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988 IEEE TRANSACTIONS ON POWER DELIVERY, VOL. 24, NO.

3, JULY 2009

Micromachined Electric-Field Sensor to Measure


AC and DC Fields in Power Systems
Gayan Wijeweera, Student Member, IEEE, Behraad Bahreyni, Member, IEEE, Cyrus Shafai, Member, IEEE,
Athula Rajapakse, Member, IEEE, and David R. Swatek, Member, IEEE

Abstract—This paper describes a new type of electric-field sensor tion along composite insulators [7]. Gerard et al. used an elec-
that has been fabricated using micromachining technology. This tric-field sensor made from parallel plate capacitors to measure
micromachined sensor is dramatically smaller than conventional ac voltage [5]. The spherical electric-field sensor used by Feser
field mills, possessing a field chopping shutter measuring only 1
mm2 . The shutter is moved using thermal actuators, thereby elim- et al. to measure high-voltage impulses is also a capacitive probe
inating the wear and tear associated with rotating and moving ele- [8].
ments of field mills. The sensor requires minimal operating power, Due to the cyclic variation with respect to time, ac electric
with the shutter being driven by a 75-mV drive signal while con- fields are relatively easy to measure. However, when a stationary
suming only 70 W. The field chopping shutter operates at 4200 probe is exposed to a dc field in open air, it will collect a charge
Hz, enabling the measurement of both ac and dc fields. Two sets of
sense electrodes enable differential field measurements and, there- over time. Gradually, all parts of the probe will reach the same
fore, do not require a reference ground potential. The sensor has potential, and the probe output decays to zero eventually. There-
a linear response to the electric-field amplitude and has demon- fore, all reported dc electric-field meters convert the dc electric
strated that it is capable of measuring a dc field as small as 42 V/m. field into an alternating field by periodically shielding and un-
This miniature sensor is the smallest sensor with such a resolution shielding sensor electrodes inside the electric field being mea-
for use in power engineering applications.
sured [9]–[13]. In field mill designs, this movement is typically
Index Terms—Electric field measurement, electric fields, micro- achieved by an electric motor or air turbine. Even though P. E.
machining.
Secker proposed the electric field mill as early as 1975, the first
use of an electric-field mill to monitor HVDC lines was reported
by Maruvada et al. in 1983 [9], [13]. Since then, electric-field
I. INTRODUCTION mills have been used to measure electric fields under HVDC
transmission lines and for various atmospheric analyses.
EASUREMENT of electric fields in the vicinity of high-
M voltage equipment in a power system is necessary for
many purposes. The electric-field measurement is used to de-
Manitoba Hydro uses HVDC transmission lines to bring
power generated in the north of the province of Manitoba to the
load centers located south of the province. Conventional field
velop improved insulation systems and to ensure personal and mills with electric motors are currently employed for long-term
equipment safety in live-line maintenance [1], [2]. It is also re- environmental monitoring of HVDC transmission lines. The
ported that the electric-field measurement data can be used to conventional field mill is a very robust electric-field-measuring
accurately identify faulty insulators in an insulator string [3], instrument that has been used in power engineering applica-
[4] and measure voltage in a three-phase power system without tions for many years. However, it is not straightforward to
using bulky and expensive insulating structures [5]. use these sensors for long-term electric-field measurements.
Several different types of electric-field sensors have been re- The high-power consumption by the electric motor requires
ported for power systems applications [5]–[14]. A 230-kV op- frequent replacement of batteries, and some of the moving parts
tical voltage transducer developed by Rahmatian et al. uses a of the field mill wear out quickly. The necessary frequent main-
number of optical electric-field meters [6]. Zeng et al. also used tenance is expensive for Manitoba Hydro since these HVDC
an optical electric-field sensor to measure electric-field distribu- transmission lines extend hundreds of kilometers through diffi-
cult terrain. The harsh Manitoba winter, which is experienced
Manuscript received March 12, 2008; revised July 05, 2008. First published over a good portion of the year, further complicates the access
May 12, 2009; current version published June 24, 2009. This work was sup- of these devices for maintenance. Therefore, the necessity
ported in part by the Manitoba Hydro and Natural Science and Engineering
Research Council of Canada (NSERC). The fabrication of the sensor was made arose to develop a sensor that consumes less battery power
possible through services provided by CMC Microsystems. Paper no. TPWRD- than the commercially available field mills, while providing a
00186-2008.
G. Wijeweera, C. Shafai, and A. Rajapakse are with the Department of
comparable level of resolution and sensitivity.
Electrical and Computer Engineering, University of Manitoba, Winnipeg, MB Manitoba Hydro also uses the electric-field mills to measure
R3T 5V6, Canada (e-mail: gayan@ee.umanitoba.ca; cshafai@ee.umanitoba.ca; the charge accumulated on live line tools. In order to measure
athula@ee.umanitoba.ca).
B. Bahreyni is with the School of Engineering Science, Simon Fraser Uni-
the electric field in the proximity of a conducting surface, it is
versity, Burnaby, BC V3T 0A3, Canada (e-mail: behraad@ieee.org). necessary for the size of the probe to be smaller than the size of
D. Swatek is with Manitoba Hydro, Winnipeg, MB R3M 3T1, Canada the installation. The smallest available electric-field sensor for
(e-mail: drswatek@hydro.mb.ca). power engineering applications was demonstrated by Johnston
Color versions of one or more of the figures in this paper are available online
at http://ieeexplore.ieee.org. and Kirkham, which possessed a probe diameter of only 2 cm
Digital Object Identifier 10.1109/TPWRD.2008.2008427 [10], [14].
0885-8977/$25.00 © 2009 IEEE
WIJEWEERA et al.: MICROMACHINED ELECTRIC-FIELD SENSOR TO MEASURE AC AND DC FIELDS 989

In [15], the authors presented a low-power thermally actuated


micromachined field mill. The mechanical design and resonant
operation were explained and simulated. Measurement results
demonstrated a linear response for steady-state dc fields from
40–5000 V/m.
In this paper, we are presenting a new device with improved
mechanical design, and a conducting moving shutter to reduce
charging effects. Measurements test results are shown for
pulsed dc electric fields and 60-Hz ac fields. A proof of concept
vacuum packaging is also demonstrated, where an external
electric field is able to enter the vacuum package containing the
sensor. Testing of the sensor under a simulated transmission
line in a high-voltage laboratory is presented.

II. SENSOR DEVELOPMENT


Micromachining is a well-established technology that em-
ploys many standard semiconductor process technologies to
fabricate miniature electromechanical devices and components.
Even though microelectromechanical systems (MEMS) sensors Fig. 1. Picture of the fabricated sensor.
and actuators are not widely used in power systems applica-
tions, they have made a huge impact on the vehicular industry,
health care, chemistry, and optical and wireless telecommuni- field through the shutter openings, the other array is covered
cations sectors. by the shutter and is shielded from the field. By using two sets
The development of microfabrication technology provides of electrodes, this sensor is capable of differential electric-field
the opportunity to miniaturize a conventional field mill with measurements without the need for a reference ground poten-
the MEMS technology. Field mills made with MEMS tech- tial. Differential measurement also improves the system perfor-
nology offer the advantages of small size, light weight, easy mance in the presence of interference offset and low-frequency
integration to electronics, bulk fabrication, etc. Several other drifts. In Fig. 1, the electrode array (fabricated from light col-
research groups have also used micromachining technology ored gold metal) on the left side of the shutter is visible through
to fabricate miniature electric-field sensors [16]–[22]. Most of the shutter perforations, while the electrode array on the right
them have used electrostatic actuators to drive a moving shutter side is covered up.
[16], [19]–[21]. However, electrostatic actuators require a large This MEFM was fabricated by using the commercially avail-
operating voltage. In addition to the difficulty of providing large able MicraGEM multiuser fabrication process from Micralyne
dc voltage in most practical applications, the large drive voltage Inc. [23]. In a multiuser fabrication process, the manufacturer
also reduces device performance. The measuring resolution of predefines fabrication steps and materials, hence limiting the
these sensors is on the order of kilovolts per meter. user’s choices. The MicraGEM process steps used to fabricate
the presented MEFM are shown in Fig. 2 and are summarized
A. Sensor Operation and Fabrication as follows: a) A Pyrex substrate with a thickness of 525 m is
isotropically etched in two subsequent steps to depths of 2 m
A microscope photograph of the sensor is shown in Fig. 1. and 10 m, respectively; b) gold metal is deposited and pat-
The sensor uses a moving electrically grounded shutter to peri- terned inside the etched cavities to form the sensing electrodes;
odically expose and shield the underlying electrodes from an c) a silicon-on-insulator (SOI) wafer is anodically bonded to the
incident electric field. This micromachined electric-field mill Pyrex substrate; this wafer contains a thin silicon layer (called
(MEFM) thus operates in manner conceptually similar to a con- the device layer) and a thick silicon layer (called the handle
ventional field mill. wafer), which are separated by a thin silicon–dioxide layer; d)
The sensor’s shutter measures 1 mm 1 mm and is supported the handle wafer and separating oxide layers are etched away;
by four springs at its corners. Thermal actuators can be seen e) gold metal is deposited and patterned to form the connecting
to be connected to the shutter, one on each side, using a novel wiring; and f) the silicon device layer is patterned and etched in
lever mechanism. Electric current through the thermal actuators a deep reactive ion etching (DRIE) system to form the thermal
causes them to heat up and expand, and so moves the shutter actuators, the shutter, connecting levers, and supporting springs.
over the sensing electrodes.
The shutter is perforated by two sets of 25 openings on each
side that are aligned with the underlying sensing electrodes.
The sensing electrodes beneath the shutter are patterned at the B. Operating Principle
bottom of a 10- m deep cavity. They are divided into two ar-
rays, one on the left side and one on the right side. The electrode The operating principle of the sensor is illustrated in Fig. 3.
arrays are positioned so that when one is exposed to the electric When the shutter covers and uncovers the sensing electrodes in
990 IEEE TRANSACTIONS ON POWER DELIVERY, VOL. 24, NO. 3, JULY 2009

Fig. 2. Fabrication steps used to construct the MEFM. Fig. 5. Single bent-beam thermal actuator.

Fig. 3. Illustration of an incident electric field chopping by the shutter, and the
periodic shielding of the differential sensing electrodes.

Fig. 6. Close up view of the thermal actuator with the lever mechanism. Di-
mensions of beams 1 and 2 determine the displacement amplification factor
and beam 3 increases the thermal resistance between the actuator and shutter
to lower the structural temperature variations during shutter operation.

has two sets of five 200 6- m beams with a prebend angle of


5 .
Fig. 4. Sensing circuit with sensing electrodes.
Finite-element simulation results showed that the bent beam
thermal actuators can provide a displacement of only a few mi-
crometers. However, in the designed MEFM, the sensing elec-
the presence of an electric field, ac current is induced on the
trodes measure 14 m in width. In order for the shutter to fully
electrodes according to
cover and uncover the sensing electrodes, the displacement of
the thermal actuators was amplified by a lever mechanism. The
lever connecting the shutter to the thermal actuator is shown up
(1)
close in Fig. 6. The motion of the shutter was further ampli-
fied by operating the sensor at the mechanical resonance of the
where is the permittivity of free space, is the component shutter-spring mass system, which was 4200 Hz.
of the electric field that is normal to the electrodes, and is the Equation (1) shows that in order to obtain a higher sensor
effective area of the electrode. current, it is necessary to operate the sensor at a high frequency.
Fig. 4 shows the sensing circuit where the induced ac cur- The maximum operating frequency of the thermal actuators de-
rents on each electrode array are differentially measured and pends on how fast they can heat up and cool down. Finite-ele-
converted to a voltage. ment simulations were used to design the thermal actuators so
that their thermal time constant was 250 s (corresponding to a
C. Actuation Mechanism
maximum operating frequency of 4 kHz), which is close to the
Bent beam thermal actuators are used to move the shutter required resonant operational frequency of the shutter.
to cover and uncover sensing electrodes [24]. A single-beam Structures move a larger distance for a given force when they
thermal actuator is illustrated in Fig. 5. When a voltage is ap- are moving at their natural resonance frequency. Therefore, ac-
plied between the anchors, ohmic heating of the two half-beams cording to (1), the sensor should produce a higher reading for
causes them to thermally expand and ultimately buckle if the a given electric field when the sensor’s shutter is operating at
bent beam angle between the beams was zero. In order to control its resonance frequency. This fact was used to find the reso-
the direction of the actuator displacement, the beams are nor- nance frequency of the structure. The initial estimate for the
mally designed with a prebend angle as shown in Fig. 5, so they resonance frequency of the structure was obtained through fi-
will have an affinity to move in plane. The fabricated MEFM nite-element simulation of the device. The output of the sensor
WIJEWEERA et al.: MICROMACHINED ELECTRIC-FIELD SENSOR TO MEASURE AC AND DC FIELDS 991

A sinusoidal signal was used to drive the thermal actuators, re-


sulting in a motion of the thermal actuators and shutter at twice
the drive frequency. By causing the shutter to move at twice the
frequency of the drive signal, interference from the drive signal
itself can be filtered.
One notch filter and three bandpass filters (all second order)
were connected after the differential amplifier to reduce the
drive signal interference and lower the noise. The notch filter
Fig. 7. Proof of concept vacuum packaging designed to test the sensor. The was tuned at the drive frequency of the thermal actuators
central portion of the lid of the vacuum chamber is fabricated from an electri- since it is the largest source of interference for measurement.
cally floating section (Metal B) that is separated from the main lid (Metal A) by
Teflon insulation. The bandpass filters were tuned to twice the frequency of the
drive signal (i.e., the frequency of shutter movement) in order
to enhance the performance of the sensor by narrowing the
was connected to a spectrum analyzer and the sensor response bandwidth around its output signal.
was observed as a function of the frequency. The frequency that The output signal of this system is shown in Fig. 8 when mea-
produced the highest sensor response was selected as the reso- suring an arbitrary dc electric field. We can see that the sensor
nance frequency. A typical frequency spectrum of the sensor is samples the dc field approximately every 0.25 ms. The ampli-
shown in Fig. 15. tude of the measured field is, however, clearly oscillating. This
beating effect resulting from the output signal of the sensor in-
D. Reliability of MEMS Thermal Actuators terfering with signals from various sources causes considerable
Park et al. conducted a reliability study on bent beam actua- variation in the amplitude of the filtered output. Beating occurs
tors [25]. They tested a thermal actuator with a half beam length when two sinusoidal signals are added, whose frequencies are
of 800 m, width of 10 m, height of 3.7 m, and a prebend close to each other. It has been found that neither the ampli-
angle of 0.2 rad up to 6 million cycles by applying 6-V, 300-Hz tudes nor the frequencies of the interference signals are stable.
square waves. They did not observe any degradation in the am- These large variations in the signal amplitude, due to interfer-
plitude of the motion after 6 million actuation cycles. In our ex- ence, make it difficult to measure the contribution from the elec-
periments, we did not notice any measurable change in the per- tric field. This beating effect can, however, be minimized and ef-
formance of the sensor after continuously operating the sensor fectively eliminated by subsequent filtering of the sensor signal.
more than two billion cycles.

III. TESTING
B. Experimental Results With a Lock-In Amplifier
The sensor was placed inside a vacuum environment with the
sensing circuit and operated at its resonance frequency ( 4200 The lock-in amplifier, also known as a phase-sensitive de-
Hz). The reduced air pressure minimizes the air resistance on tector, is an instrument commonly used to extract a signal with
the shutter, thereby reducing the necessary drive voltage on the known carrier frequency inside a noisy environment. Lock-in
thermal actuators. Reduction in drive voltage is an important amplifiers use a frequency mixer to convert the signal amplitude
factor in the sensitivity of the MEFM. The close proximity of into a dc voltage signal. A lock-in amplifier was implemented
the thermal actuators to the sensing electrodes can cause drive at the output of the sensing circuit in order to obtain a constant,
voltage on the thermal actuators to interfere with the sensing of beating insensitive output, from the measured electric field.
the incident electric field. The sensor’s response tested with a pulsed 1000-V/m electric
In addition to a reduction of drive voltage, operation in field is shown in Fig. 9. A slight time delay is visible in the
vacuum environment minimizes the power needed to maintain sensor measurement, however, this is due to a 1-s filter time
the shutter in motion. The required voltage and power to move constant of the lock-in amplifier, and not due to a characteristic
the shutter for this sensor was 75 mV and 70 W, respectively. of the sensor itself.
Such voltages and power levels are well within the allowable Also visible is a negative response measurement of the sensor
range for integrated circuits (ICs), even for today’s most after the incident electric field has switched off is visible. This
advanced technologies. Hence, it is possible to integrate the negative response is due to the following process. In the pres-
sensor with the sensing electronic circuitry on a single chip. ence of a constant electric field, the MEFM’s shutter, which is
The vacuum environment was created by placing the sensor fabricated from silicon, will slowly build up an electric charge.
in a small vacuum chamber with the air pressure reduced to 10 Once the incident field has switched off, this charge slowly dis-
mTorr. The lid of the vacuum chamber possesses an electrically charges. Its presence is clearly measured by the MEFM as it
floating section (Metal B in Fig. 7), which allows electric fields discharges.
to enter the chamber. This type of vacuum environment is com- The charging effect was solved in a subsequent iteration of
mercially available for vacuum-packaged MEMS technology. the MEFM that possessed a gold metal coating on the shutter.
The conducting gold coating effectively prevents charging of the
A. Experimental Results shutter when it is connected to the reference of the sensing cir-
When measuring a dc electric field, the ac current induced on cuit. Fig. 10 shows this sensor’s response to a pulsed 6000-V/m
the sensing electrodes is at the frequency of the shutter motion. electric field. This time, no negative response is seen when the
992 IEEE TRANSACTIONS ON POWER DELIVERY, VOL. 24, NO. 3, JULY 2009

Fig. 10. Sensor response to a periodic 6000-V/m electric field.

Fig. 8. Sensor response when measuring an arbitrary dc electric field after fil-
tering with one notch filter and three bandpass filters. (a) Shows the sensor re- Fig. 11. Sensor response to dc electric fields from 42 V/m to 5000 V/m [15].
sponse for 20 ms. (b) Shows first 5 ms that have beem magnified from (a).

Fig. 11 shows the response of the sensor to various dc elec-


tric-field amplitudes. It can be seen that the sensor has a linear
response to the amplitude of the applied fields. The lowest elec-
tric field that could be accurately measured was 42 V/m.
Fig. 12 shows the MEFM response to a 60-Hz 5000-V/m si-
nusoidal field. A 3-ms time constant was used on the lock-in
amplifier in order to capture the rapidly changing field.

C. Testing Under High-Voltage Transmission Line


The sensor was tested under a simulated transmission line at
the University of Manitoba’s High Voltage Laboratory to test the
sensor performance under real-life applications. The test setup
used is shown in Fig. 13 with the sensor 2.02 m below
the transmission line. Test results shown in Fig. 14 illustrate the
linear sensor output with an applied voltage up to 50 kV.

Fig. 9. Sensor response to a pulsed 1000-V/m electric field. D. Response to Drive Frequency, Actuation Voltage, and
Pressure
The output spectrum of the sensor, when measuring an arbi-
field turns off. The visible integration of the pulsed field ampli- trary dc electric field around its resonance frequency at the pres-
tude in the sensor output is due to the 1-s time constant of the sure of 20 mTorr, is shown in Fig. 15. This figure illustrates that
lock-in amplifier. the sensor’s measurement sensitivity is extremely sensitive to
WIJEWEERA et al.: MICROMACHINED ELECTRIC-FIELD SENSOR TO MEASURE AC AND DC FIELDS 993

Fig. 14. Variation of sensor response with the line voltage.


Fig. 12. Sensor response to a 60-Hz 5000-V/m sinusoidal electric field.

Fig. 15. Output spectrum of the sensor as a function of shutter drive frequency,
when measuring an arbitrary dc electric field.

the sensor’s response first increases initially as the area of the


sensing electrode that is exposed to and shielded from the elec-
tric field increases. However, when the actuation voltage is made
too great, the shutter opening moves past the sensing electrode,
which results in a reduction of sensor output. Therefore, op-
timum actuation voltage is required in order to fully expose and
shield the sensing electrodes from the incident field.
It can be seen that the sensor’s response to a variation in actu-
ation voltage gets narrower with a reduction in pressure, which
Fig. 13. Setup used to test the sensor in the High Voltage Laboratory. The
sensor is h = 2.02 m under a simulated transmission line of length d = 2.8 is to be expected due to the increase in the Q factor of the shutter
m. resonator when reduced air damping is present. At 20-mTorr
pressure, the sensor’s response does not change much with a
variation of actuation voltage around its peak sensitivity. This
its operation at the mechanical resonance of the shutter-spring is to be expected due to the lower Q of the shutter resonator at
mass system. This is due to the significant amplification of the higher pressures. However, in practical applications, this lower
shutter motion in resonant operation, and is consistent with the Q operation is likely beneficial, because the sensor’s output will
high Q oscillation characteristics of MEMS resonators. be more steady even if the actuation voltage amplitude deviates
The sensor’s sensitivity, as a function of actuation voltage from a preset value.
and at three different vacuum pressure levels, is shown in Fig. Long-term operation of this sensor for real-world use requires
16 for an external field of 6000 V/m. This figure illustrates a reliable vacuum package. The vacuum packaging industry is
that for a given pressure when the actuation voltage increases, well developed today and a vacuum environment can be retained
994 IEEE TRANSACTIONS ON POWER DELIVERY, VOL. 24, NO. 3, JULY 2009

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WIJEWEERA et al.: MICROMACHINED ELECTRIC-FIELD SENSOR TO MEASURE AC AND DC FIELDS 995

Behraad Bahreyni (S’98–M’06) received the B.Sc. Athula Rajapakse (M’00) received the B.Sc. (Eng.)
degree in electronics engineering from Sharif Uni- degree from the University of Moratuwa, Moratuwa,
versity of Technology, Tehran, Iran, in 1999, and the Sri Lanka, in 1990, the M.Eng. degree from the Asian
M.Sc. and Ph.D. degrees in electrical engineering Institute of Technology, Bangkok, Thailand, in 1993,
from the University of Manitoba, Winnipeg. MB, and the Ph.D. degree from the University of Tokyo,
Canada, in 2001 and 2006, respectively. Tokyo, Japan, in 1998.
He was with the NanoSicence Centre at Cambridge Currently, he is an Assistant Professor at the
University, Cambridge. U.K., conducting research on University of Manitoba, Winnipeg, MB, Canada. His
an interface circuit design for microresonators. His research interests include power system protection,
past and current research activities include the design transient simulation of power and power-electronic
of various micromachined transducers, microfabrica- systems, and distributed and renewable energy
tion technology, RF MEMS, modelling of microfabrication processes, and in- systems.
terface and RF circuit design. He is an Assistant Professor in the School of En-
gineering Science at Simon Fraser University, Burnaby, BC, Canada.

David R. Swatek (M’85) received the B.Sc. and


Ph.D. degrees in electrical engineering from the
Cyrus Shafai (S’90–M’90) received the B.Sc. degree University of Manitoba, Winnipeg, MB, Canada, in
in electrical engineering from the University of Man- 1988 and 1999, respectively.
itoba, Winnipeg, MB, Canada, in 1990, the M.Sc. de- He joined Manitoba Hydro, Winnipeg, in 1988
gree in electrical engineering for the development of where he is currently Manager in the Insulation
the scanning resistance microscope from the Univer- Engineering and Testing Department.
sity of Manitoba in 1993, and the Ph.D. degree in Dr. Swatek received the URSI Commission B:
electrical engineering from the University of Alberta, Fields and Waves, Young Scientist Award, St. Peters-
Edmonton, AB, Canada, in 1997. burg, Russia, in 1995, and the 1999–2000 University
Currently, he is an Associate Professor in the of Manitoba Distinguished Doctoral Dissertation
Department of Electrical and Computer Engineering, Award in the field of natural sciences and engineering. He is a member of
University of Manitoba. His principle research was the IEEE Power and Energy as well as Dielectric and Electrical Insulation
the development of a micromachined onchip Peltier heat pump. His current Societies.
research includes microelectromechanical-based reconfigurable surfaces for
wireless applications, micromirrors, microfluidics, and electric- and mag-
netic-field sensors. Currently, he is the Director of the University of Manitoba
Nano-Systems Fabrication Laboratory.

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