2/20/2011

Cleanrooms &
HVAC Systems Design Fundamentals
(Karachi, Pakistan, February 22, 2011)

Wei Sun, P.E.

ASHRAE
―Clean Spaces‖ Technical Committee (TC9.11) Chairman (07-10)
―Healthcare Facilities‖ Technical Committee (TC9.6) Member
―Laboratory Systems‖ Technical Committee (TC9.10) Member
IEST
Working Group CC012 (Cleanroom Design), Chairman

President
Engsysco, Inc.
Ann Arbor, Michigan, USA Engsysco
www.engsysco.com

Contents
• Definition and classifications
• Standards
• Nonviable, viable particles (microbiological) and airborne
molecular contamination (AMC)
• Particle sources
• Airflow quantity and pattern and floor arrangement
• Airlock and pressurization
• HVAC, plumbing, fire protection, and process systems
• Common devices and equipment
• Architectural construction materials, cleaning procedures,
testing standards and construction cost
• CFD application

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Introduction
Applications

• Semiconductor
• Microelectronic
• Pharmaceutical
• Biotechnology
• University
• Aerospace
• Automotive
• Hospital
• Miscellaneous

Cleanroom Definition
Definition - A specially constructed enclosed
area, its environment has following controlled
parameters:
• Temperature • Airflow Pattern
• Humidity • Pressurization
• Sound and Vibration • Particle Count
• Microbial Contamination
Common Requirements • Electrostatic Discharge (ESD)
• Gaseous Contamination
• Process Specific

Special & Unique Requirements

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Standards
U.S. Federal
Airborne particulate cleanliness classes in cleanrooms and clean zones
Standard
(former US standard, canceled in November 2001)
209E

ISO
ISO-14644: Cleanrooms and Associated Controlled Environments
Document

ISO-14644-1 Classification of Air Cleanliness

ISO-14644-2 Cleanroom Testing for Compliance

Methods for Evaluating & Measuring Cleanrooms & Associated Controlled

ISO-14644-3
Environments

ISO-14644-4 Cleanroom Design & Construction

ISO-14644-5 Cleanroom Operations

ISO-14644-6 Terms, Definitions & Units

ISO-14644-7 Enhanced Clean Devices

ISO-14644-8 Molecular Contamination

ISO-14698-1 Biocontamination: Control General Principles

ISO-14698-2 Biocontamination: Evaluation & Interpretation of Data

Biocontamination: Methodology for Measuring Efficiency of Cleaning Inert

ISO-14698-3
Surfaces

Classifications
Air Cleanliness Class Definition Comparison Between
FS 209 and ISO 14644

0.1 µm 0.2 µm 0.3 µm 0.5 µm 1 µm 5.0 µm

ISO
FS 209
14644 FS 209 ISO 14644 FS 209 ISO 14644 FS 209 ISO 14644 FS 209 ISO 14644 FS 209 ISO 14644 FS 209 ISO 14644
Class
Class
Particles/ft3 Particles/m3 Particles/ft3 Particles/m3 Particles/ft3 Particles/m3 Particles/ft3 Particles/m3 Particles/ft3 Particles/m3 Particles/ft3 Particles/m3
1 10 2
2 100 24 10 4
1 3 35 1,000 7.5 237 3 102 1 35 8
10 4 350 10,000 75 2,370 30 1,020 10 352 83
100 5 100,000 750 23,700 300 10,200 100 3,520 832 29
1000 6 1,000,000 237,000 102,000 1,000 35,200 8,320 7 293
10,000 7 10,000 352,000 83,200 70 2,930
100,000 8 100,000 3,520,000 832,000 700 29,300
9 35,200,000 8,320,000 293,000

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Classifications
Air Cleanliness Class Definition - FS 209
Old Air Cleanliness Class Definition - FS 209
100,000,000

10,000,000

FS-100,000

1,000,000
PARTICLES PER CUBIC METERS

FS-10,000

100,000 FS-100

FS-1,000

10,000 FS-10

1,000 FS-1

100

10

1
0.01 0.1 1 10
PARTICLE SIZE, μm

Classifications
Air Cleanliness Class Definition - ISO 14644
Current Air Cleanliness Class Definition - ISO 14644
100,000,000

10,000,000
ISO-9

1,000,000
PARTICLES PER CUBIC METERS

ISO-8

100,000
ISO-7

10,000
ISO-6
ISO-4

1,000 ISO-5

ISO-3

100

ISO-2

10
ISO-1

1
0.01 0.1 1 10
PARTICLE SIZE, μm

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Classifications
Air Cleanliness Class Definition Comparison
Classification Comparison Between FS 209 and ISO 14644 Between FS 209 and ISO 14644

100,000,000

10,000,000
ISO-9

FS-100,000

1,000,000
PARTICLES PER CUBIC METERS

FS-1,000
ISO-8

FS-10,000

100,000 FS-100
ISO-7
ISO-5

10,000 FS-10
ISO-6
ISO-4

1,000 FS-1

ISO-3

100
ISO-2

10
ISO-1

1
0.01 0.1 1 10
PARTICLE SIZE, μm

Airborne Particles
Airborne particulates can be:

1. Particles larger than 100 microns can be seen with

naked eyes.
2. Next step particles ranging from 0.001 to 100
microns are main interest of contamination for
years.
3. Atoms and molecules used to be considered too
small as industrial contamination, but not any more
after introduction of molecular contamination.

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Particle Sources & Control

Sources of Contamination Description Control Methods

Tighter exterior wall

construction, exterior
Infiltration through
zone pressurization,
doors, and cracks at
vestibules at main
windows, and walls
Outdoor air entrances, and seal
space penetrations.
Makeup air entering
External
through the air Multiple level filtrations
conditioning systems
Seal wall penetrations,
Infiltration through multiple level
Indoor transfer air doors, windows, and pressurizations &
between rooms wall penetrations for depressurizations to
pipes, ducts, etc. obtain proper airflow
directions
Largest source of
Garments, proper
internal particles: skin
People gowning procedures, air
scales, hair, textile
shower before entry
fibers
Work surface Rubbing one item Use cleanroom suitable
shedding against another or rated furniture
Process Spray, painting, Local filtration and
equipment welding, grinding exhaust
Equipment washing,
cleaning and
Internal Raw and semi-
During transport sterilization before
finished material
entry, use airlock &
pass-through
Liquids, During preparation,
pressurized gases processing and Local exhaust
used in process packaging
Chemicals used Use cleanroom suitable
Out-gassing to room
for cleaning or rated cleaners
Room Dust generated from Constructed with
construction wall, floor, ceiling, special building
materials door, fibrous insulation materials

Microbiological Contamination & Control

• Unlike non-viable particles, which can’t Control Methods

reproduce, microorganisms could reproduce at a
rapid speed if nutrition and environment are Physical:
favorable.
• Heat
• Microorganism can be classified as bacteria, • Radiation
algae, fungi, protozoa and viruses. Some of • Filtration
these are essential, useful and harmless, while
others are harmful and dangerous. Chemical:

• Sterilization
• Disinfection

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Airborne Particle Physical Controls

Filtration Dilution Isolation

Utilizing HEPA & Diluting internally Containing or
ULPA filters to contaminated air isolating particle
remove particles with clean, filtered generations with
from supply air air barriers

• HEPA: 99.97% • Process exhaust

• Higher air
(Ef.@0.3μm) change • Mini-environment
• ULPA: 99.9997% rate, better
(Ef.@0.12μm) dilution.

Typical Ceiling Filter Coverage

Class HEPA
Ceiling Filter
or
Coverage
US 209 ISO ULPA

9 5% - 15%
100,000 8 5% - 15%
10,000 7 15% - 20% HEPA
1,000 6 25% - 40%
100 5 35% - 70%
10 4 60% - 90%
1 3 60% - 100%
ULPA
2 80% - 100%
1 80% - 100%

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Room Airflow Quantity

(Traditional Methodology)

Classification Air Change IEST Recommended (RP-12)

Per Hour Air Change Rate For Cleanrooms
ISO Class FS-209 Class Range 700

8 100,000 5 – 48 600
600 600

Air Change Per Hour (ACH)

540 540

7 10,000 60 – 90 500
480

6 1,000 150 – 240 400

5 100 240 – 480 300

360 360 360

300 240

4 10 300 – 540 200 240

90
3 1 360 – 540 100 150
48

60
2 360 – 600 0
0 1 2 3 4 5 6 7
5
8 9

1 ISO Cleanliness Class

Airflow Patterns

Non-Unidirectional Mixed
(Conventional) Flow Flow

Unidirectional Mini-Environment
Flow Flow

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Cleanroom Floor Arrangements

Service Area

Ballroom Office and

Support Cleanrooms
Areas

Service Area

Service Area

Service Chase
R R R R
Office and R

Support Cleanrooms
Areas
R R R R R

Service Area

Service Area

Mini-Environment Office and C C C C

Support Cleanrooms
Areas C C C C

Service Area

Example – Fan Tower Arrangement

Scrubbed Exhaust Air Visitors Corridor
Silencer Waff le Slab Process Corridor

Fan Tow er Maint. Corridor Raised Floor Ceili ng + Filter Stair Case

Pressurized Plenum

Cleanroom

Return Air

Basement

Make-Up Air Cooling Coil Perforated Slab Process Exhaust Submai ns Gas Cabinets
Pump Chemical Supply Systems Process Supply Systems

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Example – Fan Filter Units Arrangement

Scrubbed Exhaust Air

3.5m

2.2m

3.6m
Stair Case
Cleanroom
9.6m

4.8m
Ret urn Air

4.8m

0. 0m
Basement

Make-Up Air Gas Cabinets Process Suppl y Syst ems Submains Process Supply Submains Scrubber

Control Airflows Between Rooms

Air Lock
Air Lock AIRFLOW CORRIDOR
+
AIRFLOW CORRIDOR
+
An intermediate room
AIRLOCK AIRLOCK
between adjacent ++ ++
areas with different
cleanliness to prevent AIRFLOW CLEANROOM AIRFLOW CLEANROOM

airborne cross +++ -

contamination CASCADING AIRLOCK BUBBLE AIRLOCK

Type AIRFLOW CORRIDOR AIRFLOW CORRIDOR

+ -
• Cascading
• Bubble AIRLOCK AIRLOCK AIRLOCK
--
-- ++
• Sink
• Dual Compartment AIRFLOW CLEANROOM CLEANROOM
AIRFLOW

- -

SINK AIRLOCK DUAL COMPARTMENT AIRLOCK

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Control Airflows Between Rooms

Air Lock
Type of Cleanroom Selection Functionality of Airlock Relative
of Airlock Pressure
Relationship

Application  Positive pressure

 No fume or bio agent
Cascading  Prevent cleanroom being
contaminated from dirty
corridor air
Cleanroom:
Airlock:
+++
++
 No containment Corridor: +
 Prevent cleanroom being
• Positive or needed
contaminated from
surrounding spaces
Negative through cracks

Pressure?  Negative pressure Bubble  Prevent cleanroom being Cleanroom: -

 Has fume or bio contaminated from dirty Airlock: ++
• Has Fume or Bio agent contamination corridor air
Corridor: +
 Prevent cleanroom fume
Contamination?  Containment needed
or bio agent releas ing to
corridor
• Containment  Negative pressure Sink  Prevent cleanroom being Cleanroom: -
Needed?  Has fume or bio contaminated from dirty Airlock: - -
agent contamination corridor air
Corridor: +
• Personal  Containment needed  Allow cleanroom fume or
bio agent releas ing to
Protection airlock. No personal
protective equipment is
Needed? needed

 Negative pressure Dual  Prevent cleanroom being Cleanroom: -

Compart - contaminated from dirty Neg. Airlock: - -
 Has toxic fume or
ment corridor air
hazardous bio agent Pos. Airlock: ++
contamination, or has  Prevent cleanroom fume
potent compound or bio agent releas ing to Corridor: -
substan ces corridor
 Containment needed  Personal protective
 Personal protecti on equipment (such as
needed pressurized suit and
respirat or) is required

Notes:
1. EXCESSIVE NEGATIVE P RESSURE IN CLEANROOM IS NOT RECOMMENDED,
SINCE IF IT IS NOT S URROUNDED BY OTHER C LEAN SPACES S, UNTREATED
DIRTY AIR CAN INFILT RATE THROUGH CRACKS INTO CLEANROO M.
2. COMMONLY A CLEANROOM SERVICE CORRIDOR NEEDS TO BE DESIGNED
SLIGHTLY POSITIVE OR NEUTRAL PRESSURE , DO NOT DESIGN IT I N NEGATIVE
PRESSURE UNLESS A DU AL-COMPARTMENT LOCK IS UTILIZED.

Control Airflows Between Rooms

Pressurization
• Air should always flows from high pressure to low pressure
area. Normally the desired flow path should be from the area of
cleanest, to less-clean, to less-contaminated, and then to dirty
areas.

• Pressurization is defined as a technique that air pressure

differences are created mechanically between rooms to
introduce intentional air movement paths through room leakage
openings. These openings could be either designated, such as
doorways, or undesignated, such as air gaps around
doorframes or other cracks.

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Control Airflows Between Rooms

Pressurization
2,000
Single Room Pressurization 1,900
Leakage Area
400
380
1,800
(Sq. in.) 360
1,700
• Room pressurization 1,600
340
320
1,500
300
Entering (SA) airflow rate is

Leakage Flowrate (cfm)

1,400 280
1,300
higher than leaving (EA + 1,200
260
240

RA) airflow rate in the 1,100

1,000
220
200
room, room net (offset) 900
800
180
160
flow is positive. 700 140
600 120
500 100

• Room depressurization 400

300
80
60

Entering (SA) airflow rate is 200

100
40
20

lower than leaving (EA + 0

0 0.005 0.01 0.015 0.02 0.025 0.03 0.035 0.04 0.045 0.05 0.055 0.06 0.065 0.07 0.075 0.08

RA) airflow rate in the Pressure Differential Between Rooms (in.)

room, room net (offset) Room Net Flow Rate vs. Pressure Differential
flow is negative.

Control Airflows Between Rooms

Pressurization
Single Room Pressurization Room Pressure Control Strategies

Room Airtightness is the key element in the

relationship between the room’s flow offset
value and the resulting pressure
differential, and each room airtightness is
unique and unknown unless tested.

The treatment of the room net flow ―offset‖

value defines a pressurization control
strategy. Typical pressurization control
techniques:

• Direct Pressure-Differential Control

• Differential Flow Tracking Control
• Hybrid Control

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Control Airflows Between Rooms

Pressurization
Room Pressure & Flow (P&F) diagram
Multiple Room (Suite) Pressurization
(suite, zone or floor) – The basis of
continuous validation and qualification
of room pressure control:

• Indicate airflow design settings

(values) of all supply, return and
exhaust registers.
• Indicate the desired room
pressure value with an acceptable
tolerance.
• Indicate the resulting leakage flow
directions (due to room pressure
differentials) and their estimated
leakage values through doors at
closed-door condition.

Typical HVAC Systems

FS209 Class
10,000, 100,000

ISO Class
7, 8

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Typical HVAC Systems

FS209 Class
100, 1,000

ISO Class
5, 6

Typical HVAC Systems

FS209 Class
1, 10

ISO Class
3, 4

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Basic HVAC Flow Diagrams

Configuration-1: Conventional Primary loop
AHU Unit

SA OA+RA OA

FILTER
C H
C C
Makeup
Air
Efficiency Ea
Co

Efficiency Eb

Space Impurity
Cs
Concentration
SA RA
HEPA

Space
Supply Return
Air Air Cs
Particle Generation
Q G EA

Leakage Deposition Exhaust

Air D Air
Cs Ce

Basic HVAC Flow Diagrams

Configuration-2: Primary loop with supply bypass
AHU Unit
SA1 SA OA+RA OA
FILTER

C H
C C
Makeup
Air
Efficiency Ea
Co
SA2 SA2+RA

Efficiency Eb

Space Impurity
Cs
Concentration
SA1
RA
HEPA

Space
Supply Return
Air Air Cs
Particle Generation
Q G EA

Leakage Deposition Exhaust

Air D Air
Cs Ce

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Basic HVAC Flow Diagrams

Configuration-3: Primary loop with dual returns
AHU Unit
SA=OA+RA OA+RA1 OA

FILTER

FILTER
C H
C C
Makeup
Efficiency Eb Air
Efficiency Ea
RA1
Co

RA2

Efficiency Ec

Space Impurity
Cs
Concentration
SA RA
HEPA

Space
Supply Return
Air Air Cs
Particle Generation
Q G EA

Leakage Deposition Exhaust

Air D Air
Cs Ce

Basic HVAC Flow Diagrams

Configuration-4: Primary loop plus secondary makeup unit

Primary Fan Unit Secondary Makeup Unit

SA OA+RA OA OA
FILTER

FILTER

C H
C C
Treated Makeup
Makeup Air
Efficiency Eb Efficiency Ea
Air Co
C1

Efficiency Ec

Space Impurity
Cs
Concentration
SA RA
HEPA

Space
Supply Return
Air Air Cs
Particle Generation
Q G EA

Leakage Deposition Exhaust

Air D Air
Cs Ce

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Basic HVAC Flow Diagrams

Configuration-5: Primary loop plus secondary AHU unit with dual returns
Primary Fan Unit Secondary AHU Unit
SA OA+RA OA+RA2 OA

FILTER

FILTER
C H
C C
Treated Makeup
Makeup Air
Efficiency Eb Efficiency Ea
Air Co
C1

RA1 RA2
Efficiency Ec

Space Impurity
Cs
Concentration
SA RA
HEPA

Space
Supply Return
Air Air Cs
Particle Generation
Q G EA

Leakage Deposition Exhaust

Air D Air
Cs Ce

Basic HVAC Flow Diagrams

Configuration-6: Primary loop plus secondary AHU unit and tertiary
makeup unit with dual returns
Primary Fan Unit Secondary AHU Unit Tertiary Makeup Unit
SA OA+RA OA+RA2 OA OA
FILTER

FILTER

C H C H
C C C C
Treated Treated Makeup
Makeup Makeup Air
Efficiency Eb Efficiency Ea Efficiency Ea
Air Air Co
C1 C1

RA1 RA2
Efficiency Ec

Space Impurity
Cs
Concentration
SA RA
HEPA

Space
Supply Return
Air Air Cs
Particle Generation
Q G EA

Leakage Deposition Exhaust

Air D Air
Cs Ce

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Building Section Schematic

Semiconductor Fabrication Facility

Process and Building Systems

Building Systems Cleanroom HVAC&R Cleanroom Process
• City water & gas • Make-up system • Gas detection
services • Recirculation system • Static control
• Cold/hot water • Return air system • RO and DI waters
distributions • Temperature & • Process chilled water
• Gas distributions humidity controls • Chemical gases and storages
• Storm, sanitary & • Room pressure control • Solvent drain and collection
vent • Noise and vibration • Solvent gas exhaust
• Fire pump & control
automatic sprinkler • Process vacuum
• Hydronic heating • Scrubbed exhaust
systems
• Comfort chilled water • House vacuum
• Emergency power
generator • Cooling tower water • Acid drain and waste
• HVAC & Indoor • Particle counting neutralization
comfort • Clean dry air
• Building • Instrumentation air & control
management

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Typical Specified Cleanroom

Components, Devices & Equipment
Air
Sampling

HEPA / ULPA Filter

Air Handhold
Filtration Particle Air Particle Portable Particle Counter
Counter Sensor

Fan-Filter Ceiling Module

Pharmaceutical cGMP Microbial Air Sampler &

Bag-in/Bag-out multiple filters Particle Monitoring & Validation Agar Media
- Against biological, chemical
& radiological materials

Typical Specified Cleanroom

Components, Devices & Equipment

Air Valve
Isolator (Glove Box) Small Mini-Environment
Precision
Room
Pressure
Transducer
Soft
Wall Product
Pass-
Floor Grate through
& Perforated
Panel

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Cleanroom Building Exterior and Interior

Cleanrooms in Construction
Building Finished
Exterior

Finished Cleanrooms

Window on Window on
Exterior Wall Interior Wall
Small Class 100,000 Interior Hallway
Cleanroom

Class 10, Gowning Area, Service Hallway

Raised Floor Raised Floor Enclosing Cleanrooms

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Cleanroom Utility and Support

Large DI Water
System

AHU Unit for Office/

Administration Areas
Steam-Hot Water
Exchange Unit
(Packaged)

Cleanrooms In Operation

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Cleanroom Construction Materials

Classification FS Class FS Class FS Class FS Class FS Class FS Class
1 10 100 1,000 10,000 100,000
ISO Class ISO Class ISO Class ISO Class ISO Class ISO Class
1, 2 & 3 4 5 6 7 8&9
Wall System Aluminum Component Aluminum Component or Metal Stud

Wall Panel Honeycomb Aluminum Conductive Finish Aluminum Polystyrene Core or Vinyl or Epoxy
Epoxy Coated Steel Laminated Coated
over Drywall Drywall
Paint Epoxy Epoxy / Latex Latex

Ceiling Grid 2‖ Aluminum Gel Seal Ceiling System 1½‖ Steel Gasketed

Grid Support All thread with Strut & Turn buckles 12 ga wire to grid, 10 ga wire to filter @ Corner of
Grid Intersection Only
Floor Raised Floor with Perforated / Grated Access Concrete Covered with Epoxy
Solids or Sheet Vinyl
Air Return Floor Low Sidewall Low Sidewall
or Ceiling

ISO Construction Cleaning Procedures

Stage Purpose Responsible party Method Standard

Stage 1 — Clean during Preventing unnecessary dust Contractor. If the construction Vacuum clean upon completion. Visual-clean.
demolition or preliminary concentration in places that will be contractor has no relevant
construction such as difficult to reach during later experience in cleanroom cleaning,
framing for wall construction. it is advisable to hire a professional
installation. cleaning contractor specializing in
cleanroom cleaning.
Stage 2 — Clean during Removing local contaminants caused Installation engineer. Vacuum clean; wipe-down piping Visual-clean.
utility installation. by installing electricity, gas, water, etc. and fixtures with moistened wipers
upon completion. The use of
vacuum cleaning and/or other
cleaning materials is necessary.
Stage 3 — Clean during Cleaning all visible contamination from Cleaning contractor. Vacuum clean; wipe-down piping Visual-clean.
early construction. ceilings, walls, floors, (filter mountings), and fixtures with moistened wipers.
etc. after completion of construction and Application of protective floor
installation activities. sealants is generally a particle
generating activity. If this is
necessary, it should be applied at
this time.
Stage 4 — Prepare for Cleaning any dust from ductwork Installation engineer and cleaning Vacuum clean; wipe down with Wiper-clean.
air conditioning ductwork sections before installing using a contractor. moistened wipers.
installation. vacuum cleaner and wipers. Meanwhile,
a positive pressure should be
introduced to the cleanroom.
Stage 5 — Clean before Removing deposited or settled dust, or Cleaning contractor. Wipe down with moistened wipers. Wiper-clean.
mounting all air filters both, from ceilings, walls, and floors.
into the system.
Stage 6 — Mount the Removing possible contamination Cleanroom HVAC filter engineer/ Clean all surface edges on all Wiper-clean.
(HEPA/ULPA) filters into caused by the mounting operation. technician. sides.
the air systems
Stage 7 — Adjust the air Removing suspended dust from the Cleanroom HVAC filter engineer/ Air conditioning air flushing Wiper-clean.
conditioning equipment. airflow and creating overpressure technician. operation.
installation, including the filters.
Stage 8 — Upgrade the Removing all deposited and clinging A professional cleanroom cleaning Wipe down with moistened wipers. Wiper-clean.
room into prescribed dust from every surface (in order: by personnel specially instructed
classification. ceilings, walls, equipment, floors). on regulations, routing and
behaviour.
Stage 9 — Approve
installation.
Verifying the cleanroom to the
prescribed design specifications.
Installation engineer and
certification engineer.
Monitor airborne and surface
particles, air velocities,
Wiper-clean. Results
should conform to
22
Stage 1 — Clean during
demolition or preliminary
construction such as
framing for wall
installation.
Stage 2 — Clean during
utility installation.
Stage 3 — Clean during
early construction.
Preventing unnecessary dust
concentration in places that will be
difficult to reach during later
construction.
Removing local contaminants caused
by installing electricity, gas, water, etc.
Cleaning all visible contamination from Cleaning contractor.
ceilings, walls, floors, (filter mountings),
etc. after completion of construction and
installation activities.
Contractor. If the construction
contractor has no relevant
experience in cleanroom cleaning,
it is advisable to hire a professional
cleaning contractor specializing in
cleanroom cleaning.
Installation engineer.
Vacuum clean upon completion. Visual-clean.
2/20/2011
Vacuum clean; wipe-down piping Visual-clean.
and fixtures with moistened wipers
upon completion. The use of
vacuum cleaning and/or other
cleaning materials is necessary.
Vacuum clean; wipe-down piping Visual-clean.
and fixtures with moistened wipers.
Application of protective floor
sealants is generally a particle
generating activity. If this is

ISO Construction Cleaning Procedures necessary, it should be applied at

this time.
Stage 4 — Prepare for Cleaning any dust from ductwork Installation engineer and cleaning Vacuum clean; wipe down with Wiper-clean.
air conditioning ductwork sections before installing using a contractor. moistened wipers.
installation. vacuum cleaner and wipers. Meanwhile,
a positive pressure should be
Stage Purpose
introduced to the cleanroom. Responsible party Method Standard
Stage
Stage 15 — — Clean
Clean during
before Preventing unnecessary
Removing deposited dust dust, or
or settled Contractor. If the construction
Cleaning contractor. Vacuum clean
Wipe down withupon completion.
moistened wipers. Visual-clean.
Wiper-clean.
demolition
mounting allorairpreliminary
filters concentration in places
both, from ceilings, that
walls, willfloors.
and be contractor has no relevant
construction
into the system.such as difficult to reach during later experience in cleanroom cleaning,
framing
Stage 6 for wall the
— Mount construction.
Removing possible contamination itCleanroom
is advisable
HVACto hire a professional
filter engineer/ Clean all surface edges on all Wiper-clean.
installation.
(HEPA/ULPA) filters into caused by the mounting operation. cleaning
technician.contractor specializing in sides.
the air systems cleanroom cleaning.
Stage
Stage 27 — — Clean
Adjust during
the air Removing
Removing local contaminants
suspended caused
dust from the Installation
Cleanroom engineer.
HVAC filter engineer/ Vacuum clean; wipe-down
Air conditioning air flushingpiping Visual-clean.
Wiper-clean.
utility installation.
conditioning equipment. by installing
airflow electricity,
and creating gas, water, etc.
overpressure technician. and fixtures with moistened wipers
operation.
installation, including the filters. upon completion. The use of
vacuum cleaning and/or other
Stage 8 — Upgrade the Removing all deposited and clinging A professional cleanroom cleaning cleaning
Wipe down materials is necessary.
with moistened wipers. Wiper-clean.
room into prescribed dust from every surface (in order: by personnel specially instructed
Stage 3 — Clean during Cleaning all visible contamination from Cleaning contractor. Vacuum clean; wipe-down piping Visual-clean.
classification. ceilings, walls, equipment, floors). on regulations, routing and
early construction. ceilings, walls, floors, (filter mountings), and fixtures with moistened wipers.
behaviour.
etc. after completion of construction and Application of protective floor
Stage 9 — Approve installation
Verifying theactivities.
cleanroom to the Installation engineer and sealants is generally
Monitor airborne and asurface
particle Wiper-clean. Results
installation. prescribed design specifications. certification engineer. generating
particles, airactivity. If this is
velocities, should conform to
Customer acceptance. necessary,
temperatureit and
should be applied at
humidity. agreed design criteria.
this time.
Stage 10 — Clean daily Maintaining the cleanroom in long-term Cleanroom manager/cleaning Listed in F.1 to F.8. A tailor-made cleaning
Stage 4 — Prepare for Cleaning any dust from ductwork Installation engineer and cleaning Vacuum clean; wipe down with
Wiper-clean.
and periodically compliance with designed classification. contractor. programme for the
air conditioning ductwork sections before installing using a contractor. moistened wipers.
installation. Microbiological
vacuum cleanercleaning and Meanwhile,
and wipers. testing cleanroom, accounting
begins in biocleanrooms.
a positive pressure should be
for the specific
introduced to the cleanroom. demands of the
production process
Stage 5 — Clean before Removing deposited or settled dust, or Cleaning contractor. Wipe down with moistened wipers. Wiper-clean.
and the customer.
mounting all air filters both, from ceilings, walls, and floors. Routine testing of
into the system. critical operation
Stage 6 — Mount the Removing possible contamination Cleanroom HVAC filter engineer/ Clean all surface edges on all parameters.
Wiper-clean.
(HEPA/ULPA) filters into caused by the mounting operation. technician. sides.
NOTE 1 During Stages 4 to 10, all high-efficiency and ultra-high-purity components, such as filters, ducts, etc., should arrive on site protected by plastic or foil covers on
the
bothairends.
systems
Covers should only be removed when ready for use. NOTE 2 During Stages 6 to 10, all activities should be done wearing prescribed cleanroom clothing.
Stage 7 — Adjust the air Removing suspended dust from the Cleanroom HVAC filter engineer/ Air conditioning air flushing Wiper-clean.
conditioning equipment. airflow and creating overpressure technician. operation.
installation, including the filters.
Stage 8 — Upgrade the Removing all deposited and clinging A professional cleanroom cleaning Wipe down with moistened wipers. Wiper-clean.
room into prescribed dust from every surface (in order: by personnel specially instructed
classification. ceilings, walls, equipment, floors). on regulations, routing and
behaviour.
Stage 9 — Approve Verifying the cleanroom to the Installation engineer and Monitor airborne and surface Wiper-clean. Results
installation. prescribed design specifications. certification engineer. particles, air velocities, should conform to
Customer acceptance. temperature and humidity. agreed design criteria.
Stage 10 — Clean daily Maintaining the cleanroom in long-term Cleanroom manager/cleaning Listed in F.1 to F.8. A tailor-made cleaning
and periodically compliance with designed classification. contractor. programme for the
Microbiological cleaning and testing cleanroom, accounting

Cleanroom Testing
begins in biocleanrooms. for the specific
demands of the
production process
and the customer.
Routine testing of
Required Testing (ISO 14644-2) critical operation
parameters.
NOTE 1 During Stages 4 to 10, all high-efficiency and ultra-high-purity components, such as filters, ducts, etc., should arrive on site protected by plastic or foil covers on
both ends. Covers should only be removed when ready for use. NOTE 2 During Stages 6 to 10, all activities should be done wearing prescribed cleanroom clothing.
Schedule of Tests to Demonstrate Continuing Compliance
Maximum Time
Test Parameter Class Test Procedure
Interval
<= ISO 5 6 Months
Particle Count Test ISO 14644-1 Annex A
> ISO 5 12 Months
Air Pressure Difference All Classes 12 Months ISO 14644-1 Annex B5
Airflow All Classes 12 Months ISO 14644-1 Annex B4

Optional Testing (ISO 14644-2)

Schedule of Additional Optional Tests

Maximum Time
Test Parameter Class Test Procedure
Interval
Installed Filter Leakage All Classes 24 Months ISO 14644-3 Annex B6
Containment Leakage All Classes 24 Months ISO 14644-3 Annex B4
Recovery All Classes 24 Months ISO 14644-3 Annex B13
Airflow Visualization All Classes 24 Months ISO 14644-3 Annex B7

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Cleanroom Design Problems & Validation

Common Design Problems
• Poor laminarity
• Fail to pressurize to specified pressure levels
• Local stagnation near point of service
• Ineffective chemical vapor exhaust
• Too high noise
• Temperature & humidity variations above specifications

How to Ensure Quality During Design Phase?

• Engineer’s design knowledge & experience
• Mock-up or scale-down model
• CFD validation

CFD Applications

Narrower
Cleanroom Cleanroom with
with 35% FA 35% FA Floor
Floor Panels Panels

A case study: Examination of flow laminarity of a cleanroom with a

subfab underneath

Cleanroom Floor
Ceiling
with 20% FA
Floor Panels FAB

SUBFAB CHASE

Slab

Cleanroom CFD model geometry

with 10% FA
Floor Panels

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 2/20/2011

Technology Trend – Determination of Airflow

Rate Based on Particle Generation Rate
During Design Phase
Room Particle Concentration versus Air Change Rate
(Steady State)
- Effect of Internal Particle Generation Rate
1,000,000.0
Internal Particle
Generation Rate:
Condition: G = Rate of
Concentration (Number of Particles Per FT3)

100,000.0
impurity
OA/SA=5% generation unit
CO=1x106 floor area,
10,000.0 EU=95% averaged
EH=99.97% throughout the
η =1.0 space
1,000.0
Unit:
Particals/FT3/Min.
100.0

G=1
10.0 G=10

G=100

1.0 G=1000

G=10000

0.1
0 100 200 300 400 500 600
Supply Air ACH (Air Change Per Hour)

Technology Trend – Provide Airflow Rate

Based on Particle Generation Rate
During Operating Phase

Staged Ventilation
ACH Rate

VFD Ventilation

Room Particle Generation Rate G

The goal is to stage the ventilation rate to maintain the same room cleanliness
level through particle sensing during all modes (occupied and unoccupied)

25