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10
The Ultimate Parameter Analyzer for Materials, Semiconductor Devices and Process Development
Perform I-V, C-V and pulsed I-V characterization with speed, clarity and confidence with the powerful Clarius software.
Project Tree
lets you organize tests and Tag and organize
control test sequencing test results
without writing code
Power on
Standard ports include:
USB, Ethernet, VGA,
serial, DisplayPort, HDMI, Built-in
audio jacks ground unit
Headphone jack to
listen to instructional
measurement videos
Accepts up to nine
medium or high power
SMUs and optional remote
preamplifiers
Add up to six
dual-channel
PMU instruments CVU instrument
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Datasheet
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4200A-SCS Parameter Analyzer
• Solar Cells
Select from Ready-to-Use Application Tests
• Sensors
With over 450 furnished application tests in the Clarius
library, select or modify the pre-defined application tests • MEMS Devices
to accelerate your characterization or easily create custom • Electrochemistry
tests from the beginning. With three easy steps, Clarius
Software guides even the new user through parameter • LED and OLED
analysis like an expert.
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Datasheet
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4200A-SCS Parameter Analyzer
Key Parameters View
provides a visual
perspective on each test
and device and helps to
reduce the learning curve.
All Parameters View
is ideal for entering
test parameters.
Confirm
operation modes
at a glance.
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Datasheet
A source measure unit has four-quadrant capability, which Extend Measurement Resolution to 10 aA
means it can not only source but also sinks current, as Many critical applications demand the ability to measure
when taking current from a device under test (DUT), such very low currents – such as determining the gate leakage
as a charged capacitor or solar cell. current of FETs, testing sensitive nano-scale devices, and
measuring leakage current of insulators and capacitors.
All 4200A-SCS SMUs have shielded triaxial connections The preamplifier is shipped installed on the back of
with active guarding for low current and high the 4200A-SCS mainframe. This installation allows for
impedance measurements and 4-wire (Kelvin) force and standard cabling to a prober, test fixture or switch matrix.
sense connections. The preamplifier can be removed from the back panel
and placed in a remote location (such as in a light-tight
enclosure or on a prober platen) to eliminate measurement
problems due to long cables. Platen mounts and triax
panel mount accessories are available.
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4200A-SCS Parameter Analyzer
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Datasheet
The 4200-CVU-PWR option is available to support: • Move the DC bias to the terminal of choice.
• High power C-V measurements up to 400 V (200 V per With just a click in the Clarius Software, you can
device terminal) for testing high power devices, such as change the terminal to which the DC bias is applied
MEMS devices, LDMOS devices, and displays. to ensure proper control of the electric field.
• DC currents up to 300 mA for measuring capacitance • Real-time C-V meter. The real-time C-V meter displays
when a transistor is turned on. quick and accurate capacitance measurements with no
need to run a pre-programmed test. This is especially
useful to ensure you have an open and short circuit
Ensure Validity of your Results before you perform a measurement compensation.
Unlike other C-V modules on the market, the 4210-CVU Additionally, you can use the real-time C-V meter for
and 4215-CVU are designed with unique, patented troubleshooting your test setup and device under test.
circuitry to support features and diagnostic tools that
ensure the validity of your results.
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4200A-SCS Parameter Analyzer
Minimize self-heating effects with ultra-fast pulsed I-V. Pulsed Sourcing involves outputting user-defined two-
level or multi-level pulses using the built-in Segment
ARB® function or outputting an
Samples arbitrarily defined waveform.
Sequence A When the instrument’s Segment
V2
ARB mode is used for multi-
Voltage
Voltage
V3
1 2 3 4 5 level pulsing, individual voltage
V1 V4 segments can be as short as
Time Time 20 ns and waveforms can have
Sequence A Definition
Measure Window Segment Start V Stop V Duration up to 2048 unique segments
1 V1 V2 T1
2 V2 V2 T2 per channel, which provides
3 V2 V3 T3
4 V3 V3 T4 the flexibility necessary to build
5 V3 V4 T5
waveforms for characterizing
Pulsed I-V Transient I-V Pulsed Sourcing flash devices and other non-
Pulse/Measure with DC-like results Time-based I and V measurements Multi-level pulsing
Train, Sweep, Step modes Waveform capture Arbitrary waveform generator volatile memory technologies.
General device characterization Dynamic device testing AC stress testing with measure
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Datasheet
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4200A-SCS Parameter Analyzer
Users can perform all the electrical measurements on The optional Multi-measurement Prober Cable Kits (4210-
the device without having to disconnect and reconnect MMPC) connect the 4200A-SCS Parameter Analyzer to
cabling for each test, which ultimately saves valuable test a prober manipulator. In addition to eliminating the need
time and reduces frustration. for re-cabling, these kits help maximize signal fidelity by
eliminating the measurement errors that often result from
The 4225-RPM also serves as a preamp to extend the cabling errors.
lower current ranges on the PMU. This is especially
important for devices, such as diodes, that have I-V Switch Matrices
characteristics that extend over several decades of
current. The pulsed I-V measurements of the diode A number of switch matrix configurations are available
through the 4225-RPM Remote Preamplifier/Switch are for the 4200A-SCS.
shown below. Its unique auto-range feature enables The six-slot 707B and single-slot 708B Semiconductor
automatic range selection while the pulsed I-V sweep is in Switch Matrix mainframes slash the time from command
progress, so the user isn’t forced to select a fixed range, to connection, offering significantly faster test sequences
which can reduce measurement resolution. and overall system throughput than earlier
mainframe designs.
4200A-SCS Chassis
CA-534-24A
Sense 4225-RPM 1 Triax to Triax Cables
SMU1 SMU1
Force
Sense
Sense CVU HI Force
SMU2
Force
PMU CH1 237-TRX-T
Triax Tee
HI Pot
HI Curr Diode enclosed in
CVU conductive shield
LO Curr
connected to
LO Pot Force LO
Ch. 1
PMU
Ch. 2 4225-RPM 2
SMU2
Sense
CA-547-2A RPM CVU LO Force
Interconnect Cables
CA-447A SMA PMU CH2
Cables
4200-TRX-2 or 4200-MTRX-2
Triax to Triax Cables
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Datasheet
Same as
300 ns to 300 ns to 200 ns to previous
Combo 1 µs to 100 µs 10 µs 1st Stress 10 µs 100 µs 2nd Stress measure 3rd Stress
10 pts. min. M M 10 pts. min.
M M
M M
VGstress M M
M M M M M M
M M
M M M M
VG to ID Sweep Spot 20 ns to 100 ks Spot Triangle 20 ns to 100 ks Spot Triangle 20 ns to 100 ks VG to ID Sweep Spot
VD M M M M M M M M M M M M M M M M M M M M
0V
Measurement Types
Ultra-fast BTI package supports spot, smooth sweep, triangle, and step sweep measurement types.
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4200A-SCS Parameter Analyzer
Specifications
All specifications are guaranteed unless noted otherwise. All specifications apply to all models unless noted otherwise.
General Information
Four-quadrant source/sink operation
4200A-SCS mainframe can accept up to nine medium or high power SMU instruments
Output Connectors Three mini-triaxial (f) on each SMU for Force, Sense and Sense Lo
One custom, 15-pin, D-Sub (f) for connection to 4200-PA
Equivalent Instruments Field installable SMUs (4200-SMU-R, 4201-SMU-R, 4210-SMU-R, and 4211-SMU-R) have equivalent
specifications to their non-field installable counterparts
Notes
1. All ranges extend to 105% of full scale.
2. Specifications apply on these ranges with or without a 4200-PA.
3. Display resolution is limited by fundamental noise limits. Measured resolution is 6½ digits on each range. Source resolution is 4½ digits on each range.
4. The measurement and source accuracy are specified at the termination of the s upplied cables.
• 23°C ±5°C, within 1 year of calibration, RH between 5% and 60%, after 30 minutes of warmup.
• Speed set to NORMAL.
• Guarded Kelvin connection.
• ±1°C and 24 hours from ACAL.
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Datasheet
Notes
1. All ranges extend to 105% of full scale.
2. Specifications apply on these ranges with or without a 4200-PA.
3. The measurement and source accuracy are specified at the termination of the s upplied cables.
• 23°C ±5°C, within 1 year of calibration, RH between 5% and 60%, after 30 minutes of warmup.
• Speed set to NORMAL.
• Guarded Kelvin connection.
Differential Voltage Monitor Use two SMUs in VMU mode or use the low sense terminal provided with each SMU.
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4200A-SCS Parameter Analyzer
Remote Sense <10 Ω in series with FORCE terminal not to exceed a 5 V difference between FORCE and SENSE terminals
±30 V maximum between COMMON and SENSE LO.
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Datasheet
Dimensions 0.79 in. wide × 4.4 in. deep × 2.2 in. tall (2 cm wide × 11.3 cm deep × 5.6 cm tall)
Notes
1. All ranges extend to 105% of full scale.
2. Specifications apply on these ranges with or without a 4200-PA.
3. Display resolution is limited by fundamental noise limits. Measured resolution is 6½ digits on each range. Source resolution is 4½ digits on each range.
4. The measurement and source accuracy are specified at the termination of the s upplied cables.
• 23°C ±5°C, within 1 year of calibration, RH between 5% and 60%, after 30 minutes of warmup.
• Speed set to NORMAL.
• Guarded Kelvin connection.
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4200A-SCS Parameter Analyzer
4210-CVU 4215-CVU
General Information
Four-terminal pair, High POT, High CUR, Four-terminal pair, High POT, High CUR,
Measurement configuration
Low POT, Low CUR Low POT, Low CUR
Output connectors Four SMA (f) Four SMA (f)
Supplied cable 100 Ω, SMA (m) to SMA (m), 1.5 m, 4 each 100 Ω, SMA (m) to SMA (m), 1.5 m, 4 each
Optional cables 100 Ω, SMA (m) to SMA (m), 3 m 100 Ω, SMA (m) to SMA (m), 3 m
Measurement Functions
Measurement parameters CP–G, CP–D, CS –RS, CS –D, R–jX, Z-theta , Y-theta CP–G, CP–D, CS –RS, CS –D, R–jX, Z-theta , Y-theta
Ranging Auto and fixed Auto and fixed
Integration time Fast, Normal, Quiet, and Custom Fast, Normal, Quiet, and Custom
Test Signal
Frequency range 1 kHz to 10 MHz 1 kHz to 10 MHz
1 kHz, 10 kHz, 100 kHz, 1 MHz depending on
Minimum resolution 1 kHz for entire range
frequency range
Source frequency accuracy ±0.1% ±0.1%
Signal output level range 10 mV rms to 100 mV rms 10 mV to 1 V rms
Resolution 1 mV rms 1 mV rms
Accuracy ±(10.0% + 1 mV rms) unloaded (at rear panel) ±(10.0% + 1 mV rms) unloaded (at rear panel)
Output impedance 100 Ω, typical 100 Ω, typical
DC Bias Function
DC voltage bias range ±30 V (60 V differential) ±30 V (60 V differential)
DC voltage bias resolution 1.0 mV 1.0 mV
DC voltage bias accuracy ±(0.5% + 5.0 mV) unloaded ±(0.5% + 5.0 mV) unloaded
Maximum DC current 10 mA 10 mA
Sweep Characteristics
Available sweep parameters DC bias voltage, frequency, AC voltage DC bias voltage, frequency, AC voltage
Sweep type Linear, custom Linear, log, custom
Sweep direction Up sweep, down sweep Up sweep, down sweep
Number of measurement points 4096 4096
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Datasheet
Notes
1. The capacitance and conductance measurement accuracy is specified under the following conditions: DX < 0.1.
2. These specs are typical, non-warranted, apply at 23°C, and are provided solely as useful information.
3. Integration time: 1 s or 10 s below 10 kHz. Test signal level: 30 mV rms.
4. Above specifications also apply for the 4215-CVU at 300 mV.
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4200A-SCS Parameter Analyzer
Current, max. 1 A
CVU Path
AC output impedance 100 Ω, typical (center pin to outer shield)
Accuracy, typical Refer to chart below
Typical Accuracy of 4210-CVU and 4215-CVU through the 4200A-CVIV Multi-Switch, 2-wire mode unless otherwise noted 1,3
Notes
1. Valid when CVU compensation is applied from a <1 month old compensation acquisition.
2. Specified in 4-wire mode; 4-wire always recommended for low impedance devices
3. The specifications above are typical, non-warranted, apply at 25˚C, and are provided solely as useful information.
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Datasheet
Typical Accuracy of 4210-CVU and 4215-CVU through the 4200A-CVIV Multi-Switch, 2-terminal bias tee
Notes
• These specs are typical, non-warranted, apply at 23 °C, and are provided solely as useful information.
• Measurements verified using 4210-CVU and 4215-CVU in 2 wire and Bias Tee Low I modes.
• Specification is valid up to 1 mA. Accuracy of measurements taken while sourcing above 1 mA is not specified.
• Measurement speed: Quiet, Test signal level: 30 mV rms, AC Measure I Range: Auto.
• Valid when CVU CVIV compensation is applied from a <1 month old compensation acquisition.
Typical Accuracy of 4210-CVU and 4215-CVU through the 4200A-CVIV Multi-Switch, 3-terminal bias tee
Notes
• These specs are typical, non-warranted, apply at 23 °C, and are provided solely as useful information.
• Measurements verified using 4210-CVU and 4215-CVU and the following CVIV configuration:
- Ch1: BiasT: SMU LO I CV HI
- Ch2: BiasT: SMU LO I CV LO
- Ch3: Ground Unit
- Ch4: Open
- 2-Wire Mode
• Measurement speed: Quiet, Test signal level: 30 mV rms, AC Measure I Range: Auto
• Valid when CVU CVIV compensation is applied from a <1 month old compensation acquisition.
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4200A-SCS Parameter Analyzer
10 V Range 40 V Range
Current measure ranges 10 mA 200 mA 800 mA
Recommended minimum
160 ns 70 ns 770 ns
pulse width 2
Recommended minimum
20 ns 20 ns 100 ns
measure window 2
Recommended minimum
20 ns 20 ns 100 ns
transition time 3
Noise 4 15 µA 50 µA 200 µA
Settling time 5 100 ns 30 ns 500 ns
Notes
1. All typical values measured with an open circuit.
2. Using default measure window of 75% to 90% of pulse top. Recommended minimum pulse width = (Settling Time) / 75%.
3. Recommended rise/fall time to minimize overshoot.
4. RMS noise measured over the Recommended Minimum Measure Window for the given voltage or current range, typical.
5. Time necessary for the signal to settle to the DC accuracy level. (Example: 10 mA settling time on the PMU 10 V range is defined when the
signal is within 1.25% of the final value. This calculation: Accuracy = 0.25% + 100 µA = 0.25% + (100 µA/10 mA) = 0.25% + 1% = 1.25%).
6. 10 mA noise specification is different if RPM is used. See table below
Notes
1. All typical values measured with an open circuit.
2. Using default measure window of 75% to 90% of pulse top. Recommended minimum pulse width = (Settling Time) / 75%.
3. Recommended rise/fall time to minimize overshoot.
4. RMS noise measured over the Recommended Minimum Measure Window for the given voltage or current range, typical.
5. Time necessary for the signal to settle to the DC accuracy level. (Example: 10 mA settling time on the PMU 10 V range is defined when the
signal is within 1.25% of the final value. This calculation: Accuracy = 0.25% + 100 µA = 0.25% + (100 µA/10 mA) = 0.25% + 1% = 1.25%).
6. 10 mA noise specification is different without RPM. See table above.
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Datasheet
Notes
1. Accuracy for 10mA range is ±(0.25% + 100uA) if no 4225-RPM attached and is ±(0.5% + 10uA) with 4225-RPM attached.
Notes
1. All typical values measured with an open circuit.
2. Using default measure window of 75% to 90% of pulse top. Recommended minimum pulse width = (Settling Time) / 75%.
3. Recommended rise/fall time to minimize overshoot.
4. RMS noise measured over the Recommended Minimum Measure Window for the given voltage or current range, typical.
5. Time necessary for the signal to settle to the DC accuracy level. (Example: 10 mA settling time on the PMU 10 V range is defined when the
signal is within 1.25% of the final value. This calculation: Accuracy = 0.25% + 100 µA = 0.25% + (100 µA/10 mA) = 0.25% + 1% = 1.25%).
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4200A-SCS Parameter Analyzer
Notes
1. To calculate the approximate maximum current and voltage for any resistance
IMAX = V range/(50 Ω + Resistance)
VMAX = IMAX · Resistance
where Resistance is the total resistance connected to the PMU or PGU channel and V range is either 10 or 40.
Example: 10 V range using R = 10 Ω (for DUT + interconnect)
VMAX = IMAX · R = 0.167 · 10 = 1.67 V
2. Typical maximum at pulse output connector. Resistance is the total resistance connected to the pulse output connector, including device
and interconnect.
10V Range: Max. Output vs. DUT Resistance 40V Range: Max. Output vs. DUT Resistance
10 0.20 40 0.8
I V I V
9 0.18
35 0.7
8 0.16
Max. Output Voltage (V)
5 0.10 20 0.4
4 0.08 15 0.3
3 0.06
10 0.2
2 0.04
5 0.1
1 0.02
V I V I
0 0.00 0 0.0
1 100 10000 1 100 10000
PMU Pulse/Level 1, 2
10 V Range 40 V Range
50 Ω into 1 MΩ –10 V to +10 V –40 V to +40 V
VOUT
50 Ω into 50 Ω –5 V to +5 V –20 V to +20 V
Accuracy ±(0.5% + 10 mV) ±(0.2% + 20 mV)
50 Ω into 50 Ω <250 µV <750 µV
Resolution
50 Ω into 1 MΩ <0.05 mV <1.5 mV
50 Ω into 50 Ω ±(3% + 20 mV) ±(3% + 80 mV)
Overshoot/pre-shoot/ringing 3
50 Ω into 50 Ω, typical best case ±(2% + 20 mV) ±(0.8% + 40 mV)
Baseline noise ±(0.3% + 1 mV) RMS typical ±(0.1% + 5 mV) RMS typical
Source impedance 50 Ω nominal 50 Ω nominal
Current into 50Ω load (at full scale) ±100 mA typical ±400 mA typical
Short circuit current ±200 mA ±800 mA
Output limit Programmable limit to protect the device under test
Notes
1. Unless stated otherwise, all specifications assume a 50 Ω termination.
2. Level specifications are valid after 50 ns typical settling time (after slewing) for the 10 V source range and after 500 ns typical settling time (after slewing) for the 40 V source range into a 50 Ω load.
3. With transition time of 20 ns (0%–100%) for the 10 V source range and 100 ns (0% to 100%) for the 40 V source range.
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Datasheet
Notes
1. 40 V range minimum programmable transition time (source only) is 30 ns for voltage <10 V and 100 ns for voltages >10 V.
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4200A-SCS Parameter Analyzer
Trigger
Trigger output impedance 50 Ω
Trigger in impedance 10 kΩ
Notes
1. For multiple 4225-PMU or 4220-PGU cards in a single 4200A-SCS chassis
2. Per channel
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Datasheet
Pulse/Level 1, 2
10V Range 40V Range
50 Ω into 1 MΩ –10 V to +10 V –40 V to +40 V
VOUT
50 Ω into 50 Ω –5 V to +5 V –20 V to +20 V
Accuracy — ±(0.5% + 10 mV) ±(0.2% + 20 mV)
50 Ω into 50 Ω <250 µV <750 µV
Resolution
50 Ω into 1 MΩ <0.5 mV <1.5 mV
50 Ω into 50 Ω ±(3% + 20 mV) ±(3% + 80 mV)
Overshoot/pre-shoot/ringing 3
50 Ω into 50 Ω, typical best case ±(2% + 20 mV) ±(0.8% + 40 mV)
Baseline noise — ±(0.3% + 1 mV) RMS typical ±(0.1% + 5 mV) RMS typical
Source impedance — 50 Ω nominal 50 Ω nominal
Current into 50 Ω load
— ±100 mA typical ±400 mA typical
(at full scale)
Short circuit current — ±200 mA ±800 mA
Output limit — Programmable limit to protect the device under test
Notes
1. Unless stated otherwise, all specifications assume a 50 Ω termination.
2. Level specifications are valid after 50 ns typical settling time (after slewing) for the 10 V source range and after 500 ns typical settling time (after slewing) for the 40 V source range into a 50 Ω load.
3. With transition time of 20 ns (0%–100%) for the 10 V source range and 100 ns (0%–100%) for the 40 V source range.
Pulse Timing
10 V Range 40 V Range
Source Only Source Only
Frequency range 1 Hz to 50 MHz 1 Hz to 10 MHz
Timing resolution 10 ns 10 ns
RMS jitter (period, width), typical 0.01% + 200 ps 0.01% + 200 ps
Period range 20 ns to 1 s 100 ns to 1s
Accuracy ±1% ±1%
Pulse width range 10 ns to (Period–10 ns) 50 ns to (Period–10 ns)
Accuracy ±(1% + 200 ps) ±(1% + 5 ns)
Programmable transition time
10 ns to 33 ms 30 ns to 33 ms 1
(0%–100%)
±1% ±1%
Transition slew rate accuracy
(transitions > 100 ns) (transitions > 1 µs)
Solid state relay open/close time 25 µs 25 µs
Notes
1. 40 V range minimum programmable transition time (source only) is 30 ns for voltage <10 V and 100 ns for voltages >10 V.
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4200A-SCS Parameter Analyzer
10 V Range 40 V Range
Rise Time <10 ns 50 ns to 10 V, 100 ns to 40 V
Pulse Width 10 ns (FWHM) 50 ns (FWHM)
Period 20 ns 100 ns
Overshoot/
±(2% + 20 mV) ±(0.5% + 40 mV)
Preshoot/Ringing
Trigger
Trigger output impedance 50 Ω
Trigger in impedance 10 kΩ
Notes
1. For multiple 4225-PMU or 4220-PGU cards in a single 4200A-SCS chassis
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Datasheet
Dimensions 1.34 in. wide × 4.9 in. deep × 3.0 in. tall (3.4 cm wide × 12.5 cm deep × 7.6 cm tall)
Dimensions with base 1.34 in. wide × 4.9 in. deep × 3.8 in. tall (3.4 cm wide × 12.5 cm deep × 9.6 cm tall)
Weight 8.6 oz. (245 g) (with base: 13.4 oz. (381 g))
10V Range
Current measure ranges 100 nA 1 µA 10 µA 100 µA 1 mA 10 mA
Recommended
134 µs 20.4 µs 8.36 µs 1.04 µs 370 ns 160 ns
minimum pulse width 2
Recommended
minimum 10 µs 1.64 µs 1 µs 130 ns 40 ns 20 ns
measure window 2
Recommended
minimum 1 µs 360 ns 360 ns 40 ns 30 ns 20 ns
transition time 3
Noise 4 200 pA 2 nA 5 nA 50 nA 300 nA 1.5 µA
Settling time 5 100 µs 15 µs 6 µs 750 ns 250 ns 100 ns
Notes
1. All typical values measured with an open circuit.
2. Using default measure window of 75% to 90% of pulse top. Recommended minimum pulse width = (Settling Time) / 75%.
3. Recommended rise/fall time to minimize overshoot.
4. RMS noise measured over the Recommended Minimum Measure Window for the given voltage or current range, typical.
5. Time necessary for the signal to settle to the DC accuracy level. (Example: 10 mA settling time on the PMU 10 V range is defined when the
signal is within 1.25% of the final value. This calculation: Accuracy = 0.25% + 100 µA = 0.25% + (100 µA/10 mA) = 0.25% + 1% = 1.25%).
10 V Range
Current measure ranges 100 nA 1 µA 10 µA 100 µA 1 mA 10 mA
Accuracy (DC) ±(0.5% + 1 nA) ±(0.5% + 1 nA) ±(0.5% + 30 nA) ±(0.5% + 100 nA) ±(0.5% + 1 µA) ±(0.5% +10 µA)
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4200A-SCS Parameter Analyzer
Pulse/Level 1
Pulse/Level1 4225-PMU with 4225-RPM
VOUT –10 V to +10 V
Accuracy2 into open load ±(0.5% ± 10 mV)
Resolution <0.05 mV
Baseline noise ±(0.39% ± 1 mV) RMS typical
Overshoot/Pre-shoot/Ringing 3 ±2% of amplitude ±20 mV
Notes
1. Performance at the triax output connection of the 4225-RPM when using a 2 m RPM interconnect cable between the 4225-PMU
and 4225-RPM Remote Preamplifier/Switch Module.
2. 100 mV to 10 V.
3. Typical, with transistion time of 100 ns (0% to 100%).
Notes
1. All typical values measured with an open circuit.
2. Using default measure window of 75% to 90% of pulse top. Recommended minimum pulse width = (Settling Time) / 75%.
3. Recommended rise/fall time to minimize overshoot.
4. RMS noise measured over the Recommended Minimum Measure Window for the given voltage or current range, typical.
5. Time necessary for the signal to settle to the DC accuracy level. (Example: 10 mA settling time on the PMU 10 V range is defined when the
signal is within 1.25% of the final value. This calculation: Accuracy = 0.25% + 100 µA = 0.25% + (100 µA/10 mA) = 0.25% + 1% = 1.25%).
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Datasheet
General Information
Connector Type 3-lug triax
Package Contents
(1) 707B Switch Mainframe
General Information
Connector Type 3-lug triax
Maximum Signal Level 200 V, 1 A
Package Contents
(1) 707B Switch Mainframe
32 TEK.COM
4200A-SCS Parameter Analyzer
9. NBTI/PBTI Package
The 4200-BTI-A package combines advanced DC I-V and ultra-fast I-V measurement capabilities of Keithley with automatic test executive
software to provide the most advanced NBTI/PBTI test platform available in the semiconductor test industry.
Model 4200-BTI-A
Offers the best high-speed, low-current measurement sensitivity available in a single-box integrated solution.
Ensures that source/measure instrumentation will not be the limiting factor when making low-level
measurements.
The ACS software, which is provided in the package, supports building complex test sequences, including
up to 20 measurement sequences and full prober integration. It also:
• Easily integrates DC I-V and ultra-fast I-V measurements into a pre- and post-stress
measurement sequence.
• Incorporates single pulse charge trapping (SPCT) measurements into longer stress-measure
sequences.
Cabling
Example of using eight SMUs to stress 20 devices in parallel for HCI and NBTI. A separate ground unit (GNDU) is used for common terminals.
TEK.COM 33
Datasheet
Keithley User Library Tool (KULT) Assists test engineers to create custom test routines as well as use existing Keithley and third-party
C-language subroutine libraries. Users can edit and compile subroutines, then integrate libraries of
subroutines with Clarius, allowing the 4200A-SCS to control an entire test rack from a single user interface.
KPulse A graphical user interface that is a non-programming alternative to configure and control the installed
4225-PMU or 4220-PGU pulse generator modules. It is used for quick tests requiring minimal interaction
with other 4200A-SCS test resources.
Data Analysis Two methods of parameter extraction are available. The Formulator executes data transformations for
performing automated line fits and parameter extraction. A spreadsheet offers standard spreadsheet
analysis tools. Many of the sample libraries include parameter extraction examples.
Formulator The Formulator supports mathematical functions, conversion functions, search functions, common industry
constants and line fit/parameter extraction functions. The Formulator supports the following functions:
Mathematical Functions Addition (+), subtraction (-), division (/), multiplication (*), exponent (^), absolute value (ABS), value at an
index position (AT), average (AVG), moving average (MAVG), conditional computation (COND), derivative
(DELTA), differential coefficient (DIFF), exponential (EXP), square root (SQRT), natural logarithm (LN),
logarithm (LOG), integral (INTEG), standard deviation (STDEV), moving summation (SUMMV), arc cosine
(ACOS), arc sine (ASIN), arc tangent (ATAN), cosine (COS), sine (SIN), tangent (TAN)
Search Functions Find down (FINDD), find up (FINDU), find using linear interpolation (FINDLIN), maximum position
(MAXPOS), minimum position (MINPOS), first position (FIRSTPOS), last position (LASTPOS), sub array
(SUBARRAY), return a specified number of points (INDEX)
34 TEK.COM
4200A-SCS Parameter Analyzer
Formulator Constants
The Formulator supports user-supplied constants for use in parameter extractions.
These constants are factory installed:
PI = 3.14159 rad (π)
K = 1.38065 × 10 –23 J/K (Boltzmann’s constant)
Q = 1.60218 × 10 –19 C (Charge of electron)
M0 = 9.10938 × 10 –31 kg (Electron mass)
E V = 1.60218 × 10 –19 J (Electron Voltage)
U0 = 1.25664 × 10 –6 N/A 2 (Permeability)
E0 = 8.85419 × 10 –12 F/m (Permittivity of a Vacuum)
H = 6.62607 × 10 –34 m2 * kg/s (Planck’s constant)
C = 2.99792 × 10+8 m/s (Speed of light)
KT/Q = 0.02568 V (Thermal Voltage)
Automation
Test Sequencing Clarius provides point-and-click test sequencing on a device, a group of devices (subsite, module, or test
element group), or a user-programmable number of probe sites on a wafer.
Prober Control Keithley provides integrated prober control for supported analytical probers when test sequencing is
executed on a user-programmable number of probe sites on a wafer. Contact the factory for a list of
supported analytical probers. A manual prober mode prompts the operator to perform prober operations
during the test sequence.
Fake Prober
The Fake prober is useful when prober actions are not desired, such as when debugging, without having to
remove prober commands from a sequence.
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Datasheet
External Instrument Configuration KCon allows lab managers to integrate external instruments with the 4200A-SCS and a supported switch
matrix. After the user configures the GPIB addresses for supported instruments, Keithley-supplied
libraries will function and test modules can be transferred between 4200A-SCS systems without any user
modification. In addition to the standard supported instruments, the General Purpose Instrument allows
users to develop subroutines and control switches for a generic two-terminal or four-terminal instrument.
For the widest possible system extensibility, users can develop their own test libraries for general
purpose instruments.
Outside of KCon, users can configure GPIB or USB control of simple instruments, switches, lamps, etc.
with included user libraries.
Switch Matrix Configuration Users define the connection of 4200A-SCS instruments and external instruments to device under
test (DUT) pins through a supported switch matrix configuration. (See Switch Matrix Support and
Configurations.) Once connections are defined, users need only enter the instrument terminal name and
pin number to establish connections. The 4200A-SCS applications and standard user libraries manage the
routing of test signals between instrument terminals and DUT pins. The user doesn’t need to remember
and program row and column closures. Test modules can transfer between 4200A-SCS systems without
re-entering connection information.
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4200A-SCS Parameter Analyzer
4200-SMU Medium Power Source-Measure Unit for 4200A-SCS, 100 mA to 100 fA, 200 V to 0.2 µV, 2 Watts
If configured with a preamp: All cables are provided with the 4200-PA. See 4200-PA below.
If configured without a preamp: (2) 4200-MTRX-2 Mini Ultra Low Noise Triax Cables, 2 m (6.6 ft)
4201-SMU Medium Power Source-Measure Unit for 4200A-SCS and high-capacitance setups, 100 mA to 100 fA,
200 V to 0.2 µV, 2 Watts, 10 µF load capacitance
If configured with a preamp: All cables are provided with the 4200-PA. See 4200-PA below
If configured without a preamp: (2) 4200-MTRX-2 Mini Ultra Low Noise Triax Cables, 2 m (6.6 ft)
4210-SMU High Power Source-Measure Unit for 4200A-SCS, 1 A to 100 fA, 200 V to 0.2 µV, 20 Watts
If configured with a preamp: All cables are provided with the 4200-PA. See 4200-PA below.
If configured without a preamp: (2) 4200-MTRX-2 Mini Ultra Low Noise Triax Cables, 2 m (6.6 ft)
4211-SMU High Power Source-Measure Unit for 4200A-SCS and high-capacitance setups, 1 A to 100 fA, 200 V to
0.2 µV, 2 Watts, 100 µF load capacitance
If configured with a preamp: All cables are provided with the 4200-PA. See 4200-PA below
If configured without a preamp: (2) 4200-MTRX-2 Mini Ultra Low Noise Triax Cables, 2 m (6.6 ft)
4200-PA Remote Preamp Option for 4201, 4211, 4200, and 4210 SMUs, extends SMU to 0.01 fA resolution
(4) CA-447A SMA Cables, male to male, 100 Ω, 1.5 m (5 ft) • (4) CS-1247 Female SMA to Male
BNC Adapters
TEK.COM 37
Datasheet
(1) 4200-MTRX-2 Mini Ultra Low Noise Triax Cable, 2 m (6.6 ft)
NOTE: For each SMU connected through the 4200A-CVIV, one 4200A-CVIV-SPT or one 4200-PA is required.
38 TEK.COM
4200A-SCS Parameter Analyzer
Test Fixtures
8101-PIV Pulse I-V Demo Fixture
TEK.COM 39
Datasheet
237-ALG-2 Low Noise Triax Input Cable terminated with 3 alligator clips, 2 m
4210-MMPC-C Multi-Measurement (I-V, C-V, Pulse) Prober Cable Kit for Cascade Microtech 12000 prober series
4210-MMPC-S Multi-Measurement (I-V, C-V, Pulse) Prober Cable Kit for SUSS MicroTec PA200/300 prober series
4210-MMPC-L Multi-Measurement (I-V, C-V, Pulse) Prober Cable Kit for Lucas Signatone probers
4210-MMPC-W Multi-Measurement (I-V, C-V, Pulse) Prober Cable Kit for Wentworth Laboratories probers
4200-TRX-* Ultra Low Noise Preamp Triax Cable: 0.3 m, 0.75 m, 2 m, 3 m options
4200-PMU-PROBER-KIT General Purpose Cable/Connector Kit. For connecting the 4225-PMU to most triax and coax probe
stations. One kit required per 4225-PMU module.
Software
ACS-BASIC Component Characterization Software
Other Accessories
EM-50A Modified Power Splitter
TL-24 SMA Torque Wrench
40 TEK.COM
4200A-SCS Parameter Analyzer
External Display External VGA, HDMI, or Display Port: The system is designed to work with an external monitor of resolution
1920 × 1080
Maximum VA 1000 VA
Regulatory Compliance Safety: European Low Voltage Directive. NRTL listed by Intertek for the US and Canada.
EMC: European EMC Directive
Dimensions 43.6 cm wide × 22.3 cm high × 56.5 cm deep (175 ⁄32 in × 8¾ in × 22¼ in)
Weight (approx.) 29.7 kg (65.5 lb) for typical configuration of four SMUs
I/O Ports USB, SVGA, Display Port, RS-232, GPIB, Ethernet, mouse, keyboard, audio
Ground Unit Voltage error when using the ground unit is included in the 4200-SMU, 4210-SMU, and 4200-PA
specifications. No additional errors are introduced when using the ground unit.
Maximum Current 2.6 A using dual triaxial connection; 9.5 A using 5-way binding posts
LCD Display Pixel Guideline LCD displays are made up of a matrix of pixels, with each pixel consisting of red, green, and blue sub-
pixels. These pixels and sub-pixels can become fixed in an unchanging state resulting in permanently
black, white, or colored spots on the display. These are typically categorized as Bright or Black pixel (or
dot) defects.
Bright dot defect: A dot that is always lit, either as a white or colored dot, visible on a black check pattern.
Black dot defect: A dot that appears as either black or purple (magenta) on red, green, and/or blue
check patterns.
The LCD display used in the 4200A-SCS is permitted to have a maximum of 6 (six) bright dot defects
upon receipt of a new instrument. A maximum of three bright dot defect pairs (adjacent defective dots) are
permitted. Three adjacent bright dots are not permitted under the pixel guideline.
The LCD display is permitted to have a maximum of 5 (five) black dot defects. Two adjacent black dot
defects are to be counted as a single black dot defect. A maximum of three black dot defect pairs
(adjacent defective dots) are permitted. Three adjacent black dot defects are not permitted under the
pixel guideline.
TEK.COM 41
Datasheet
Mainframes
4200A-SCS Parameter Analyzer with 15.6” LCD display
Instruments/Modules
4200-PA Remote SMU Preamplifier Module
4200-SMU/PA-R Field Installable, Medium Power Source Measure Unit with Preamplifier
4201-SMU-R Field installable medium power Source Measure Unit for high-capacitance setups
4201-SMU/PA-R Field Installable, medium Power Source Measure Unit for high-capacitance setups with Preamplifier
4210-SMU/PA-R Field Installable, High Power Source Measure Unit with Preamplifier
4211-SMU-R Field installable high power Source Measure Unit for high-capacitance setups
4211-SMU/PA-R Field Installable, high power Source Measure Unit for high-capacitance setups with Preamplifier
42 TEK.COM
4200A-SCS Parameter Analyzer
TEK.COM 43
Datasheet
4200A-MF-UP This upgrade service will convert any 4200-SCS mainframe to the 4200A-SCS widescreen mainframe with
Clarius+ software. Any instrument modules in the 4200-SCS will be moved to the 4200A-SCS mainframe
and the system will receive a factory calibration and a one year warranty on the mainframe.
4200A-IFC Required installation and factory calibration service when any instrument module is added to the
4200A-SCS mainframe. Only one 4200A-IFC is required per instrument module upgrade order.
Not required when ordering the 4200A-MF-UP.
4200A-WIN10-UP This service ugrades the embedded operating system of the 4200A-SCS Parameterr Analyzer to
Microsoft® Windows® 10.
4200A-WIN10-DRV Replace hard disk inside the 4200A-SCS unit with a new Windows 10 disk. Requires unit to be shipped
back to the factory. This upgrade can be ordered with the -NOACRONIS option to remove the Acronis
backup software from the 4200A-SCS. Do not add 4200A-IFC unless instrument modules are being
added as well.
4200-SMU-MOD/4210-SMU-MOD Modernize an older SMU in order to add new SMUs to the same system. Should not be ordered with
4200A-MF-UP.
Hardware Warranty Keithley Instruments warrants the Keithley manufactured portion of the hardware for a period of one year
from defects in materials or workmanship; provided that such defect has not been caused by use of the
Keithley hardware which is not in accordance with the hardware instructions. The warranty does not apply
upon any modification of Keithley hardware made by the customer or operation of the hardware outside the
environmental specifications.
Software Warranty Keithley warrants for the Keithley produced portion of the software or firmware will conform in all material
respects with the published specifications for a period of ninety (90) days; provided the software is used on
the product for which it is intended in accordance with the software instructions. Keithley does not warrant
that operation of the software will be uninterrupted or error-free, or that the software will be adequate for the
customer’s intended application. The warranty does not apply upon any modification of the software made by
the customer.
CAUTION: Do not reinstall or upgrade the Microsoft® Windows® operating system (OS) on any 4200A-SCS. This action should only be performed
at an authorized Keithley Instruments service facility. Violation of this precaution will void the 4200A-SCS warranty and may render the 4200A-SCS
unusable. Any attempt to reinstall or upgrade the operating system (other than a Windows service pack update) will require a return-to-factory repair
and will be treated as an out-of-warranty service, including time and material charges.
Although you must not attempt to reinstall or upgrade the operating system, you can restore the hard drive image (complete with the operating
system) using the Acronis True Image OEM software tool, included with the 4200A-SCS.
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4200A-SCS Parameter Analyzer
Contact Information:
Australia 1 800 709 465
Austria* 00800 2255 4835
Balkans, Israel, South Africa and other ISE Countries +41 52 675 3777
Belgium* 00800 2255 4835
Brazil +55 (11) 3759 7627
Canada 1 800 833 9200
Central East Europe / Baltics +41 52 675 3777
Central Europe / Greece +41 52 675 3777
Denmark +45 80 88 1401
Finland +41 52 675 3777
France* 00800 2255 4835
Germany* 00800 2255 4835
Hong Kong 400 820 5835
India 000 800 650 1835
Indonesia 007 803 601 5249
Italy 00800 2255 4835
Japan 81 (3) 6714 3010
Luxembourg +41 52 675 3777
Malaysia 1 800 22 55835
Mexico, Central/South America and Caribbean 52 (55) 56 04 50 90
Middle East, Asia, and North Africa +41 52 675 3777
The Netherlands* 00800 2255 4835
New Zealand 0800 800 238
Norway 800 16098
People’s Republic of China 400 820 5835
Philippines 1 800 1601 0077
Poland +41 52 675 3777
Portugal 80 08 12370
Republic of Korea +82 2 565 1455
Russia / CIS +7 (495) 6647564
Singapore 800 6011 473
South Africa +41 52 675 3777
Spain* 00800 2255 4835
Sweden* 00800 2255 4835
Switzerland* 00800 2255 4835
Taiwan 886 (2) 2656 6688
Thailand 1 800 011 931
United Kingdom / Ireland* 00800 2255 4835
USA 1 800 833 9200
Vietnam 12060128