Professional Documents
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Hao Wang
Reyes Sierra
Dept. Chemical & Environmental Engineering, University of Arizona.
Buddy Ratner
University of Washington Engineered Biomaterials (UWEB) Center, University of Washington
SRC/SEMATECH Engineering Research Center for Environmentally Benign Semiconductor Manufacturing
ESH Testing and Evaluation of NPs
Handy, R.D., Shaw, B.J., 2007. Toxic effects of nanoparticles and nanomaterials: Implications for public health, risk
assessment and the public perception of nanotechnology. Health Risk Society 9, 125-144.
SRC/SEMATECH Engineering Research Center for Environmentally Benign Semiconductor Manufacturing 2
Objectives and Method Approach
Objective: Characterization of the surface sites on nanoparticles that
contribute to concentration, retention, and enhanced transport of toxic
chemicals.
Method approach: Surface hydroxylation (adsorption and desorption
of contaminants).
Materials: SiO2, HfO2, and
CeO2.
Parameters: Oxide type,
particle size, temperature.
MFC
Purge or dilution gas Sample holder
Challenge
gas
Furnace
Moisture
UHP N2 source
MFC
APIMS CRDS
MFC MFC
Gas Phase
r
Substrate
Nanoparticle
Chemisorption Physisorption
SRC/SEMATECH Engineering Research Center for Environmentally Benign Semiconductor Manufacturing 7
Process Simulation: Packed-bed Domain
Adsorbent concentration in the gas phase:
𝜕𝐶𝑔𝑜𝑢𝑡 𝜕 2 𝐶𝑔𝑜𝑢𝑡 𝜕𝐶𝑔𝑖𝑛 2
= 𝐷𝑒𝑜𝑢𝑡 − 𝐷𝑒 | 𝑟=𝑟 4𝜋𝑟0 𝑁𝑣
𝜕𝑡 𝜕𝑥 2 𝑖𝑛
𝜕𝑟 0
H H H H H H
OH OH OH OH OH
O O O O O O O
Si Si Si Si Si Si
O O O O O O O O O O O O
𝑚+1 𝑚
𝜕𝐶𝑔 𝐶𝑔,𝑖 − 𝐶𝑔,𝑖
=
𝜕𝑡 𝛥𝑡
2 𝑚+1 𝑚+1 𝑚+1 𝑚 𝑚 𝑚
𝜕 𝐶𝑔 1 𝐶𝑔,𝑖+1 − 2𝐶𝑔,𝑖 + 𝐶𝑔,𝑖−1 𝐶𝑔,𝑖+1 − 2𝐶𝑔,𝑖 + 𝐶𝑔,𝑖−1
= +
𝜕𝑥 2 2 Δ𝑥 2 Δ𝑥 2 𝑪𝒏𝒈,𝒐𝒖𝒕
1 𝑚+1 𝑚 𝑚
𝐶𝑔 = (𝐶𝑔,𝑖 + 𝐶𝑔,𝑖 ), 𝐶𝑠 = 𝐶𝑠,𝑖 .
2
𝑪𝒏+𝟏
𝒈,𝒊𝒏 𝑪𝒏𝒔,𝒊𝒏
𝛼Δ𝑡 𝑚+1 1 𝑚
𝛼Δ𝑡 𝑚+1
𝛼Δ𝑡 𝑚+1
𝐶 + [ (𝛿𝐶 − 𝛾)Δ𝑡 − − 1]𝐶 + 𝐶
2Δ𝑥 2 𝑔,𝑖+1 2 𝑠,𝑖
Δ𝑥 2 𝑔,𝑖
2Δ𝑥 2 𝑔,𝑖−1
𝛼Δ𝑡 𝑚 1 𝑚
𝛼Δ𝑡 𝑚
=− 2
𝐶𝑔,𝑖+1 + [− (𝛿𝐶𝑠,𝑖 − 𝛾)Δ𝑡 + 2
− 1]𝐶𝑔,𝑖
2Δ𝑥 2 Δ𝑥
𝑪𝒏+𝟏
𝒏+𝟏
𝒌𝒏+𝟏
𝒂 , 𝒌𝒅 ,
𝛼Δ𝑡 𝑚 𝑚 𝒔,𝒊𝒏
− 𝐶 − Δ𝑡𝛽𝐶𝑠,𝑖 ……
2Δ𝑥 2 𝑔,𝑖−1
Dimensionless groups:
𝐷𝑒𝑖𝑛 𝑉 𝐶𝑠𝑖𝑛,0 𝑘𝑑𝑐 𝐶𝑠𝑖𝑛,0
𝛼= , 𝛽= , 𝛾= ,
𝑟02 𝐴0 𝑘𝑎𝑐 𝑆0 𝐶𝑔𝑖𝑛,0 𝑘𝑎𝑐 𝑆0 𝑆0
𝐶𝑔𝑖𝑛,0 𝑉 𝐶𝑔𝑖𝑛,0 𝑉 𝑘𝑑𝑐 𝑉
𝜂= , 𝜃= , 𝜔= ,
𝐶𝑠𝑖𝑛,0 𝐴0 𝐴0 𝑆0 𝑘𝑎𝑐 𝐴0 𝑆0
𝐷𝑒𝑖𝑛 𝑉
𝛼=
𝑟02 𝐴0 𝑘𝑎𝑐 𝑆0
𝐷𝑒𝑖𝑛 𝑉
𝛼=
𝑟02 𝐴0 𝑘𝑎𝑐 𝑆0
NPs with smaller size will have larger density of surface sites
and larger surface retention. They also have higher affinity for
retention of contaminants. Based on the size effect on energy,
smaller NPs would have higher desorption activation energy
and lower adsorption activation energy.
Acknowledgment
• SRC/SEMATECH Engineering Research Center
• Farhang Shadman, Professor of Chemical and Environmental Engineering, UA.
• Reyes Sierra, Professor of Chemical &Environmental Engineering, UA.
• Buddy Ratner, Professor of Bioengineering, UW.
• Junpin Yao, Matheson Tri-Gas Inc.
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