Homework Problem 6 MEMS 1082

1. A parallel capacitor is made of two square plates with the dimensions L=W=1000 µm (or 1mm), as
shown in the following Figure. Determine the normal Static force if the gap between these two plates is d
= 2 µm, if (1) If the plates are separated by static air, and (2) if the plates are separate by pure water.

2. For parallel plate capacitor structure, electrostatic forces can be induced in the length and width
direction due to partial alignment of the plates in respective directions. The two forces along the two
direction can be expressed as (Trimmer, W.S.N., and Gabriel, K.J., “Design Considerations for Practical
Electrostatic Micromotor,” Sensors & Actuators, Vol. 11, 1987, pp. 189-206)

1 ε o ε rWV 2 1 ε o ε r LV 2
FL = FW =
2 d 2 d

For a comb-drive shown in the following figure,

determine the voltage supply required to pull the moving
electrode 12 mm from the unstretched position of the
spring. The spring constant k is 0.05 N/m. The comb
drive is operated in air. The gap d between the electrodes
and the width W of the electrodes are 2 µm, and 5 µm,
respectively.