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DOI 10.1007/s10971-014-3417-2
ORIGINAL PAPER
Abstract Zr-doped ceria thin films were prepared by Keywords Sol–gel Films Ceria Metalorganic
spin-coating metalorganic solutions containing polyvinyl- decomposition Polymer Thickness
pyrrolidone (PVP), which serves as a relaxing agent to
relieve the strong mechanical stresses developed during the
thermal decomposition step. The precursor solutions were 1 Introduction
deposited on silicon substrates and subsequently heated in
air at 500 °C. The complete decomposition of organics was During the preparation of ceramic thin films via sol–gel
checked by infrared spectroscopy with attenuated total routes, strong mechanical stresses appear during drying and
reflectance. The molar ratio between PVP and total metal pyrolysis which can lead to fatal cracking of the films [1].
ions was varied between zero and one. Furthermore, the Such stresses become even more important as the film
effect of using two different PVP molecular weights was thickness is increased. In general, a critical thickness
also investigated. For the high molecular weight of PVP, appears which depends on mechanical film toughness,
crack-free films as high as 150 nm could be obtained plasticity, strain and adherence to the substrate [2].
compared to 30 nm when no PVP is added. Thickness after In order to increase the film thickness in a single coat,
spin-coating and after thermal decomposition were deter- mechanical relaxation at these stages of film formation
mined by profilometry and correlated with the polymer should be promoted. Towards this goal, several approaches
concentration in the precursor solution, showing a linear have been tried either modifying the processing, for
dependence with PVP concentration in both cases. The instance, via slower heating ramps or flux flow adjustment
main controlling parameter of the final thickness is the [3] or using additives in the solution [4]. The alternative
viscosity, with similar power law dependencies both before option is to stack different films by multicoating approa-
and after thermal treatment, which would indicate that the ches. One of the most successful approaches is using inkjet
porosity fraction remains essentially constant in the final printing deposition on a hot plate [5], which allows high
films. Furthermore, AFM analysis was used to investigate thicknesses by sequential multideposition of thinner films
the flatness and surface porosity of the films after the with intermediate heating steps.
thermal treatment. In the case of CeO2, increasing the film thickness is
advantageous for a large number of applications: as buffer
layer for simplified architectures of coated conductors [6],
electrolytes for intermediate-temperature fuel cells and
A. Calleja (&) S. Ricart N. Mestres T. Puig X. Obradors
membranes [7], UV-protection layers [8, 9], corrosion
Institut de Ciència de Materials de Barcelona-Consejo Superior
de Investigaciones Cientı́ficas (ICMAB-CSIC), Campus de la resistance coatings on steel [10] or heterogeneous catalysis
UAB, 08193 Bellaterra, Catalonia, Spain [11]. However, producing crack-free CeO2 films with
e-mail: acalleja@icmab.es thicknesses higher than 100 nm has proven troublesome.
Related to this, chemical doping of CeO2 with rare-earth
A. Calleja M. Aklalouch
OXOLUTIA SL, Edifici Eureka, Parc de Recerca de la UAB, cations has been shown to be a useful strategy in increasing
Campus de la UAB, 08193 Bellaterra, Catalonia, Spain the critical thickness [12, 13]. Moreover, Zr-doping
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J Sol-Gel Sci Technol
promotes ionic mobility at crystallization temperatures in Table 1 Summary of tested precursor solutions describing metal and
ceria films, diminishing surface roughness, which is highly PVP concentrations, length of PVP chain and [PVP]/[Ce ? Zr] molar
ratio
desirable in buffer layers for coated conductors and
favouring removal of carbon impurities [14, 15]. Sample Ce ? Zr PVP Mw [PVP]/
On the other hand, chemical solution deposition (CSD) reference [M] [M] PVP [Ce ? Zr]
offers a cost-effective methodology to prepare functional A-1 0.500 0.000 Low 0.00
oxides in thin film form [16]. It starts from a precursor A-2 0.500 0.125 Low 0.25
solution containing the metallic salts in stoichiometric A-3 0.500 0.250 Low 0.50
amounts dissolved in a suitable solvent. In this case, large A-4 0.500 0.375 Low 0.75
stresses develop in the early stages of drying and pyrolysis A-5 0.500 0.500 Low 1.00
which should be suitably managed to preserve the B-1 0.500 0.000 High 0.00
mechanical integrity of the films.
B-2 0.500 0.125 High 0.25
In this respect, in-plane tensile stress during thermal
B-3 0.500 0.250 High 0.50
treatment of the as-deposited films can be reduced by
B-4 0.500 0.375 High 0.75
adding polyvinylpyrrolidone (PVP) to the precursor solu-
B-5 0.500 0.500 High 1.00
tion, as first proposed by Kozuka et al. [17]. Since then,
progress has been made in increasing the critical thickness Low and high stand for the PVP molecular weights 5.8 9 104 and
1.3 9 106, respectively
of several technologically relevant advanced ceramics in
the form of thicker films [18–20]. PVP impacts favourably
the processing of CSD films in different ways: (1) PVP crack-free thick films. Moreover, the dependence of the
amide groups coordinate to metal cations [21] and thus polymer concentration on the final film thickness is
diminishes the condensation reactions that produce rigid investigated when spin-coating is used as the deposition
metalloxane networks, which increase stiffness; (2) The technique, in order to obtain clues about the evolution of
excellent film-forming properties of PVP help relax the porosity in this system.
tensile stress by increasing plasticity of the gel as reported
by Kozuka et al. [22]; (3) The fact that PVP decomposes at
temperatures higher than the metalorganic decomposition 2 Experimental
process (250–350 °C, typically) allows the retardation of
the condensation reactions during the sharp shrinkage and The doped-ceria precursor solution was prepared by
(4) Last but not least, PVP is considered a non-toxic weighing appropriate amounts of cerium(III) 2,4-pentadi-
chemical [23]. onate hydrate and zirconium(IV) 2,4-pentadionate
However, the addition of significant amounts of organic (Aldrich) in propionic acid (PANREAC) as a solvent. The
polymers in the precursor solution implies large volumes of nominal formula was Ce0.90Zr0.10O2. Then, two different
decomposition gases that should escape from the film types of PVP (–(C6H9NO)n–) were used with
during the heating process at some stage. This usually Mw = 5.8 9 104 and 1.3 9 106 (K-29/32 from ISP Global
causes entrapped porosity inside the final oxide layer that Technologies and Alfa Aesar, respectively). For the low
leads to poor performing films, especially when a flat and molecular weight PVP, the capped vial was stirred mag-
dense epitaxial oxide structure is sought. This porosity netically for 24 h at room temperature to accomplish full
problem should be more severe in thicker layer as the solubilization. In the case of high molecular weight PVP, it
decomposition gases should be released through the film was necessary to let the mixture stand for 12 h in order to
travelling longer diffusion paths. In this respect, the get swelling of the polymer prior to the stirring stage.
mechanical properties of the surrounding remains of the Metal molarity is expressed as the sum of cerium and
metalorganic salts, either partially or totally decomposed, zirconium cations whereas PVP molarity is expressed as
should also play an important role in the degree of com- mols of repetitive unit of the polymer with M = 111.1.
pactness of the final structure. In fact, little is known about Each film was prepared from a unique solution. In Table 1,
the effect of the polymers during the thermal decomposi- the data of the precursors solutions are displayed. Series A
tion in CSD approaches. In general, the benefits of the and B correspond to low and high molecular weight,
polymers in relieving mechanical stresses due to their respectively. In each series, PVP to metal cation molarities
viscoelastic characteristics are hindered by excessive ranges from 0 to 1. Solution volumes were 2 ml. Stability
porosity in the final film. of solutions varies between 1 and 4 weeks.
In this work, PVP has been studied as a stress-relaxing Then 15 ll of the fresh yellowish precursor solution
additive in the metalorganic precursor solution of zirco- were spin-coated onto single crystal polished squared-
nium-doped ceria films with the ultimate aim to obtain shaped silicon pieces cut from a large wafer. All substrates
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J Sol-Gel Sci Technol
100 The viscosity is 2.5 mPa s for the PVP-free solution and
reaches values as high 99 mPa s when the [PVP]/
[Ce ? Zr] ratio is 1.0 and using high PVP molecular
weight. A monotonic increase dependency is observed for
each series in accordance with the expected rise in vis-
µ (mPa·s)
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J Sol-Gel Sci Technol
25
1.5
50
1.25
75
100 1
125
0.75
150
175 0.5
200 0.25
µm
0
µm
0.6
0.4
0.2
0
0 20 40 60 80 100 120 140 160 180 µm
polymer concentration in photoresist films. On the other at 310 °C, coincides with a strong and narrow exothermic
hand, Extrand et al. [29] found an analytical time evolution DTA signal. When pure PVP was analyzed by TGA/DTA
for the liquid height during spinning, being simplified to under the same conditions, a two-step decomposition pro-
final thickness h = (l/qx)1/2c, where l, q, x and c are the cess was recorded, which finishes at 650 °C, in accordance
viscosity, density, spin rate and initial concentration, to previous works [31]. Such thermogravimetric behaviour
respectively. It was shown to be valid for the case of thin was equivalent for both PVP molecular weights.
films from 0.5 to 170 nm of thickness. More complex As a consequence, polymer degradation is accelerated in
approaches based on finite-element analysis have been also our case in which seems to be an autocatalytic reaction as
reported, like in the work of Flack et al. [30] where non- more ceria is able to decompose the surrounding polymer
Newtonian fluids are also included. as it forms [32]. In fact, CeO2 is widely used as a good
In our case, linearity of the thickness-polymer concen- oxidizing catalyst for organic matter owing to the ability of
tration plot is observed in series B but not completely in ceria to change the oxidation state of Ce(III)/Ce(IV) and
series A at low polymer concentrations. In this latter case, the oxide transport properties of CeO2 [33].
the viscosity is not totally dependent on the polymer con- Although TGA analysis provides an indication that
centration but also on the metalorganic salt concentration, organics should be completely decomposed at the tested
as the low molecular weight of PVP does not produce a firing temperature of 500 °C, more sensitive IR-ATR of
huge increase in viscosity, contrary to series B. heated films was used as a tool to ensure the complete
removal of organic species. This is especially relevant for
3.2 Thickness after thermal treatment the solution containing high loads of PVP.
Figure 5 shows the IR-ATR spectra of the thickest film
In order to ensure complete organic removal during ther- B-5. For comparison purposes, powders of PVP of the
mal decomposition, TGA/DTA analysis was performed. A same high molecular weight were also analyzed. Main
typical TGA/DTA curve is shown in Fig. 4, which corre- absorbances are clearly detected for powdered PVP. The
sponds to sample B-3 with molar ratio [PVP]/[Ce ? Zr] of most prominent bands appear at 1,651, 1,422 and
0.5. After weight loss around 130 °C due to solvent 1,278 cm-1 which can be assigned to C=O and N–C
removal, organic decomposition starts, which abruptly ends stretching vibrations, CH deformation of cyclic CH2
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J Sol-Gel Sci Technol
300 110
(a)
280
260
240
220
200 100
IR-ATR signal
180
tSC (nm)
160 (a)
140
120
100
(b)
90
80
60
40
20 (c)
0 80
0,000 0,125 0,250 0,375 0,500 4000 3500 3000 2500 2000 1500 1000
PVP (M) wavenumber (cm )
-1
900
(b) Fig. 5 IR-ATR spectra corresponding to bulk PVP powder (a), a salt-
800 free PVP film (b) and the sample B-5 (c). The high Mw PVP was used
in these measurements
700
600
tSC (nm)
500
(a) 70
400 after thermal decomposition (nm)
60
300
Thickness of series A
200 50
100 40
0
0,000 0,125 0,250 0,375 0,500 30
PVP (M)
20
(b) 200
100
after thermal decomposition (nm)
20 175
Thickness of series B
150
90
15
DTA (°C/mg)
125
Weight (%)
100
80
10
75
70
50
5
25
0 0
60
100 200 300 400 500 600 700 800 900 0,000 0,125 0,250 0,375 0,500
Temperature (°C) PVP (M)
Fig. 4 TGA–DTA curves corresponding to sample B-3, where Ce/ Fig. 6 Thickness plots after thermal treatment as a function of
PVP molar ratio is 0.5 polymer concentration: low Mw (a) and high Mw PVP (b)
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J Sol-Gel Sci Technol
200
180
160
140
after thermal treatment (nm)
Ce0.90Zr0.10O2
120
Thickness of series B
100 Silicon
80 1 µm
60
Fig. 8 Cross-sectional SEM image of the Zr-doped ceria sample B-5
on the silicon substrate showing good coverage and thickness
40 uniformity
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J Sol-Gel Sci Technol
0.5 0.5
0.6 0.6
0.7 0.7
0.8 0.8
0.9 0.9
µm µm
B-3 B-4
0 0.2 0.4 0.6 0.8 µm 0 0.2 0.4 0.6 0.8 µm
0 0
0.1 0.1
0.2 0.2
0.3 0.3
0.4 0.4
0.5 0.5
0.6 0.6
0.7 0.7
0.8 0.8
0.9 0.9
µm µm
B-5
0 0.2 0.4 0.6 0.8 µm
0
0.1
0.2
0.3
0.4
0.5
0.6
0.7
0.8
0.9
µm
coating coverage are observed. Interestingly, no macro- With the aim of investigating the porosity generated
scopic defects like blisters or cracks are detected in this during thermal decomposition, AFM analysis was carried
sample. The thickness derived from the image is out for series B (Fig. 9), which gives surface information
137 ± 20 nm, in good agreement with the value found by about the morphology of the ceria films. Nanometric-size
profilometry. doped-ceria grains can be identified with a general
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