Electrostatic Handbook PDF

ELECTROSTATIC
Handbook
INDEX
1. THE BASICS OF STATIC ELEC TRICIT Y P.3

1-1 MECHANISM FOR THE GENER ATION OF STATIC ELECTRICIT Y
1-2 GENER ATION OF STATIC ELECTRICIT Y IN RE AL- LIFE SITUATIONS
1-3 PROPERTIES OF ELECTRICIT Y
1- 4 AMOUNT OF ELECTRIC CHARGE AND ELECTRIC FIELD
1-5 LINES OF ELECTRIC FORCE
1- 6 ELECTROSTATIC CAPACIT Y
1-7 CONDUCTORS AND INSUL ATORS
2. VARIOUS ELEC TROSTATIC PROBLEMS P.16

2-1 STATIC ELECTRICIT Y FELT BY THE HUMAN BODY
2-2 ELECTROSTATIC PROBLEMS IN E ACH INDUSTRY
2-3 MECHANISM OF ELECTROSTATIC BRE AKDOWN
2- 4 MECHANISM OF ADHESION BY ELECTROSTATIC FORCE
2-5 IGNITION AND E XPLOSION CAUSED BY ELECTROSTATIC DISCHARGE
3. THE BASICS OF STATIC ELIMINATION MEASURES P.27

3-1 ME A SURES FOR CONDUCTORS
3-2 ME A SURES FOR INSUL ATORS
3-3 OPER ATING PRINCIPLE OF STATIC ELIMINATORS ( IONIZERS)
4. STATIC ELIMINATOR BASICS P.39

4 -1 STATIC ELIMINATOR ( IONIZER ) T YPES
4 -2 STATIC ELIMINATION ABILIT Y
4 -3 APPLIED VOLTAGE AND STATIC ELIMINATION ABILIT Y
4-4 E VALUATION METHOD FOR STATIC ELIMINATION ABILIT Y
5. UTLISATION OF A STATIC ELIMINATOR P.47

5 -1 INSTALL ATION OF A STATIC ELIMINATOR
5 -2 OPER ATING DISTANCE AND ION GENER ATION CYCLE
5 -3 DOWN FLOW & AIR PURGE
5-4 MAINTENANCE OF A STATIC ELIMINATOR
6. KEYENCE STATIC ELIMINATOR ADVANTAGES P.54

6 -1 KEYENCE STATIC ELIMINATOR LINEUP
6 -2 INTRODUCTION TO KEYENCE STATIC ELIMINATORS
6 -3 I.C.C. CONTROL
6-4 SHE ATH AIR GUIDE STRUCTURE
6 -5 FUNCTIONS AND AL ARM OUTPUTS
2 EL E C T R OS T AT IC H A N DB O OK
1. THE BASICS OF STATIC ELECTRICITY
1-1 MECHANISM FOR THE GENER ATION OF STATIC ELEC TRICIT Y
CONTACT CHARGING
1-2 GENER ATION OF STATIC ELEC TRICIT Y IN REAL-LIFE SITUATIONS
FRICTIONAL CHARGING
SEPAR ATION CHARGING
INDUCTION CHARGING
POL ARIZ ATION
1-3 PROPERTIES OF ELEC TRICIT Y
TRIBOELECTRIC SERIES
CHAR ACTERISTICS OF ELECTRICIT Y
1- 4 AMOUNT OF ELEC TRIC CHARGE AND ELEC TRIC FIELD
COULOMB’S L AW
ELECTRIC FIELD
1-5 LINES OF ELEC TRIC FORCE
GAUSS’S THEOREM
1- 6 ELEC TROSTATIC C APACIT Y
CALCUL ATION OF ELECTROSTATIC CAPACIT Y
1-7 CONDUC TORS AND INSUL ATORS
EL E C T R OS T AT IC H A N DB O OK 3
1-1 MECHANISM FOR THE GENER ATION OF STATIC ELEC TRICIT Y

In their natural state on the earth, it is assumed that objects never exist without generating static electricity.
They may be of the same material or different materials, and they may be in a solid, liquid or gaseous state.
Lightning, for example, is a type of static electricity generated by the friction between frozen vapour particles
in a cloud. When gas or liquid vigorously flows through a pipe or hose, it also generates static electricity.
Static electricity may cause a lot of problems in every industry, such as an explosion while the inside of a
tank is being cleaned, decreased efficiency in production processes, or the destruction of semiconductor
devices. What causes the generation of static electricity?
Figure 1-1-1 shows the mechanism for the generation of static electricity at the atomic level.
[Figure 1-1-1]: Mechanism for the generation of static electricity at the atomic level
Atomic structure
Under normal conditions, an atom is neutral (stable) by having the same number of protons and electrons, for example, 5 protons (positively charged) and 5 electrons (negatively charged). If two objects
make contact with each other and cause friction or separation, an electron transfers from one atom to another. As a result, the atom has 5 protons and 4 electrons. Since the number of protons is greater,
the atom becomes positively charged. When the electron transfers to the other atom, that atom now has 5 protons and 6 electrons. Since the number of electrons is greater, the atom becomes negatively
charged.
An object contains negatively charged electrons, positively charged protons, and neutrons which are neutral.
Under normal conditions, the number of protons and electrons are the same, making the atom electrically neutral.
CONTACT CHARGING
Every object is a combination of atoms. An atom has a nucleus consisting of negatively charged electron(s)
and positively charged proton(s). Under normal conditions, the number of electrons and protons are the
same in an atom, maintaining an electrically neutral, stable status (0 V). Contact charging is a phenomenon
in which two objects move closer, make contact, and become positively or negatively charged. In other
words, electrons in the atoms start moving due to the contact. When negative electrons transfer out of
one object, the object becomes positively charged. These electrons transfer into the other object, and the
other object becomes negatively charged. This is how static electricity is generated. During this period,
the electrons move from an object in which they are weakly bonded, to an object in which they are
strongly bonded, resulting in the separation of electric charges along the contact interfaces as shown in
Figure 1-1-2. There is no absolute definition for the mechanism of the movement of electrons, and it is
considered that whether an object becomes charged positively or negatively depends on the priority of
electronic energy between the two objects in contact. The triboelectric series, described later, is used as a
guideline for the priority.
[Figure 1-1-2]: Contact interface of electric charges generated by contact
Approach of objects Contact Separation
When objects making contact separate, some of the electrons which moved to the contact surface return to their original position. The remaining electrons stay on the surface, which results
in static electricity.
Consequently, when two objects make contact, the separation of electric charges always occurs, resulting in
the generation of static electricity. The electric charge generated by contact charging is very small compared
with the electric charge generated by frictional charging. However, the electric charge by contact can cause
some electrostatic problems. For example, in the injection moulding process of plastic products, the products
in contact with the mold become highly charged and cause electrostatic discharge at the instant they are
released from the mold. If an electrostatic discharge occurs on moulded products, the trace of the discharge
remains on the surface. This is caused by the airborne dust attached to the surface during the electrostatic
discharge. This contact charging may develop into friction charging or separation charging, which may cause
a greater electrostatic discharge.
1-2 GENER ATION OF STATIC ELEC TRICIT Y IN REAL-LIFE SITUATIONS

In real-life situations, static electricity is generated by various phenomena such as the friction between a film
and a winding roller, the separation of an adhesive tape, the deformation or breakage of objects, or charged
particles. As shown in Figure 1-2-1, static electricity is generated in many occurrences in various processes
within manufacturing facilities, with the main cause of the generation being repeated friction or separation.
FRICTIONAL CHARGING
Frictional charging is caused when surfaces in contact are rubbed
together. It is a charging phenomenon which occurs between [Figure 1-2-1]:
Major factors in the generation of
1) insulators, 2) insulator and conductor, and 3) conductors. static electricity
The amount of electric charge is far greater compared to contact 1. When objects produce friction
charging. This is because the projections and depressions on the

surface are rubbed together by friction, and the new areas being
subject to friction continue increasing. Since a friction area is
not exactly the same but changes all the time, the contact area
increases, resulting in greater electric charge. Moreover, it is possible
that a new contact surface appears when dirt buildup or surface 2. When objects in contact are separated
deterioration caused by friction occurs over time. The increase

in temperature caused by the destruction of the surface material
also greatly affects the charging phenomenon. When objects are
rubbed together, the friction surface emits electrons, ions, and
neutral molecules. This phenomenon is called “triboemission”, and
3. When gas or liquid flows through a pipe
the emission of electrons continues for a long period immediately or hose
after the friction starts. The contact charging described above

occurs between different materials. Contact between objects of the
same material does not typically create electric charges. However,
objects of the same material may be charged by friction if they are
different in size or if their surface conditions are different (e.g. rough
In manufacturing facilities, friction and separation
and smooth). This is called asymmetrical friction. An example of occur repeatedly in a vast range of situations that
are absolutely unimaginable in everyday life.
asymmetrical friction is the phenomenon in which the ice particles As a result, large amounts of static electricity are
generated as in the processes described above.
of different sizes in a cloud generate an electrostatic discharge, or
lightning, by friction.
SEPAR ATION CHARGING

When objects in contact are separated, as when adhesive tape is [Figure 1-2-2]: Conceptual graph of the
relationship between separation speed
peeled off or protective film is removed from an LCD glass substrate, and electric charge
a strong charging phenomenon occurs. This phenomenon is

actually the same as “contact charging” described above, but
Amount of electric charge

is generally called “separation charging” because objects are
charged by separation.
The closer the contact is, the higher the electric charge density
becomes, resulting in a greater electric discharge. The amount of
electric charge depends on the speed of separation. As Figure
Separation speed
1-2-2 shows, when the separation is slow, the electric charge is The amount of electric charge depends on
the separation speed. When the separation is
less because small electrostatic discharges occur in series. When fast, the amount of electric charge increases;
however, the charge eventually saturates.
the separation is fast, the electric charge increases because the
amount of electrostatic discharges are less.
[Figure 1-2-3]: Induction charging
When charged object A moves closer to conductor B, the surface of conductor B
facing A is charged with the opposite polarity of A.
When conductor B is grounded, electric charges with the same polarity as A dissipate
through the ground. When the ground is disconnected at this point, conductor B is
Charged Charged Charged
charged with the polarity opposite to the charge of object A.
object A object A object A
Conductor B Conductor B Conductor B
INDUCTION CHARGING
[Figure 1-2-4]: Movement of electrons
Induction charging is a phenomenon that occurs only when when the conductor is grounded
objects are conductive. When a charged object moves closer to a

Supplied
conductor, the surface of the conductor is charged with the polarity
opposite to the polarity of the charged object.
For example, when a positively charged object moves closer to Charged
object A
a conductor, the electrons inside the conductor move, making Conductor B
negative charges appear on the conductor surface facing the

charged object, and positive charges appear on the other side. Absorbed
This is caused by the uniformisation property of the electric

charges gathered on the conductor surface, and this state is called
Charged
“induction”. When the conductor in this state is grounded, electric object A
Conductor B
charges with the same polarity as the charged object are forced
away from the conductor. In other words, electrons are supplied
or absorbed through the ground as shown in Figure 1-2-4, and the
conductor is charged with the opposite polarity of the object. When
the ground is disconnected and the object is moved away from the
conductor, the conductor is still charged with the opposite polarity
of the object. This phenomenon is called “induction charging”.
POL ARIZ ATION
If an insulator is moved closer to a charged object or if it is placed between electrodes and then voltage is
applied, the molecular pattern changes due to the electrical force. The insulator does not conduct electricity
and the electrons inside the insulator cannot move. As a result, certain sections of the insulator are positively
charged and other sections are negatively charged, but the total amount of electric charges of the insulator
is still close to 0 V (bipolar charging). Such a state is called “polarization”. Although polarization looks like
induction, electrons do not move out of an object even when the insulator is grounded, and the insulator does
not become charged as in the case of induction charging.
Other than the description above, objects may be charged by bending or deformed by force (for example,
when a bunch of hair is curled repeatedly with a finger). This is a charging phenomenon caused by deformation
or destruction. Although the surface of an object may be charged by the application of force, the charge
disappears spontaneously when the application of the force stops. This type of charge does not generate
static electricity. However, if the charge attracts electric charges existing in the surrounding atmosphere, the
attracted charges do not disappear and may become static electricity.
1-3 PROPERTIES OF ELEC TRICIT Y
TRIBOELECTRIC SERIES
Table 1-3-1:
When two objects become charged by contact or friction, the resulting polarities of Triboelectric series
the objects depend on their properties. Table 1-3-1 shows the triboelectric series,
which indicates the polarity resulting from the friction between two objects. An
Positive (+)
Air
object is positively charged when it is rubbed together with an object located above Human body
it in the table, and is negatively charged when it is rubbed together with an object Glass
located below it in the table. The objects closer to the top have more free electrons Nylon
Fur
than those closer to the bottom. It can be considered that objects are charged
Lead
because the electrons move from the objects on the top to the objects on the bottom. Silk
For example, when a glass plate and a cotton cloth make contact, the glass plate, Aluminium
which is located above cotton in the table, becomes positively charged. The cotton Cotton
Steel
cloth, which is located below glass, becomes negatively charged. When a cotton
Wood
cloth makes contact with a PFA plate, the cotton cloth, which is located above PFA,
Amber
becomes positively charged. The PFA plate becomes negatively charged. Thus, Nickel, copper
the polarity of static electricity is determined by the relationship between the two Tin, silver
Gold, platinum
objects. Therefore, if you need to prevent the generation of electric charge, but
Sulfur
there is a possibility of contact or friction between objects, select materials which
Acetate
are located closer in the triboelectric series. On the contrary, the materials which Polyester
are located farther apart tend to generate greater electric charges. Note, however, Celluloid
that the order of the triboelectric series is not always reproducible. It may change Urethane
Polyethylene
depending on humidity, temperature, and the shape and surface condition of the
Vinyl
objects. Take extra caution regarding these factors when using the table for real
Negative (-)
Silicone
situations. PFA
CHAR ACTERISTICS OF ELECTRICIT Y

Even if objects of the
When a charged object approaches another charged object, they repel each other same material are rubbed
together, one becomes
positively charged and the
if they have static electricity of the same polarity, and they attract each other if other becomes negatively
charged. The amount of
they have static electricity of different polarities. This force is called the Coulomb electric charge for this case
tends to be smaller than the
force. The Coulomb force is always applied to every object which is charged with case in which an object is
rubbed against a
different material.
static electricity, and this often causes problems. For example, the cause of the
problem when films or glass plates stick together in manufacturing facilities is the
attracting force caused by electric charges with different polarities. When objects
are charged with the same polarity, problems will arise in which they cannot be
properly transported to specified positions or components may be flicked away
due to the repelling force. Defective products or incorrect delivery may result.
Airborne dust and particles are another cause of problems because most of them
are charged either positively or negatively. Dust and other charged particles drift
in the air and can adhere to any charged object. Manufacturing facilities including
the coating, evaporation, or glue application processes in particular, suffer from
faulty appearance caused by the adhesion of dust and particles.
Example of problems caused by static electricity
1. Parts become stuck in feeder bowls 2. Products are not ejected properly 3. Problems with double-fed material 4. Irregular coating due to dust adhesion.
from moulds. exists due to static charges.
In manufacturing facilities, static electricity can cause a variety of problems, often without anyone understanding the cause. These include sudden stops of machines or defective products.
1- 4 AMOUNT OF ELEC TRIC CHARGE AND ELEC TRIC FIELD
When an electric charge is placed in an electric field, the charge is [Figure 1-4-1]:
Movement of electrons at the atomic level
moved by a force applied to it. This movement is called an electric
current. The electric current shows a flow from the place with
Object A
more electrons (high potential) to the place with fewer electrons
(low potential). When an electric current flows through an object,
an electric field always exists. Every object contains something
that carries electric charges. Electricity has positive and negative
Object B
polarities. An object consists of atoms, and an atom contains small (Before contact)
particles charged either positively or negatively. Normally, these

particles maintain balance in a nucleus, making it electrically neutral.
If an object makes contact with another object, electrons start moving
as shown in Figure 1-4-1. Consequently, the object which receives
electrons becomes negatively charged, and the object which emits Object A
electrons becomes positively charged. This exchange of electrons is

the major cause of a lot of electrostatic problems.
Object B
COULOMB’S L AW (During contact)
As described above, when charged objects move closer, a force

is generated between the objects: Objects which have the same
polarity repel each other, and objects which have different polarities
attract each other. This electrical force is called the “Coulomb force”
(Unit: N), and “Coulomb’s law” shows the relationship between the Object A
amount of electric charge and the force as follows:
Charging by contact
Object B
(After contact)
In the microscopic world, nuclei emit or receive electrons

from each other.
1. THE BASICS OF STATIC ELECTR ICIT Y
The electric charge of an object that is too small to measure its size is called a point charge. Assume that
point charge A, which has the amount of charge of Q [C], is approached by point charge B, which has the
amount of charge of Q’ [C], at a distance of r [m] in a vacuum. When Coulomb’s law is used to calculate
the force of static electricity F, the force is inversely proportional to the square of r [m], which is the distance
between B and A, and is proportional to the product of Q and Q’, which is the amount of charges A and B.
The proportionality constant Ɛ is the dielectric constant of a vacuum (8.85 x 10 -12 [F/m]: farad per meter).
The Coulomb force acts as a repelling force when the polarities of the two charged objects are the same,
and as an attracting force when the polarities are different. The force can be expressed in kilograms when it
is divided by the acceleration of gravity, 9.8 [m/s2].
EXAMPLE
When two point charges of 1 [C] and -1 [C] are placed at a distance of 1 [m],
the force of static electricity F can be calculated as follows:
This indicates an operating force of about one million ton-force, which is an equivalent to the force required
to lift an object of one million tons. The value of 1 coulomb [C] indicates an extremely large force. In real-life
situations, they often use the value around 10 -5 [C], which is the amount of charge when a
square polymeric film measuring 1 x 1 [m] is charged by friction.
COULOMB’S L AW
It is said that Coulomb’s law was discovered by Thales, a Greek philosopher (B.C. 640-546).
Coulomb (1739-1806) is the person who officially formulated the theory into a law and published it in 1785.
ELECTRIC FIELD
An electric field is the area which surrounds a charged object and [Figure 1-4-2]: Electric field
has forces applied to the electric charge. For example, when a point
charge exists at a certain place, the space surrounding this charge
acquires specific properties. If another point charge is brought to this
location, the force of the space is applied to the latter point charge.
Therefore, an electric field can be considered as “the reach of an
electric charge”. As Figure 1-4-2 shows, the further the distance from
the centre of the electric field, the smaller the force. The strength of
an electric field is called “electric field strength”. As shown in Figure
1-4-2, the electric field strength spreads outward from the centre Due to the operating force of an electric field,
an electrical force is applied to another electric
charge existing in the same location.
of the field and becomes weaker at points further away from the The further the distance from the centre, the
weaker the electric field strength becomes.
centre. Since an electric field has a property of operating in specific
directions, it is expressed with a vector. Not only the strength but
also the direction is required to express an electric field.
When a point charge of Q [C] exists in a space and force F [N] is applied to the charge, the electric field
strength can be expressed as:
E=F/Q [V/m]
The unit of an electric field, [V/m], expresses the potential difference per unit distance.
By inverting this formula, it can be expressed as follows:
F=QE [N]
This indicates the force applied to the other electric charges placed in the electric field.
This is the Coulomb force.
Consequently, the electric field strength created by the point charge is expressed as follows:
When a point charge with the amount of charge Q [C] is positioned, the electric field strength of the
surrounding space is inversely proportional to the square of r [m], the distance from the point charge.
1-5 LINES OF ELEC TRIC FORCE

An electric field points away from a positive electric charge and toward a negative charge. As shown in Figure
1-5-1, the lines of electric force are imaginary lines representing the directions of the electric field vectors.
The directions of the lines show the direction of the electric field, away from positive charges toward negative
charges. As Figure 1-5-1 (c) shows, the lines of electric force of a charged object (conductor) are emitted
perpendicularly from the surface. When the electric surface charges of a
charged object exist in the same density, the intervals between the lines of electric force are also the same.
The density expresses the level of the potential. The electric field is strong where there are many lines of
electric force at narrower intervals; and the field is weak where there are less lines at wider intervals.
[Figure 1-5-1]: Lines of electric force
(a) (b) (c)
Lines of electric force of a positively-charged Lines of electric force in a space where two point charges Lines of electric force of a charged
point charge exist which are charged positively and negatively. object (conductor)
(d)
Lines of electric force in a location where a conductor exists near

a charged object
GAUSS’S THEOREM
When an electric charge exists in an electric field, you can use “Gauss’ theorem” to calculate the electric field
strength from the amount or form of the charge. It helps to provide countermeasures against electrostatic
problems by calculating the electrical force which the approaching charged object applies to the electric
field. Table 1-5-2 shows formulas based on Gauss’ theorem.
[Table 1-5-2 ] Calculation of electric field based on Gauss’ theorem
Form of electric charge Amount of charge Electric field [V/m]

Point charge Q[C] E=Q/4πƐor 2
Line charge λ[C/m] E=λ/2πƐor
E=σ/Ɛo Conductor
Area charge σ[C/m 2 ]
E=σ/2Ɛo Insulator
Cylinder E=ρr/2Ɛo Inside the cylinder

(charges are uniformly distributed ρ[C/m 3 ]
inside the cylinder) E=a2/2rƐo Outside the cylinder
Sphere(charges are uniformly distributed E=ρr/3Ɛo Inside the sphere

ρ[C/m 3 ]
inside the sphere) 3
E=σ /3Ɛor 2
Outside the sphere
r : Distance from the center of the charged object
a : Radius of the charged object
Ɛo : Dielectric constant of a vacuum
As the table shows, when Gauss’ theorem is used to calculate the electric fields surrounding a point or line
according to the distribution of electric charges, the dielectric constant of the charged object is inversely
proportional to the electric field strength. The density of the lines of electric force is proportional to the electric
field strength. As a result, if an object has a pointed tip, the density of the electrical force is higher at the tip,
creating a stronger electric field.
EXAMPLE
Calculate the electric field strength which provides a point charge of 1 [C]
when the distance between the point charge and electric field is 1 [m]:
This is about 1,000 times stronger than the dielectric breakdown strength in the air of 3 x 106 [V/m]. Such
strength is equivalent to the electric discharge caused by lightning, and is not practical.
When a plastic surface is rubbed with a cloth, the amount of electric charge is approximately 10 -5 [C/m2]
per unit area. The strength of the electric field applied to the surface is calculated as follows:
(Gauss’ theorem: E=σ/Ɛ[V/m] )

σ : Surface charge density of a charged object [C/m2])
1- 6 ELEC TROSTATIC C APACIT Y
The potential and electric charge of a charged object have the following proportional relationship:
Q=CV [C]
The proportionality constant C is called electrostatic capacity and is expressed in the unit F (farad).
When the amount of charge is 1 [C] and the potential difference is 1 [V], the electrostatic capacity is 1 [F].
This unit, however, is still too great for practical use and the following units are generally used: 1F=106µ=1012pF
Figure 1-6-1 explains electrostatic capacity by comparing it to the capacity of a container of water. The
amount of water in a container is comparative to the amount of electric charge; the water level is comparative
to the potential and the bottom area of the container is comparative to the electrostatic capacity. When water
is poured into a small container, the water level quickly rises. When the same amount of water is poured into
a container with a larger bottom area, the water level rises less. Consequently, when a charged object is
thought of as a container which holds electric charge, electrostatic capacity expresses the size (capacity) of
the container. In this example, the difference between water and electrons is that water flows from the place
where the water level is higher to the place where the water level is lower until the water levels become the
same. For electrons, the potential of the place where electrons are emitted rises, and the potential of the
place where electrons are received decreases. The former means a positive charge, and the latter means a
negative charge.
[Figure 1-6-1]: Electrostatic capacity

CALCUL ATION OF ELECTROSTATIC CAPACIT Y compared to water level
Electrostatic capacity can be calculated using the following formulas

according to the size and shape of the charged object and other
conditions.
[SPHERICAL CONDUCTOR]
When electric charge Q is applied to a spherical conductor with a radius
of r [m], the surface potential is expressed as V=Q4πƐor[V], and the
electrostatic capacity is calculated as C=Q/V=4πƐor[F].
[T WO CONDUCTIVE PL ATES POSITIONED IN PAR ALLEL]

Amount of water: Amount of charge
As shown in Figure 1-6-2, when electric charges +Q and -Q are applied Water level: Potential
Bottom area: Electrostatic capacity
to two conductive plates which have an area of S[m2] and are positioned
in parallel with an interval of d[m], the electric field strength operating
[Figure 1-6-2]: Electrostatic capacity of
between the electrodes is calculated as follows: two conductive plates positioned in parallel
(Charge density σ= Q/S)

Since the potential difference between the electrodes V is calculated as
V=Ed=dQ/SƐo, the electrostatic capacity is expressed as follows: With two conductive plates which have an area of S
and are positioned in parallel with an interval of d,
electrostatic capacity C can be expressed as Ɛ0S/d [F].
If an insulator exists between the conductive plates (relative dielectric constant of the insulator:Ɛs), the
electrostatic capacity is calculated using the following formula:
EXAMPLE1
Electrostatic capacity of a charged object:
[Figure 1-6-3 ] Electrostatic capacity of a
As Figure 1-6-3 shows, when several conductors move closer to a charged object
conductive object and they are grounded, the sum of their electrostatic
capacity is the electrostatic capacity for the object.
EXAMPLE2
Electrostatic capacity of an insulator:
This is a case where a conductive plate is in close contact with the
back of an insulative film and the plate is grounded. If an insulative [Figure 1-6-4 ] : When a conductive plate
is in close contact with the back of an
film with a thickness of d [m] (relative dielectric constant:Ɛs) is in close insulative film
contact with a grounded conductive plate, and if an electric charge Q
[C/m2] is applied to the front surface of the film, the back surface of
Relative dielectric constant:Ɛs
the film is charged with the same amount of charge of the opposite
Thickness: d
polarity of the conductive plate. The electric charges are aligned when
If the surface of the film is charged, the charge of
two plates positioned in parallel are charged at the charge density σ, the opposite polarity appears on the surface of
the metal plate due to electrostatic induction. The
as shown in Figure 1-6-4. electric charges are aligned as in the case of the
plates positioned in parallel.
The electric surface charge of the insulator Vs is expressed as follows:
EXAMPLE3
Electrostatic capacity of insulative films with different thickness:
[Figure 1-6-5 ] : Insulative films with
When a polyimide film (thickness: 100 [µm], Relative dielectric constant different thicknesses
Ɛs = 3.3) is in close contact with a grounded conductive plate as shown Thickness:
100 µm
in Figure 1-6-5, and when the surface charge density is considered to

Relative dielectric constant Ɛs = 3.3
be σ = 1 x 10 -5 [C/m2], the surface potential is expressed as follows:
Ɛs = 3.3 1 mm
When the thickness of the film is different, the

surface potential (per unit area) greatly varies
When the thickness of the film is changed to 1 [mm] under the same although the relative dielectric constant and the
charge density are the same.
conditions,
Consequently, when the thickness of the film is different, the surface

potential greatly varies although the relative dielectric constant and the
charge density are the same.
As previously described above, countermeasures against static electricity require not only focusing on the
amount of electrostatic charge, but also reducing the influence of static electricity by improving the conditions.
For example, place a charged object close to a grounded conductor as often as possible, or ground more
than one point. These measures decrease the surface potential and weaken the electric field, preventing the
generation of static electricity. The electrostatic discharge, which often occurs on the surface of charged
insulative film, may cause serious electrostatic problems if several electric charges abruptly discharge their
electricity. Consequently, it is ideal to adjust the electrostatic capacity of the charged section to a smaller
value while the object is being charged, and to adjust it to a greater value after the object has been charged.
1-7 CONDUC TORS AND INSUL ATORS

There are some objects which easily conduct electricity and others that hardly conduct electricity. In
general, objects through which electric current flows easily when voltage is applied, such as metals, are
called “conductors”. Objects through which an electric current hardly flows, such as plastics, are called
“insulators”. Objects which have resistance between them are called “semiconductors”. Conductors such
as metals consist of positively charged protons and negatively charged electrons. Protons are fixed to the
nucleus and hardly move while electrons move freely and maintain a neutral state. When these conductors
are affected by something such as contact with another object, an electric field is formed around them. This
allows the electrons to move across objects. The negative electrons flow in the opposite direction of the
electric field strength, while the positive protons do not move. Consequently, the positively charged conductor
lacks electrons, and the negatively charged conductor has excessive electrons.
In insulators, the flow of an electric current is restrained and the electrons do not move across objects.
If some electrical force is applied to an insulator, the electric charges gather on the surface, making the
insulator become partially positively or negatively charged. Some insulators, however, have properties which
allow the movement of some electric charges depending on the temperature at which an electric field is
applied. This is caused by the fact that the electrons are moved by the vibration of molecules resulting from
the high temperature of the material. The movement of electric charges after the generation of static electricity
is evaluated with Ohm’s law. When the electric field strength of a material at a certain point is E and the
density of the electric current perpendicular to the electric field strength is б, б is proportional to E at a given
temperature. This is expressed as follows:
E=ρxб
(ρ represents volume resistance.)
Table 1-7-1 shows the resistance values of typical materials at room temperature.
These values are important when considering the electrostatic properties of materials.
[Table 1-7-1]: Volume resistance
Material Resistance [Ω-m]

Silver 1.6 x 10 -8
Copper 1.7 x 10 -8
Aluminium 2.9 x 10 -8
Iron 1.0 x 10 -7
Dry wood 3 x 10 8
Glass 2 x 1011
Rubber 3 x 1014
Polystyrene 1 x 1017
2. VAR IOUS ELECTROSTATIC PROBLEMS
2-1 STATIC ELEC TRICIT Y FELT BY THE HUMAN BODY
2-2 ELEC TROSTATIC PROBLEMS IN EACH INDUSTRY
2-3 MECHANISM OF ELEC TROSTATIC BREAKDOWN
PROBLEMS CONCERNING SEMICONDUCTOR DEVICES
ELECTROSTATIC DISCHARGE ( ESD) MODELS
CHARGED OBJECTS CAUSING ELECTROSTATIC BREAKDOWN
2- 4 MECHANISM OF ADHESION BY ELEC TROSTATIC FORCE
ELECTROSTATIC FORCE OPER ATING ON OBJECTS

HAVING A L ARGE R ATIO OF ”SURFACE AREA / WEIGHT”
ELECTROSTATIC FORCE OPER ATING PL ANE-SURFACED OBJECTS
ELECTROSTATIC FORCE OPERATING BETWEEN A CONDUCTOR AND AN INSULATOR
STATIC ELIMINATION EX AMPLES DEALING WITH DUST-REL ATED PROBLEMS
2-5 IGNITION AND EXPLOSION C AUSED BY ELEC TROSTATIC DISCHARGE
ELECTROMAGNETIC INTERFERENCE ( EMI )
2-1 STATIC ELEC TRICIT Y FELT BY THE HUMAN BODY
Since the human body has a low amount of capacitance, it becomes charged by moving around without being
grounded. In an actual workplace, there are many opportunities for the human body to become charged
with static electricity, such as by sitting and then standing up (contact with and separation from a chair),
or by walking around. When the human body becomes charged, electrostatic charges accumulate inside
the body and cause many problems. If a charged worker carelessly touches static-sensitive electronics
components such as semiconductors, an electrostatic breakdown occurs. Contact between a human body
and a charged object causes electrostatic discharge, resulting in the generation of noise. Such problems may
cause malfunctions in computer devices.
Table 2-1-1 shows the relationship between the potential charge in a human body and the magnitude of the
shock. The potential of the charge when people feel a shock is 3 kV. When the charge exceeds 10 kV you
would feel very strong pain. Although static electricity is constantly generated, a charge around 1 kV is hardly
felt by the human body. In manufacturing facilities, however, static electricity of 1 kV or less causes many
problems without workers realizing, resulting in defective products or problems in processing.
Table 2-1-1: Relationship between the potential charge in a human body and the magnitude of the shock
Potential charge in human body [kV] Magnitude of shock
1.0 Feel nothing.
2.0 Feel something around the fingers, but no pain.
3.0 Feel a shock like the sting of a needle.
5.0 Feel pain in the palm and along the forearm.
6.0 Feel strong pain in the fingers and the upper arm feels heavy.
7.0 Feel strong pain and numbness in the fingers and palm.
8.0 Feel numbness in the palm and along the forearm.
9.0 Feel strong pain in the wrist and numbness in the hand.
10.0 Feel pain and the flow of electricity in the entire hand.
11.0 Feel strong numbness in the fingers and strong shock in the entire hand.
12.0 Feel a strong blow in the entire hand.

"Safety Guideline for Static Electricity" by National Institute of Industrial Safety
2-2 ELEC TROSTATIC PROBLEMS IN EACH INDUSTRY

The problems caused by static electricity are not limited to the electric/electronics device industry, they now affect
every industry. The problems include product damage during the chip-mounting process in the semiconductor industry,
different products mixing in the electronics component industry, and two sheets of film being taken out instead of one
sheet in the plastic industry. All of these problems are caused by static electricity. Table 2-2-1 shows examples of major
electrostatic problems categorized by industry.
Table 2-2-1: Major electrostatic problems categorized by industry
Industry Objects being charged Example of problem
Damage to circuits, deteriorated characteristics,

Package, internal circuit
decreased yield
Semiconductor, Facilities, packaging

Defective products found after shipment
LCD materials, workers
Glass panel, workers, Damage to transistors, breakage of glass panels

facilities during manufacturing
Insulating materials, Damage to circuits/devices, malfunction of circuits,

Electric/electronics
workers, etc. suspended computer operation, malfunction of robots
Fiber Defective strand of raw thread, entangled or broken thread
Dust adhesion, entanglement of film around a roller,

Chemical Film electrostatic discharge (ignition source, electric shock,
pinhole formation)
Dust adhesion, adhesion/repulsion between products,

Other
products clinging to equipment
Ignition/explosion inside an oxygen tank, ignition of

Medical Clothes, etc.
anaesthetic gas
Agglomeration, scattering, sieving failure, electrostatic

Powder
discharge (dust explosion, electric shock)
Dust adhesion, electrostatic discharge

Other Transfer pipe
(ignition source, electric shock)
Printing failure due to ink spattering, several sheets of paper

Paper
being stuck together, unwanted printing on back
As described in the previous chapter, these problems are caused by the generation of static electricity. The
existence of electric charges leads to the formation of an electric field, and the charged objects entering the
electric field cause attraction or repulsion due to the Coulomb force. In daily life, sometimes clothes cling to
the body or Styrofoam particles adhere to surrounding objects. These phenomena are also caused by the
Coulomb force. In these cases, when static electricity is charged in objects which have a large ratio between
surface area and weight (such as a thin film), or which are relatively light weight (such as Styrofoam), the
resulting electrical force is far greater than the gravity applied to the objects, resulting in electrostatic problems.
The mechanism is as follows: When small (light weight) objects are charged with the same polarity, they repel
each other. When these charged objects move close to another conductor, electrostatic induction occurs
in the conductor, and the conductor shows the polarity opposite of the charged objects. Consequently, an
attracting force is generated between the conductor and the electric charges because they have the opposite
polarities. If the charged objects are lighter than the conductor, they are attracted to the conductor. If they are
heavier than the conductor, they attract it. In a clean room, you can see small particles of dust adhere to the
metal sections in the facility, sometimes making large clusters. This is because the airborne dust particles that
are charged or polarized by nearby charged objects are attracted to the surface of charged objects which
are heavier than the particles. Soft materials, such as films, tend to be charged with more electricity than hard
materials even if the applied charge is the same. This is because the area of effective contact is greater.
Elec trostatic problem examples by industr y
Semiconductors Electronics components

(Clogged capillary) (Clogging of small parts due to static electricity)
Capillary
Small parts
Semiconductor/LCD/LCD-related products Chemical

(Dust adhesion to glass substrate) (Dust adhesion to the film being wound)
LCD
substrate
Film
2. VARIOUS ELECTROSTATIC PROBLEMS
2-3 MECHANISM OF ELEC TROSTATIC BREAKDOWN

An electrostatic breakdown is a phenomenon in which electric components, such as ICs (Integrated Circuits),
are damaged by static electricity. When an electrostatic breakdown occurs in an IC, high-voltage electricity
temporarily flows inside due to electrostatic discharge, breaking the thin film of high-insulating silicon oxide
(insulation layer) and damaging the internal circuit.
Recent electronics components have been designed to be lighter and smaller. As a result, they are extremely
sensitive to electrostatic problems. MOS semiconductors, for example, lose their "semiconducting" properties
when voltage of only 80 to 100 V is applied. You can imagine how small this amount is, since human beings
feel only a shock with a voltage around 3 kV.
In reality, components can break due to the application of even lower voltages in cases where the oxidation
film is insufficient. As the circuits of semiconductor devices are designed to be more minute and complicated,
their wires are placed at narrower intervals. Together with the miniaturization of the devices, these factors
decrease the immunity against static electricity, leading to the necessity for more sophisticated electrostatic
control measures.
PROBLEMS CONCERNING SEMICONDUCTOR DEVICES

Figure 2-3-1 shows examples of electrostatic problems concerning semiconductor devices.
(1) When wafers are taken out of a wafer rack:

An electrostatic breakdown may be caused by an electrostatic discharge since wafers are charged by
separation while they are transferred or when they are removed from a wafer rack.
(2) When protective films are peeled off from substrates:

An electrostatic breakdown may occur due to the charges accumulated by separation charging when
protective films are peeled off from the LCD glass substrate.
(3) When chips are removed in the chip-mounting process:

An electrostatic breakdown may occur due to the charges accumulated by separation charging when
chips are removed from a wafer sheet.
Examples of electrostatic problems concerning semiconductor devices
1. When wafers are taken out of a wafer rack 2. When protective films are peeled off 3. When transporting chips
from substrates
Wafer rack Protective film Chip mounting
ELECTROSTATIC DISCHARGE ( ESD) MODELS
There are three types of charged objects which may cause electrostatic
CLASSIFICATION
breakdown of semiconductor devices: Workers, facilities, and
semiconductor devices themselves. These causes can be expressed as
“the Human Body Model (HBM)”, “the Machine Model (MM)”, and “the
Charged Device Model (CDM)”.
CHARGED OBJECTS CAUSING ELECTROSTATIC BREAKDOWN

When a human body charged with static electricity touches the lead wires Human Body Model (HBM)
of a device, the device becomes charged by the resulting discharge. A

Semiconductor
discharge current flows through the circuit at the instant when the device is device
grounded, resulting in an electrostatic breakdown. Like this case, the model Electric current
When a worker charged with static electricity carelessly moves

of the discharge from an external object charged with static electricity to a closer to a semiconductor device, an electrostatic discharge
occurs between the terminals of the device and the finger of the
semiconductor device where the external object is a human body is called worker. (Workers tend to be charged extremely easily because
they walk around and perform various operations.)
“the Human Body Model (HBM)”. When the external object is a human
body, a large amount of charges are emitted from the body, and the Machine Model (MM)
discharge energy is far greater compared to the case of insulators. When

Semiconductor
facilities are the object, such as machines, the phenomenon is called “the device
Machine Model (MM)”. If the machines used in the manufacturing process Electric current
Conductor
are not grounded, even conductors accumulate static charges. When
When a semiconductor device touches a conductor charged
these charged machines touch the external terminal of a semiconductor with static electricity, the device becomes charged. When the
device is grounded, an electrostatic breakdown occurs.
device, an electric current flows through the device, resulting in an

Charged Device Model (CDM)
electrostatic breakdown. Furthermore, even when substantial measures
are taken against electrostatic discharge (ESD) of the HBM and MM, there
Semiconductor
are other possibilities for breakdown due to ESD occurring during the device
Electric current
manufacturing and assembly processes of semiconductor devices. Such
When the internal circuit of a semiconductor device becomes
breakdown is caused by ESD occurring when semiconductor devices charged and the terminal of the device approaches a nearby
conductor, a discharge occurs and the internal circuit is
damaged by an electrostatic breakdown.
themselves become charged. This phenomenon is called "the Charged
Device Model (CDM)". In the CDM, the devices become charged by friction
on their surfaces, and electrostatic induction occurs in the conductors,
such as circuits and lead wires, due to the external electric field. Under
these conditions, when the lead wires are grounded, the internal electric
field changes sharply and a discharge current flows through the circuit,
resulting in an electrostatic breakdown.
3000˚C
Section min. [Graph]
where Melting point of wiring
chrome material vs. heat generated by
evaporated electrostatic discharge
Bridge Photo: Conductor traces

forming a bridge due to
electrostatic damage Temperature at
electrostatic discharge
The traces are heated by electrostatic
discharge and melt, resulting in a 1083˚C Melting point of copper
bridge between the traces. The gaps
Normal between traces are becoming narrower Melting point of
chrome 660˚C aluminium
due to the recent trend toward finer
circuit patterns. This increases the
possibility of electrostatic discharge.
*Copper and aluminium are typical wiring materials.
2- 4 MECHANISM OF ADHESION BY ELEC TROSTATIC FORCE

As described earlier, when charged objects approach each other, a force operates between them to make the
static charges of the same polarity repel, and the charges of the opposite polarities attract each other, like the
N and S poles of a magnet. This force is called the Coulomb force and this attracting/repelling force operating
on the charged objects causes various electrostatic problems. This section describes the mechanism of the
electrostatic force according to the type of operation.
ELECTROSTATIC FORCE OPER ATING ON OBJECTS

HAVING A L ARGE R ATIO OF "SURFACE AREA / WEIGHT"
For objects having a large ratio of "surface area/weight" such as minute particles,
fiber, or thin films, the Coulomb force becomes much greater than the gravity
operating on the objects. Figure 2-4-1 shows the mechanism of static electricity
which makes a charged particle attract and adhere to the surface of a film. When
the surface of a film (insulator) is charged and the charge density on the surface is Insulator
σ[C/m2], the electric field can be expressed as E=σ/2Ɛo[V/m]. When the amount
[Figure 2-4-1]:
of charge of the charged particle is Q [C], the particle moving closer to the film is Attracting force operating
on a charged particle
attracted to the charged film surface by a force of F=Qσ/2Ɛo[N].
F=QE
For example, the amount of charge when the surface of an insulating sheet is rubbed is about 10 -5 [C/m2]
per unit area. When this value is assigned to the formula, the electric field on the charged surface is
approximated as F=5.65 x 105 [V/m]. Assume that a minute particle which has a diameter of approximately 1
[µm] and a surface charge of 10 -5 [C/m2] (these values are fairly realistic) moves closer to the insulating sheet.
Since the particle has a charge of Q=3.14 x 10 -17 [C], it is attracted by a force of approximately (F=QE) F=1.8
x 10 -11 [N]. If this particle is assumed to be a sand particle with a specific gravity of 2 to 3, this force is about
1,200 to 1,700 times greater than the gravity acting on the particle. This is why dust clinging to the surface of
a film cannot be easily removed.
ELECTROSTATIC FORCE OPER ATING PL ANE-SURFACED OBJECTS

Figure 2-4-2 shows an example of how plane-surfaced objects, such as
positively charged films and negatively charged sheets, attract each other. The
charge density of the charged surfaces is expressed as σ[C/m2], the electric
field on the surface is expressed as E, and the electrostatic force operating on
the surfaces per unit area is expressed as F. The lines of electric force emitted
from the positive charge on the surface go out perpendicularly and reach the
negative charge on the other surface. You can see that the electric field in [Figure 2-4-2]:
this area is uniform. When either the positively or negatively charged plane- Adhering force operating
on plane-surfaced objects
surfaced object approaches the other, the electric field is concentrated only
between the surfaces, and its force can be calculated as F=ƐoE2/2. The adhering force generated in this
electric field can be expressed as E=σ/Ɛ[V/m]. If the charge density of the film surface is assumed to be σ
= ±1 x 10 -5 [C/m2], the electrostatic force can be calculated as follows:
Consequently, an adhering force of approximately F=0.58 [kg/m2] operates per unit area.
When the charge density is doubled, the force of the electric field is also doubled and the adhering force is
quadrupled. If the value is increased by one digit, the electrical force increases by 100 times. When charged
films in contact are separated, the charge density may become as high as 10 -3 [C/m2]. As a result, an
extremely powerful electrostatic force may operate on the surface.
ELECTROSTATIC FORCE OPER ATING

BET WEEN A CONDUCTOR AND AN INSUL ATOR
When a charged insulator, such as dust, comes close to a conductor, such as [Figure 2-4-3]: Image force
metal, induction charging occurs inside the metal and the surface of the metal
shows a sign of being charged. The potential caused by this electrostatic
induction and the static electricity charged in the dust generates attraction
according to the Coulomb force. Figure 2-4-3 shows the attracting force when Metal wall
a point charge of Q [C] approaches a metal wall at a distance of d [m]. The

charged insulating particle in front of the metal wall receives an attracting [Figure 2-4-4]:
force to the wall due to the electrostatic induction that occurred in the wall. Adhesion and repulsion of the
charged particle
Under these conditions, a point charge -Q [C], which is the same electrostatic
force as the approaching point charge, is generated inside the metal wall. This
is called an "image charge", and its force is called an "image force", which can
be expressed as the following formula:
When the charged insulating particle makes contact with the metal wall, it
transfers its charge to the wall and the attracting force disappears. If another
charged object exists in proximity or if the metal wall is not grounded, an
electric field is formed on the wall surface. The particle is then charged with [Figure 2-4-5]: Attraction and
repulsion of an insulator
the same polarity as the metal wall, and repels and moves away from the wall.
Figure 2-4-4 shows the adhesion and repulsion of the charged particle.
How about the situation where a point charge exists in front of the surface of
an insulator?
In this case, the operating force is also as great as the image force. If the
Insulator Insulator
dielectric constant of the insulator is greater than that of the space or material
in which the point charge exists, the force is attraction. If it is smaller, the force
is repulsion. [Figure 2-4-5]
STATIC ELIMINATION EX AMPLES DEALING WITH DUST-REL ATED PROBLEMS
APPLICAT ION 1
A static eliminator attached to the tip of an air
gun enables air purge and static elimination
simultaneously. Directing a strong air jet is also
effective to blow off dust.
APPLICAT ION 2
The air supplied to a static eliminator blows off
dust or other foreign substances from containers.
Since the air is released along the entire bar, it is
possible to eliminate static electricity and clean
dust in a wide area.
APPLICAT ION 3
Static eliminator (SJ-H108A)
A static eliminator is installed inside an air-shower

room. Since it eliminates the static electricity from
dust, the dust is easily removed from workers. If
a static eliminator is not installed, workers enter
the clean room space with dust tightly clinging
to them, resulting in the degradation of the clean
state.
Air-shower room
Adhesive tape (commercial product)
2-5 IGNITION AND EXPLOSION C AUSED BY ELEC TROSTATIC DISCHARGE
So far, the description has mainly focused on the problems caused by electrostatic discharge such as
damage to semiconductor devices or malfunctions in machines. Electrostatic discharge causes a lot of
problems in various industries and production areas, and may often lead to more serious accidents, such
as ignition or explosion.
In industries using polymeric materials, which have high insulation resistance, a product such as a
polymeric film makes contact with many metal rollers, becomes charged at high density, and causes an
electrostatic discharge at the instant it separates from the rollers. When large film becomes charged, the
electric field surrounding the nearby conductors also becomes greater, resulting in the possibility of ignition
in a flammable atmosphere.
In industries using flammable gases, sparking may occur with the mixture of flammable gas and air, igniting
the gas and causing an explosion. When this happens, it is assumed that the energy of the flammable gas
has exceeded the threshold causing a discharge.
Table 2-5-1 shows the minimum ignition energy, which is the threshold when sparking occurs in a mixture
of flammable gas and air. The ignition of gases, however, is based on a probability. The minimum ignition
energy is not absolute, but rather an assumed guideline for the danger level.
The ignition energy of particles is relatively large compared with gases. It is, however, also dangerous if
conductive particles are charged or the density of charged particles is high. The finer the particle is, the
smaller the ignition energy becomes, resulting in greater danger of explosion due to electrostatic discharge.
The danger becomes far greater in industries using petroleum. Irregular activities such as cleaning the
inside of an oil tanker may cause an electrostatic discharge, leading to an explosion. In the medical
industry, an electrostatic discharge caused by charged clothes may cause ignition during treatments using
oxygen tanks or oxygen tents.
Table 2-5-1: Minimum ignition energy of gases
Name Chemical formula Minimum ignition energy [mJ]
Hydrogen H 0.019
Acetylene HC=CH 0.019
Ethylene CH 2 =HC 2 0.096
Methanol CH 3OH 0.14
Benzene C6H6 0.20
Butane C 4H10 0.25
Ethane CH 3 CH 3 0.25
Propane CH 3 CH 2 CH 3 0.25
Methane CH 4 0.28
Acetone CH 3 COCH 3 1.15
ELECTROMAGNETIC INTERFERENCE ( EMI )

Electromagnetic waves are generated by electrostatic discharge due to abrupt pulse discharges. These
electromagnetic waves are the source of the noise affecting measuring instruments or communication
equipment in production sites, and interfere with the system operation in many ways such as malfunctions or
system crashes. On dry winter days, for example, when a person suddenly stands up at a steel desk, their
body touching the desk causes a strong electrostatic discharge. If the person is using a personal computer
on the desk, the machine may break down. With personal computers, damage to internal devices seldom
occurs. In a case, however, where various computer devices control the process in a production factory,
malfunctions caused by electromagnetic interference may lead to significant loss. Since the electromagnetic
waves generated by electrostatic discharge include a wide frequency of components, the range of the
influence is great.
3. THE BASICS OF STATIC ELIMINATION MEASURES
3-1 MEASURES FOR CONDUC TORS
GROUNDING / WRIST STR AP
ANTI-STATIC FLOOR MATERIAL
ANTI-STATIC FLOORING
ANTI-STATIC SHOES
ANTI-STATIC CLOTHES
3-2 MEASURES FOR INSUL ATORS
MAKING THE OBJECT CONDUCTIVE
STATIC- CHARGE PREVENTION EFFECT OF COATING T YPE ANTI-STATIC AGENTS
HUMIDIT Y CONTROL
SELF-DISCHARGE T YPE
VOLTAGE-APPLICATION T YPE
SOF T X-R AY T YPE
3-1 MEASURES FOR CONDUC TORS

As described in the previous chapters, when two objects make contact, the separation of electric charges
always occurs, generating static electricity. The best measure to prevent problems caused by static electricity
is to prevent the generation of static electricity. That is, however, impossible in a real-world situation.
The most practical method is to minimize the generation of electric charges or to release the charges quickly.
To be more specific, one method is to eliminate static electricity by generating electric charges with the
opposite polarity of the charged object and thereby neutralizing the charges of the object. This is done
with a static eliminator, such as an ionizer. The other method is to release static electricity from an object by
humidification or grounding. It is necessary to combine these measures to devise a suitable method.
Anti-static measures require a full understanding of the electrical properties of the target object as well as
the environment that is effective for static elimination. In the electric industry, for example, there are various
kinds of static electricity to be managed, from the kind which may affect highly static sensitive components
such as ICs and LSIs, to the kind which use great energy to cause dust to adhere to packaging materials.
Such packaging materials usually do not require the extreme anti-static control that is required for ICs. They
may, however, require extreme control if there is a possibility that the ICs will come close to the packaging
materials. This section describes the measures when charged objects are conductive.
GROUNDING / WRIST STR AP

When the charged object is a conductor, such as a metal, [Figure 3-1-1]: Grounding resistance vs. leakage time
a typical anti-static measure is "grounding". Grounding
releases accumulated static electricity literally to the
Time constant of attenuation
"ground" by taking advantage of the fact that the earth

of electric charges [sec.]
is a large conductor whose surface potential is zero. In

other words, the ground is "a limitless absorber of electric
charges". When a charged conductor is grounded, its
charges immediately flow into the ground and are eliminated
from the object.
Figure 3-1-1 shows the relationship between the speed and Grounding resistance Ω
time of the leakage of electric charges. The time constant of The leakage time constant τ is a product of C, the capacitance of the
conductor, and R, the grounding resistance. Electric charges can
the attenuation of the charge is expressed as τ=RC, where leak almost instantly, whether the grounding resistance is 10 Ω or 100 Ω.
the grounding resistance is R[Ω] and the capacitance of

the conductor is C [F]. The value of C depends on the shape, size, and position of the conductor. Assuming
that C=1 x 10 -9 F (1000 pF, approximately 5 times larger than the capacitance of a human body) and R=1
[MΩ] (M=10 6), then τ=1/1000s.
Grounding is an easy and effective anti-static measure and is commonly used in many applications.
It is said that an electrical grounding resistance of 1 [MΩ] or less is acceptable and no other special
consideration is necessary. On the other hand, grounding is so common that people may forget to ground
machinery. Sometimes grounding even loses its ability because of unnoticed corrosion.
Grounding is effective only when the charged object is a conductor.
It cannot be used for insulators such as glass or plastic as the electrical charges cannot flow freely through
an insulator. Even when a charged insulator is grounded, the static electricity cannot be eliminated.
When a charged insulator is in contact with a grounded conductor, the [Figure 3-1-2]: Insulative film whose back
face is in contact with a grounded
static electricity of the insulator appears neutralized. When you measure conductive plate
the electrical potential of the insulator, the potential is actually lower than
the value before the contact. This contributes to the misconception that Electrostatic sensor
grounding is also an effective static elimination method for insulators

(Figure 3-1-2). The reason that the potential decreases is as follows:
When a conductor is grounded, the charges can move freely. When
a charged insulator makes contact with this conductor, the charges of Insulator
the conductor with the opposite polarity to the insulator are attracted
to the surface of the conductor. Consequently, on the contact surface When a charged insulator is in contact with a
grounded conductor, the static electricity in
between the charged insulator and the grounded conductor, the the insulator apparently disappears and the
potential becomes lower.
positive and negative charges are neutralized, and the static electricity
of both objects appears to be eliminated. In reality, however, the
[Figure 3-1-3]:
charges in the insulator have not been removed. When the insulator
Configuration of a wrist strap
is separated from the conductor, you can see that the electrostatic
Lead wire Resistor
charges that had apparently disappeared still remain in the insulator.
Thus, the electrical charges accumulated in an insulator normally are
not removed, even when the insulator is grounded. If the insulator Wrist strap
Cuff
has some conductive properties, the charges may be lost gradually
through grounding. To eliminate the electric charges in a human body,
which is extremely easily charged, grounding is effective because
a human body is a conductor. One of the methods used to ground Resistor
a human body is a "wrist strap". A wrist strap reduces the electrical

potential of the human body by grounding the skin of the worker. With To the ground
this precaution, the static electricity generated from the human body
does not affect other objects. Workers handling static-sensitive objects
must wear a wrist strap to avoid electrostatic problems. Figure 3-1-3
shows the configuration of a wrist strap. It consists of a cuff which wraps
around the wrist, its connector, lead wire, and grounding connection.
Figure 3-1-4 shows a variety of wrist straps.
[Figure 3-1-4]: Variety of wrist straps
There are a variety of wrist straps according to the configuration or purpose of use. In order to use a wrist strap
effectively, select one which securely makes contact with the skin, without causing discomfort to the wearer.
You should also take into account human safety, workability, and quality control.
The following are important points to be considered when selecting a wrist strap.
1. SOLVENT RESISTANCE
Confirm that all solvents which may be used in the work area will not deteriorate the materials in the wrist strap
or change their properties. Since a wrist strap is worn around the wrist, solvents may accidentally splash on
the cuff or lead wire.
2. SWEAT RESISTANCE
Confirm that the metal sections of the wrist strap are resistant against rust or corrosion caused by sweat from
the body. With some fibrous or plastic cuffs, salt or dirt contained in sweat accumulates due to adsorption.
This may cause contamination and/or increased resistance. Wrist straps must be tested for the potential of
rust, corrosion, and contamination.
3. EASE OF WEAR
Check if the wrist strap can be easily attached and detached. A wrist strap needs to be attached and
detached easily as well as provide a firm hold so that it will not come off during work. A certain level of hold
is required at connecting sections (between the cuff and lead wire, between the lead wire and grounding
terminal). If a wrist strap comes off too easily, ability to eliminate static will decrease. On the other hand, it
must be able to be detached immediately in cases where an excessively large current is flowing or where
other mechanical danger arises.
4. STRENGTH OF THE LEAD WIRE

Confirm that the strength of the lead wire is higher than the reference value determined in the attachment/
detachment test.
5. SERVICE LIFE
Use a life tester to confirm the replacement time of the wrist strap. The life varies depending on the structure
or breakdown mode of the wrist strap. You need to check for poor connection, cord deterioration, and stable
contact between the cuff and skin at regular intervals.
6. CRITICAL CURRENT RESISTANCE

Critical current resistance is normally set to a value less than the current value supplied from a high-voltage
power supply. Generally, it is between 1 MΩ to 800 kΩ (Wrist straps with lower resistance values may be
used for some ranges). To check the resistance, attach the wrist strap to a stainless cylinder and measure the
resistance between the cylinder and ground.
7. COMFORT OF USE
Confirm that the worker feels comfortable when wearing the wrist strap. Since wrist straps are worn directly on
the body, the wearer usually feels some amount of discomfort. Recently, such discomfort has been alleviated
by design improvements, however, various problems still remain. This includes the attachment/detachment
procedure and the weight of the strap on the wrist. Selecting proper wrist straps can alleviate some complaints
such as the cleanliness issue because the wrist strap cannot be washed, or the pain associated with skin
imprints on the wrist from the metal buttons on the cuff. It is necessary to make as many improvements as
possible so that the wrist strap does not decrease work efficiency.
In conclusion, although the main purpose of wearing wrist straps is to eliminate the static electricity accumulated
in the human body, it is important to select an appropriate device that does not decrease operability, cause
contamination, or place a burden on the worker, even during extended use.
ANTI -STATIC FLOOR MATERIAL

In static electricity control, charging from the floor in a work area is an important factor. This charging can be
caused by vibration of machinery or simply from the movement of people. The methods of anti-static control
for flooring can be broadly divided into two types: One is to prevent the charge by limiting the accumulation
of charges caused by contact with workers, and the other is to establish grounding to dissipate the generated
charges effectively.
In this section, we explore the anti-static methods for major floor materials, such as carpets, floor mats, and
tiles. Table 3-1-5 lists the structural properties and advantages of anti-static floor materials.
Table 3-1-5: Comparison of anti-static floor materials
Name Advantage Problem Electrical resistance

Good appearance, Not used for manufacturing sites in Normally about 1010 Ω,
Carpet
comfortable the electronics industry. some offer lower resistance.
Floor mat Easy installation Partial protection
Mats can move or curl easily
1) Conductive type Good anti-static property
presenting safety hazards
Humidity dependent, 107 Ω or less
2) Anti-static type Can be used on the existing floor
contamination 10 9 to 1012Ω
Anti-static agent
Can be used on the existing floor
for floor coating
Contamination, durability,
1) Conductive coating Good anti-static property 107 Ω or less
maintenance/ reapplication cost
2) Coating type Contamination, durability,
Easy application, low cost 10 9 to 1012 Ω
anti-static agent maintenance/ reapplication cost
3) Floor-specifi c Variation, humidity dependent,
Easy application, low cost 10 9 to 1012 Ω
anti-static agent maintenance/ reapplication cost
Excellent antistatic property
Good durability/permanency Cost
Anti-static flooring About 105 Ω
Some products can be used Installation in the existing facility
in clean rooms.
CARPET
Carpets are used in computer rooms or other facilities because of good appearance and comfort. However,
they are not effective for industries that require severe anti-static controls, such as IC manufacturing.
FLOOR MAT
Floor mats are suitable to control static electricity in a limited area. They are mainly used around a workbench
or a specific area in a laboratory where anti-static floor material is not used. Most of them have a two-layer
structure of rubber, vinyl, or polyolefin material with conductive carbon compound, and nitrile polymer. As
for the properties of floor mats, the installation is relatively easy. However, there are concerns regarding
contamination, durability and the safety hazard that curling or slipping mats can present.
FLOOR COATED WITH ANTI-STATIC AGENT

There are three types of anti-static agents for floor coating: Conductive coating, coating type anti-static agent,
and floor-specific anti-static agent. Conductive coating is a floor material containing conductive carbon fiber
or metal fiber. Due to its ease of use and good anti-static properties, it can be used as an anti-static measure
throughout an entire factory. However, it is not appropriate for clean rooms because of problems such as dust
generation. Coating type anti-static agent was not originally designed to be used on a floor. Consequently, it
has problems with durability and the need for a reapplication cycle. However, its low cost can be attractive.
The main type of floor-specific anti-static agent includes three types: The first is to remove wax or other debris
from the floor surface, the second is to clean the surface, and the third is to apply anti-static agent. It has an
advantage of being relatively low cost and offering good properties in the first application. The problem is
that the effective period of most products depends on humidity or other external factors, and reapplication by
specialists may cost more than anticipated.
ANTI-STATIC FLOORING
Anti-static flooring is available in two types: One is a tile/sheet type made of conductive vinyl material, and
the other is a carpet type containing metal fiber. The tile/sheet type contains conductive material evenly
distributed over the entire surface. Consequently, it offers high anti-static properties and high durability, and
is suitable for static electricity control. The cost, however, is extremely expensive.
ANTI -STATIC SHOES

Shoes are an equally important factor in a static electricity controlled area. To prevent static charge from
accumulating in shoes, you can attach heel straps or ankle straps to establish grounding. Also, anti-static
safety shoes with conductive properties can be used. The conductivity of these measures will depend on the
structure and material.
ANTI -STATIC CLOTHES

The human body and clothes are separated or insulated in terms of static electricity. Therefore, even when
the human body is grounded, the charge on clothes cannot be eliminated. There are various types of
clothing that can prevent the accumulation of static electricity. Their properties, however, largely depend on
the temperature and humidity inside the clothes. This could be due to the type of clothes underneath, the
perspiration of the person workers, and other factors. Also, even when workers wear clothes without anti-static
treatment in a static electricity controlled area, you need to measure the voltage of the static electricity being
generated. When workers wear a common type of anti-static clothes in such an area, you need to measure
the generation amount. Once you have identified this cause of static generation, additional measures must
be considered. Then think of measures according to the properties.
3-2 MEASURES FOR INSUL ATORS
MAKING THE OBJECT CONDUCTIVE

Since electricity cannot flow through insulators, grounding insulators has no effect on static elimination.
However, if a statically charged insulative object becomes conductive, grounding one end of the object easily
eliminates the charges. There are two methods to make insulators conductive: One is to cover the surface
with conductive material and the other is to mix conductive material with the insulator.
PROVIDING SURFACE CONDUCTIVITY

Providing surface conductivity means to make only the surface of an object conductive materials. This is
a typical method of static elimination for insulators because you can prevent charges in insulators without
impairing the original properties of the object. Anti-static agents are mainly used.
ACTUAL EXAMPLES ARE:

❙ Covering the surface of a polymeric material with a thin metal film which has a high electrical induction
property. This promotes the leakage of electric charges through the conduciveness of the metal layer.
❙ Applying a conductive coating containing conductive materials such as carbon black or silver particles.
❙ Making the surface of the object hydrophilic. This promotes the leakage of electric charges through the
moisture absorbed on the surface.
The disadvantage of this method is that the anti-static effect may wear off due to cleaning or deterioration of
the surface.
PROVIDING VOLUME CONDUCTIVITY

Providing volume conductivity means to make the object itself conductive by mixing conductive materials, such
as carbon fiber into a polymeric material. Since this method reliably makes the polymeric material conductive,
static electricity can be easily eliminated by grounding. Since the object itself acquires conductivity, the effect
continues permanently compared with methods to alter surface conductivity.
The disadvantage is that mixing in conductive materials may alter the original properties of the material. When
carbon black is mixed into a polymeric material, the colour becomes black and opaque, resulting in limited
applications.
This method is mainly used for storage bags to protect static-sensitive products such as PC boards or other
electronics components.
STATIC- CHARGE PREVENTION OF COATING T YPE ANTI -STATIC AGENTS

Coating type anti-static agents are used to control static electricity by applying a special liquid onto the surface
of an object. Its function is to dissipate electrical charges into the surrounding atmosphere by increasing
conductivity on the surface of the object. This has the following effects:
❙ Increases conductivity of the object surface. When two objects are charged with static electricity,
the agent promotes the exchange of electrons between the two objects. In other words, the electron
balance of the two objects is neutralized, the generation of friction charges is prevented, and the charges
on the surfaces dissipate into the air due to the surface conductivity.
❙ Has the ability to achieve a balance between the positive and negative ions on the object surface.
This is because the friction charges generated on the object surface dissipate into the air due to the
neutralization or exchange of ions.
❙ Makes an object surface smooth to prevent charges accumulated due to friction.
Table 3-2-2: Types of anti-static agents

Polymer with a functional group
Other agent
General-use organic/inorganic compound
Anti-static agent Anion surfactant

Ionic surfactant
Cation surfactant
Surfaceactive agent
Non-ionic surfactant
(surfactant)
Amphoteric surfactant
[ REFERENCE]
Principle of an anti-static spray
An anti-static spray is a simple measure against
electrostatic problems. As shown in Figure 3-2-3, [Figure 3-2-3]: Principle of an anti-static spray
an anti-static spray creates a surfaceactive agent

coating on the surface of an insulator. When the Coating of a
surfaceactive agent
Anti-static spray
agent absorbs moisture in the air, electricity can flow
on the surface. In other words, an anti-static spray
offers a mechanism for electrical flow by creating a
conductive coating on the surface of an insulator.
In manufacturing sites, anti-static sprays are often Insulator
provided next to parts feeders. They are used when ADVANTAGE: Static elimination can be achieved easily and simply.
DISADVANTAGE: The effect is not permanent.
the feeder is clogged with parts.
HUMIDIT Y CONTROL
Another measure against electrostatic concerns is humidity [Figure 3-2-4]: Relationship between electrostatic
charges being neutralized by humidity in the air
control (humidification). This method maintains a certain level
of humidity in the atmosphere so that a material becomes more Normal
conductive, when the air is dry, the decrease in conductive
Potential of charged object (kW)

moisture prevents the movement of electricity. The reason that
more electrostatic problems occur during winter than summer is Humidity
that humidity is lower and heating promotes drying. This causes

an increased ratio of defective products in manufacturing sites
due to seasonal factors. High
Humidity can be expressed with relative humidity and absolute

humidity, and the former is commonly used. The relative humidity Time (minute)
is a percentage of the actual amount of water vapour in the air, When an object is charged with a high potential, increasing
humidity allows leakage of charges into the air.
when the amount of water vapour in the air can contain without
condensation is assumed to be "1". When the relative humidity
drops below 35%, static electricity may be generated even in natural materials such as cotton or wood,
which are generally not considered to be charged materials. When the relative humidity exceeds 65%, static
electricity is hard to generate. And even if generated, it is neutralized spontaneously.
Figure 3-2-4 shows the relationship between electrostatic charges being neutralized by humidity in the air.
At high humidity, the higher the charge density on the object surface, the more quickly the charges are
released into the air. Consequently, the surface charges are reduced to a limited amount. Although the
reduction speed slows and some charges remain, you can use humidity control to decrease and maintain the
charge of an object to a level where problems do not occur easily.
The most common method of humidification is to use a humidifier. In addition to this, you can supply water
vapour or spray water on the floor. However, these methods present problems including safety concerns,
worker discomfort, efficiency, cost and the increased possibility of condensation, rust and mold.

Air consists of 78% nitrogen molecules, and a majority of the remainder is oxygen molecules. A small amount
of carbon dioxide and water vapour is also present. These molecules become ionized with positive or negative
polarity due to weather conditions such as winds, storms, lightning, radiation from the sun, or radioactive
materials on the Earth's surface.
These air ions can have either positive or negative polarity, and have the characteristic of being neutralized
by absorption of the opposite polarity. By taking advantage of this property, static eliminators (ionizers) supply
objects which are electrically charged with ions of the opposite polarity. They balance the charges of objects
with an opposite charge to eliminate static electricity. Static eliminators (ionizers) are effective not only in
neutralizing static electricity, but also in preventing materials or airborne microscopic particles from being
charged. They are often used as a supplementary measure for static elimination where humidity or grounding
cannot be used (moving equipment or insulators). They have become indispensable for anti-static control
measures. Static eliminators (ionizers) can be divided into two types according to the method of ionization of
air molecules: "corona-discharge type" and "light irradiation type". Corona-discharge type static eliminators
concentrate an electric field in a needle-shaped electrode to generate a corona discharge and eliminate static
electricity with the ionized air. These are further divided into "self-discharge type" and "voltage-application
type".
Light-irradiation type static eliminators are also called "soft X-ray type" because they use soft, or weak, X-rays.
The following sections describe the features, applications, and mechanisms of these static eliminators.
SELF- DISCHARGE T YPE

[Figure 3-3-1]: Induction charges
When a conductor (e.g. metal) with a needle-like point, such as fiber or concentrate at the needle electrode
wire, moves closer to a charged object, induction charges concentrate

at the tip. Consequently, the electric field around the tip becomes
stronger, generating a corona-discharge (Figure 3-3-1). Since the
strength of the electric field other than the area around the needle-like
point (electrode) does not exceed the dielectric breakdown strength,
the discharge occurs only at the point. When such a corona discharge
starts, ions with the opposite polarity to the charges on the object are Induction charges concentrate at the tip of the
needle electrode, making the electric field stronger.
generated, resulting in the neutralization of the electric field. Corona-
discharge type static eliminators use this phenomenon to eliminate
[Figure 3-3-2]: Structure of a self
static electricity.
discharge type static eliminator
A self-discharge type static eliminator has a simple structure in which Conductive

fibre
carbon or other conductive fiber is tied in a bundle like a brush and is
connected to the ground. (Figure 3-3-2)
A self-discharge type static eliminator consists of a
brush of thin conductive fiber which is connected to
the ground. When moved closer to a charged object,
When a charged object comes closer to the static eliminator, it generates a corona discharge. The resulting
charges with the opposite polarity to the object
neutralize the object.
electrostatic induction occurs and charges opposite to the polarity to
the object flow through the ground and concentrate at the tips of the
conductive fiber brush. When the amount of charge exceeds a certain
level, a corona discharge occurs. The resulting air ions are attracted
to the charged object and combine with the charges of the object, [Figure 3-3-3]: Ability of a self-discharge
resulting in the neutralization of the object. type static eliminator
Amount of charge after the static
No operation
Self-discharge type static eliminators are widely used because they
eliminator passes
Amount of charge
do not require a voltage source, are inexpensive, and can be installed required to start operation
easily.
A common example is the one attached near the paper discharge
port of fax machines or copy machines, in order to eliminate the static
Since a self-discharge type static eliminator
electricity from the paper. generates a corona discharge based on the electric
field created by the charge of the target object, it
does not work unless the charge of the object is
higher than a certain level.
Figure 3-3-3 shows the ability of a self-discharge type static eliminator. A self-discharge type static eliminator
creates an electric field based on the charge of the target object. The greater the charge, the stronger the
electric field becomes. For an object with a small amount of charge, a corona discharge may not occur.
Consequently, this type of static eliminator cannot completely eliminate the static electricity of an object, and
is not suitable for operations requiring high accuracy.
VOLTAGE-APPLICATION T YPE
A voltage-application type static eliminator neutralizes static charges by using high-voltage discharge
technology. This method spontaneously generates a corona discharge by using a needle-shaped electrode
probe and a high voltage power supply.
As Figure 3-3-4 shows, a voltage-application type static eliminator consists of a high voltage power supply, a
grounding electrode, and a needle-shaped electrode probe. A voltage-application type generates a corona
discharge around the tip of the electrode probe by applying high voltage (3 kV or higher) to the electrode
probe. When a corona discharge occurs, the air around the electrode probe is ionized. The generated ions
are supplied to the charged object to eliminate the static electricity.
The amount of ions generated by a self-discharge type static eliminator depends on the amount of charge
of the object. In contrast, a voltage-application type static eliminator applies high voltage to the electrode
probe to force a corona discharge. Since it ensures stable and powerful static elimination by adjusting on the
power supply, the voltage-application type is widely used in manufacturing sites where accurate operation is
required.
[Figure 3-3-4]: Structure of a corona-discharge voltage-application type static eliminator
When positive high-voltage is applied When negative high-voltage is applied

Electrode probe Electrode probe Electrode probe
Positive Negative
High-voltage Negative
high Positive ions high
power supply ions are
voltage are generated. voltage
generated.
Ground Ground Ground
When positive voltage is applied, positive ions are generated. When negative voltage is applied, negative ions are generated.
Figure 3-3-5 shows an AC (alternating current) type static eliminator which is a common type of voltage-
application static eliminator. It consists of an electrode in which electrode probes are positioned at regular
intervals, and a counter electrode, which is a rectangular plate that is grounded.
The AC type static eliminator generates ions by either a positive or negative discharge at a constant cycle.
Some of the generated ions are absorbed by the counter electrode, and the remaining ions pass beyond the
counter electrode to reach the surface of the charged object and neutralize the charges.
[Figure 3-3-5]: Structure of an AC-type static eliminator

Counter electrode High-voltage cable
Needle electrode (corona electrode)
The electrode probe of the voltage-application type static eliminator can generate more ions when it is more
sharply pointed. The tip of the electrode probe needs to be made of materials which are highly resistant to
stress because they are easily damaged by the collision of ions. Although steel electrode probes can be
easily processed, they are less resistant to stress. Tungsten electrode probes can resist stress and have
greater durability, but are rather expensive.
SOF T X-R AY T YPE

A soft X-ray is a type of X-ray which has a shorter wavelength than ultraviolet rays, within a range of tenths
of a nanometer and tens of nanometers. A soft X-ray has the property of ionizing air. A soft X-ray type (light
irradiation type) static eliminator, eliminates static electricity by directly ionizing the gas molecules in the air.
The advantage is that it can eliminate static electricity in a wider area over a shorter time because it works only
by irradiating a soft X-ray. The disadvantage is that a soft X-ray is an X-ray. Although it is weak, it is hazardous
to humans and legal requirements demand notification of the presence of soft X-rays. Furthermore, using a
soft X-ray requires substantial control measures and special shielding equipment, resulting in higher cost.
As a result, the soft X-ray type is often used for static elimination in a limited space where it is hard for ions
generated by a corona-discharge type to reach the target. One such example of this is particles flowing
through a pipe.
4. STATIC ELIMINATOR BASICS
4 -1 STATIC ELIMINATOR ( IONIZER) T YPES
BLOWER T YPE
BAR T YPE
SPOT T YPE
DC ( DIRECT CURRENT) METHOD
AC (ALTERNATIVE CURRENT) METHOD
PULSE DC METHOD
PULSE AC METHOD
4-4 EVALUATION METHOD FOR STATIC ELIMINATION ABILIT Y
4 -1 STATIC ELIMINATOR ( IONIZER) T YPES

Static eliminators (ionizers) are classified into "corona-discharge type" and "light irradiation type" according to
the ionization method of air molecules. A corona-discharge type generates corona discharge at the electrode
probe by concentrating voltage to eliminate static with ionized air. The corona discharge type can be classified
into "self-discharge type" and "voltage application type".
The light irradiation type is also called "soft X-ray type" as it uses weak soft X-rays.
Among these static eliminators, the corona discharge type (with voltage application method) is often used
in production sites that require safe, stable and high accuracy static elimination. A corona discharge type is
composed of an electrode probe, a high-voltage power supply and a ground electrode.
It generates a corona discharge by applying high voltage (3 kV min.) at the point of the electrode probe.
As corona discharge occurs, the air near the electrode probe is electrically decomposed and ions are
generated. It eliminates static, by sending the ions onto charged objects. Corona discharge static eliminators
are classified into the following three types:
BLOWER T YPE
Figure 4-1-1 shows a typical blower type ionizer. It is a compact static eliminator that can be installed on a
desk. It provides air with ions generated by corona discharge. As the integrated fan blows ionized air onto
target objects, it is suitable for neutralizing irregular shaped objects. It can also be used for eliminating static
on the human body. Since the human body is a conductor of static electricity, when the ionized air is applied
to a part of the body, the whole body is neutralized.
[Figure 4-1-1]
SJ-F2500 High-speed static elimination blower
APPLICATION
Static elimination during electronics Static elimination of containers Static elimination of resin moulded products
production processes
BAR T YPE
Figure 4-1-2 shows typical bar type ionizers.
A bar type ionizer is suitable for stable static elimination in a
wide range of applications such as preventing dirt adhesion
or electrical charge on plastic moulded products, sheet
materials, or conveyed wafers.
[Figure 4-1-2] SJ-H Controller-integrated static eliminator
APPLICATION
Preventing dirt from adhering to sheet materials Loader/unloader Preventing clogging in a heat sealing process
SPOT T YPE
Figure 4-1-3 shows a spot type static eliminator.
Since it has a compact head, it can locally neutralize objects.
It can be mounted into a narrow space and can target an object
through a gap in equipment. Since it provides high-pressure air, it
can blow off dust and dirt during static elimination.
[Figure 4-1-3]
SJ-M Spot type high-speed static eliminator
APPLICATION
When transporting ceramic sheets When transporting chips Static elimination in the mold of a molding machine

An effective static eliminator can neutralize objects in a short time and also reduce the electrical charge
of moving objects. Static elimination ability is indicated by the "static elimination speed" and "ion balance".
A good static eliminator ensures both high-speed static elimination and good ion balance.
STATIC ELIMINATION SPEED

The static elimination speed is determined by how many Static elimination speed
ions a static eliminator can send to the surface of charged 3.0
Electrostatic charge voltage (kV)

objects within a specified time. To increase the amount of 2.5 Slow static elimination
ions, ion generation capacity (Ion generation in a unit of 2.0
time) should be improved. Figure 4-2-1 shows how fast the
1.5
eliminator removes electrostatic charge on an object to a
1.0
specified voltage. The static elimination ability depends
0.5 Fast static elimination
on the initial voltage of the application. Generally, it is a
0
measure of the time required to eliminate static from the 0.5 1.0 1.5 2.0 2.5 3.0
original voltage by 1/10th (from ±1000V to ±100V). Static elimination time (sec.)
[Figure 4-2-1]
ION BAL ANCE

Ion balance measures how much static an eliminator can
remove and how long it can keep it at the lowest value. It
Ion balance
also means the generation ratio of positive and negative
5
ions. When there are the same amount of positive and
Electrostatic charge voltage (kV)
4
negative ions on a charged object, the charged object is
almost neutralized. As shown in the figure 4-2-2, the nearer 3
The nearer to OV,
the value is to 0V, the better the static eliminator's balance. 2
the better the ion
The ion balance is generally adjusted when setting up balance
1
an eliminator according to installation or environment. 0
Since static eliminators may be used with devices that are
-1
sensitive to static, the amount of positive and negative ions 0.5 1.0 1.5 2.0 2.5 3.0
Static elimination time (sec.)
should be carefully adjusted. Even after careful adjustment
[Figure 4-2-2]
and static elimination, if electrostatic charge remains or
objects near the static eliminator are electrically charged,
the ion balance has deteriorated.
Note that some static eliminators are not equipped with the
ion balance adjustment function.
There are various methods to apply voltage that determine a static eliminators' ability.
DC METHOD ( DIRECT CURRENT METHOD)

This method generates unipolar ions by constantly applying either positive or negative voltage and achieves
fast static elimination (Figure 4-3-1). However, as it generates ions of the same polarity with the discharge
voltage, it can neutralise only a specified polarity. Since it supplies either positive or negative ions, it may
oppositely charge target objects by continuously providing ions even after the object is neutralised.
The amount of ion generation is larger than that of the AC method because
Electrode probe Area of ion generation Static
voltage is applied continuously. However, since ions of only one polarity
elimination
+7kV4 are generated, the target polarity is either positive or negative.
High-voltage +3kV4
speed
power supply
Static elimination speed: Fast
0
Since either positive or negative ions are generated, ions of the same
polarity are supplied continuously even after the target is neutralised.
Ion balance
The target may become charged to the opposite polarity.
[Figure 4-3-1] DC (direct current) method Ion balance: Poor
AC (ALTERNATIVE CURRENT ) METHOD

This method applies positive voltage on a discharged electrode to generate positive ions in a half cycle. In
the next half cycle it applies negative voltage to generate negative ions. Compared with the DC method, it
generates a lesser quantity of ions, so the static elimination speed is slow. However, it can neutralise both
positively and negatively charged objects. It has also an excellent ion balance as it supplies ions of both
polarities (Figure 4-3-2).
The amount of ion generation is smaller than that of the DC method,

Electrode probe Area of ion generation Static
resulting in a slower speed. However, static electricity of both polarities
elimination
+7kV4 can be eliminated.
High-voltage +3kV4
speed
Static elimination speed: Slow
power supply 0
-3kV4
-7kV4 Since both positive and negative ions are supplied,
Ion balance good ion balance can be achieved.
[Figure 4-3-2] AC (alternative current) method Ion balance: Good
SSDC (STEADY STATE) METHOD

This method constantly applies direct current voltage to both positive and negative electrode probes
(Figure 4-3-3) to achieve fast static elimination. It adjusts the ion balance by changing the number of positive
and negative ions generated.
Electrode probe
+7kV4 Static Since this method constantly applies voltage, the amount of ion generation is
+3kV4 elimination larger than that of the AC method. However, ion recombination occurs.
Positive Negative 0
high voltage high voltage -3kV4 speed Static elimination speed: Fast
power supply power supply
-7kV4
Since both positive and negative ions are supplied, good ion balance
Ion balance can be achieved.
[Figure 4-3-3] SSDC (steady state) method Ion balance: Good
PULSE DC METHOD
This method has electrode probes for both positive and negative ions. Direct current voltage is alternately
applied to either probe, thus combining the advantages of the DC method and the AC method.
Compared with the AC method, it generates a large amount of ions, so the static elimination speed is faster.
It also has a good ion balance as it alternately generates positive and negative ions.
Electrode probe
Static The static elimination speed is faster than that of the AC method
elimination because the amount of ion generation is larger.
speed Static elimination speed: Fast
Positive Negative
high voltage high voltage
power supply power supply Since both positive and negative ions are supplied alternately, good
Ion balance ion balance can be achieved.
Ion balance: Good
[Figure 4-3-4] Pulse DC method *Excluding bar type static eliminators

Positive Negative Positive Negative
electrode electrode electrode electrode
As shown in figure 4-3-5, when a bar type static eliminator with the
pulse DC method is used for a short distance operation, the area
immediately below the electrodes contains either positive or negative
ions. Consequently, the ion balance along the length of the bar is
poor. Note that a static eliminator may not work properly depending
on how its installed. Area of
positive
Area of
negative
Area of
positive
Area of
negative
ions ions ions ions
[Figure 4-3-5] Ion generation by pulse DC method

VARIABLE DC METHOD
(KEYENCE's original method used in blower type static eliminators) The variable DC method, shown in the
figure 4-3-6, constantly applies direct current voltage to both positive and negative electrode probes. Since
it applies direct current voltage to both electrodes to generate a large amount of ions, static elimination
speed is fast. It constantly generates both ions so it has an excellent ion balance and provides high-
accuracy static elimination.
The static elimination speed is fast because a large number of ions
Positive ions are generated
Static
are generated by applying DC voltage to both electrode probes for
elimination
simultaneous positive and negative ion generation.
speed
Static elimination speed: Excellent
Negative ions are generated Since both positive and negative ions are supplied continuously,
accurate static elimination can be achieved without a subtle
A large amount of ions is constantly generated from both positive and negative Ion balance
electrode probes, and the number of ions is controlled with the I. C. C. method.
variation in ion balance.
Ion balance: Excellent
[Figure 4-3-6] Variable DC method
PULSE AC METHOD
(KEYENCE's original method used in bar, blower and spot type static eliminators) The pulse AC method,
shown in the figure 4-3-7, alternately applies both positive and negative direct current voltage to each
electrode probe. It combines the advantages of the DC, AC and pulse DC methods. Compared with the
AC method, it generates more ions and the static elimination speed is faster. Since it alternately generates
both ions, it also has a good ion balance. Unlike the pulse DC method, the ion balance in the longitudinal
direction of the bar type static eliminator is kept in good condition.
Electrode probe
Static The static elimination speed is faster than that of the AC method
elimination because the amount of ion generation is larger.
Positive Negative speed Static elimination speed: Fast
high voltage high voltage
power supply power supply
Since both positive and negative ions are supplied alternately, good
ion balance can be achieved (even at a short distance, unlike the
Ion balance
pulse DC method).
[Figure 4-3-7] Pulse AC method Ion balance: Good
4-4 EVALUATION METHOD FOR STATIC ELIMINATION ABILIT Y
The EOS/ESD (US) standard and RCJ Standard recommend a charged plate monitor for testing a static
eliminator's ability. A testing device is set as shown in figure 4-4-1. The conductor plate is 15cm x 15cm.
The minimum electrostatic capacity is 15pF when connected with a testing device that has no electric
connection. Total electrostatic capacity including conductor plate and testing circuits is 20pF ±2pF.
Probe 15 x 15 cm
Switch metal plate
Metal plate
Insulator Dimension A Insulator
Ground plate
Ground surface
Ground
Ground
Note) Minimum ground surface is 15 x 15 cm.

High voltage power supply
(Excess current protection)
Isolated
electrometer
Timer to count time
required eliminating static
[Figure 4-4-1] Testing device and evaluation method for static eliminators
The EOS/ESD Standard and RCJ Standard classify static eliminator types by their applications, and provide different
evaluation methods for each type. Figure (4-4-2) is an evaluation method using a laminar airflow hood ionizer (provides
downward ion flow using laminar airflow in a hood).
15 cm 15 cm HEPA filter
Rear
TP6
TP7 15 cm Grid type ioniser
or
Airflow bar type ioniser
TP3 TP4 TP5 Center line on 60 cm
measuring
point Charged plate
TP1 TP2
15 cm
Front
Center line on measuring point
Note) measurement should be conducted at
seven points (from TP1 to TP7)
Front
[Figure 4-4-2] Evaluation method with laminar airflow hood ionizer
The EOS/ESD Standard and RCJ Standard advise evaluating the ability of static eliminators at several points. In the
case of pulse DC or steady DC type static eliminators, it is very important to evaluate the ability in the longitudinal
direction, especially when using eliminators at a short distance with charged objects. The ion balance in the
longitudinal direction can be disrupted, as shown in figure 4-4-3, making it necessary to carefully evaluate the static
eliminator.
Positive Negative Positive Negative [Figure 4-4-3] Pulse DC type static elimination bar
electrode electrode electrode electrode
Pulse DC type static eliminators have several electrodes to separately generate positive and
negative ions. When there isn't a suitable distance between the static elimination bar and the
charged object, one of the ions is more concentrated under each electrode probe and the
static elimination bar's ion balance in longitudinal direction is disrupted.
Area of Area of Area of Area of

positive negative positive negative
ions ions ions ions
[Ion balance]
Operating distance = 300 mm Operating distance = 600 mm

500 200
400 150
300
Ion balance (V)
Ion balance (V)
100
200
50 Operating
100
distance
0 0
-100 -50
-200
-100
-300
-400 -150
X axis direction
-500 -200
-500 -250 0 250 500 -500 -250 0 250 500
X (mm) X (mm)
Conventional pulse DC type static eliminator *Measurement conditions used for comparative testing conducted by KEYENCE
Conventional DC type static eliminator
Static elimination bar length: approx. 1000 mm
KEYENCE SJ-H
Plate monitor: 150 mm x 150 mm (20pF)
5. UTILIZATION OF A STATIC ELIMINATOR
5 -2 OPER ATING DISTANCE AND ION GENER ATION C YCLE
5-4 MAINTENANCE OF A STATIC ELIMINATOR
MECHANISM OF THE DIRT ADHESION ON THE ELECTRODE PROBE
INFLUENCE OF A DEPOSIT ON THE ELECTRODE PROBE
INFLUENCE OF A WORN OUT ELECTRODE PROBE
MAINTENANCE OF THE ELECTRODE PROBE

To maximize the static eliminator's ability, it is essential to carefully consider installation locations.
INFLUENCE OF METAL OBJECTS (GROUND) NEAR THE STATIC ELIMINATOR
WITHOUT A CHARGED OBJECT

Electrode probe Electrode probe
When there is a metal object near a static eliminator,
the metal object generates static induction and gains
reverse polarity against ions. As a result, the ions are
attracted to the metal object. In this case, negative
ions are more attracted than the positive ions, so the
Metal object (ground) Metal object (ground)
ambient ion balance becomes positive.
[Figure 5-1-1] Without charged object
WITH A CHARGED OBJECT

When an object's static is large, ions are attracted to Electrode probe
Metal object
Electrode probe
(ground)
the object and static elimination works well. But as
the static on the object is eliminated, ions are less
attracted to the object and finally, the metal object
starts to attract ions. Because of the metal object,
the ions won't attach to the charged object. Although
Charged object Charged object
ions are generated, the static eliminator can no longer
[Figure 5-1-2] With charged object
eliminate static on the object.
INFLUENCE OF METAL OBJECTS NEAR THE STATIC ELIMINATION TARGET

When there is a metal object near the static eliminator or the target object, it may disrupt the static
elimination.
STATIC ELIMINATION OF SHEET MATERIAL ON A METAL ROLLER

As shown in figure 5-1-3, when there is a metal roller under
the sheet material, static induction occurs in the roller.
Therefore, an electrostatic charge, opposite of the polarity
of the charged object, will build on the surface of the roller.
Since the static charge on the sheet material binds with the
electric charge generated by static induction, it is electrically
Metal roller
neutralized. As a result of this electrical coupling, the static
eliminator will have no effect, even though ions are supplied. [Figure 5-1-3] Static elimination of sheet material on a metal roller
Electrical coupling (neutralization) occurs on the metal roller, so the static elimination has
no effect even when ions are supplied.
GROUNDING
TO INSTALL A STATIC ELIMINATOR, YOU SHOULD GROUND IT.
If a static eliminator is not grounded, electricity is charged inside
the static eliminator itself, resulting in an electrostatic discharge
High-voltage High-voltage
from the static eliminator or damage to the static eliminator itself. power supply power supply
As shown in figure 5-1-4, the static eliminator generates ions

by shifting the electrostatic charge to or from the ground. If the
static eliminator is not grounded, it cannot shift electrostatic
charges that accumulate inside the static eliminator. This [Figure 5-1-4] Grounding
accumulation of electrostatic charge may cause an electrostatic While negative ions are generated, electricity fl ows from
the ground to the high-voltage power supply according
to the number of negative ions being generated. (Shift of
discharge to the internal circuits and damage them, or it may electrostatic charge)
cause a discharge to any surrounding objects. To prevent such

problems, make sure to ground the static eliminator during installation.
5 -2 OPER ATING DISTANCE AND ION GENER ATION C YCLE

With static eliminators that generate positive and negative ions, the ion generation cycle is determined by
the operating distance.
SHORT RANGE SETTING [When the ion generation cycle is short] [When the ion generation cycle is long]

When the operating distance is 100 mm max, the
ion generation cycle should be short to keep the
ion balance. (Figure 5-2-1)
Direction of ion movement Direction of ion movement
Constant supply of positive and negative Positive and negative ions are separately
ions improves ion balance. concentrated on different points. As a
LONG RANGE SETTING result, the ion balance is disrupted.
When the operating distance is 100 mm min., the [Figure 5-2-1] Short-range setting
ion generation cycle should be long to prevent
recombination of ions and help to ensure the ions
reach the target. (Figure 5-2-2)
[When the ion generation cycle is short] [When the ion generation cycle is long]

As described above, you need to set the
generation frequency of ions according to
operating distances. When the operating distance
is long, you can prioritise either the static
elimination speed or the ion balance by adjusting
Charged object Charged object
ion generation frequency. When you wish to
Positive ions and negative Few positive or negative ions
prioritise static elimination speed, set the frequency ions recombine and they don't recombine, so they attach to the
attach to the charged object. charged object. As a result, the
longer than usual, alternatively when you wish to ion balance is disrupted.
prioritise the ion balance, set the frequency shorter [Figure 5-2-2] Long range setting
than usual for effective static eliminations.
EXAMPLE
Operating distance: 600 mm
Standard frequency: 10 Hz
Prioritising static elimination speed at 10Hz max. (8/5/3 Hz with the SJ-M Series)
Prioritising ion balance at 10Hz min. (33/47/68 Hz with the SJ-H Series)

When the operating distance is long, static elimination speed is slow.
Static elimination speed can be increased by adjusting the frequency,
Filter
but the ion balance slightly deteriorates. To improve both the static
elimination speed and the ion balance with a long operating distance,
Airflow
use airflow.
Floor
DOWN FLOW
Improve both the static elimination speed and the ion balance by using
[Figure 5-3-1] Structure of clean room
the airflow from the ceiling to the floor in a clean room or from the upper
to the lower side of equipment.
STRUCTURE OF UTILIZING DOWN FLOW

When a static eliminator is used in a clean room with laminar flow, the
static eliminator may disturb the laminar flow because of its structure and
deteriorate the clean room environment. When the static eliminator's structure
causes turbulent flows, it also disturbs static elimination. In contrast, an
aerodynamically designed (laminar flow structure) static eliminator utilizes
down flow without disturbing the laminar flow of clean room environments. [Figure 5-3-2] dAerodynamic design
(Laminar flow structure)
AIR PURGE
Combining a static eliminator with a general-use air purge, you can blow ions
faster and further away by using the physical force of the air. Thanks to the air
purge, static elimination speed is increased and the ion balance is improved
even though the frequency is programmed shorter than usual. It is also
effective for preventing particles from adhering on the electrode probe.
[Figure 5-3-3]
Usage examples of air purge
The combination of a static eliminator and an air purge can simultaneously (1) Attaching a static eliminator at the tip of
an air gun enables an air purge and static
elimination simultaneously. When strong
blow off dust and eliminate electrostatic charge. air is provided, dust can be blown away
simultaneously.
(This combination is also effective for preventing dirt from reattaching on target
objects.)
NOTE WHEN USING AIR PURGE

When using an air purge, make sure to use clean dry air (Mesh size: 0.01µm,
dew point:
-20°C max.). Condensation or adhesion of particles can not only deteriorate
static elimination ability but also damage the static eliminator.
Specified Static elimination
Air purge Ion balance
frequency speed
Not used 10Hz Approx. 8 sec. ±30V max.
Used 33Hz Approx. 3 sec. ±30V max.
[Table 5-3-4] Effect of air purge

Static elimination speed: Time required to eliminate a target's static electricity between ±300V to ±3000V.
There is a down fl ow for the data of Air purge: Not used. Providing air through a static eliminator allows blowing dust, hair, or
other foreign materials away from containers. Blowing air from the entire
bar enables static elimination and dust removal over a wide area.
5 - 4 MAINTENANCE OF STATIC ELIMINATOR

A static eliminator's ability (static elimination speed and ion balance) gradually deteriorates as time goes on.
The major factors of the deterioration are deposits on the electrode probe and electrode probe wear. Both
cases are caused by high voltage being applied to the electrode probe. Deposits and electrode probe wear
decrease the ion generation (slowdown the static elimination speed) and deteriorate the ion balance, so
proper maintenance measures are required.
Static elimination
Deposit on the point of
speed decreases
electrode probe
The amount of
ions decreases
Electrode probe is
worn out *Positive and negative ions Ion balance
decrease at different rates. deteriorates
[Figure 5-4-1] Time course of static elimination ability
MECHANISM OF DIRT ADHESION ON THE ELECTRODE PROBE

A static eliminators' electrodes are applied with a high voltage of 7 kV to over 10 kV, thus a strong electrical
field is generated at the tip. The electrical field causes the following two phenomena.
(1) Particles in the air are attracted to the electrode 1. Ions are generated 2. Particles are electrically charged

and accumulate. Particle
(2) Siloxane in the air separates out as SiO2 (silicon

dioxide) on the electrode probe.
3. Particles adhere to the 4. The generation of ions decreases
electrode probe
Particle Particle
A deposit on the electrode probe is generated by the
above two factors.
(The component of the deposit varies depending on the
ambient conditions.) [Figure 5-4-2] Influence of the deposit on the electrode probe
DETAILED MECHANISM
Office environment:
Static eliminators apply positive and negative high voltages on the After 24h continuous operation for approx.
electrode probe to generate ions. As shown in the figure 5-4-2, at the one month.
Magnified image
periphery of the electrode probe, minute particles are electrically charged Deposit
on probe
by ions and attracted to the electrode probe by Coulomb force. Figure
5-4-3 shows the adhesion of SiO2 on the electrode probe and figure 5-4-4
describes the mechanism of SiO2 adhesion.
Electrode probe Electrode probe [Figure 5-4-3] Deposit on electrode probe

Siloxane
vapourises Test portion Si O S
Deposit
White deposit 38.0 61.0 0.9
*Sample data (composition analysis of deposit)
Silicon rubber,
silicon adhesive agent,
Corona discharge
etc.
Silicon objects such as silicon rubber, Siloxane gas in the air is oxidized by the SiO 2 is generated at the point of
silicon adhesive agent generates siloxane. discharge energy of corona discharge. electrodes by oxidisation of siloxane.
(Siloxane gas is usually in the air)
[Figure 5-4-4] Mechanism of adhesion
INFLUENCE OF A DEPOSIT ON THE ELECTRODE PROBE

Static eliminators electrically decompose the air near the Electrode probe Electrode probe
electrode probe to generate ions. When particles adhere on

the electrode probe, they interrupt the probe in contact with
the air resulting in the reduction of ion generation. When the Generated positive ion: 3 Generated positive ion: 2
Generated negative ion: 3 Generated negative ion: 1
generation of ions decreases, the static elimination speed Since the number of generated Since the number of generated
ions is the same for positive and ions differs between positive
slows down. If positive and negative ions decrease at the negative ions, good ion balance
can be maintained.
and negative ions, the ion
balance changes to the
positive side.
same rate, it only causes slowdown of static elimination
speed, however, negative ions actually decrease faster [Figure 5-4-5] Ion balance variation due to the deposit on the
electrode probe
than positive ions. The difference in ion generation amount
deteriorates the ion balance.
Figure 5-4-5 shows the variation in the ion balance with Deterioration of ion quantity (Typical data)
and without a deposit on the electrode probe. To utilize a 120
static eliminator, you should consider not only the static 100
Ion quantity [%]
: +Ion
80
: -Ion
elimination speed but also the durability of the static 60
elimination ability. 40
20
0
INFLUENCE OF A WORN OUT ELECTRODE PROBE 0 120 240 360 480 600
Time [h]
Static eliminators constantly apply high voltage of more The graph demonstrates that deposits on the electrode probe decrease positive
and negative ion generation and the static elimination speed slows down. Since
positive and negative ions decrease at different rates, the ion balance also
than ±3kV (Approx.±7 to 8kV). Since very high energy is deteriorates.
concentrated on the electrode probe, the electrode probe
wears out. When the tip of the electrode probe is New probe Used probe
worn out, the energy concentration decreases and ion

generation also decreases. (Figure 5-4-6)
The decrease in ion generation causes a slowdown in
the static elimination speed due to the deposit on the
electrode probe. The worn out electrode probe also After operating for a long time, the tip of the electrode probe wears out,
causing a decrease in ion generation.
affects the ion generation balance. Since positive ions [Figure 5-4-6] The influence of a worn out electrode probe
are generated more than negative ions, the ion balance
tends to be positive.
MAINTENANCE OF THE ELECTRODE PROBE

As described above, a deposit on the electrode
probe not only decreases the ion generation but also
Cotton swab
slows down the static elimination. Furthermore, since moistened
with alcohol
positive and negative ions decrease at a different rate, [Figure 5-4-7] Maintenance of the electrode probe
the ion balance deteriorates, and in the worst case,
the static eliminator may create static. To maximize
Service
Material Characteristics
life
the static elimination ability, it is essential to maintain
the electrode probe. The electrode probe should be Tungsten
Approx. Most commonly used material.
2 years Long life
cleaned with cotton swabs moistened with alcohol,
as shown in figure 5-4-7, and the maintenance Approx.
Titan Long life
2 years
cycle is generally once every two weeks in a normal
environment. (This is a rough guideline. Note that Approx. Material used in an environment where
Silicon
2 years metal contamination must be avoided.
the maintenance cycle varies according to usage
environments.) Low cost.
Stainless Approx.
Relatively short service life
steel 1 year
compared to other materials.
The service life of an electrode probe depends on the *The above are rough standards for cleaning or replacing when static eliminators are used
in a general environment.
materials, thus the replacement cycle varies. Table
[Table 5-4-8] Maintenance of electrode probes
5-4-8 shows the service life of electrode probes that are
widely used.
6. KEYENCE STATIC ELIMINATOR ADVANTAGES
6 -1 KEYENCE STATIC ELIMINATOR LINEUP
6 -2 INTRODUC TION TO KEYENCE STATIC ELIMINATORS
1. I.C.C. CONTROL
2. SHEATH AIR GUIDE STRUCTURE
3. FUNCTIONS AND AL ARM OUTPUTS
6 -3 I.C .C . CONTROL
(1) AUTOMATIC ION BAL ANCE CONTROL
(2) STATIC ELIMINATION ACCORDING TO THE ELECTRIC CHARGE OF THE TARGET
(3) RETENTION OF STATIC ELIMINATION ABILIT Y OVER TIME
6-4 SHEATH AIR GUIDE STRUC TURE
6 -5 FUNC TIONS AND AL ARM OUTPUTS
1. ELECTRIC CHARGE MONITOR
2. ION LEVEL MONITOR AND ION LEVEL AL ARM OUTPUT
3. CONDITION MONITOR AND CONDITION AL ARM OUTPUT
4. ABNORMAL DISCHARGE DETECTION CIRCUIT
A WIDE VARIETY OF IONISERS
BAR TYPE
ULTRA HIGH SPEED SENSING IONISER ULTRA-HIGH SPEED,

HYBRID TYPE SHEATH-SENSING IONISER
SJ-E SJ-H
METHOD METHOD
Pulse AC Pulse AC
ION BALANCE ION BALANCE

±30 V ±30 V
CHARACTERISTICS CHARACTERISTICS
The lowest air volume in the world and World’s fastest/Greatest energy and
reduction of approximately 60% compared with maintenance-saving ionisers
conventional models
BLOWER TYPE MEASURING INSTRUMENT
HIGH-SPEED, HIGH PRECISION, FREE LAYOUT, HIGH-SPEED, WIDE-AREA ELECTROSTATIC SENSOR

WIDE-AREA STATIC ELIMINATION BLOWER STATIC ELIMINATION BLOWER SK
SJ-F2000/5000 SJ-F300
METHOD METHOD Method

Pulse AC Variable DC V.S.S. method
ION BALANCE ION BALANCE Measurement accuracy

±5 V ±5 V ±10 V (in high-precision mode)
CHARACTERISTICS CHARACTERISTICS CHARACTERISTICS

Wide type that instantaneously eliminates Standard type that can be mounted on a table High-precision surface potential measuring
static electricity in a wide area or integrated into equipment instrument that is not affected by the
measurement distance
SPOT TYPE
HIGH-PERFORMANCE HIGH-PRESSURE BLOW

MICRO STATIC ELIMINATOR SPOT TYPE STATIC ELIMINATOR
SJ-M SJ-M400
METHOD METHOD
Pulse AC Pulse AC
ION BALANCE ION BALANCE

±15 V ±15 V
CHARACTERISTICS CHARACTERISTICS
Utility type with eight kinds of selectable heads Compact and spot type that is perfect for
removing dust
6 -2 INTRODUC TION TO KEYENCE STATIC ELIMINATORS

SJ Series Features (high-speed/high-accuracy static elimination and functionality)
The SJ Series' control methods and functions offer faster static elimination speed and better ion balance.
[Figure 6-1]: Electric charge monitor

1. I.C.C. CONTROL
The I.C.C. control is equipped on all models to achieve
(Ex: Target is negatively charged)
high-accuracy, high-speed static elimination. The display panel features an electrostatic charge
monitor to easily see the strength and polarity of a
target object's charge. The bar LED clearly shows
the effect of static elimination.
2. SHEATH AIR GUIDE STRUCTURE
The sheath air guide structure is applied to the newest static elimination bars, the SJ-H Series. It enables
amazing sustainability of static elimination ability.
3. FUNCTIONS & AL ARM OUTPUTS

Various functions and alarms indicating the charge condition of target objects or alerting the deterioration
of ion generation due to dirt on the electrode probe are equipped on the SJ Series to maximize the
functionality and operation.
6 -3 I. C . C . CONTROL
KEYENCE's SJ Series static eliminators are all equipped with I. C. C. control.
I. C. C. (Ion Current Control) Control offers the three following advantages:
(1) AUTOMATIC CONTROL OF THE ION BAL ANCE

Standard static eliminators provide ions by applying high voltage to the electrode probe and generating
corona discharge at the tip as shown in [Figure 6-3-1]. The amount of ion generation varies according to
applied voltage or ambient conditions (mainly humidity). Therefore, with the simple structure shown in
[Figure 6-3-1], it is difficult to keep the applied voltage constant. KEYENCE's static eliminators use
Kirchhoff's first law to automatically control the ion balance. The mechanism, described in [Figure 6-3-2],
applies negative high voltage to the electrode probe, negative ions are then generated by a corona
discharge. A movement of ions (electrical charge) is a current. According to Kirchhoff's first law, equivalent
current to the electric charge of generated negative ions passes from the ground to the high-voltage power
supply. The SJ Series measures the current and controls the time to apply positive or negative high voltage
to keep both current values equal. This maintains positive and negative ion generation in equal quantities,
consequently keeping the ion balance at 0V. This automatic ion balance control mechanism is one of the
Current fl owing Current fl owing
advantages of the SJ Series. Electrode probe toward a point away from a point
Electrode probe
High-voltage Feedback
Electric power supply circuit
High-voltage charge
power
supply
Current Ion current
fl ow detection Kirchhoff's law: At a specific point, the sum of the values of all
circuit of the currents fl owing toward the point is equal to the sum of
the values of all of the currents fl owing away from the point.
[Figure 6-3-1]: The internal structure of [Figure 6-3-2]: The internal structure [Figure 6-3-3]: Kirchhoff's first law (Current law)
a conventional static eliminator of KEYENCE's SJ Series
(2) STATIC ELIMINATION ACCORDING TO A TARGE T'S ELECTROSTATIC CHARGE
The SJ Series calculates the amount of electrostatic charge
No
on the target by sensing ground current. It quickly provides electrical
charge
suitable ions according to the polarity and the quantity of the

Positive Negative Status of charged voltage
electrical charge for optimum static elimination. high voltage

power supply
high voltage
power supply
[Figure 6-3-4] shows the sensing mechanism when there is

Ground current
no charged object. The I.C.C. controls high voltage charging detecting circuit
time on electrode probes to make the ground current equal

Positive and negative voltages
are equally charged.
for both positive and negative ion generation. This mechanism [Figure 6-3-4] Without charged object
automatically controls the ion balance.

Positive
When there is a charged object in the vicinity, ion generation is charged
object
affected by the electrical field of the charged object regardless

Positive Negative Status of charged voltage
Positive ions decrease
of the charging time of the high voltage. As the electrode high voltage
power supply
high voltage
power supply Negative ions increase
probe is applied with positive high voltage, positive ions are Ground current decreases
Ground current when positive ion generate
generated and an electric field occurs near the positive ions detecting circuit
Ground current increases
(See [Figure 6-3-5]). That repels the electrical field of the when negative ions generate
Controlling charging time of

positively charged object. Since both electric flux lines face [Figure 6-3-5] With charged object
positive or negative voltage
According to electric conditions.
each other, the electrical fields decrease. Therefore, when
there is an object that is charged with the same polarity as the applied voltage, ion generation decreases. In the
case of [Figure 6-3-5], if negative high-voltage is applied, negative ions are generated and the electrical field is
increased, resulting in increased ion generation.
Thus, when there is a positively charged object in front of the SJ Series, the ground current is increased while
negative high voltage is applied and decreased while positive high voltage is applied. The SJ Series determines
the amount and the direction of ground current by the current value. The SJ Series senses the polarity and quantity
of electrostatic charges on an object by the ground current change to control the time to apply voltage for suitable
ion generation.
(3) RETENTION OF STATIC ELIMINATION ABILIT Y OVER TIME

Generally, a static eliminator's ability deteriorates over time due I.C.C. control in the SJ-H Series
Test results: measured by the SJ-H060A)
to deposits or wear of the electrode probe. (The static elimination 150

120
speed slows down and/or the ion balance deteriorates.) The SJ 90
I.C.C. control is OFF
60
Series is equipped with I.C.C. control that constantly monitors and
Ion balance (V)
30
controls the ion generation to suppress potential deterioration of 0

-30
functionality, especially the ion balance. [Figure 6-3-6] shows the -60 I.C.C. control is ON
-90
performance of the I.C.C. control for retaining the ion balance. I.C.C. -120
control helps maintain not only high-accuracy, high-speed static -150

Start of measurement One month
Measurement period (continuously operated)
elimination, but also the retention of static elimination ability.
Measurement conditions
Measurement device: Charged plate monitor (150 mm/20pF)
Ambient temperature: 25˚C fixed
Relative humidity: 35 to 45%RH
Operating time: 24h continuous operation
[Figure 6-3-6] Ion Balance Comparison (Typical data)
6-4 SHEATH AIR GUIDE STRUC TURE

Maintenance saving
The sheath air guide structure, which prevents dust adhesion on electrode probes, is used by the SJ-H
Series. By supplying clean and dry air, the system maintains cleanliness of the electrode probes regardless
of the surrounding environment, ensuring an extraordinary maintenance-saving effect. The amount of
maintenance required can be greatly reduced.
* Comparison with a conventional model
Air supply
Air supply
Conventional model Sheath air guide structure

(Cross-sectional view of the electric probe cap) (Cross-sectional view of the electric probe cap)
6 -5 VARIOUS FUNC TIONS & AL ARM OUTPUTS

KEYENCE's static eliminators display a variety of data, such as the charge conditions of a target object or
ion generation. They are equipped with various useful functions, including a maintenance alarm and an
abnormal discharge alarm.
During normal operation
1. ELECTROSTATIC CHARGE MONITORING FUNCTION

Every SJ Series is equipped with this function that displays the
Example: When the target becomes positively charged
electrical charge condition of target objects.
2. ION LEVEL MONITORING FUNCTION AND ION LEVEL AL ARM

This self-diagnostic function monitors the reduction of ion generation to eliminate the influence of
deposits on the electrode probe. (Equipped on the SJ-HA, SJ-M, SJ-F2000/5000 Series)
Not charged Positively charged Ion level: Normal Ion level: Abnormal
(Example: Drop in positive ions)
3. CONDITION MONITORING FUNCTION AND CONDITION AL ARM
This function outputs an alarm when static elimination is interrupted by improper installation.
(Equipped on the SJ-H, SJ-M, SJ-F2000/5000 Series)
4. ABNORMAL DISCHARGE DETECTION CIRCUIT

Abnormal discharge detection circuit
This function detects abnormal discharge due to
the close proximity of a conductor and stops ion
generation to prevent trouble or damage. (Equipped
on the SJ-H, SJ-M, SJ-F2000/5000 Series)
When abnormal discharge is detected, the eliminator simultaneously outputs an alarm and
cuts off the high-voltage power supply to stop ion generation.
Copyright (c) 2013 KEYENCE CORPORATION. All rights reserved. SJHandbook-WW-OT-GB 1113-1 600D24 Printed in Japan
* 6 0 0 D 2 4 *

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ELECTROSTATIC

1. THE BASICS OF STATIC ELEC TRICIT Y P.3

2. VARIOUS ELEC TROSTATIC PROBLEMS P.16

3. THE BASICS OF STATIC ELIMINATION MEASURES P.27

4. STATIC ELIMINATOR BASICS P.39

5. UTLISATION OF A STATIC ELIMINATOR P.47

6. KEYENCE STATIC ELIMINATOR ADVANTAGES P.54

1-1 MECHANISM FOR THE GENER ATION OF STATIC ELEC TRICIT Y

1-2 GENER ATION OF STATIC ELEC TRICIT Y IN REAL-LIFE SITUATIONS

SEPAR ATION CHARGING

POL ARIZ ATION

1-3 PROPERTIES OF ELEC TRICIT Y

CHAR ACTERISTICS OF ELECTRICIT Y

1- 4 AMOUNT OF ELEC TRIC CHARGE AND ELEC TRIC FIELD

1-5 LINES OF ELEC TRIC FORCE

1- 6 ELEC TROSTATIC C APACIT Y

CALCUL ATION OF ELECTROSTATIC CAPACIT Y

1-7 CONDUC TORS AND INSUL ATORS

1-1 MECHANISM FOR THE GENER ATION OF STATIC ELEC TRICIT Y

[Figure 1-1-2]: Contact interface of electric charges generated by contact

Approach of objects Contact Separation

1-2 GENER ATION OF STATIC ELEC TRICIT Y IN REAL-LIFE SITUATIONS

charging. This is because the projections and depressions on the

deterioration caused by friction occurs over time. The increase

after the friction starts. The contact charging described above

SEPAR ATION CHARGING

a strong charging phenomenon occurs. This phenomenon is

Amount of electric charge

objects are conductive. When a charged object moves closer to a

negative charges appear on the conductor surface facing the

This is caused by the uniformisation property of the electric

1-3 PROPERTIES OF ELEC TRICIT Y

CHAR ACTERISTICS OF ELECTRICIT Y

1- 4 AMOUNT OF ELEC TRIC CHARGE AND ELEC TRIC FIELD

particles charged either positively or negatively. Normally, these

electrons becomes positively charged. This exchange of electrons is

As described above, when charged objects move closer, a force

amount of electric charge and the force as follows:

In the microscopic world, nuclei emit or receive electrons

1-5 LINES OF ELEC TRIC FORCE

[Figure 1-5-1]: Lines of electric force

(a) (b) (c)

Lines of electric force in a location where a conductor exists near

[Table 1-5-2 ] Calculation of electric field based on Gauss’ theorem

Form of electric charge Amount of charge Electric field [V/m]

Cylinder E=ρr/2Ɛo Inside the cylinder

Sphere(charges are uniformly distributed E=ρr/3Ɛo Inside the sphere

(Gauss’ theorem: E=σ/Ɛ[V/m] )

[Figure 1-6-1]: Electrostatic capacity

Electrostatic capacity can be calculated using the following formulas

[T WO CONDUCTIVE PL ATES POSITIONED IN PAR ALLEL]

(Charge density σ= Q/S)

The electric surface charge of the insulator Vs is expressed as follows:

in Figure 1-6-5, and when the surface charge density is considered to

When the thickness of the film is different, the

Consequently, when the thickness of the film is different, the surface

1-7 CONDUC TORS AND INSUL ATORS

[Table 1-7-1]: Volume resistance

Material Resistance [Ω-m]

2-1 STATIC ELEC TRICIT Y FELT BY THE HUMAN BODY

2-2 ELEC TROSTATIC PROBLEMS IN EACH INDUSTRY

2-3 MECHANISM OF ELEC TROSTATIC BREAKDOWN

PROBLEMS CONCERNING SEMICONDUCTOR DEVICES