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8 8
EIS Results 9
Cross Section of the anodized layer
7 7 8
7
6 6
6
5 5
5
4 4
4
3 3
3
2 2 2
1 1 1
-3 -2 -1 0 1 2 3 4 5 6 -3 -2 -1 0 1 2 3 4 5 6 -4 -3 -2 -1 0 1 2 3 4 5 6
0 0 0
-3 -2 -1 0 1 2 3 4 5 6 -3 -2 -1 0 1 2 3 4 5 6 -4 -3 -2 -1 0 1 2 3 4 5 6
Fig. 1. Bode-plots for the R&D tank mixed Fig. 2. Bode-plots for the type III Fig. 3. Bode-plots for the production tank Fig. 4. SEM image of the production tank sample
acid sample for an exposure period of 14 days sample for an exposure period of 14 days sample for an exposure period of 365 days
15 15 6 6
13 13
LogRpo (ohm)
LogRpo (ohm)
Type3 D2Lot3
0907-073 0907-107
Cpo (nF)
Cpo (nF)
11 11
TY3 D2Lot2
0907-005 0907-005
D2Lot3 TY3
9 9 0907-107 0907-073
D2Lot2 Type3
7 7
5 5 5 5.5
0 2 4 6 8 10 12 14 16 0 50 100 150 200 250 300 350 0 2 4 6 8 10 12 14 16 0 50 100 150 200 250 300 350
Time (days) Time (days) Time (day) Time (days)
Fig. 5. Time dependence of Cpo for R&D Fig. 6. Time dependence of Cpo for Fig. 7. Time dependence of Rpo for R&D Fig. 8. Time dependence of Rpo for
tank mixed acid and type III samples production tank samples tank mixed acid and type III samples production tank samples
III. Conclusions
● The impedance spectra for the samples that were anodized in the R&D tank mixed acid were very stable during 14 days exposure.
● The impedance spectra for the type III samples suggest that oxide layers are more complex than those for the other samples. The impedance spectra did not change significantly during the
14 days exposure time which suggests that these anodized surfaces were very corrosion resistant.
● The impedance spectra for the production tank samples were very stable for an exposure time of 365 days showing that these surfaces had very high corrosion resistance.
● The very high and stable values of the pore resistance Rpo for all three processes indicate that the newly developed anodizing and sealing processes were very effective.
Acknowledgements References
Funding by Lam Research Corporation and numerous helpful 1. F. Mansfeld, G. Zhang and C. Chen, Plating and Surface Finishing, 84 , 72 ( Dec. 1997).
discussions with Dr. Hong Shih are greatly appreciated. 2. F. Mansfeld, L. T. Han, C. C. Lee and G. Zhang, Electrochim. Acta 43, 2933 (1998).
3. F. Mansfeld, H. Shih, H. Greene, C.H. Tsai, ASTM STP 1188 (1993) 37.
4. Dr. Hong Shih presentation.