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Process Improvement
5.3. Choosing an experimental design
5.3.3. How do you select an experimental design?
2-factor RBD 2 L1 * L2
3-factor RBD 3 L1 * L2 * L3
4-factor RBD 4 L1 * L2 * L3 * L4
. . .
k-factor RBD k L1 * L2 * ... * Lk
with
.
.
.
Furnace run The nuisance factor they are concerned with is "furnace
is a nuisance run" since it is known that each furnace run differs from the
factor last and impacts many process parameters.
Ideal would An ideal way to run this experiment would be to run all the
be to 4x3=12 wafers in the same furnace run. That would
eliminate eliminate the nuisance furnace factor completely. However,
nuisance regular production wafers have furnace priority, and only a
furnace factor few experimental wafers are allowed into any furnace run at
the same time.
Model for a The model for a randomized block design with one
randomized nuisance variable is
block design
\( Y_{i,j} = \mu + T_{i} + B_{j} + \mbox{random
error} \)
where
with \( \bar{Y}_{j} \) =
average of all Y for which X2 =
j.