni2 DP eni2 Dn
JS
N D LP N A Ln
General case -WP 0 WN
eni2 DP eni2 Dn
JS
dn dp
N D LP th( ) N A Ln th( )
LP Ln
Ph. Lorenzini
Semiconductors Physics 295
University of Nice (France)
The real diode: generation‐recombinaison
mechanism in depletion layer
• The model is refined we take into account G‐R process in
depletion layer
• Well understood mechanism (Shockley‐Read)
1pn ni2
r
2 ni p n
eVa
We know that p (W N ) n(W N ) p (W P )n(W P ) ni2 exp( )
kT
n 2
If we suppose np constant in depleted region and np >>
i
(in forward bias) , the rate r is max when n=p, and it can
be rewritten
ni eVa
rmax exp
2 2kT
Ph. Lorenzini
Semiconductors Physics 296
University of Nice (France)
The real diode: genération‐recombinaison
mechanism in depletion layer
• Generation‐Recombinaison current in depletion
layer can be expressed as:
WN
J n (Wn ) J n ( W p ) J GR e rdx
WP
pn ni2
For reverse biasing ( ), we have a
n
negative rate ( ) . It means
r
2
0 i
dans we
have a net generation process
For forward bias, rmax=cte>0 and the current is
due to recombinations.
Ph. Lorenzini
Semiconductors Physics 297
University of Nice (France)
The real diode: genération‐recombinaison
mechanism in depletion layer
• Finally GR current present in depletion layer can be
expressed as:
eVa eni
J GR J 0
GR exp( ) 1 J GR
0
WT
2kT 2
Reverse biasing:
Junction breakdown
• Thermal Effect (Narrow bandgap)
• Zener Effect:
• direct flowing from VB to CB by
tunnel effect (0), if electric field tunn
Tunnel
above critical Field Ec el
• Avalanche Effect:
• before« tunneling », hot electrons
(accelerated electrons) excite by impact
Avalanche
ionisation electrons from VB to CB
(1,2,3) etc….
.EC2
VBD
2eN B
• « Punchtrough »
Ph. Lorenzini
Semiconductors Physics 299
University of Nice (France)
Junction capacitance
dQ
CT C j Q eAN AWP eAN DWN
dV
or:
A 2e N AND A
CT C j
2 (VD VA ) ( N A N D ) WT
Ph. Lorenzini
Semiconductors Physics 301
University of Nice (France)
• Reflects the delay between XC
the voltage and current QSp A e( p ' ( x) p n ) dx
WN
• Associated with charges
injected into the neutral Holes density in excess
regionsTraduit le retard entre present in N region
la tension et le courant
QSp P J P
dn 1
QSp e( p ' (0) p n ) LP coth( )
QSn n J n LP dn
sh( )
LP
Ph. Lorenzini
Semiconductors Physics 302
University of Nice (France)
QSp J P (WN ) avec
P 1
1
dn
ch( )
LP
Time expression can be simplified, depending of the
neutral geometry:
d n2
t
Narrow diode: transit time
2 DP
P lifetime
Long diode:
Ph. Lorenzini
Semiconductors Physics 304
University of Nice (France)
(from Neamen)
Wn
As long as the stored charge is positive
forward bias diode voltage across
diode is small (few 10 mV)
eVa
p 'n pn pn (e kT
1)
Switching Junction PN
Ph. Lorenzini
Semiconductors Physics 308
University of Nice (France)
If If
sd p ln(1 ) ln(1 )
Im I f I m
F RC j If
f 2.3 avec
1 I f Im
• Cj: mean value of capacitance between zero and –V2
Ph. Lorenzini
Semiconductors Physics 309
University of Nice (France)
(b)
Va
I t I pe exp1 Va
V V (c)
pe pe
4a 2m * e (d)
Tt exp b
3
(e)
Ph. Lorenzini
Semiconductors Physics 310
University of Nice (France)
PIN Diodes
• VLSI devices high electric fields
• Avalanche issues and hot electrons effects
• Solutions:
• Reducing the electric field by increasing the space charge
• Incorporation of an "undoped" layer called Intrinsic hence the
name!
Ph. Lorenzini
Semiconductors Physics 311
University of Nice (France)
PIN Diodes
(x)
+ + + +
-Wp -- d +Wn x
--
Intrinsic
layer.
Ph. Lorenzini
Semiconductors Physics 312
University of Nice (France)
PIN Diodes
Max electric field ( intrinsic zone)
eN A x p eN ( x d )
Em D n
Si Si
built in potentiel
Em Em
Vbi ( x p xn d ) (Wd d )
2 2
space charge width
2 Si ( N A N D )
Wd Vbi d ² W d20 d ²
e N AND
capacity electric field
CT Wd 0 1 Em Wd d² d
1 2
CT 0 Wd d² Em 0 Wd Wd 0 W d 0 Wd 0
1 2
Wd 0