Specifications for Field Emission Scanning Electron Microscope

High Resolution Schottky emitter FE-SEM (Field Emission -Scanning Electron

Microscope) is a high resolution scanning electron microscope which is
intended for use for characterization of nano-materials both conducting and non
conducting such as metal, ceramics, polymer and composite for investigating
the .microstructure and perform chemical analysis using Energy Dispersive X-
Ray Spectroscopy (EDS).
1 Resolution High vacuum mode 1.5 nm (30kV) 4.0nm (1kV)
For analysis 3.0nm (15kV, Probe current 1nA)
Low vacuum mode 1.8nm (15kV, Backscattered
electron image)
2 Magnification X5 to x 6,00,000 (Magnification is defined with a
display size 128mm x 96mm)
3 Displayed magnification 1x14 to 1,679,449
(Magnification is defined with a display size 358mm x
269mm)
4 Electron gun Schottky Field Emission Electron gun
5 Accelerating 0.5kV to 30kV
voltage
6 Probe Current 1pA to 20nA. High resolution to be guaranteed at
highest probe current setting.
7 Low vacuum 10 to 150 Pa
pressure
adjustment range
8 Aperture angle Built-in
controllers
9 Objective lens 4-stage
aperture
10 Stigma memory Built-in
11 Electrical image +/- 50Micrometer (at WD=10mm)
shift
12 Automatic Auto focus, Auto brightness/contrast, auto astigmatism
functions correction
13 Specimen stage Large Eucentric type X:125mm; Y: 10mm Z:80mm
Tilt :-10OC to +90OC; Rotation 360O
14 Standard recipe Built-in
15 Image mode Secondary electron image, REF image, Backscattered
electron image
16 OS Windows 10
17 Observation 23-inch touch screen
monitor
18 Image size 640x480, 1280x960, 2560x1920, 5120x3840
19 Measurement Built-in
function
20 Language Switch Should be operable in English
21 Vacuum system Fully automatic TMPx1,SIPx2 RPx2
22 FESEM Table Anti-vibration table to be supplied by the supplier
23 Supporting Tools Specimen handling tools, stage tools and specimen
preparation materials and general tools for maintenance
of FE SEM.
Conductive carbon tapes of 20m to be provided
24 Recommended Quote should also be submitted for recommended
essential spares essential and consumables for uninterrupted operation
of the equipment for spares for five years.
25 Maintenance The supplier shall provide uninterrupted supply of
spares and accessories for a ·period of 1 0 years after
warranty.
26 Up-gradation The supplier shall supply any software for FESEM and
whenever they are upgraded.
27 Application notes The supplier shall provide detailed application notes of
FESEM in hard and soft copies.
28 Essential i) IRCCD camera ii) Chiller with air circulation system
Accessories (Capacity of 2 tons-3 Nos.) iii) Compressor iv)
Interface between SEM and EDS v) UPS 10 KVA with
2 hr back up vi) 4 Nos. Spare Filament (in the form of
coupouns) vii Combined S uttering and Carbon and
gold coating system.

General:
1. FE-SEM quoted must be complete in all respect. It should have capability
to image thin films, nanomaterials, polymers, semiconductors, ceramics,
metals and all other advanced materials at high mag. FESEM should have
suitable technology for optimum performance of all the detectors.
2. The firm should have at least three installation of similar machine (FE
SEM) in IITs/Govt. Labs/Academic Institutes running for more than three
years. The name and addresses of all the installed FE SEM should be
provided.
3. The firm should give the compliance of the specification with the bid.
4. Training: Faculty should be trained on working days free of cost
thoroughly at the place where the equipment is housed. Initial training
during installation of the machine and one week of advanced training
 after·six months of machine installation. The expenses for travel, training
and accommodation should be borne by the firm.
5. Warranty: One year standard with two extended warranty should be the
part of the offer.
6. Acceptance criteria: Different types of samples of nanomaterials and
other advanced materials will be given for imaging. The quality of the
data received will be the parameter for the acceptance criteria of the
machine.
7. Installation: Free installation and commissioning at the Institution is sole
responsibility of vendor.
8. Documents and Services: The firm should provide all necessary
brochures supporting the important parameters of the equipment and
provide information about the service person and their location in India.
9. Manuals: Detailed user instruction manual, operation I instruction
manual, trouble shooting manual, CD ROM tutorials for FESEM.
Detailed circuit and fault diagnostic Software, detailed circuit diagram of
the equipment (FESEM), maintenance and service manual.
10. Standard operating procedure for each mode including sample mounting
should be given separately.
11.Spares and consumables
12.Safety: The equipment should confirm to Indian and International safety
standards and regulations pertaining to radiation and other hazards. Safety
of all users of the equipment should be ensured.
13.Details of service centres and service personnel should be provided
14.Price quoted should be inclusive of transit insurance, freight charges upto
the installation site at the Avinashilingam Institute of Home Science and
Higher Education for Women, Coimbatore-43

Conditions:
1. The tender should furnish evidence showing that he is the
distributor/dealer/authorised seller of the equipment
2. Service and spares must be free of cost during the warranty period
3. All charges shall be borne by the seller to install the equipment in the
premises of Avinashilingam Institute for Home Science and Higher
Education for Women, Coimbatore and training at our premises
4. Tenderer should produce his income tax return for the last two years
5. Tenderer should furnish his TIN No.without fail.