2011 3rd International Conference on Advanced Computer Control (ICACC 2011)

Frication Compensation and Disturbance Observer Design for a High Acceleration

Precision Direct Drive Motion Stage

Li Teng Liu Yanjie Sun Lining

State Key Laboratory of Robotics and System
Harbin Institute of Technology
Harbin, China
e-mail: liteng_ha@126.com

Abstract-Friction compensation and disturbance observer
design in velocity loop for a high acceleration precision motion
stage actuated by linear motor is considered. The friction
compensator divides the friction into linear and nonlinear part
basing on LuGre model, linear part is treated as damping
together with other part in system, and nonlinear part is
compensated basing on the model. Internal state z in LuGre
model is calculated according model and position real time
instead of using state observer, which can reduce calculation
and as far as possible to ensure the precision of friction model.
The disturbance observer proposed here account for time
delay in system which caused by discrete sampling, signal
process, transport distance, and so on. Simulation results
demonstrate the effectiveness of the approach.
Keywords-control system; velocity loop; linear motor; time
delay; less calcultation
I. INTRODUCTION
Accurate positioning with high acceleration is required in
many manufacturing systems, particularly in semiconductor
applications. Direct drive system has proven to be an
effectively approach to achieve high acceleration, high
velocity and high precision. Compared with traditional gear­
reduced systems, the technical advantages of direct drive
systems are widely known: friction is reduced, backlash is
eliminated, and the mechanical stiffness is very high. The
disadvantages, on the other hand, also exist: the system is
more sensitive to disturbance forces and parameter variations.
To fully exploit the potential advantages of direct drive
actuators, the controller must provides a high level of real
time character, less calculation, and disturbance rejection,
especially when using computer to form the control system.
For high precision motion stage, friction is one of
significant factors to reduce system performance, especially
the nonlinear friction for positioning accuracy. As a result of
the hard nonlinear friction behavior, friction can only be
partly compensated using linear feedback control strategies
such as PID, cascade PIPI or state feedback control. More
advanced techniques have been incorporated to achieve
sufficiently high path and tracking accuracy [1.3]. For high
acceleration motion system, in order to get real time,
calculation should be considered, so in this paper linear
friction is regarded as damping in system, and nonlinear
friction is compensated base on LuGre model, and internal
Friction compensation basing on model can not
compensate friction completely because of modeling error,
measurement noise and so on. Besides, in direct drive
systems there are no gear reduction effects to help deaden
disturbance forces at the load, and thus disturbance observer
should be chosen. Disturbance observer provides a
convenient method assuring the controller provides adequate
disturbance rejection ability [4.6]. For high acceleration
Motion system, time delay should be considered. So in this
paper disturbance observer with time delay effect is proposed.
Friction compensation and disturbance rejection can
either in position loop or in velocity loop, because of friction
is function of velocity and nominal model in velocity is
relatively simple, without more integral or differential
conversion, so this article focus on velocity loop control
system design. Motion stage we studied in this paper is
described in second part and model of it is built including
both electrical and mechanical parts by bond graph approach.
Friction compensator and disturbance observer are designed
respectively in section III and IV, simulation results of
proposed control approach are shown in section V.
II. DIRECT DRIVE MOTION STAGE
Figure 1 shows the direct drive motion stage we studied.
It is a high performance positioning system, with the max
acceleration of 109, positioning accuracy at the micron level.
Cross roller guide
Figure 1. High acceleration and high precision motion stage
The stage is driven by permanent magnet linear
synchronous motor (PMLSM), and the slider is denoted by a
flat for simplification. Cross roller guide is chosen for its
high load capacity, high acceleration I deceleration. Grating
sends position signals to control system with nano-scale
resolution constantly. For this system, moving mass,
M 3.86kg, including mass of moving modular and linear
=

state z is obtained by model and position to eliminate the motor slider. R 0.660, L 6.07mH and Ke 25.7N/A are
= = =

calculation compared with using state observer.

resistance, inductance and force constant of linear motor.

978-1-4244-8810-0111/$26.00 mOll IEEE 120

 2011 3rd International Conference on Advanced Computer Control (ICACC 2011)

A. Friction Model
At present, many friction models have been proposed by
researchers. It is necessary to select a precision friction
model that accurately represents the friction forces in the
system. LuGre model [7] is one of perfect models, which can
describe accurately the static and kinetic characters of
friction, like stick slip, hunting, pre-sliding displacement,
friction memory, and so on, so we use this model here. Figure 2. Equivalent circuit of PMLSM and model of mechanism

LuGre friction model can be expressed as follows:

dz 1:1.., I :M
Ff =O"oz+O"j-+Bv

dz
-=v--- z
dt
O"o l vl 21 �dY�161 �
I
�
R:f('.)
dt g(v) Se -!.......i

g(v)=Fe+(Fs -Fe)e-(v/v
,)'

Ff is the whole friction, 0"0 and 0"1 are equivalent to the

� 71 R:D
stiffuess and the damping coefficients of the bristle, B is the
coefficient of viscous friction, v is the moving velocity. z Figure 3. Bond graph model of system
denotes average deflections of bristles. F, is static friction,
Se denotes the input voltage, I:Lq and R:Rs denote the
Fe is coulomb friction, and VI is the stribeck velocity. inductance and resistance in circuit, GY denotes the energy
Basing on above model, in this paper, friction is treated conversion between permanent magnetic energy and
as two parts: nonlinear part ( f ( v» and linear part (viscous mechanical energy in air gap, Ke is the conversion coefficient.
friction), rewrite the model as following forms: I:M denotes the inertia of load, and R:B denotes the
Ff =f ( v)+B v coefficient of viscous friction, Rj{v) denotes the nonlinear
part of friction, its the function of velocity. The first 1-
B. Modelling of System junction describes voltage equation:
Direct drive motion stage is a typical mechatronic system, uq = Rsiq +�'¥q +�V'¥d (1)
its model should containing both motor and mechanism. dt T
Linear motor is essentially characterized by two parts: a Where 'P d, 'P q are flux of d-axis and q-axis respectively,
slider, powered with a three-phase alternate current, and a '¥d =Ldid +'¥I' 'Pq = Lqiq , Ke =(ff / T)'¥I' 'PI is the flux of
stator, made up of a number of permanent magnets. If the permanent magnet and it is a constant.
three phases are Y-connected and fed with a three-phase The second I -junction describes force balance equation:
system of currents, they produce a fundamental magnetic F=Mv+Bv+f(v) (2)
field with sinusoidal distribution in space. In tum, the Suppose, state vector X= [P2P 6] T, input vector U = [Se],
magnets produce an excitation field whose fundamental output vector Y= [16]. Pb P6 denote the flux in electrical
component is again sinusoidal. Magnetic field, combination system and momentum in mechanical system separately, Se
of the two contributions, then arises in the air gap. Each
denotes the voltage in circuit,./6 denotes velocity v.
phase is then interested by a back electromotive force (EMF), According to the definition of elements and causality:
according to the induction law. In A-B-C reference frame,
model of PMLSM is nonlinear time-variable equation. P2 =f2 Lq, P6=f6M
Analysis of it is very difficult. Accordingly, model under d-q e3=RJ3, e7 =Bf7 , eg =fUg)
reference frame based on the principle of field-oriented According to energy flow:
control avoids the problem. This analysis process is similar
to that of PMSM. So they have the same equivalent circuit in
fi =f2 =f3=f4' e1 =e2 +e3+e4
this case as show in figure is]. fs =f6=f7 =f g' es =e6+e7 +eg
Mechanism is simplified as a mass moving under es =Kef4' e4 = Kefs
external force and friction force, there is no deformation and e;, j; (i =1 ,2 . . . 7) are effort and flow variables of each
rigid connection between load and slide. Model of it is also element. From above equations:
show in figure 2. . Rs Ke
Bond graph approach is used to modeling the system. P2=e2=Se--P2--P6
Lq M
According to figure 2, the model can be obtained in figure 3.
. Ke B
P6= e6=-P2--P6-f(v)
Lq M
1
f6=-P6
M
Analysis and controller design will basing on this state
space equations. This is a 2-order system.

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 2011 3rd International Conference on Advanced Computer Control (ICACC 2011)

III. FRICTION COMPENSATION BASING LUGRE MODEL
LuGre model could describe static and dynamic behavior
of friction, and it turns out to be suitable for the design of
model-based friction compensation schemes [9J. But when
using this dynamic friction model, controller design becomes
difficult. One reason is the friction parameters appear in a
function of position, that is, z may be obtained by model and
position real-time.
Figure 5 shows the relationship between friction and
velocity, when velocity is bigger than VI (here, VFO.009),
friction function is approximate to the linear function.
25 r---�-----r--�--r---�

time variable fashion, the other reason is the system's

20
internal state z, which depends on the unknown parameters,
is not measurable. Normally approaches solving the
1 15
problems are parameter identification and state observer [ 0J.
Parameter identification usually needs mass data for
convergence and large calculated amount. State observer also
has the same problems. For a high acceleration motion stage,
parameters will not significantly changed within a short
distance, so in this article, we suppose parameters are time
invariable, on the other hand, in the typical motion process, 0.04 0.06 0.08 0.1
v(mI5)
there are fewer sampling points, identification approach may
not have good convergence, and the high real-time require Figure 5. LuGre friction model
less calculation. So a new friction compensation approach
that friction is divided into linear part and nonlinear part Figure 6 shows z and dz/dt change with time. The left Y
compensated respectively, and z is obtained by model and axis denotes z, the right Y axis denotes dz/dt. Variation of
position real time, is proposed below. In our system, them completely describes the characters of static friction.
Fs = lIN , Fe = 9N , Vs = 0.004m1s , ao = 650000N/m ,
a1 = 1650Ns/m , B=120Ns/m.

A. Analysis of Friction Character

Internal state z describes the deflections of bristle, when
1 1, __ - - - - - - - - - - - - - - -,_.- - - - - - - - - - - 0
stage in the complete motion state, dz/dt =0, g(v )=ao z , the
model can be simplified as:
- (vlv, ) 2
- Fc + (Fs - Fc ) e
rL'f - + Bv
When v» vs, the second item approaches to zero, friction
force degraded to the linear function of velocity. 1(5)
-(v,lvj <
Define velocity VI, when (Fs - Fc ) e J, Figure 6. z and dzJdt with time

Ff =Fc+Bv
Figure 7 is the relationship between position s and z,
Where r5 is a very small number, it means the effect of from the figure, z is the function of position, and it can be
nonlinear friction can be neglected now, here we obtained by this function.
chose J= 0.0 I . In this way, friction force is divided into two x 10"
'
parts according to VI, nonlinear part before VI, and linear part 1. 6 r---�----�--'
after VI. In nonlinear part, z must be obtained. 1P�-------1
·'
Ff ____ � 1; � r-x :.:
'0 _ :. ________________---;
' ·· r
N 0 : '
0.6
0.5
0.4
s
0.2
Figure 4. Static friction model
O L---�----�--�
o 0.01 0.02 0.03 0.04 0.05
When velocity closes to zero, dz/dt also equals to zero, s(m)
now the static friction is simplified as: Figure 7. z with position
dz
Ff =ao z+aj-+ Bv=aoz
dt B. Design of Friction Compensator
It has hysteresis relationship with position as show in
Friction compensation basing on model is an effect
figure 4, that is, friction is the function of position. So z is the
approach to deal control performance decrease due to
nonlinear friction. The rest part of friction that don not

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 2011 3rd International Conference on Advanced Computer Control (ICACC 2011)

compensated by model can be treated as an external In the figure, sys denotes system without time delay,
disturbance suppress by other controller. For the high sys5us, sysl0us, and sys20us respectively denote system
acceleration motion system, less calculation and real-time are with time delay 51ls, lOllS and 20IlS. It shows that the
important, so the friction compensation is divided into two stability margin getting smaller with time delay increase.
parts, as shown in figure 8. Friction compensator is divided
B. Disturbance Obser v er Design for Time Delay Effect
into two parts by velocity vI , the viscous friction is treated as
Consider the transfer function of system:
damping in system O(s), C(s) is the controller in velocity
K
loop, vref is the reference velocity. G d(s)=e-zo, f
P
(Ls+R)(Ms+B)+K }
And the nominal model of it is Opn(S).
K
f
Gpn (s) =

(Ls+R)(Ms+B)+K }
Figure 10 shows the structure of the disturbance observer
account for the time delay. Signals c, d and v are the
command, disturbance and output respectively. The
Figure 8. Friction compensation basing on LuGre model
command is normally provided by an outer loop controller
designed basing on the nominal plant model. The key design
issue is choosing Q(s) to provide a good balance between
IV. DISTURBANCE OBSERVER DESIGN disturbance rejection performance versus stability robustness
Disturbance observers offer several attractive features. In and noise sensitivity.
the absence of large model errors, they allow independent
tuning of disturbance rejection characteristics and command
following characteristics, which is particularly helpful in
situations where gains need to be tuned on-line. Further,
compared to integral action, disturbances observers allow
more flexibility via the selection of the order, relative degree,
and bandwidth of low-pass filtering Q(s). For the high
acceleration motion stage, position measurement, signal Figure 10. Disturbance observer with time delay
processing, velocity estimate, sampling time and so on, will
make the system have significant time delay [Ill. Traditional In continuous time, a Pade approximation can be used to
disturbance observer design methods encounter problems. So denote the time delay e -ts . I -order Pade approximation is
in this paper disturbance observer account for time delay
effect is studied. used here: e-t>. = (1- 2.�)/(1+2.�) .
2 2
A. Time Delay Character The candidate Q-filter is chosen to be of the form:
Do not consider the nonlinear part of friction in system, 3Ls+I
Q(s) =
3
and B is viewed as damping coefficient. In this case, the (LS) +3(Ls) 2 +3Ls +I
linear time invariant system with time delay T is Opd(S).
Figure 9 shows system Bode plot with different T. C. Control System Design
B o de Diagram Typical control approach in velocity loop is PD control,
-20 .. " . . ' '
.. :;::
r=:;::: . :;::
. .. :: :T;
;::;:Hi:;::::;:::
...... ...
. ;:;-::
...:;.�TTT:1
..... sys
. .. .. . -==-�1 --
so the control system we proposed is shown in figure 11.
-40
, I I " "" - - sys5us
, I I I .""

�o , ' " ' ''" - . - . sysl Ous

....... sys20us
jo
io
::;
120
. .: .: . .... . : .: ..... . ..
.
...� • • . �..: �
.
: �: • . . � • • . �..
: �
.
: : ..... .
: �: • . . � • • . �.:.:.:�: • . . � • •

1
,
, "' " I
'
I
"
"
"
'
""
' " " I
"
"

' '
""
''
" I
"
"
"
" "
"

��:;:;��.�.�.�.�....
48 �:::::: .�. .�.�.;.;:. �::::� . :::;: .

-45 � :.: �':':�H .. �.. :.: �.:.:��: ... �.. :.: �.:..
• . . • . : :�: ... .. . .. . . , , " .

�o ... �.. : .:�.:.:��:.. '.. : .:�.:.:��:... �.. : .:�.:.:.:�:... �.. : . : �':'�:.

�5 . : �: ... � .. : .:�.:.:.�
.. � .. : .:�.:.:��:... �. '.:�.:.� : :... .. . .. . , , " ..
,"," . :,..:
f.ilo . .. . ..... . .. ��,"",' --:.,.. ' :':"';';;":-=;..,,;...� .;..:. ' ""

� � � � I� I � [JI�JJ�� � � I� I � [JI�JJ�� � -�-- � ��-:-:-�: ����s=;��"

5 -

� i fFHf � i fFHf � i fFHf � i i �+H,

Figure 11. Block diagram of control system
2 70 • . . • • · ··· .. · ··· .. · ··· .. ·

315 �·�·�·�··�·==··�···
� =··
� �·==·=· �·�··�··�·�·=·=·�··
� ·=.�.�.��
� The disturbance observer and PD compensation in the
10' 102 F req u en 2/(radiSeC) 10' 10
feedback path, and friction compensator is basing on LuOre
Figure 9. System bode plot with different � model and position information.

123
 2011 3rd International Conference on Advanced Computer Control (ICACC 2011)

V. SIMULATION RESULTS VI. CONCLUSIONS

MATLAB/Simulink is used. Velocity reference signal is A control system was designed and applied to one axis of
shown in Figure 12, the max acceleration is reach 5g, a high acceleration precision direct drive motion stage.
movement time in one direction is 12ms, with 6ms detent System model including both actuator and mechanism is
time. It describes both the positive and negative velocity. built firstly by bond graph approach. Friction compensator
was provided basing LuGre model, linear and nonlinear part
are respectively compensated, internal state z is obtained by
model and position real time for nonlinear friction
compensation, which reduce the calculation and as far as
possible guarantee the model precision. Disturbance observer
which accounts for time delay in the plant was used. It was
effective in rejecting disturbances while assuring the closed­
-0_05
loop frequency response. Simulation results show the
-0.1 effective of proposed approach, it will be applicable to direct
drive system used in a variety of manufacturing applications,
0.005 0.01 0.035 especially in semiconductor case.
Figure 12_ Velocity reference ACKNOWLEDGMENT

Figure 13 shows the velocity error comparison of PD This work is supported by the National Natural Science
controller and PD with friction compensation. It's obviously Foundation of China under grant 50705027, the National
Important Project on Technologies R&D under grant
show that in low speed positioning process, velocity error of
2009ZX02021-003, and Program for Cheung Kong Scholars
PD with friction lower than the PD controller, which means
and Innovative Research Team in University.
nonlinear friction compensator have good performance.
x 10...3
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Figure 14_ Velocity error comparison

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