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OF INTERDIGITATED ELECTRODE
ARRAYS FOR BIOIMPEDANCE
SPECTROSCOPY
M. Ibrahim1, J. Claudel1, D. Kourtiche1, B. Assouar2 and M. Nadi1
1
Electronic Instrumentation Laboratory of Nancy,
2
Institute Jean Lamour,
Nancy University, France.
ABSTRACT
This paper concerns a theoretical and electrical modelling of interdigital sensor in a wide band
frequency. A theoretical approach is proposed to optimize the use of the sensor for
bioimpedance spectroscopy. CoventorWare software was used to modelize in three
dimensions the interdigital sensor system for measuring electrical impedance of biological
medium. Complete system simulation by Finite element method (FEM) was used for sensor
sensitivity optimization. The influence of geometric parameters (number of fingers, width of
the electrodes, …), on the impedance spectroscopy of biological medium was studied.
A high level description of the sensor and the biological medium was also developed under
VHDL-AMS with SystemVision software from mentor graphics. The simulation results are
compared with measurements obtained with a true interdigitated sensor illustrating a good
correlation. This shows that even the theoretical model is simple, it remains very effective.
1. INTRODUCTION
Electrical impedance measurement has been demonstrated as a potential useful approach in
biomedical applications. This method allows to determine the physiological status of ex vivo
or living tissues as well as their electromagnetic characterization [1]. The changes induced by
some pathologies could be associated with variations of essential tissue parameters such as the
physical structure or the ionic composition that can be reflected as changes in the passive
electrical properties. The range of applications derived from this technique is quite wide [2,
rigaud et morucci].
Planar interdigitated electrode arrays have become more prominent as a sensor device due to
the ongoing miniaturization of electrodes and the low cost of those systems [3]. An important
advantage of these sensor devices is the simple and inexpensive mass-fabrication process and
the ability to use these devices over a wide range of applications without significant changes
in the sensor design [4-5]. Typically these sensors have been used for the detection of
capacitance, dielectric constant and bulk conductivity in biological medium [6-7]. Basically,
the structure consists on two parallel coplanar electrodes whose design (width, gap between
electrodes, length) is repeated periodically [8].
This paper, based on previous work [9], presents a new approach of physical and electrical
modelling system of a biological sensor. The electrical and physical modelling of the
Interdigital sensor and the medium was developped by using COVENTORWARE ® and
Systemvision (MENTORGRAPHICS®) sofware respectively.
Section two describes the correlation between design parameters and frequency behavior in
coplanar impedance sensors. By developing total impedance equations and modeling
equivalent circuits we propose a theoretical optimization of the geometrical parameters of the
sensor. One objective was to get the optimal ratio between the width of the electrodes and the
gap. The third section gives a description of the sensor and medium model with the finite
element method FEM using CoventorWare® software. We studied the influence of the
medium’s physical properties on the frequency sensor response. We simulated the influence of
electrodes number and we found the number 16 as optimized for a cross section 1mm*1mm.
In the fourth section, we give a description of electrical model for IDT sensor with VHDL-
AMS (SystemVision software®). This software provides an electrical approach that can be
readily used in current electronic design flow to include distributed physics effects. VHDL-
AMS language permits to simulate the sensor and medium. It allows fast simulations to
validate a simplified model and to serve as a reference to power conditioning.
The sensor manufacturing is described in the fifth section. A test bench based on a
measurement system composed by RCL meter connected with computer was built to test the
sensor. Preliminary bioimpedance measurements were done on calibrated ionic solution of
NaCl.
Section six concludes on the validity of models and presents the perspectives.
2. THEORETICAL ASPECT
2.1. Description of interdigital sensors
Interdigital sensor is equivalent to a parallel plate capacitor (Figure 1) [10-11]. An electric
field is created between the positive and negative electrodes (instantaneous polarity) shown on
figure 1 (a) and (b) respectively. When a medium is placed on the sensor, the electric field
across the medium under test is also shown on figure 1 (c). The dielectric properties of the
material as well as the geometry of the material under test affect the capacitance and
conductance between the two electrodes. The variation of the electric field can be used to
determine the properties of the material depending on the application.
To use them in bioimpedance domain, a potential difference is applied between two electrodes
and the electrical impedance between the electrodes is measured.
The electrodes of the interdigital sensor are coplanar, so the measured impedance will have a
very low signal-to-noise ratio.
Figure 3 : (a) Configuration of interdigitated impedance cell and (b) its equivalent circuit
The resistance RSol of the resistance is the sensing element and is related to the electrolyte
conductivity σSol by the cell constant KCell [12]:
KCell (1)
RSol
σSol
The cell constant KCell is equal to [13] :
2
K k
1 - k²
KCell .
N - 1L K
(2)
1 π W
with K k
1
dt and k cos .
0 1 - t² 1 - k²t² 2 SW
Where N is the number of fingers, S the finger spacing, W the finger width and L the finger
length.
The function K(k) is the incomplete elliptic integral of the first kind [14]. So, the cell constant
depends entirely on the geometry of the sensor.
The lead resistance RLead is the result of the series resistances of the connecting wires.
Direct capacitive coupling between the two electrodes is represented by the cell capacitance
CCell given by :
ε 0. ε r, Sol
CCell
KCell (3)
where A is the electrode surface and CDL,Surface the characteristic of the double layer
capacitance of the electrode-electrolyte system. One must notice that the factor 0.5 is the
result of CDL determined by only half of the electrode surface A. The characteristic of the
double layer capacitance CDL, Surface is supposed to be equal to the characteristic capacitance of
the Stern layer for electrolytes having a quite high ionic strength. This characteristic
capacitance of the Stern layer is approximated by CStern, Surface = 10-20 μF/cm2 [15, 16].
Based on the equivalent circuit of figure 1.b, the total observed impedance can be expressed as
Z jω 2RLead
Z1
(5)
j.ω.CCell. Z1 1
Where
2
Z1 RSol
j.ω.CDL
Frequency, Hertz
2 jω .CDL.RSol
Z (6)
j.ω .CDL
and
1
fLo (7)
π. RSol CDL
The impedance increases with the decrease in the frequency (double layer region).
However, above fLow, double layer capacitance offers no impedance. This is explained by the
fact that only the resistance of the solution contributes to the impedance while below fHi the
influence of CCell is not yet indicative, the total impedance is independent of the frequency
(resistance of the solution zone). This results into a frequency band, restricted by fLo and fHi, in
which the results (e.g. the conductivity) can be deduced from the observed impedance using :
Z jω 2RLead RSol (8)
To optimize the impedance cell leads to maximize the plateau width in the curve of figure 4.
When the frequency is higher than fHi, the current cross the middle of the dielectric capacitor
instead of crossing the electrolyte solution resistance.
That is, the branch (CDL + RSol + CDL) is inactive, and the branch (CCell) is active. In this zone,
the dielectric capacitance of the medium governs the total impedance, and the double layer
capacitance and medium resistance could be neglected. Thus, the total impedance value is
inversely proportional to the frequency :
RSol
Z (9)
j.ω .CCell.RSol 1
and
1
fHi (10)
2. π .RSol.CCell
Or in terms of conductivity parameters :
σSol
fLo (11)
0.5.π .W. L. N. CDL, Surface . KCell
and
σSol
fHi (12)
2. . 0. r, Sol
Note that the higher boundary frequency, fHi, is not dependent on the geometry, according to
the theory, when the wiring capacitance is not present.
Obviously, maximising the width of the plateau can only be done by decreasing the lower
boundary frequency. In order to make the lower boundary frequency (11) as low as possible,
the geometrical term
L*L : L = N. (W+S) - S
With L in mm and S in microns
L+S≈L
Finaly
L = N. (W+S) (14)
However, it is more illustrative to introduce a factor a = S/W. Using the substitutions :
L 1 L a
W . and S .
N a 1 N a 1 (15)
Which are based on equation (15) together with the ratio a, expression (13) becomes :
2.L 1
K k
1 - k²
. . = X (N, L) * Y(a)
N - 1 a 1 K (16)
Where
2.L 1 K k
1 - k²
X N, L and Y a .
N - 1 a 1 K
0.6
X: 0.66
Y: 0.51
0.5
0.4
Y(a)
0.3
0.2
0.1
0
0 1 2 3 4 5 6 7 8 9 10
a
3. COVENTORWARE®MODELING
3.1. Model description
In this section, the model of the sensor loaded by the blood medium is described. This model
was developed for simulation with the finite element method FEM using CoventorWare ®
software.
We used the module MEMS electro quasistatic harmonic response proposed by the software.
3.S L
W μm, S μm
2 5.N/2 1
and N is a variable.
For example, N = 4 electrodes, S = 1000/(5.4/2-1) = 111 μm and W = 3.111/2 = 167 μm.
7
10
16 electrodes, with interface double layer DL
6 16 electrodes, out interface double layer DL
10
5
10
Impedance, Ohm
4
10
3
10
2
10
1
10
0
10 2
10 10
4
flow 10
6
10
8 fhigh1010 10
12
Frequency, Hertz
Figure 8 : Simulated impedance of a blood medium deposited on the structure of the sensor
number of fingers 16 electrodes, with and without interface double layer DL.
8
10
16 electrodes, conductivity = 0.7 s/m
10
7 16 electrodes, conductivity = 9 s/m
6
10
Impedance, Ohm
5
10
4
10
3
10
2
10
1
10
0
10 2 4 6 8 10 12
10 10 flow flow10 10 fhigh10 fhigh 10
Frequency, Hertz
5
10
Impedance, Ohm
4
10
3
10
2
10
1
10
0
10 2 4 6 8 10 12
10 10 10 10 10 10
Frequency, Hertz
7
10
2 electrodes
8 electrodes
6
10 12 electrodes
16 elctrodes
5 20 electrodes
10
30 electrodes
Impedance, Ohm
4
10
3
10
2
10
1
10
0
10
2 4 6 8 10 12
10 10 10 10 10 10
Frequency, Hertz
Figure 12: General electrical model for an interdigitated sensor with medium
CDL, e represents the double layer capacity per finger, ZMed, e and CCell, e the impedance of
medium and the cell capacitance between two fingers. These components are governed by the
same equations (1), (3) and (4), but with a different cell constant, which does not contain the
term N and (N-1) : the electrodes form factor Ke (equation 17).
2
K k
ZMed, e
1 - k² Zbe(j ). KCell
Ke . KCell. N - 1 and ZMed
L K N - 1 (17)
This model can be easily be simulated in VHDL-AMS, but its remains very difficult to write
its equations. It is necessary to simplify it in order to allow a simple use. To do this, one
supposes that the effect of the double layer can be divided into two equal parts. We divide the
interface capacity into two equal parts to obtain a parallel circuit between the electrodes
(figure 13). This new model can be simplified in a simple circuit with 4 components : 2 double
layer capacitors CDL, the cell capacitor CCell and the medium impedance ZMed. This is the
circuit presented in the theoretical part in figure 3.b. This simplified model proves that one
can find the conductivity and permittivity of medium by using cell constant.
Figure 13: Steps to simplify the model.
result:=0.0;
pas:= 1.0/100000.0;
for nbr in 1 to 99999 loop
t:=real(nbr)/100000.0;
y:= result + pas*(1.0/sqrt((1.0-t**2.0)*(1.0-(x**2.0)*(t**2.0))));
result:=y;
Figure 14: Example of calculation of constants (here: the electrodes form factor and C Cell).
end loop;
return y;
end K;
The frequency analysis simulation is made by connecting an alternative current source to the
sensor. An AC current of 1A was applied at a frequency varying from 100Hz to 1GHz. Figure
15 gives the simulation result of the impedance variation. The central plateau is the resistance
of the solution.
Impedance (Ohm)
4
10
2
10
2 3 4 5 6 7 8 9
10 10 10 10 10 10 10 10
Frequency (Hz)
Figure 17: Fricke’s Model for blood and its equivalent impedance in [Ohm.m]. With r P, rC, Cm,
a and Ø the resistivity of plasma in [Ohm.m], the intern resistivity of blood cells in [Ohm.m],
the membrane surface capacity in [F/m], the radius of blood cells in [m] and the volume in
percentage of blood cells.
Impedance (Ohm)
4
10
3
10 - Simulation for 16 electrodes; blood model
2
10
2 3 4 5 6 7 8 9
10 10 10 10 10 10 10 10
Frequency (Hz)
Figure 18: Simulated impedance of a sensor with 16 electrodes, for a blood medium.
Conductivity and capacity
-2
10
Conductivity (S)
-4
10
-6
10
Capacity (F)
-8
10
-10
10
-12
10
2 3 4 5 6 7 8 9
10 10 10 10 10 10 10 10
Frequency (Hz)
Figure 19: Conductance and capacity of a sensor with 16 electrodes for blood medium.
The figures 18 represents the impedance; one can see two plateaux which correspond
respectively to the plasma resistance and plasma resistance in parallel with blood cell
resistance. The value of capacitance is difficult to evaluate in this type of curve, but it is easily
find in the figure 19.
Figure 19 gives the conductance and the capacity versus the frequency. For the conductivity,
each plateau represents respectively the plasma resistance and the plasma resistance in parallel
with the blood cell resistance. In capacity, each plateau represents respectively the double
layer capacity, the blood cells capacity and CCell.
5. Experimental validation
5.1 Sensor manufacturing
The sensor was provided by our colleague from the IJL team (Institut Jean Lamour, Henri
Poincaré-Nancy 1 University). It was obtained by a deposit of 500 nm platinum on an
insulating glass substrate in a 5 steps process:
Substrate cleaning with acetone and isopropanol.
Deposition of a platinum by ion-beam sputtering.
UV lithography: deposit resin, mask application, insolation and development.
Ion beam etching.
Removal resin with acetone and isopropanol.
Its geometrical parameters are N=100, W=4µm, S=8µm and L=1000µm. This is a first
prototype sensor for which we recycled a mask designed for SAW interdigitated sensor
previously developped at IJL. A printed circuit board (PCB) was designed and built to connect
the sensor with an appropriat measuring instrument. The connections between the sensor and
the PCB were realized using a gold wires bonding figure 20.
Figure 20: Sensor and PCB connection and its gold wires bonding and partial microscopic
view of the fingers
5.2. Measurements
The measurement system is composed of an LCR meter HP4284A controlled by VEE©
software with a GPIB interface. It allows a fast and automatic measurements between 20Hz
and 1 MHz. A photography of this system is given in the figure 20a. The measurements were
performed with a calibrated drop of ionic solution. This solution contains 0.9% of NaCl, and
has an approximate conductivity of 0.72 S/m. We placed a drop directly on the sensor, as
shown on figure 21.b. The sensor connections (bonding) were not isolated, and can cause
some errors of measurements. These first measurements were done just to validate the model .
Figure 22 shows the measurement results compared to VHDL-AMS simulation results.
Figure 21.a: Measurement system using the HP4284A PRECISION LCR METER.
Figure 21.b: Deposit of a drop of calibrated solution on the sensor.
Impedance (Ohm)
5
10
4
10 Measured impedance for a NaCl
calibrated solution: conductivity = 0.72 S/m
Simulated impedance for an
ionic solution: conductivity = 0,72 S/m
3
10
2
10
2 3 4 5 6 7
10 10 10 10 10 10
Frequency (Hz)
Simulation of complex system by the finite element method with CoventorWare®, takes lot of
memory for computation. For N equal 100 electrodes, our simulation equipment was not able
to model and simulate the whole system.
The preliminary experimental measurements agree with the simulation. One can see a plateau
at higher frequency, at a level close to that of simulation, but the instrument frequency
limitation do not allow to check the precise level. The slope of the curve is slightly lower in
measurement, because the real system response is not exactly the same those classical passive
electronic components.
6. CONCLUSION
This paper presents a comparative approach for simulation of biological sensor modeling in
physical and electrical domains using two softwares. CoventorWare® software for three
dimensional interdigilal sensor simulation techniques to analyse the influence of the physical
properties of the medium and the impedance response was used. The simulation results are in
agreement with the theoretical equations of optimization.
This optimization method used for bioimpedance spectroscopy sensor is obtained from
theoretical equations, by developing total impedance equations and modeling equivalent
circuits. The equations given relate the cutoff frequencies to the geometric parameters of the
sensor and physical properties of the measured medium. A geometric structure of the sensor
was proposed. The use of a square cross section permit to eliminate one of the geometric
parameters of the sensor, that simplifies the optimization and the analysis of the sensor.
Electrical modeling of the interdigital sensor and the medium is carried out with VHDL-AMS
software from MENTOR GRAPHICS®. The use of VHDL-AMS language shows the
advantage to combine multiphysical domains. The approach can be readily used in current
electronic design flow to include distributed physics effects into modelling and simulation
process with VHDL-AMS. Simulations results give similar results as physical simulation.
However, all the physical properties are not represented, especially at high frequency. The
useful properties are correctly simulated .
The use of behavioural models in simulation simplify physics and explore interactions
between different domains in a reasonable amount of time compared to physics modelling
with CoventorWare® software.
The simulation results of the impedance obtained with VHDL AMS don’t show any resonance
because all the geometric parameters, such as thickness of the medium and the interactions
between ions were not include in the model.
The experimental results obtained with a sensor, designed by the IJL (Institut Jean Lamour,
Nancy University) team, are in agreement with those obtained by simulation.
The future goal is to design a specific sensor by optimizing its dimensions for blood measure
samples. It will be necessary to design a tank on the active area of the sensor, to avoid
measurement errors, and do measurement at higher frequency.
The simulation and measured curves present many similarities; the preliminary experiment
measures are satisfactory. The next goal is to realise our own sensor by optimizing dimensions
to measure blood samples. It will be necessary to design a tank limited to the active area of the
sensor, to reduce measurement errors, and allows measurement at higher frequency.
7. REFERENCES
[1]. Faes TJ, Meij HA, de Munck JC, Heethaar RM: ‘‘The electric resistivity of human tissues
(100 Hz-10 MHz): a meta-analysis of review studies’’. Physiol Meas 1999 , 20:R1-10.
[2]. E. Katz, I. Willner, ‘‘Electroanalysis’’, 15 (11), 913-947, 2003.
[3]. Mukhopadhyay, S.C., “Sensing and Instrumentation for a Low Cost Intelligent Sensing
System”, SICE-ICASE International Joint Conference, pp 1075-1080, Oct 2006.
[4]. Mukhopadhyay, S.C., Gooneratne, C.P., Demidenko, S., Sen Gupta, G., “Low cost
sensing system for dairy products quality monitoring”, Proceedings of 2005 International
Instrumentation and Measurement Technology Conference. 2005, IEEE Catalog Number
05CH37627C, ISBN 0-7803-8880-1, 244-249.
[5] . P. Van Gerwen, W. Laureyn, W. Laureys, G. Huyberechts, M. Op De Beeck, K. Baert, J.
Suls, W. Sansen, P. Jacobs, L. Hermans, R. Mertens, ‘‘Nanoscaled interdigitated electrode
arrays for biochemical sensors’’, Sens. Actuators, B 49.1999.73–80.
[6]. S. Timms, K. O. Colquhoun, C. R. Fricker, J. ‘‘Microbiol’’, Meth, 26(1996) 125.
[7]. P. Geng, X. Zhang, W. Meng, Q. wang, L. Jin, Z. Feng, Z. Wu, ‘‘Electrochim’’, Acta 53
(2008) 4663.
[8]. R. Igreja, C. J .Dias, ‘‘Sensors and actuators’’, A 112 (2004) 291-301.
[9]. D. Borkholder, ‘‘Based biosensors using microelectrodes’’, Ph.D. dissertation, Stanford
University, Palo Alto, 1998.
[10]. Mamishev, A., Sundara-Rajan, K., Yang, F., Du, Y., Zahn, M., “Interdigital sensors and
transducers” Proceedings of the IEEE. 2004, 92, 808-845.
[11]. Sundara-Rajan, K., Byrd II, L., Mamishev, A.V., “Moisture content estimation in paper
pulp using fringing field impedance spectroscopy” IEEE Sensors Journal 2003, 4, 378-383.
[12]. W. Olthuis, W. Streekstra, P. Bergveld, ‘‘Sensors and Actuators’’ B 24-25 (1995) 252-
256.
[13]. P. Jacobs, A. Varlan, W. Sansen, ‘‘Design optimisation of planar electrolytic
conductivity sensors’’, Medical & Biological Enfineering & Computing, November, page
802-810, 1995.
[14]. M. Abramowittz and I. Stegun, ‘‘Handbook of mathematical functions’’, Dover
Publications Inc, New York, 1965.
[15]. E. A. M. F. Dahmen, ‘‘Electroanalysis Theory and applications in aqueous and non
aqueous media and in automated chemical control’’, Elsevier, Amesterdam, 1986.
[16]. A. J. Bard and L. R. Faulkner, ‘‘Electrochemical methods, fundamentals and
applications’’, John Wiley and Sons, New York, 1980.
[17]. G. T. A. Kovacs, ‘‘introduction to the theory, design, and modeling of thin-film
microelectrodes for neural interfaces, in Enabling technologies for Cultured Neural
Networks’’, D.A. Stenger and T. M. McKenna, Eds, London, U.K, Academic, pp.121-165,
1994.
[18]. A. J. Bard and L. R. Faulkner, ‘‘Electrochemical Methods’’, New York, Willey, 2001.
[19]. F. Jaspard, M. Nadi, A. Rouane ‘‘Dielectric properties of blood : an investigation of
haematocrit dependance’’, Physiological Measurement, Vol 24 pages 134-147, 2003.