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Thermodynamic reassessment of Au–Ni–Sn


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CALPHAD: Computer Coupling of Phase Diagrams and Thermochemistry 43 (2013) 61–70

Contents lists available at ScienceDirect

CALPHAD: Computer Coupling of Phase Diagrams and


Thermochemistry
journal homepage: www.elsevier.com/locate/calphad

Thermodynamic reassessment of Au–Ni–Sn ternary system


H.Q. Dong n, V. Vuorinen, T. Laurila, M. Paulasto-Kröckel
Department of Electronics, Aalto University School of Electrical Engineering, FIN-02601 Espoo, Finland

art ic l e i nf o a b s t r a c t

Article history: For having a better understanding on the formation and evolution of metal bonding interconnection
Received 6 June 2013 microstructures the Au–Ni–Sn ternary system was reassessed on the basis of experimental results and
Received in revised form the recently reported thermodynamical description for Au–Sn and Ni–Sn systems. In this paper, the
30 September 2013
thermodynamic parameters of Ni3Sn4 phase were modified in order to achieve a better agreement with
Accepted 6 October 2013
Available online 22 October 2013
experimentally determined phase boundaries. Further, a self-consistent set of thermodynamic para-
meters for the Au–Ni–Sn system were obtained, which were able to reproduce most of the available
Keywords: experimental data. The Ni|80Au20Sn (wt%) diffusion couples were annealed at 320 1C for 10,000 s and at
Thermodynamic modeling 150 1C for 2500 h. The microstructures of these samples were studied with SEMþ EDS technique. The
Au–Ni–Sn
reaction interface between Ni and near eutectic AuSn alloy consisted of Ni3Sn/(Ni, Au)3Sn2/AuSn/Au5Sn
Diffusion couples
layers. This experimentally observed diffusion path of Ni against Au–20 wt% Sn solder at 150 1C was
Diffusion path
rationalized on the basis of the thermodynamically calculated isothermal section.
& 2013 Elsevier Ltd. All rights reserved.

1. Introduction The element, Ni, just as in other bonding technologies [6,7], still
plays the role of diffusion barrier in Sn-related bonding systems
Metal bonding method is becoming more popular in micro- using TLP bonding [5]. Thus, it is essential to understand the
electro-mechanical systems (MEMS) wafer level packaging. It is now microstructure of the Au–Sn/Ni bonding joint which governs its
gradually taking over the traditional glass based MEMS bonding pro- mechanical properties.
cesses due to several advantages over other bonding methods: not However, the microstructure after the bonding joint is determ-
only significantly reducing products costs, but also capable of provid- ined not only by its composition and thermal history, but also by
ing electrical interconnection and higher levels of hermeticity [1]. the reactions that occur at the solder/substrate interface [8]. A comp-
With respect to various metal bonding techniques, the transient rehensive understanding on the formation and evolution of the
liquid phase bonding (TLP) is considered very promising due to interconnection microstructure requires obtaining a consistent ther-
several advantages: (1) the final bond has a potential of having modynamic description of the various metal bonding systems, in order
closely related mechanical, electrical and thermal properties to gain better understanding on the changes occurring during
to those of the base materials, owing to the formation of the fabrication, reliability testing and field usage [9,10].
interlayer (i.e., alloys containing the base materials as a solvent and Therefore, in this work, the phase equilibria of Au–Ni–Sn ternary
a solute); (2) the bonding process can be performed at a low were recalculated on the basis of the newly updated thermodynamic
temperature, which enables the integration of temperature sensi- description of two binary systems. Besides, microstructure of the
tive devices, and has the capability of reducing the cost and diffusion couple, Au–20 wt% Sn/bulk Ni, at 150 1C was also investi-
minimizing the stresses induced by a thermal mismatch between gated via different annealing period.
the materials; and (3) it permits higher processing temperatures for The paper is organized as follows: the experimental method
further assembly steps as well as higher operational temperatures in will be introduced in Section 2. A brief review of previous work is
the end-application due to the higher melting point of the formed presented in Section 3. The applied methods and models that were
interlayer tin comparison to the bonding temperature [2–4]. The used will be described in Section 4. The results obtained and the
Au–20 wt% Sn alloy is continually used in TLP bonding technique related discussions can be found in Section 5. Finally, conclusions
owing to its relatively low bonding temperature, low elastic mod- drawn from this simulation are summarized in Section 6.
ulus, high thermal conductivity and high strength. Here the Sn
element acts as the solder material, and Au is the base metal [5].
2. Materials and methods

n
Corresponding author. Tel.: þ 358 409311239. The reaction couples were manufactured by placing a 100 mm
E-mail address: hongqun.dong@aalto.fi (H.Q. Dong). thick near eutectic Au80/Sn20 (wt%) [Au70.7/Sn29.3 (at%)] alloy

0364-5916/$ - see front matter & 2013 Elsevier Ltd. All rights reserved.
http://dx.doi.org/10.1016/j.calphad.2013.10.001
62 H.Q. Dong et al. / CALPHAD: Computer Coupling of Phase Diagrams and Thermochemistry 43 (2013) 61–70

foil between etched (1 min in dilute HCl þmethanol solution) solid solubility of Au in Ni3Sn4 was not found, and the maximum
0.5 mm thick Ni foils (99,99þ , Goodfellow Ltd.). The sandwich solubility of Ni in AuSn was 11.9 at% which was achieved at high
structure was then soldered at 320 1C for from 100 s up to 10,000 s temperature (at 400 1C). The above information implies that the
at air furnace by utilizing Rosin Mildly Activated (RMA) flux. After deduced room temperature tie-triangle could not represent the
the soldering a few samples were annealed in a forced convection true phase equilibria, and those proposed ternary solubility were
oven (Heraeus Instruments UT6) for different periods of time up to incorrect. Therefore, the results from [21] were not taken into
2500 h at 150 1C. The cross-sections of the samples were prepared consideration. In the work of [22], the complete phase equilibria of
with the standard metallographic methods, and they were ana- Au–Ni–Sn ternary system were experimentally determined and
lyzed with a field emission scanning electron microscope (JEOL thermodynamically calculated by means of differential scanning
6335 F FE-SEM) equipped with an energy dispersive spectrometer calorimetry, X-ray diffraction, scanning electron microscopy,
(EDS, Oxford ISIS). EPMA, and CALPHAD approach [22]. In that work, they proved
that there was no such continuous solid solution from Ni3Sn2 to
AuSn phase, and AuSn dissolved a smaller amount of Ni (i.e., 5 at%
3. A brief review of previous work at 200 1C) than that reported in [21]. Besides, using their own
parameters, they could reproduce the experimental results. How-
3.1. The binary systems ever, as discussed in Section 3.2, the thermodynamic description
for Au–Sn, and Ni–Sn systems were recently updated, which
The three binary systems have already been extensively inves- require to reassess the ternary system. Therefore, at present work,
tigated both experimentally and theoretically. The Au–Ni binary the thermodynamic descriptions of Au–Ni–Sn were reassessed
system was studied by Wang et al. in 2005 utilizing the CALPHAD based on the new binary information as well as the combined
approach [11]. In that work, the authors considered all the avai- experimental information from [20,22].
lable experimentally determined phase boundaries and thermo-
chemical values. By using that set of thermodynamic parameters,
most of those results can be reproduced. Thus, those parameters 4. Thermodynamic models
were directly adopted at present assessment work. A variety of
thermodynamic description of Au–Sn binary system has been The lattice stability of the element i (i ¼Au, Ni and Sn)
published [12–15]. However, the description had to be redone is referred to as the constant enthalpy value of the standard
due to the new lattice stability data for Sn(hcp) reported recently element reference H SER
i at 298.15 K and 1 bar as recommended
by SGTE (i.e., 3900  7.464  T þGSERSn ) instead of 3900  4.4  by Scientific Group Thermodata Europe (SGTE). Different models
T þGSER
Sn ) as well as newly measured enthalpies of formation of were employed to describe the involved solution phases and
several compounds [16]. Thus, it was modified in our recent work intermetallic compounds.
[17], and those values were applied to this simulation. As for the
Ni–Sn binary system, the work from Zemanova et al. [18] was 4.1. Solution phases
directly adopted in this work except for that of Ni3Sn4. The
parameters of Ni3Sn4 phase was modified on the basis of the An ordinary substitutional solution model was applied to
model described in [18], in order to fit the reported homogeneity describe the liquid, fcc, bcc, bct, hcp, and dhcp solutions. The
ranges [19]. molar Gibbs energy of a solution phase ϕ (ϕ representing the afore
mentioned solution phases) can be represented as a sum of the
3.2. The Au–Ni–Sn ternary system Gibbs energy for these pure components, the ideal entropy term
describing a random mixing of components, and the excess Gibbs
The first reported ternary information was an isothermal energy describing the deviation from ideal behavior, i.e.,
section at 400 1C. It was examined by Neumann et al. [20] via ϕ ϕ
powder X-ray diffraction, metallography, electron-probe microa- Gϕ ¼ ∑ x0i Gi þ RT ∑ xi lnðxi Þ þ ex G ð1Þ
i ¼ Au;Ni;Sn i ¼ Au;Ni;Sn
nalyzer (EPMA), and thermal analysis. They measured the struc-
ture of a ternary compound τ (i.e., Fe3S4-s-type, with a¼ 422.6 where R is the gas constant, T is the temperature in K, xi is the molar
ϕ
(1) and c¼2656.6(4) pm) and all the ternary solubility in binary fraction of component i (i¼Au, Ni and Sn), and 0 G i is the molar
compounds at 400 1C. Especially, they found a continuous solid Gibbs energy of pure element i, with the reference state of ϕ. Here
solution from Ni3Sn2 to AuSn phase. Then, in 1998, Anhöck et al. the excess term is formulated as
investigated the Au–Ni–Sn ternary system by using scanning
ðjÞ ϕ
N
electron microscopy (SEM), and energy dispersive X-Ray spectro- ex ϕ
G ¼ xAu xNi ∑ L Au;Ni ðxAu  xNi Þj
meter (EDX) [21]. They constructed the isothermal section of j ¼ 0;1:::

Au–Ni–Sn system at the Sn–Au and Sn–Ni3Sn2 corner at room N


ðjÞ ϕ
temperature, which included the tie-triangles and the room þ xAu xSn ∑ L Au;Sn ðxAu  xSn Þj
j ¼ 0;1:::
temperature ternary solubility in the AuSn4, AuSn2, AuSn, Hcp,
ðjÞ ϕ
N
Au(Fcc), Ni3Sn4, and Ni3Sn2. However, the samples used in their þ xNi xSn ∑ L Ni;Sn ðxNi  xSn Þj
investigation were either untreated or annealed at high tempera- j ¼ 0;1:::

ture (i.e., 170 1C for 300 h). No equilibrium sample at room ϕ ϕ


þ xAu xNi xSn LAu;Ni;Sn þ mag G ð2Þ
temperature was prepared. Therefore, such isothermal section at
room temperature could not represent the equilibrium phase ϕ ϕ ϕ
where the values of ðjÞ L Au;Ni , ðjÞ L Au;Sn and ðjÞ L Ni;Sn are cited from
relation. Besides, some of their results are conflict with the others:
previous works (i.e., [11,17,18]), respectively, except for these of
(1) the AuSn4 phase should not be observed at room temperature
ðjÞ dhcp dhcp
which is unstable lower than 50 1C [17]; (2) the Au5Sn and Au10Sn and ðjÞ L Ni;Sn . In following text, dhcp was replaced by Au10Sn.
L Au;Ni ,
binary phases were missing in the proposed isothermal section, as The temperature dependent equation can be used to describe these
well as the ternary compound (τ); and (3) the extremely high interaction parameters
ternary solubility in Ni3Sn4 ( 20 at% Au) and AuSn (  20 at% Ni)
ðjÞ ϕ
were not testified in later investigation [22]. According to [22], the L ¼ a þ bT þ cT ln T þ dT 2 þeT 3 þ f T  1 ð3Þ
H.Q. Dong et al. / CALPHAD: Computer Coupling of Phase Diagrams and Thermochemistry 43 (2013) 61–70 63

Parameters a and b were directly cited from former work [11,17,18]. þ 0:25nRTðY IINi LnY IINi þ Y IISn LnY IISn Þ
 
Only the ternary interaction parameter Lhcp
Au;Ni;Sn was optimized in ðNiÞ0:25 :ðNi;SnÞ0:25 :ðSnÞ0:5
þ Y IINi Y IISn Σ j j L Ni:ðNi;SnÞ:Sn ðY Ni  Y Sn Þj
ϕ
this work. The rest of them (LAu;Ni;Sn ) will not be optimized and were ð8Þ
set to be zero due to the lack of reliable experimental information.
here
ðNiÞ :ðNi;SnÞ0:25 :ðSnÞ0:5
GNi:Ni:Sn
0:25
¼ 0:5n0 G Fcc 0 Bct
Ni þ 0:5n G Sn þ E 3 þ F 3 nT ð9Þ
4.2. Intermetallic compounds
ðNiÞ :ðNi;SnÞ0:25 :ðSnÞ0:5
Out of the binary compounds, only the parameters of Ni3Sn4 GNi:Sn:Sn
0:25
¼ 0:25n0 G Fcc 0 Bct
Ni þ 0:75n G Sn þ E 4 þ F 4 nT ð10Þ
were modified in this work. This was done on the basis of the
j ðNiÞ0:25 :ðNi;SnÞ0:25 :ðSnÞ0:5
thermodynamic model in [18]. Extending to ternary system, the L Ni:ðNi;SnÞ:Sn ¼ E5 þF 5 nT ð11Þ
ternary solubility of 5 binary compounds was investigated, as well
where the values of En and Fn (n ¼1,2..,5) were assessed at
as a ternary compound was modeled [20,22]. In all the 5 binary
present work.
compounds, two of them are line compound, the rest have
The Ni3Sn2 compound, having a large solubility of Au, was
solution ranges. Thus, the two line compounds in binary system,
described by a three sublattice sites, i.e., (Au, Ni, Va)1:(Ni, Va)1:
i.e., Au5Sn and AuSn4, can be modeled as (Au, Ni)m:(Sn)n, and
(Ni, Sn)1. The Gibbs energy was formulated as
the followed equations can be adopted to describe their Gibbs
energy: GðAu;Ni;VaÞ1 :ðNi:V aÞ1 :ðNi;SnÞ1 ¼ ∑ ∑ ∑ Y Ii Y IIk Y III
l Gi:k:l
i k l
ðAu;NiÞ :ðSnÞ
GðAu;NiÞm :ðSnÞn ¼ Y IAu GðAu;NiÞ I
Au:Sn þ Y Ni GNi:Sn
m n
þ RTðY IAu LnY IAu þ Y INi LnY INi þ Y IV a LnY IVa Þ
m
þ RTðY IAu LnY IAu þY INi LnY INi Þ þ RTðY IINi LnY IINi þ Y IIVa LnY IIV a Þ
mþn
!
þ RTðY III III III III
Ni LnY Ni þ Y Sn LnY Sn Þ
þ Y IAu Y INi
ðAu;NiÞm :ðSnÞn
∑ j L ðAu;NiÞ:Sn ðY IAu  Y INi Þj ð4Þ !
ðAu;Ni;V aÞ :ðNi;VaÞ1 :ðNi;SnÞ1
j
þ Y IAu Y INi Y IIV a Y III
Sn ∑ j L ðAu;NiÞ:Va:Sn
1 I I
nðY Au Y Ni Þj
j ¼ 0;1
here
0 ðAu;Ni;V aÞ1 :ðNi;V aÞ1 :ðNi;SnÞ1
m 0 Fcc n 0 Bct þ Y IAu Y IINi Y IIV a Y III
Sn n L Au:ðNi;VaÞ:Sn
II II
nðY Ni  Y V a Þ0 ð12Þ
ðAu;NiÞm :ðSnÞn
GNi:Sn ¼ G þ G þ E1 þ F 1 nT ð5Þ
m þ n Ni m þn Sn where j refers to as Au, Ni and Va; k refers to as Ni and Va; and
ðAu;NiÞ :ðSnÞn
l refers to as Ni and Sn. As for the parameters relating to
LðAu;NiÞ:Sn
m
¼ E 2 þ F 2 nT ð6Þ 0 ðAu;Ni;V aÞ1 :ðNi;VaÞ1 :ðNi;SnÞ1 0 ðAu;Ni;VaÞ1 :ðNi;V aÞ1 :ðNi;SnÞ1
G Au:Ni:Sn ; G Au:V a:Sn ,
0 ðAu;Ni;VaÞ 1 :ðNi;V aÞ1 :ðNi;SnÞ1 1 ðAu;Ni;V aÞ1 :ðNi;VaÞ1 :ðNi;SnÞ1
L ðAu;NiÞ:Va:Sn ; L ðAu;NiÞ:V a:Sn ,
where Y IAu , and Y INi are the site fractions of Au and Sn in the first
0 ðAu;Ni;VaÞ1 :ðNi;V aÞ1 :ðNi;SnÞ1 ðAu;Ni;V aÞ1 :ðNi;VaÞ1 :ðNi;SnÞ1
ðAu;NiÞ :ðSnÞn
sublattice of (Au, Ni)m:(Sn)n; the value of GAu:Sn m are cited from L ðAu;NiÞ:Ni:Sn and 0 L Au:ðNi;V aÞ:Sn are optimized in
previous work [17]. this work, on the basis of the reported results. The parameters of other
The AuSn phase was described by a three sublattice site (i.e., items were directly cited from the work of [18].
(Sn)1:(Sn, Va)1:(Au, Ni)1), in order to reproduce the ternary Phase, Ni3Sn_LT, was determined to dissolve about 4.4 at% Au at
solution range. Its Gibbs energy was formed as 400 1C [20], such ternary solubility was ignored in the work of [22].
ðSnÞ :ðSn;V aÞ1 :ðAu;NiÞ1 In this work, it was taken into consideration during the opti-
GðSnÞ1 :ðSn;V aÞ1 :ðAu;NiÞ1 ¼ ∑ ∑ Y IIo Y III
p GSn:o:p
1

o p mization procedure. It was described by a two-sublattice sites,


þ RTðY IISn LnY IISn þ Y IIVa LnY IIV a Þ
þ RTðY III III III III
Au LnY Au þY Ni LnY Ni Þ Ni
!
ðSnÞ :ðSn;VaÞ :ðAu;NiÞ1
þ Y IISn Y IIVa Y III
Au ∑ j L Sn:ðSn;VaÞ:Au
1 1
ðY Sn  Y V a Þj
j ¼ 0;1
!
j ðSnÞ1 :ðSn;VaÞ1 :ðAu;NiÞ1
þ Y IISn Y IIVa Y III
Ni ∑ L Sn:ðSn;VaÞ:Ni ðY Sn  Y V a Þj
j ¼ 0;1
!
ðSnÞ :ðSn;V aÞ :ðAu;NiÞ1
þ Y IISn Y III III
Au Y Ni ∑ j L Sn:Sn:ðAu;NiÞ
1 1
ðY Au  Y Ni Þj
j ¼ 0;1
!
þ Y IIVa Y III III ðSnÞ :ðSn;V aÞ :ðAu;NiÞ1
∑ j L Sn:Va:ðAu;NiÞ ðY Au  Y Ni Þj ð7Þ Au80Sn20 (wt-%)
Au Y Ni
1 1

j ¼ 0;1

In the above equation, o and p indicate to elements in second and


third sublattice site, respectively. The binary parameters relating to
Au–Sn were cited from [17], and the rest were optimized in the
present assessment.
The thermodynamic description of Ni3Sn4 phase was modified
in this work, in order to fit better with the determined binary
solution ranges [19]. In this work, the same model was employed
as that described in [18], i.e., (Ni)0.25:(Ni, Sn)0.25:(Sn)0.5, and its
Gibbs energy was expressed as Ni
ðNiÞ0:25 :ðNi;SnÞ0:25 :ðSnÞ0:5 ðNiÞ0:25 :ðNi;SnÞ0:25 :ðSnÞ0:5
G ¼ Y IINi 0 G Ni:Ni:Sn
ðNiÞ0:25 :ðNi;SnÞ0:25 :ðSnÞ0:5
þY IISn GNi:Sn:Sn Fig. 1. Ni|Au80Sn20 interfacial microstructure after soldering at 320 1C for 100 s.
64 H.Q. Dong et al. / CALPHAD: Computer Coupling of Phase Diagrams and Thermochemistry 43 (2013) 61–70

i.e., (Au, Ni%, Sn)0.75:(Ni, Sn%)0.25, and its Gibbs energy was 5. Results and discussion
described as
5.1. Experimental determination
GðAu;Ni;SnÞ0:75 :ðNi;SnÞ0:25 ¼ ∑ ∑ Y Iy Y IIz 0 G ðAu;Ni;SnÞ
y:z
0:75 :ðNi;SnÞ0:25

y z
Fig. 1 shows the general microstructure of the solid Ni|liquid
þ RTðY IAu LnY IAu þY INi LnY INi þ Y ISn LnY ISn Þ Au–20 wt% Sn sandwich joint after soldering at 320 1C for 100 s.
The fine grained eutectic solidification structure is seen in the
þ RTðY IINi LnY IINi þY IISn LnY IISn Þ þGex ð13Þ

where y is represented by Au, Ni and Sn, z refers to as Ni and Sn. The (Au5Sn+AuSn)eut
values of Gex are related to interaction parameters. The parameters,
required in Ni–Sn binary system, equal to the value reported in [18].

4.3. Ternary compounds

In this ternary system, only one ternary compounds (i.e., τ) was Ni


determined. And it was regarded as a line compound. Thus its
Gibbs energy expression was written in the following way:

Gτ ¼ 0:143n0 G Fcc 0 Fcc 0 Bct


Au þ 0:286n G Ni þ 0:571n G Sn þH þ J nT ð14Þ AuSn

AuSn
The parameters H and J were obtained in this work.

Au5Sn

(Au 5Sn+AuSn) eut AuSn


(Ni,Au)3Sn2

Ni3Sn

Au5Sn
Ni

AuSn Fig. 3. The microstructure of Au–20 wt% Sn/Ni diffusion couple after annealing at
Ni 150 1C for 1200 h.

(Au 5Sn+AuSn) eut (Au5Sn+AuSn)eut

Au5Sn

AuSn
(Ni,Au)3Sn2

Ni
Ni

(Au 5Sn+AuSn) eut


Au5Sn
AuSn
AuSn

(Ni,Au)3Sn2
(Ni,Au)3Sn2
Ni3Sn
AuSn

Ni
Ni
Fig. 2. Ni|Au80Sn20 interfacial microstructure after soldering at 320 1C holding for
different periods: (a) keeping at 320 1C for 100 s; (b) keeping at 320 1C for 2500 s; Fig. 4. The microstructure of Au–20 wt% Sn/Ni diffusion couple after annealing at
and (c) keeping at 320 1C for 10,000 s. 150 1C for 2500 h.
H.Q. Dong et al. / CALPHAD: Computer Coupling of Phase Diagrams and Thermochemistry 43 (2013) 61–70 65

Table 1
Thermodynamic parameters used in this work.

Phase Parameters Reference

L model: (Au, Ni, Sn) LLiq [11]


Au;Ni ¼ þ 9500  5:249nT
0

LLiq [11]
Au;Ni ¼ þ 1614
1

0 Liq
LAu;Sn ¼  48822:94 þ 19:6767nT [17]
1 Liq
LAu;Sn ¼  17990:36 þ 0:7892nT [17]
2 Liq
LAu;Sn ¼  5222:53 [17]
0 Liq
LNi;Sn ¼  104602:87 þ 197:8089nT  21:6959nT nLNðTÞ [18]
1 Liq
LNi;Sn ¼  30772:17 þ 52:5528nT  7:56094nT nLNðTÞ [18]
2 Liq
LNi;Sn ¼ þ 6582:31 [18]

Bcc model: (Au, Ni, Sn) 0


LBcc
Au;Ni ¼ þ 5000
[11]
0
LBcc
Ni;Sn ¼ þ 2369 þ 43:736nT
[18]
1
LBcc
Ni;Sn ¼  654762:56 þ 63:2724nT
[18]
2
LBcc
Ni;Sn ¼ þ 689895:17  94:7409nT
[18]
0
LBcc
Au;Ni;Sn ¼ þ 85000
This work

Bct model: (Ni, Sn) 0


LBct
Ni;Sn ¼  21500 [18]

fcc model: (Au, Ni, Sn) 0


T Fcc
cNi ¼ þ 633
[18]
0 Fcc [18]
BmagnNi ¼ :52
0 Fcc [11]
LAu;Ni ¼ þ 28696  11:274nT
1 Fcc [11]
LAu;Ni ¼  10945 þ 6:154nT
2 Fcc [11]
LAu;Ni ¼ þ 2519
0 Fcc [11]
T cAu;Ni ¼  500
0 Fcc [17]
LAu;Sn ¼  28802:84  5:5753nT
1 Fcc [17]
LAu;Sn ¼ þ 8815:07  9:7873nT
0 Fcc [18]
LNi;Sn ¼  69507:35 þ 74:5698nT  8:0319551nT nLNðTÞ
1 Fcc [18]
LNi;Sn ¼  12395:19
0 Fcc
T cNi;Sn ¼  6000 [18]
1 Fcc [18]
T cNi;Sn ¼ þ 3000
0 Fcc [18]
BmagnNi;Sn ¼  6:8002
1 Fcc [18]
BmagnNi;Sn ¼ 4:3689

Hcp model: (Au, Ni, Sn) 0


T Hcp
cNi ¼ þ 633
SGTE
0
BHcp
magnNi ¼ :52
SGTE
0
LHcp
Au;Ni ¼ þ 10000
[11]
0
LHcp
Au;Sn ¼  13163:98  4:4860nT
[17]

LHcp [17]
Au;Sn ¼  18954:81  23:2973nT
1

0
LHcp
Ni;Sn ¼ þ 10000
[18]
0
LHcp
Au;Ni;Sn ¼  274600 þ 210nT
This work

Au10Sn model: (Au, Ni, Sn) 0


GAu 10 Sn
¼ 125 þ 0:79nT þ GHSERAU [17]
Au
0 Au10 Sn
GSn ¼ 3804  3:46nT þ GHSERSN [17]
0
GAu 10 Sn
¼ þ 5000 þ GHSERNI This work
Ni
0
LAu 10 Sn
¼ þ 10000 [11]
Au;Ni

LAu 10 Sn [17]
Au;Sn ¼  13546:66  4:7107nT
0

LAu 10 Sn [17]
Au;Sn ¼  14193:13  22:3922nT
1

0 Au10 Sn
LNi;Sn ¼ þ 10000 This work

LAu 10 Sn This work


Au;Ni;Sn ¼  553355 þ 635nT
0

AuSn2 model: (Au)0.33333:(Sn)0.66667 GAuSn [17]


Au;Sn ¼  14296:55þ 5:4538nT þ 0:33333nGHSERAU þ 0:66667nGHSERSN
0 2

AuSn4 model: (Au,Ni)0.2:(Sn)0.8 GAuSn [17]


Au;Sn ¼  7790:25þ 0:8355nT þ 0:2nGHSERAU þ 0:8nGHSERSN
0 4

GAuSn This work


Ni;Sn ¼  9569:66þ 5:0104nT þ 0:2nGHSERNI þ 0:8nGHSERSN
0 4

LAuSn This work


ðAu;NiÞ:Sn ¼  13747:5 þ 7:503nT
0 4

LAuSn This work


ðAu;NiÞ:Sn ¼ þ 4200
1 4

Au5Sn model: (Au,Ni)0.84:(Sn)0.16 GAu 5 Sn [17]


Au;Sn ¼  4036:78 3:3648nT þ 0:84nGHSERAU þ 0:16nGHSERSN
0

0 Au5 Sn
GNi;Sn ¼  11287:51þ 12:5013nT þ 0:84nGHSERNI þ 0:16nGHSERSN This work
0 Au5 Sn
LðAu;NiÞ:Sn ¼  18080:78 þ 12:0133nT This work
66 H.Q. Dong et al. / CALPHAD: Computer Coupling of Phase Diagrams and Thermochemistry 43 (2013) 61–70

Table 1 (continued )

Phase Parameters Reference

AuSn model: (Sn)1:(Sn, Va)1:(Au, Ni)1 GAuSn [17]


Sn:Va:Au ¼  31490 þ 4:3439nT þ GHSERAU þ GHSERSN
0

GAuSn [17]
Sn:Sn:Au ¼  1000 þ :5nT þ GHSERAU þ 2nGHSERSN
0

LAuSn [17]
Sn:ðSn;VaÞ:Au ¼  20000 þ T
0

GAuSn This wok


Sn:Va:Ni ¼  47800:92 0:3998nT þ GHSERNI þ GHSERSN
0

Ni3Sn_LT model: (Au, Ni%, Sn)0.75:(Ni, Sn%)0.25 0


GNi3 Sn_LT
¼ þ 6300 þ GHSERNI [18]
Ni:Ni
0
GNi3 Sn_LT
¼ þ 5000 þ 0:25nGHSERNI þ 0:75nGHSERSN [18]
Sn:Ni
0
GNi3 Sn_LT
¼  28408 þ 7:0009nT þ 0:75nGHSERNI þ 0:25nGHSERSN [18]
Ni:Sn
0
GNi3 Sn_LT
¼ þ 5000 þ GHSERSN [18]
Sn:Sn
0
GNi3 Sn_LT
¼  1574:54 þ 5:3114nT þ 0:725nGHSERAU þ 0:25nGHSERSN This work
Au:Sn

Ni3Sn4 model: (Ni)0.25:(Ni, Sn)0.25:(Sn)0.5 GNi3 Sn4 This work


Ni:Ni:Sn ¼  26678:56 þ 4:301nT þ 0:5nGHSERNI þ 0:5nGHSERSN
0

0 Ni3 Sn4
GNi:Sn:Sn ¼ þ 4613:24 þ 8:749nT þ 0:25nGHSERNI þ 0:75nGHSERSN This work
GNi3 Sn4 This work
Ni:ðNi;SnÞ:Sn ¼  41928:16
0

Ni3Sn2 model: (Au,Ni,Va)1 :(Ni,Va)1 :(Ni,Sn)1 GNi3 Sn2 2 [18]


Ni:Ni:Ni ¼ þ 31637:3þ 355:1761nT  66:288nT nLNðTÞ  0:0145221nT
0

GNi3 Sn2 2 [18]


Va:Ni:Ni ¼ þ 21091:53þ 236:784nT  44:192nT nLNðTÞ  0:0096814nT
0

GNi3 Sn2 2 [18]


Ni:Va:Ni ¼ þ 21091:53þ 236:784nT  44:192nT nLNðTÞ  0:0096814nT
0

GNi3 Sn2 2 [18]


Va:Va:Ni ¼ þ 10545:766 þ 118:58688nT  22:096nT nLNðTÞ  0:0048407nT
0

GNi 3 Sn2 [18]


Ni:Ni:Sn ¼  83734:818 þ 14:6888nT þ 2nGHSERNI þ GHSERSN
0

GNi 3 Sn2 [18]


Va:Ni:Sn ¼ þ 5000 þ GHSERNI þ GHSERSN
0

0 Ni3 Sn2
GNi:Va:Sn ¼  52177:98þ 10:774nT þ GHSERNI þ GHSERSN [18]
GNi 3 Sn2 [18]
Va:Va:Sn ¼ þ 20000 þ GHSERSN
0

GNi 3 Sn2 [18]


Ni:ðNi;V aÞ:Sn ¼  9784:4 12:385nT
0

GNi 3 Sn2 [18]


Ni:ðNi;V aÞ:Sn ¼ þ 12000
1

GNi 3 Sn2 This work


Au:Ni:Sn ¼  25039:16 þ 23:2401nT þ GHSERAU þ GHSERNI þ GHSERSN
0

GNi 3 Sn2 This work


Au:Va:Sn ¼  26604:42 þ 2:8011nT þ GHSERAU þ GHSERSN
0

0 Ni3 Sn2
LðAu;NiÞ:V a:Sn ¼  24022:03 þ 14:0021nT This work

LNi3 Sn2 This work


ðAu;NiÞ:V a:Sn ¼  1520:16
1

0 Ni3 Sn2
LðAu;NiÞ:Ni:Sn ¼ þ 18407:62  81:2035nT This work

LNi3 Sn2 This work


Au:ðNi;VaÞ:Sn ¼  29989:98
0

τ model: (Au)0.143:(Ni)10.286:(Sn)0.571 0
GτAu:Ni:Sn ¼  22224:16 þ 2:0665nT þ 0:143nGHSERAU þ This work
0:286nGHSERNI þ 0:571nGHSERSN

Values are in SI units. Parameters used in present calculation were listed in the table; the rest parameters which were not shown in table were given the value of zero. And
SGTE refers to as Scientific Group Thermodata Europe (http://www.sgte.org/).

middle of the joint. However the microstructure is coarsened close [22], when temperature increases, the solubility of Ni at% to AuSn
to the Ni interface. This is clearly seen from the higher magnifica- phase also increases, and the solubility of Au at% in Ni3Sn2
tion image shown in Fig. 2a. Fig. 2c illustrates the solid Ni|liquid compound decreases accordingly. As shown in [22], the Ni3Sn2
Au–20 wt% Sn interfacial microstructures soldered at 320 1C hold- compound can dissolve up to 29.1 at% Au at 200 1C, and the AuSn
ing for 10,000 s. Dissolved Ni is not observed from either of the compound can dissolve up to 4.5 at% Ni at 200 1C. Therefore, the
IMCs in the eutectic structure, within the detection limits of EDS. ternary solubility of Ni3Sn2 and AuSn compounds at 150 1C,
However, after 100 s annealing, small amounts of Ni (o2 at%) is determined in this work were in accordance with those reported
already detected from AuSn near the interface. As seen from in [22].
Fig. 2b and c, there is a layer of (Ni, Au)3Sn2 crystals formed at Fig. 4 shows the microstructures of sample after annealing for
the interface. Also some of (Ni, Au)3Sn2 precipitates are found 2500 h. The almost identical results were obtained as that of the
inside AuSn grains. Au5Sn did not contain any Ni even after sample annealed for 1200 h. Only with the exceptions that the
10,000 s annealing. Au5Sn areas next to AuSn layer was enlarged, and the thickness of
After making the sandwich joint at 320 1C for 100 s the solid Ni3Sn2 and Ni3Sn layers were slightly increased. However, the
state Ni|Au–20 wt% Sn diffusion couples were annealed at 150 1C composition of Ni3Sn layer was still outside of the resolution limits
for 1200 and 2500 h, respectively. Fig. 3 shows the microstructure of SEM/EDS. The interfacial reaction layer structure of the diffusion
of the sample after annealing for 1200 h. As shown in Fig. 3, couple is proposed as Ni/Ni3Sn/Ni3Sn2/AuSn/(Au5Snþ AuSn).
the sample is composed of Ni/Ni3Sn/Ni3Sn2/AuSn/(Au5Sn þAuSn)
layers from the bottom to top. Here the Ni3Sn and Ni3Sn2 phase 5.2. Thermodynamic assessment
formed a continuous layer. The AuSn layer is slightly irregular,
while still can be considered as an interlayer. The thermodynamic descriptions of the Au–Ni–Sn binary sub-
In this investigation, a large amount of ternary solubility in systems have been taken from the literatures: Au–Ni according to
Ni3Sn2 (  32 at% Au) and AuSn ( 3.5 at% Ni) compounds were Wang et al. [11]; Au–Sn according to Dong et al. [17] and Ni–Sn
also found at the interfaces next to Ni. Besides, around 3 at% according to Li et al. [18] except for the parameters of Ni3Sn4.
Ni was measured in Au5Sn compound. As for the Ni3Sn compound, The parameters of Ni3Sn4 phase was modified on the basis of the
it is too thin to be analyzed after 1200 h annealing. According to model described in [18], in order to fit the reported homogeneity
H.Q. Dong et al. / CALPHAD: Computer Coupling of Phase Diagrams and Thermochemistry 43 (2013) 61–70 67

ranges [19]. These binary systems have been combined and the present experimental investigation. Table 1 lists the thermo-
phase models have been adopted in order to describe the ternary dynamic parameters used in this work.
solubility of the Bct, Hcp, Au10Sn, AuSn4, Au5Sn, Ni3Sn_LT, and As shown in Table 1, the ternary interaction parameters of Hcp
Ni3Sn2. Moreover, the terna1ry compound τ has been added. and Au10Sn phases have strong temperature dependence. It can be
New binary and ternary thermodynamic parameters have been explained in this way: no ternary thermochemical quantities for
evaluated using the PARROT optimizer module in the Thermo-Calc these phases have been determined before. There, the parameters
software package. Optimization has been performed by taking were adjusted according to phase equilibria involving them, and
into account the experimental information (i.e., phase equilibria in then determined to locate within an optimal range (Table 2).
different isothermal sections and relevant ternary solubility in The experimental information are mainly on the basis of the
binary compounds) from literatures [20,22] and, in particular, from reported phase equilibria and ternary solubility in these phases

Table 2
Comparison of the ternary solubility of binary phase between previously reported data and the calculated results in this work.

Temperature (1C) Phase Ternary solubility (at%) Reference

150 Ni3Sn2 Au%:  32 Experimental result, this work


Au%: 31.5 Assessed, this work
Ni3Sn_LT Au%: 1.8 Assessed, this work
AuSn Ni%:  3.5 Experimental result, this work
Ni%: 2.8 Assessed, this work
Au5Sn Ni%:  3 Experimental result, this work
Ni%: 3.0 Assessed, this work
AuSn4 Ni%: 10.4 Assessed, this work

200 Ni3Sn2 Au%: 29.1 Experimental result [22]


Au%: 26.4 Assessed result [22]
Au%: 31.1 Assessed, this work
Ni3Sn_LT Au%: 1.9 Assessed, this work
AuSn Ni%: 4.5 Experimental result [22]
Ni%: 4.0 Assessed result [22]
Ni%: 4.1 Assessed, this work
Hcp Ni%: 0.2 Experimental result [22]
Ni%: 0.06 Assessed result [22]
Ni%: 0.16 Assessed, this work
AuSn4 Ni%: 10.5 Experimental result [22]
Ni%: 8.0 Assessed result [22]
Ni%: 10.1 Assessed, this work

300 Ni3Sn2 Au%: 29.2 Experimental result [22]


Au%: 28.7 Assessed result [22]
Au%: 30.4 Assessed, this work
Ni3Sn_LT Au%: 2.5 Assessed, this work
AuSn Ni%: 10.9 Experimental result [22]
Ni%: 8.1 Assessed result [22]
Ni%: 7.5 Assessed, this work
Hcp Ni%: 0.6 Experimental result [22]
Ni%: 0.6 Assessed result [22]
Ni%: 0.6 Assessed, this work
Au10Sn Ni%: 0.5 Assessed, this work

400 Ni3Sn2 Au%: a continuous solid solution with AuSn Experimental result [20]
Au%: 26.8 Experimental result [22]
Au%: 26.0 Assessed result [22]
Au%: 27.7 Assessed, this work
Ni3Sn_LT Au%: 4.4 Experimental result [20]
Au%: 3.1 Assessed, this work
AuSn Ni%: a continuous solid solution with Ni3Sn2 Experimental result [20]
Ni%: 11.9 Experimental result [22]
Ni%: 9.9 Assessed result [22]
Ni%: 10.8 Assessed, this work
Hcp Ni%: o1 Experimental result [20]
Ni%: 1.7 Experimental result [22]
Ni%: 1.7 Assessed result [22]
Ni%: 1.4 Assessed, this work
Au10Sn Ni%:o 1 Experimental result [20]
Ni%: 0.7 Assessed, this work

500 Ni3Sn2 Au%: 23.5 Experimental result [22]


Au%: 22.6 Assessed result [22]
Au%: 22.4 Assessed, this work

600 Ni3Sn2 Au%: 13.9 Experimental result [22]


Au%: 13.5 Assessed result [22]
Au%: 16.8 Assessed, this work
68 H.Q. Dong et al. / CALPHAD: Computer Coupling of Phase Diagrams and Thermochemistry 43 (2013) 61–70

by Neumann et al. [20] and Liu et al. [22], as listed in Table 2. and calculated results. This is shown by the dotted line in Fig. 9.
Neumann et al. studied the isothermal section at 400 1C and the The path starts from Ni towards the Ni3Sn along the binary Ni–Sn
related ternary solubility in binary compounds [20]. Besides, they edge of the diagram as no Au was detected inside Ni3Sn. The
found the phase equilibrium between Ni3Sn2 and Au10Sn com- diffusion path then proceeds to (Ni, Au)3Sn2 by taking one of the
pounds which was not covered in the experimental determining tie lines—again close to the binary edge, since Ni3Sn does not have
area of [22]. Liu et al. measured the composition ranges of Hcp and marked amounts of Au dissolved. The path travels inside the
compounds in Sn-rich side at different temperatures by analyzing (Ni, Au)3Sn2 one phase field towards AuSn. In Fig. 3 there one
the equilibrated samples using EPMA, which implies that these can see that there is at least one location where three phases,
experimental data are reliable. Therefore, in order to fulfill the namely (Ni, Au)3Sn2, (Au, Ni)Sn and (Au, Ni)5Sn are in contact. This
phase equilibrium between Ni3Sn2 and ternary solubility of Hcp corresponds to the corner of the tie-triangle for the given
determined at different temperatures, such strong temperature equilibrium. Based on the Gibbs phase rule, when temperature
dependence was required. and pressure are fixed, only two-phase areas can be realized in the
Fig. 5 illustrates the modified Ni–Sn phase diagram, with the diffusion couple if diffusion is to proceed, since concentration
experimental invariant points superimposed [19]. Further, the (activity) differences are needed to drive the diffusion. In this case
enthalpies of formation of Ni–Sn system were also calculated there is naturally no three phase region, but a point, which
and compared with the determined data [23,24] (i.e., Fig. 6). indicates that the diffusion path hits the corner of the (Ni, Au)3Sn2,
According to these comparisons, it is evident that the present (Au, Ni)Sn and (Au, Ni)5Sn tie-triangle. Also at this point, as the
modification of Ni3Sn4 can be considered acceptable. Thus, activity differences are no longer there, locally no diffusion should
they were used in the optimization of the ternary thermodynamic occur. However, the global diffusion path then proceed to (Au, Ni)
database. Sn by taking one of the tie-lines in the corresponding two-phase
By using the present ternary database, the isothermal sections field implying a relatively straight interface between the phases.
at various temperatures were calculated, and are illustrated in After reaching (Au, Ni)Sn the path turns towards (Au, Ni)5Sn. There
Fig. 7a–f. These isothermal sections are superimposed with some are two options, which the diffusion path can utilize. It can
of the critical experimental points from [20,22], as well as those proceed along the two-phase field, most likely by crossing the
obtained in the present study with the help of diffusion couple tie-lines, since the interface in Fig. 3 appears relatively wavy or it
experiments. As shown in these isothermal sections, most of the can travel through the three phase triangle along a straight line to
experimental information can be reproduced. Table 2 listed the
calculated ternary solubility in binary compounds by using the
present obtained parameters. Comparing with the thermodynamic
assessment work of [22], more experimental information was
included to the assessment in this work. It was found that a good
agreement was achieved between the calculated results in this
work and previous experimental data [20,22]. Further, the present
thermodynamic description can be considered better than that in
[22], not only because more experimental information was taken
into account, but due to the fact that it also includes the recently
updated binary information [16–19], and the ternary solubility in
Au5Sn and Ni3Sn_LT compounds as well as two ternary areas
which were determined in [20] while they were missing in [22].
Thus, this further confirms the fact that the present database can
be considered reasonable. In addition to the isothermal sections,
the liquidus projection was constructed, as shown in Fig. 8. Finally,
the relevant invariant reactions in this ternary system were
calculated, as listed in Table 3.
The diffusion path in the reaction couple, i.e., Ni/Au–20 wt% Sn Fig. 6. Calculated enthalpies of formation of Ni–Sn system at 298 K, comparing
solder, at 150 1C is predicted based on the present experimental with previously reported value [18,23,24]. Reference stages: Ni(Fcc), and Sn(Bct).

Fig. 5. Phase diagram of Ni–Sn with experimental data superimposed: (a) the partial phase diagram from 10 at% Ni to 45 at% Ni at temperature range 1000–1600 K; and
(b) the entire phase diagram of Ni–Sn binary system.
H.Q. Dong et al. / CALPHAD: Computer Coupling of Phase Diagrams and Thermochemistry 43 (2013) 61–70 69

Fig. 7. Calculated isothermal section of Au–Ni–Sn ternary system, at various temperatures, superimposed experimentally determined both form this work and previous
works [20,22]. a) 1501C, b) 2001C, c) 3001C, d) 4001c, e) 5001C and f) 6001C.

Fig. 8. Calculated liquidus projection of Au–Ni–Sn, the figure in the right hand side is the enlarged part at the Au–Sn boundary.

the end composition. It is common knowledge that the so called longer annealing times. This will also naturally change the course
“virtual diffusion path”, as defined by Kirkaldy et al. [25], if made of the corresponding diffusion path. The details about the diffusing
to go through a tie-triangle, represents an apparent three-phase species in Au–Ni–Sn system will be discussed in following
equilibrium with three phases interwoven at the interphase area publications.
(e.g., finger-like structure). However, as there are no such mor-
phological features in any of the micrographs, this feature of the
diffusion path is not likely. In addition, if the path would go 6. Conclusions
through the three phase equilibrium, mass-balance would not be
fulfilled. Hence, the path must first go to the Ni free Au5Sn and The microstructure characteristics of diffusion couple Au–20 wt%
then turn back to the original gross composition along the binary Sn/Ni bulk was studied via SEM/EDX, for samples after annealing at
Au–Sn edge in order to fulfill the mass-balance. It is to be noted 150 1C for 1200 h and 2500 h, respectively. The phase relations in Au–
that there is a significant increase in the amount of Au5Sn in Ni–Sn ternary system have been thermodynamically reassessed by
contact with (Ni, Au)3Sn2 after 2500 h in comparison to 1200 h. utilizing the CALPHAD method based on the available experimental
This implies that the local equilibria may not have been achieved results as well as by utilizing the new updated thermodynamic
completely and further microstructural changes may occur after descriptions of the three binary systems. A set of self-consistent
70 H.Q. Dong et al. / CALPHAD: Computer Coupling of Phase Diagrams and Thermochemistry 43 (2013) 61–70

Table 3 Acknowledgments
Calculated ternary invariant reactions in Au–Ni–Sn ternary system.

Type Temperature (K) Reaction Liquid composition (at%)


The authors would like to thank Finnish Funding Agency for
Technology and Innovation, Okmetic and Murata Electronics Oy
Au Ni for their financial support. One of the authors, H.Q. Dong, thanks
the Graduate School in Electronics Telecommunications and Auto-
U1 1229.62 Lþ Bcc-Ni3Sn_LT þ Ni3Sn2 32.05 49.36
mation, Finland for the financial support.
U2 1220.95 Lþ Bcc-Ni3Sn_LT þ Fcc 24.41 62.00
U3 844.34 Lþ Ni3Sn_LT-Ni3Sn2 þFcc 78.73 1.98
U4 802.15 Lþ Fcc-Au10Sn þ Hcp 79.21 0.10
U5 577.88 Lþ AuSn-Ni3Sn2 þ AuSn2 24.16 0.036 Appendix A. Supplementary material
U6 577.57 Lþ Ni3Sn2-AuSn2 þτ 24.04 0.037
U7 563.33 Lþ τ-AuSn4 þAuSn2 19.99 0.04
Supplementary data associated with this article can be found in
U8 561.05 Lþ Ni3Sn2-AuSnþ Hcp 69.83 0.0061
U9 489.9 Lþ Ni3Sn4-AuSn4 þBct 0.95 0.08 the online version at http://dx.doi.org/10.1016/j.calphad.2013.10.001.
P1 835.91 Lþ Ni3Sn2 þ Fcc-Hcp 78.67 1.76
P2 693.39 Lþ Ni3Sn4 þ Ni3Sn2-τ 23.79 0.27
References
P3 572.82 Lþ τþ Ni3Sn4-AuSn4 12.55 0.10

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