Professional Documents
Culture Documents
3, JULY 2009
Abstract—This paper describes a new type of electric-field sensor tion along composite insulators [7]. Gerard et al. used an elec-
that has been fabricated using micromachining technology. This tric-field sensor made from parallel plate capacitors to measure
micromachined sensor is dramatically smaller than conventional ac voltage [5]. The spherical electric-field sensor used by Feser
field mills, possessing a field chopping shutter measuring only 1
mm2 . The shutter is moved using thermal actuators, thereby elim- et al. to measure high-voltage impulses is also a capacitive probe
inating the wear and tear associated with rotating and moving ele- [8].
ments of field mills. The sensor requires minimal operating power, Due to the cyclic variation with respect to time, ac electric
with the shutter being driven by a 75-mV drive signal while con- fields are relatively easy to measure. However, when a stationary
suming only 70 W. The field chopping shutter operates at 4200 probe is exposed to a dc field in open air, it will collect a charge
Hz, enabling the measurement of both ac and dc fields. Two sets of
sense electrodes enable differential field measurements and, there- over time. Gradually, all parts of the probe will reach the same
fore, do not require a reference ground potential. The sensor has potential, and the probe output decays to zero eventually. There-
a linear response to the electric-field amplitude and has demon- fore, all reported dc electric-field meters convert the dc electric
strated that it is capable of measuring a dc field as small as 42 V/m. field into an alternating field by periodically shielding and un-
This miniature sensor is the smallest sensor with such a resolution shielding sensor electrodes inside the electric field being mea-
for use in power engineering applications.
sured [9]–[13]. In field mill designs, this movement is typically
Index Terms—Electric field measurement, electric fields, micro- achieved by an electric motor or air turbine. Even though P. E.
machining.
Secker proposed the electric field mill as early as 1975, the first
use of an electric-field mill to monitor HVDC lines was reported
by Maruvada et al. in 1983 [9], [13]. Since then, electric-field
I. INTRODUCTION mills have been used to measure electric fields under HVDC
transmission lines and for various atmospheric analyses.
EASUREMENT of electric fields in the vicinity of high-
M voltage equipment in a power system is necessary for
many purposes. The electric-field measurement is used to de-
Manitoba Hydro uses HVDC transmission lines to bring
power generated in the north of the province of Manitoba to the
load centers located south of the province. Conventional field
velop improved insulation systems and to ensure personal and mills with electric motors are currently employed for long-term
equipment safety in live-line maintenance [1], [2]. It is also re- environmental monitoring of HVDC transmission lines. The
ported that the electric-field measurement data can be used to conventional field mill is a very robust electric-field-measuring
accurately identify faulty insulators in an insulator string [3], instrument that has been used in power engineering applica-
[4] and measure voltage in a three-phase power system without tions for many years. However, it is not straightforward to
using bulky and expensive insulating structures [5]. use these sensors for long-term electric-field measurements.
Several different types of electric-field sensors have been re- The high-power consumption by the electric motor requires
ported for power systems applications [5]–[14]. A 230-kV op- frequent replacement of batteries, and some of the moving parts
tical voltage transducer developed by Rahmatian et al. uses a of the field mill wear out quickly. The necessary frequent main-
number of optical electric-field meters [6]. Zeng et al. also used tenance is expensive for Manitoba Hydro since these HVDC
an optical electric-field sensor to measure electric-field distribu- transmission lines extend hundreds of kilometers through diffi-
cult terrain. The harsh Manitoba winter, which is experienced
Manuscript received March 12, 2008; revised July 05, 2008. First published over a good portion of the year, further complicates the access
May 12, 2009; current version published June 24, 2009. This work was sup- of these devices for maintenance. Therefore, the necessity
ported in part by the Manitoba Hydro and Natural Science and Engineering
Research Council of Canada (NSERC). The fabrication of the sensor was made arose to develop a sensor that consumes less battery power
possible through services provided by CMC Microsystems. Paper no. TPWRD- than the commercially available field mills, while providing a
00186-2008.
G. Wijeweera, C. Shafai, and A. Rajapakse are with the Department of
comparable level of resolution and sensitivity.
Electrical and Computer Engineering, University of Manitoba, Winnipeg, MB Manitoba Hydro also uses the electric-field mills to measure
R3T 5V6, Canada (e-mail: gayan@ee.umanitoba.ca; cshafai@ee.umanitoba.ca; the charge accumulated on live line tools. In order to measure
athula@ee.umanitoba.ca).
B. Bahreyni is with the School of Engineering Science, Simon Fraser Uni-
the electric field in the proximity of a conducting surface, it is
versity, Burnaby, BC V3T 0A3, Canada (e-mail: behraad@ieee.org). necessary for the size of the probe to be smaller than the size of
D. Swatek is with Manitoba Hydro, Winnipeg, MB R3M 3T1, Canada the installation. The smallest available electric-field sensor for
(e-mail: drswatek@hydro.mb.ca). power engineering applications was demonstrated by Johnston
Color versions of one or more of the figures in this paper are available online
at http://ieeexplore.ieee.org. and Kirkham, which possessed a probe diameter of only 2 cm
Digital Object Identifier 10.1109/TPWRD.2008.2008427 [10], [14].
0885-8977/$25.00 © 2009 IEEE
WIJEWEERA et al.: MICROMACHINED ELECTRIC-FIELD SENSOR TO MEASURE AC AND DC FIELDS 989
Fig. 2. Fabrication steps used to construct the MEFM. Fig. 5. Single bent-beam thermal actuator.
Fig. 3. Illustration of an incident electric field chopping by the shutter, and the
periodic shielding of the differential sensing electrodes.
Fig. 6. Close up view of the thermal actuator with the lever mechanism. Di-
mensions of beams 1 and 2 determine the displacement amplification factor
and beam 3 increases the thermal resistance between the actuator and shutter
to lower the structural temperature variations during shutter operation.
III. TESTING
B. Experimental Results With a Lock-In Amplifier
The sensor was placed inside a vacuum environment with the
sensing circuit and operated at its resonance frequency ( 4200 The lock-in amplifier, also known as a phase-sensitive de-
Hz). The reduced air pressure minimizes the air resistance on tector, is an instrument commonly used to extract a signal with
the shutter, thereby reducing the necessary drive voltage on the known carrier frequency inside a noisy environment. Lock-in
thermal actuators. Reduction in drive voltage is an important amplifiers use a frequency mixer to convert the signal amplitude
factor in the sensitivity of the MEFM. The close proximity of into a dc voltage signal. A lock-in amplifier was implemented
the thermal actuators to the sensing electrodes can cause drive at the output of the sensing circuit in order to obtain a constant,
voltage on the thermal actuators to interfere with the sensing of beating insensitive output, from the measured electric field.
the incident electric field. The sensor’s response tested with a pulsed 1000-V/m electric
In addition to a reduction of drive voltage, operation in field is shown in Fig. 9. A slight time delay is visible in the
vacuum environment minimizes the power needed to maintain sensor measurement, however, this is due to a 1-s filter time
the shutter in motion. The required voltage and power to move constant of the lock-in amplifier, and not due to a characteristic
the shutter for this sensor was 75 mV and 70 W, respectively. of the sensor itself.
Such voltages and power levels are well within the allowable Also visible is a negative response measurement of the sensor
range for integrated circuits (ICs), even for today’s most after the incident electric field has switched off is visible. This
advanced technologies. Hence, it is possible to integrate the negative response is due to the following process. In the pres-
sensor with the sensing electronic circuitry on a single chip. ence of a constant electric field, the MEFM’s shutter, which is
The vacuum environment was created by placing the sensor fabricated from silicon, will slowly build up an electric charge.
in a small vacuum chamber with the air pressure reduced to 10 Once the incident field has switched off, this charge slowly dis-
mTorr. The lid of the vacuum chamber possesses an electrically charges. Its presence is clearly measured by the MEFM as it
floating section (Metal B in Fig. 7), which allows electric fields discharges.
to enter the chamber. This type of vacuum environment is com- The charging effect was solved in a subsequent iteration of
mercially available for vacuum-packaged MEMS technology. the MEFM that possessed a gold metal coating on the shutter.
The conducting gold coating effectively prevents charging of the
A. Experimental Results shutter when it is connected to the reference of the sensing cir-
When measuring a dc electric field, the ac current induced on cuit. Fig. 10 shows this sensor’s response to a pulsed 6000-V/m
the sensing electrodes is at the frequency of the shutter motion. electric field. This time, no negative response is seen when the
992 IEEE TRANSACTIONS ON POWER DELIVERY, VOL. 24, NO. 3, JULY 2009
Fig. 8. Sensor response when measuring an arbitrary dc electric field after fil-
tering with one notch filter and three bandpass filters. (a) Shows the sensor re- Fig. 11. Sensor response to dc electric fields from 42 V/m to 5000 V/m [15].
sponse for 20 ms. (b) Shows first 5 ms that have beem magnified from (a).
Fig. 9. Sensor response to a pulsed 1000-V/m electric field. D. Response to Drive Frequency, Actuation Voltage, and
Pressure
The output spectrum of the sensor, when measuring an arbi-
field turns off. The visible integration of the pulsed field ampli- trary dc electric field around its resonance frequency at the pres-
tude in the sensor output is due to the 1-s time constant of the sure of 20 mTorr, is shown in Fig. 15. This figure illustrates that
lock-in amplifier. the sensor’s measurement sensitivity is extremely sensitive to
WIJEWEERA et al.: MICROMACHINED ELECTRIC-FIELD SENSOR TO MEASURE AC AND DC FIELDS 993
Fig. 15. Output spectrum of the sensor as a function of shutter drive frequency,
when measuring an arbitrary dc electric field.
Behraad Bahreyni (S’98–M’06) received the B.Sc. Athula Rajapakse (M’00) received the B.Sc. (Eng.)
degree in electronics engineering from Sharif Uni- degree from the University of Moratuwa, Moratuwa,
versity of Technology, Tehran, Iran, in 1999, and the Sri Lanka, in 1990, the M.Eng. degree from the Asian
M.Sc. and Ph.D. degrees in electrical engineering Institute of Technology, Bangkok, Thailand, in 1993,
from the University of Manitoba, Winnipeg. MB, and the Ph.D. degree from the University of Tokyo,
Canada, in 2001 and 2006, respectively. Tokyo, Japan, in 1998.
He was with the NanoSicence Centre at Cambridge Currently, he is an Assistant Professor at the
University, Cambridge. U.K., conducting research on University of Manitoba, Winnipeg, MB, Canada. His
an interface circuit design for microresonators. His research interests include power system protection,
past and current research activities include the design transient simulation of power and power-electronic
of various micromachined transducers, microfabrica- systems, and distributed and renewable energy
tion technology, RF MEMS, modelling of microfabrication processes, and in- systems.
terface and RF circuit design. He is an Assistant Professor in the School of En-
gineering Science at Simon Fraser University, Burnaby, BC, Canada.