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Traro2o Mass Flow Controllers Enter the Mainstream | FierceFlectonics = Prience a Mass Flow Controllers Enter the Mainstream by Andy dab Aus 1.2000 1008 Inmost processes the critical variable is mass, not volume. Volumetric flow meas urements are less reliable than mass flow measurements because changes in gas temperature and pressure change the density af a fixed volume of gas. In the control system, aditional errors canbe propagated by backpressure fluctuations inthe process being monitored, In contrast to rotemeters, turbine meters, and other volumetre flow devices, thermal mess flow meters (MFM) and mass flow controllers (MFCS) are relatively immune to changes in inlet temperature and pressure, Tho MFM/MFC i the anly deve capable of providing direct measurement of mass flow (see Table 1. Most other methods measure volumetric tlow (Q) and require separate measurements of pressure (P) and temperature (1) to calcula density ane mass flow (m Because the MFC meas ures and regulates molecular flow, it provides the most reliable, repeatable, and accurate methed for

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