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Received 25 March 2008; received in revised form 9 April 2008; accepted 13 April 2008
Available online 22 May 2008
Abstract
Atomic mobilities of both Co and Si in all the solid phases of the Co–Si system were obtained through assessments of experimen-
tally determined diffusion coefficients from the present work and the literature by the DICTRA (diffusion-controlled transformations)
simulation package. The first-principles calculations were performed to clarify the contradictory impurity diffusion coefficients of Co
in Si by determining the diffusion activation energy. The concept of ‘‘average thermodynamic factor” was extended to model binary
compounds with certain homogeneity ranges. Based on the atomic mobilities obtained, the diffusion growths of the compounds in
wide temperature ranges were predicted. Comprehensive comparisons show that most of the experimental data resulting from diffusion
phenomena are well reproduced by the parameters obtained. The approach is of general validity and applicable to establish mobility
databases of technically important alloys.
Ó 2008 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
1359-6454/$34.00 Ó 2008 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
doi:10.1016/j.actamat.2008.04.017
L. Zhang et al. / Acta Materialia 56 (2008) 3940–3950 3941
growth of binary intermediate compounds with certain while those from the other sources [17–22,24,25] are not
homogeneity ranges. considered.
The Co–Si system is chosen as the target because of its Many investigators [27–40] focused on the measure-
technical importance [11] and fundamental scientific inter- ments of self-diffusion coefficients of Si in pure Si. Owing
est for diffusion phenomenon. Most recently, the present to the short half-life of the radiotracer 31Si (2.6 h), the
authors [12] provided the precise thermodynamic parame- reported Si self-diffusion coefficients are limited in a narrow
ters for this system. Thus, the main objectives of the pres- temperature range [28–30,32,33]. The stable isotope 30Si
ent work are (1) to measure the diffusion growth of the Co– used in these studies [27,34–36] has the disadvantage that
Si binary compounds and the inter-diffusion coefficients of the 30Si background concentration in natural Si is high
the (aCo) phase at 1050 °C; (2) to clarify the contradictory (3.10%). To overcome the difficulties mentioned above,
impurity diffusion coefficients of Co in Si via first-principles Bracht et al. [37] employed highly isotopically enriched
28
calculations; (3) to obtain self-consistent atomic mobility Si layers as well as the secondary ion mass spectrometry
parameters for both Co and Si in various solid phases of (SIMS) technique to measure the self-diffusion coefficient
the Co–Si system via DICTRA simulations; and (4) to of Si in pure Si in the temperature range 850–1388 °C.
describe the diffusion growth of the compounds in a wide These data are consistent with those from Ural et al.
temperature range. [38,39]. Recently, Shimizu et al. [40] measured the self-dif-
fusion coefficients of Si at temperatures 735–875 °C based
2. Literature data on diffusion growth and diffusivities of on the Raman shift of longitudinal optical phonon fre-
Co–Si binary phases quencies of diffusion annealed 28Si/30Si isotope superlattic-
es. However, the data from Shimizu et al. [40] cannot be
2.1. Diffusion growth of Co–Si binary phases used in the present assessment, as grain boundary diffusion
is enhanced significantly at lower temperatures, and the
Jan et al. [13], Kim et al. [14] and Barge et al. [15] have DICTRA software employed in the present work can only
studied the reactive diffusion in the Co–Si system by means treat volume diffusion at higher temperatures [3]. As a
of bulk Co/Si diffusion couples in the temperature range result, only the data from Bracht et al. [37] and Ural
700–1050 °C. They found that three intermediate phases et al. [38,39] are used in the present work, while others
(Co2Si, CoSi and CoSi2) grow according to the parabolic [27–36] are used to verify the reliability of the atomic
law, implying diffusion-controlled transformation. The mobilities obtained .
observed thicknesses of the intermediate phases at different In addition to the above self-diffusion in pure elements,
temperatures were reported, and their corresponding self-diffusion coefficients of Co and Si in various intermedi-
growth rate constants were presented [13–15]. van Dal ate compounds have also been investigated by two groups
et al. [16] investigated the reactive diffusion of the single- of authors [16,41]. As shown in Table 1, van Dal et al. [16]
intermediate phase by diffusion couples consisting of the obtained the tracer diffusion coefficients of Co and Si in the
saturated adjacent phases over the temperature range CoSi2 and CoSi phases by employing the concept of inte-
914–1217 °C. The width of the intermediate phase was grated diffusion coefficient. The fact that Si is virtually
also observed to grow via a diffusion-controlled mecha- the only mobile species in the CoSi phase was also reported
nism. The thickness of the CoSi phase in bulk Co2Si/CoSi2 by van Dal et al. [16]. These self-diffusion coefficients of Co
diffusion couples was also measured by van Dal et al. [16]. and Si in intermediate compounds [16,41] are used in the
present work to evaluate the atomic mobilities of the ele-
2.2. Diffusion coefficients of Co–Si binary phases ments in the corresponding compounds.
The impurity diffusion of Co in Si was reported by
Three kinds of diffusion coefficients in the Co–Si system Bakhadyrkhanov et al. [42], and then reviewed by Weber
are available in the literature, including (a) self-diffusion [43]. Subsequently, several researches [44–50] measured
coefficients of Co and Si in both pure elements and com- the impurity diffusion of Co in Si using different methods.
pounds, (b) impurity diffusion coefficients of Co in Si and These reported data [44–50] fall into three categories. As
(c) inter-diffusion coefficients in the (aCo) phase. All the data shown in Fig. 1, large deviations exist among the reported
are summarized in Table 1 and categorized in the following. data. In the present work, first-principles calculations are
Self-diffusion of Co in pure Co has been studied by performed to determine the diffusion activation energy of
many groups [17–26] using various methods. The measure- Co in Si following the mono-vacancy diffusion mechanism,
ments [17–22,24,25] focused mainly on the very narrow as described later.
temperature ranges, using the conventional mechanical sec- As for the inter-diffusion coefficients, only one piece of
tioning technique, while Bussmann et al. [23] and Lee et al. experimental information exists in the literature, which is
[26] studied the self-diffusion in pure Co over wide temper- also listed in Table 1. However, only those values
ature ranges through a combination of sputter sectioning >1050 °C from Yamamoto et al. [51] are used in the present
and serial lathe sectioning. The results [23,26] are in good assessment, owing to the discrepancy between the inter-dif-
agreement. Consequently, the data from Bussmann et al. fusion coefficients at 1050 °C in the Co-rich region from
[23] and Lee et al. [26] are used in the present optimization, Yamamoto et al. [51] and the present work, as well as the
3942 L. Zhang et al. / Acta Materialia 56 (2008) 3940–3950
Table 1
Summary of various diffusion coefficients in the Co–Si system
Type of data Temperature Method Ref. Codea
range (°C)
Self-diffusion In pure Co: 1050–1250 Radioactive 60Co: decrease in surface activity method; purity: 99.06 wt.% Co and [17,18] h
coefficients of Co DCo
Co 99.7 wt.% electrolytic Co
ðDCo Þ 1000–1265 Radioactive 60Co: decrease in surface activity method; purity: >99.9 wt.% Co [19] h
1104–1406 Radioactive 60Co: sectioning and counting; purity: >99.9 wt.% Co [20] h
701–1297 Radiation of 60Co: residual-activity technique [21] h
1015–1300 Radioactive 60Co: sectioning and counting; purity: 99.45 wt.% Co [22] h
623–1472 Standard radio-tracer (57Co and 60Co) thin-layer-sectioning technique; serial [23] j
lathe sectioning (>1127 °C) and sputter sectioning (<1127 °C); purity: 99.99 wt.%
polycrystalline Co
873 Radioactive 60Co: IBSb serial microsectioning; purity: 99.996 wt.% Co [24,25] h
650–1470 The serial radio-frequency (57Co and 60Co) sputter microsectioning method [26] j
(<1445 °C); serial lathe sectioning method (>1445 °C); purity: >99.999 wt.%
single-crystal Co
30
Self-diffusion In pure Si: 1178, 1300 Si radioactivation: chemical sectioning [27] h
coefficients of Si DSi
Si 1200–1400 Radio-isotope 31Si: hand-lapping sectioning [28] h
ðDSi Þ 1000–1300 Radioactive 31Si: electrochemical sectioning [29,30] h
970–1070 Electron microscope observation: loop annealing [31] h
1047–1390 Radiotracer (31Si): sputter sectioning [31] h
900–1000 Radioactvie 30Si: (p, c) resonance broadening method [34] h
885–1175 Isotope 30Si: ion-analyzer technique [35] h
830–1200 Isotope 30Si: ion implantation; p, c-reaction technique [36] h
850–1388 Isotopically enriched 28Si layers: SIMSb technique [37] j
800–1100 Isotopically enriched 30Si layers: SIMSb technique [38,39] j
735–875 Raman spectroscopy [40] +
Impurity diffusion coefficients of Co 1000–1300 Radioactive isotope 56Co: successive removal of layers [42] +
in Si ðDSi
Co Þ 900–1200 Radioactive 57Co: successive removing and counting [44] j
1125–1225 Electrically active Co: spreading resistance technique [45] j
1000–1200 Electrically active Co: DLTSb; ICTSb [46] j
1100 Electrically active Co: DLTSb [47] j
1050–1150 Radioactive 60Co: SIMSb [48] +
700–1000 Electrically active Co: DLTSb [49] j
760–1100 Radioactive 57Co: sectioning technique [50] +
overlap of those inter-diffusion coefficients at 1000 and Co–10 at.% Si alloy was prepared in an arc melting furnace
1050 °C [51]. (WKDHL-I, Opto-electronics Co. Ltd., Beijing, China)
under a high purity argon atmosphere using a non-consum-
3. Experimental procedure able W electrode. The button was re-melted five times to
improve its homogeneity. No chemical analysis for the
Co pieces (purity 99.95 wt.%) and Si pieces (purity alloy was conducted, as the weight loss during arc-melting
99.99 wt.%) were used as the starting materials. First, one was <0.5 wt.%.
L. Zhang et al. / Acta Materialia 56 (2008) 3940–3950 3943
Fig. 5. (a) The relationship between the square of the thickness for Co2Si and CoSi phases and the diffusion time at 1050 °C; Arrhenius plot for the
parabolic growth constants of (b) the Co2Si phase and (c) the CoSi phase in the Co/Si diffusion couples from the literature [13–15,63] and the present work.
The light solid lines denote the maximal errors. The error bars for experimental data are shown in the diagrams in the cases they are reported in the
literature.
3946 L. Zhang et al. / Acta Materialia 56 (2008) 3940–3950
Fig. 6. (a) Concentration profile for the Co/Co–10 at.% Si couple annealed at 1050 °C for 192 h; (b) composition dependence of the inter-diffusion
coefficients for the Co/Co–10 at.% Si couple at 1050 °C for 192 h.
can be modeled effectively. The calculated formation parameters for the two phases. The thermodynamic param-
energy of the vacancy adjacent to the solute atom is eters for the other phases are the same as those in Ref. [12].
2.58 eV. The present calculation indicates that the migra- The assessment of atomic mobilities for the Co–Si sys-
tion barrier of the solute is very small in magnitude, with tem is conducted in two steps. In the first step, the atomic
a value of 0.06 eV. Such a small migration barrier means mobilities of Co and Si in solution phases, i.e., (aCo), (eCo)
that there is almost no energy barrier for the diffusion of and (Si), are evaluated using the PARROT module [65] in
Co from the lattice site to the site of vacancy. This is due the DICTRA software package, based on all the critically
to the positive solution energy of Co in Si. The calculated reviewed experiment data from the literature and the pres-
solution energy for Co in Si is 0.024 eV atom1. The pres- ent work. For the (aCo) phase, it is unnecessary to assess
ent calculated diffusion activation energy of Co in Si fol- all the parameters in Eq. (2), considering the limited exper-
lowing the mono-vacancy diffusion mechanism is thus imental data in this phase. Here, the frequency factors of
2.52 eV, i.e., 243,151 J mol1, according to density func- DGSi Si
Co and DGSi are assumed to be 0.5 times and 10 times
tional theory (DFT). This first-principles calculated value that of the self-diffusivity of Fe [66], while their activation
is in good agreement with the assessed value of enthalpies equal the self-diffusivity of Fe [66]. The other
269,767 J mol1, which is based on the experimental data parameters ðDGCo Co 0 Co;Si
Co ; DGSi , D GCo and D0 GCo;Si
Si Þ are opti-
[44–47,49]. The calculated result deviates substantially mized based on the experimental diffusivities. Owing to
from the experimental values of 144,518 J mol1 [48] and the lack of experimental information, the atomic mobility
35,648 J mol1 [50]. Consequently, the experimental impu- for (eCo) phase is assumed to be identical to that of
rity diffusion coefficients of Co in Si reported in Refs. [44– (aCo) phase. For the (Si) phase, DGSi Si can be optimized
47,49] are regarded as reasonable in the present work. from those assessed experimental self-diffusion coefficients
In order to perform kinetic assessments for the solid of Si in pure Si, and DGSi Co was extracted from the experi-
phases ((aCo), (eCo), aCo2Si, CoSi, CoSi2, (Si) phases) in mental impurity diffusion coefficients of Co in Si by [44–
the Co–Si system, slight modifications to the previous ther- 47,49]. As described above, the present first-principles cal-
modynamic modeling [12] should be made in order to culation indicates that these experimental data [44–47,49]
introduce small homogeneity ranges for CoSi2 and (Si) are reliable. As the solubility of Co in (Si) is nearly negligi-
phases. Table 2 lists the newly evaluated thermodynamic ble, it is reasonable to assume that DGSi Si
Co and DGSi are
Table 2
Summary of the adopted thermodynamic parameters of CoSi2 and (Si) phases in the Co–Si systema
CoSi2: (Co,Si)1/3(Co,Si)2/3
0
GCoSi 1 SER 2 SER
Co:Si 3 H Co 3 H Si
2
¼ 41239:2 þ 116:62481 T 20:17772 T ln T 0:0043072 T 2 63420:2 T 1
0 hcp
0
GCoSi
Co:Co GCo ¼ 20; 000
2 b 0 CoSi2
GSi:Si 0 GDiamond
Si ¼ 20; 000b
0
GCoSi 0 CoSi2 0 CoSi2 0 CoSi2
Si:Co ¼ GCo:Co þ GSi:Si GCo:Si
2
a
Temperature (T) in Kelvin and Gibbs energy in J (mol atoms)1.
b
The underlined parameters are adjusted in the present work. The other parameters are taken from the recent evaluation [12].
L. Zhang et al. / Acta Materialia 56 (2008) 3940–3950 3947
independent of concentration. In consequence, it is a good 22,24,25,27–36] proves that the assessed atomic mobility
approximation to set DGCo Si Co Si
Co ¼ DGCo and DGSi ¼ DGSi . The parameters obtained in the present work are reliable.
finally obtained atomic mobility parameters of Co and Si in In Fig. 8, the calculated inter-diffusion coefficients in the
(aCo), (eCo) and (Si) phase are listed in Table 3. (aCo) phase from 1000 to 1200 °C with an interval of 50 °C
In the second step, the self-diffusion coefficients of Co are compared with experimental values from Yamamoto
and Si in intermediate compounds are assessed. The self- et al. [51] and the present work. As shown in the figure,
diffusion coefficients of Co and Si in the CoSi2 phase, as the agreement between the calculated values and the exper-
well as that of Si in the CoSi phase, can be evaluated from iment ones >1050 °C is very good. Moreover, the extrapo-
the experimental data of Barge et al. [41] and van Dal et al. lated curves at lower temperatures (1000 and 1050 °C)
[16] via the Arrhenius equation. As pointed out by van Dal based on the parameters obtained from the data at temper-
et al. [16], Si is virtually the only mobile species in the CoSi atures >1050 °C can also reproduce most of the experimen-
phase. Consequently, the self-diffusion coefficient of Co in tal data. The fact that the extrapolated curve at 1050 °C is
the CoSi phase is assumed to be 1/100 of that of Si in the located between the two sets of experimental data can also
CoSi phase. Such an assumption proves to be reasonable in verify the reliability of the present parameters obtained.
the subsequent diffusion growth modeling of the CoSi The largest difference between the two sets of experimental
phase. Owing to limited experimental information, the inter-diffusion coefficients at 1050 °C does not exceed
self-diffusion coefficients of Co and Si in the aCo2Si phase 100%. This is the typical experimental error associated with
are assumed to be equal to those of Ni and Si in the d (low- the measurements of diffusivities in dilute solution regions.
temperature form of Ni2Si) phase of the Ni–Si system [10], The slightly concave shape of the extrapolated curves at
in view of the fact that aCo2Si and d have the same crystal 1000 and 1050 °C is due to the effect of magnetism, which
structure. All the evaluated self-diffusion coefficients of Co was considered in thermodynamic modeling [12].
and Si in the three intermediate phases are summarized in Further validation of the atomic mobility parameters
Table 4. obtained is performed by checking whether the parameters
Fig. 7a and b presents the calculated self-diffusion coef- can describe satisfactorily the experimental information
ficients of Co and Si as a function of inverse temperature, that was not used in the evaluation of the parameters.
compared with the experimental data [16–41]. As shown Fig. 9 shows the model-predicted concentration profiles
in the figures, the calculated values are in excellent agree- of the Co/Co–10 at.% Si diffusion couple annealed at
ment with the selected experimental data [16,23,26,37–39]. 1050 °C for 192 h, compared with the experimental data
The good fit to the other experimental data [17– obtained in the present work. The calculated result is in
Table 3
Summary of the atomic mobility parameters of Co and Si in (aCo), (eCo) and (Si) phases obtained in the present worka
Phases Mobility Parameters
4 0 Co;Si
(aCo) Mobility of Co DGCo Si
Co ¼ 296542:9 74:48 T , DGCo ¼ 286; 000 RT lnð3:5 10 Þ, D GCo ¼ 288318:0 þ 69:75 T
4 1 Co;Si
Mobility of Si DGCo Si
Si ¼ 280658:2 70:14 T , DGSi ¼ 286; 000 RT lnð7:0 10 Þ, D GSi ¼ 130597:8 128:76 T
4 0 Co;Si
(eCo)b Mobility of Co DGCo Si
Co ¼ 296542:9 74:48 T , DGCo ¼ 286; 000 RT lnð3:5 10 Þ, D GCo ¼ 288318:0 þ 69:75 T
4 1 Co;Si
Mobility of Si DGCo Si
Si ¼ 280658:2 70:14 T , DGSi ¼ 286; 000 RT lnð7:0 10 Þ, D GSi ¼ 130597:8 128:76 T
8 8
(Si) Mobility of Co DGCo Si
Co ¼ 269766:9 þ RT lnð9:1 10 Þ, DGCo ¼ 269766:9 þ RT lnð9:1 10 Þ
Mobility of Si DGCo Si
Si ¼ 457306:4 26:11 T , DGSi ¼ 457306:4 26:11 T
a 1
In J (mol atoms) ; temperature (T) is in Kelvin. The underlined parameters are estimated in the present work considering the limited experimental
data in the (aCo) phase, and the other parameters are assessed in the present work.
b
Owing to lack of experimental information, the mobility parameters of (eCo) phase are assumed to be equal to those of (aCo) phase.
Table 4
Summary of the self-diffusion coefficients of Co and Si in the intermediate phases of the Co–Si systema
aCo2Sib
4 3
DCo
aCo2 Si ¼ 3:0 10 expð161; 000=RT Þ, DSi
aCo2 Si ¼ 2:8 10 expð294; 000=RT Þ
CoSi
8 6
DCo
CoSi ¼ 3:2 10 expð206; 000=RT Þ,c DSi
CoSi ¼ 3:2 10 expð206; 000=RT Þ
CoSi2
4 8
DCo
CoSi2 ¼ 2:8488 10 expð296164:7=RT Þ, DSi
CoSi2 ¼ 2:8 10 expð186; 000=RT Þ
a
In m2 s1; temperature (T) is in Kelvin.
b
Owing to the lack of experimental data, the parameters of aCo2Si phase are assumed to be equal to those of d phase in the Ni–Si system [10].
c
The self-diffusion coefficient of Co in CoSi phase is supposed to be 1/100 that of Si in CoSi phase, taking into account the experimental information of
van Dal et al. [16].
3948 L. Zhang et al. / Acta Materialia 56 (2008) 3940–3950
Fig. 7. Calculated self-diffusion coefficients of (a) Co and (b) Si in various phases as a function of inverse temperature along with the corresponding
experimental data [17–40] according to the present mobility parameters. A constant, M, is added in order to separate the data for different phases in both
figures. The error bars for experimental data are shown in the figures in the cases they are reported in the literature.
accordance with the experimental data within experimental in the present work are used. For the analytical method,
error. Small discrepancies in the Co-rich side exist between the growth of CoSi phase in a bulk diffusion couple is gov-
modeling and experiment. The discrepancies can be traced erned by the following equations:
back to the differences between the measured and calcu- oC i =ot ¼ Dave 2 2
ði ¼ aCo2 Si; CoSi and CoSi2 Þ
i o C i =ox
lated inter-diffusion coefficients at 1050 °C, as shown in
ð8Þ
Fig. 7. Fig. 8 provides confirmation on the reliability of
the mobility parameters of the (aCo) phase. on1 =ot ¼ ðDave
aCo2 Si oC aCo2 Si =ox
Fig. 10 shows the model-predicted growth rates of CoSi 1
þ Dave 0
CoSi oCCoSi =oxÞ=ðC aCo2 Si CCoSi Þ ð9Þ
phase in the aCo2Si/CoSi2 diffusion couples at 914, 1000
and 1100 °C along with measured data [16]. The solid lines on2 =ot ¼ ðDave
CoSi oC CoSi =ox
are calculated by means of DICTRA simulation, while the þ Dave 1 0
CoSi2 oC CoSi2 =oxÞ=ðC CoSi C CoSi2 Þ ð10Þ
dotted ones are obtained using the analytical method.
Within estimated experimental errors, all calculations rea- The boundary conditions are C aCo2 Si ¼ C 0aCo2 Si ¼ constant
sonably reproduce the experimental data [16]. In the DIC- at x = 1 and C CoSi2 ¼ C 1CoSi2 ¼ constant at x = +1. As
TRA simulation, the moving boundary model [67] and the these intermediate compounds (aCo2Si, CoSi and CoSi2
average inter-diffusion coefficients of aCo2Si, CoSi and phases) have narrow homogeneity ranges, it is reasonable
CoSi2 phases based on the modified thermodynamic data to assume that the concentration profile within each phase
L. Zhang et al. / Acta Materialia 56 (2008) 3940–3950 3949
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