© JCC 2017

Low-pressure CVD 5
##
+ +
&,)
*&#,+!&%
.*
⇥ = AI0 (Φ⇠) + BK0 (Φ⇠)
cA I0 (Φ⇠)
 -!&)
*
Φξ →

K0 (0) ! 1 B=0 ⇥= =
cA0 I0 (Φ)
+,#
'&*!+!&%
)+
2%
+ 
effectiveness factor η =
'&*!+!&%
)+
!
A = cA0
-)/. )
d⇥
NAr |r=Rw (2⇡Rw L) LDAB dC LDAB d⇠
dr r=Rw ⇠=1
⌘= 2
= = 2
2⇡Rw kr cA0 Rw kr cA0 k r Rw
d⇥
d⇠
⇠=1 2I1 ( )
=2 ⌘=
2 I0 ( )

#&+
&
%&)$#!0

&%%+)+!&%
-)*,*
)!#

'&*!+!&%
#&%
+ 
.)
21 .)
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%+)
© JCC 2017

Low-pressure CVD 6
&.
&%*!)
*#!%
,'
'&*!+!&%
+&
.)*
.!+

#))
!$+)

 
)+%+*
&%%+)+!&%
')&2#
%
%
+ 
'&*!+!&%
,%!&)$!+/

'%*
&%#/
&%
+ 
 !#
$&,#,*

2
2 2kr Rw
=
DAB L
!%+!%!%
,%!&)$!+/
!%
+ 
2#$
)(,!)*
+ +
Φ2
!*
"'+
&%*+%+
*

Rw
!*
!%)*
)&$
w,1
+&
w,2
+ !*
)(,!)*
+ +


!%)*

)&$
1
+&
2
*,
+ +

2 2 2 2 ✓ ◆2
2kr Rw,1 2kr Rw,2 Rw,1 Rw,2 Rw,2
= ! = ! L 2 = L1
DAB L1 DAB L2 L1 L2 Rw,1

22