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DOI 10.1007/s00170-015-7801-z
ORIGINAL ARTICLE
Received: 27 March 2015 / Accepted: 2 September 2015 / Published online: 15 September 2015
# Springer-Verlag London 2015
Abstract The precision of microobject manipulation is pre- Keywords Compliant mechanism . Microgripper . Plunger .
dominantly based on the appropriate design of micromanipu- Topology optimization . Flexure hinges . Surface forces
lation devices such as microgrippers. A compliant
mechanism-based microgripper is an appropriate choice to
achieve a highly precise and controlled motion. This research 1 Introduction
article proposes a refined technique to design a compliant-
based microgripper with a plunger. The topological optimiza- Recent developments in precision industries are demanding
tion technique has been adopted in this research work to de- for highly controlled and precision movements of manipulat-
velop the conceptual design of the mechanism. Flexure hinges ing devices. A microgripper is a fundamental component in
are introduced in the topologically optimized design to over- the micromanipulation of minute objects [1]. Hence, the de-
come the senseless regions developed during the optimization sign and development of a microgripper have drawn more
process which is highly complicated to manufacture. Various attention in micromanipulation researches. Microgripper de-
flexure hinge contours such as rectangular, circular, and ellip- sign should include the physical nature of the micro-sized
tical are introduced in the conceptual design domain, and their objects to be handled such as irregular shapes, fragile-
effects are investigated. Various parameters of flexure hinges natured biological cells, and bacteria [2], and changes in the
are considered; the stress, the displacements, and the strain physics of micro-sized components [3]. Therefore, the design
energy stored in the mechanism are studied through finite of gripping devices and its mechanism at the micro level have
element analysis (FEA). In addition to FEA, experimental attracted many researchers. Incorporating the conventional
verification of the design was also performed. Both results joints in the mechanism of a microgripper leads to inaccuracy
are convincing about the structural performance of the due to backlash, wear, manufacturing error, assembly error,
microgripper design. In general, microdevices possess higher and friction between the assembled parts. Drawbacks found
surface forces than volumetric forces; hence, this design is in the conventional joints at precision and micro-level motion
introduced with a plunger segment which is used to push the suggests the designer to develop an alternate design method-
microobject for an active release during micromanipulation. ology such as a monolithic compliant mechanism. A compli-
ant mechanism-based design has a slender region called flex-
ure hinge which allows limited rotation between two rigid
parts by bending. The control over precision motion of
* R. Bharanidaran microgripper design extremely depends on the kind of flex-
bharanidaran123@gmail.com ures and their design [4]. The monolithic compliant mecha-
T. Ramesh nism design has been developed by adopting various ap-
tramesh@nitt.edu proaches such as mechanism synthesis [5, 6], pseudo-rigid
1
School of Mechanical and Building Sciences, Vellore Institute of body model [7], optimization technique [8], inverse methods
Technology, Vellore, India [9], and intuitive method [10]. Among the various methods
2
Department of Mechanical Engineering, National Institute of highlighted in this research paper, optimization technique has
Technology, Tiruchirappalli, India proven that it is more general and efficient.
104 Int J Adv Manuf Technol (2017) 93:103–112
Topological optimization is a mathematical approach In this research work, many design aspects are consid-
of developing a conceptual design of compliant mech- ered to design a microgripper with a plunger portion. The
anism [11]. It is solved effectively by using Solid Iso- conceptual design of the mechanism is made through to-
tropic Material with Penalization (SIMP). Bendsoe and pological optimization technique. This conceptual design
Sigmund [8] implemented SIMP or power law interpo- is further post-processed to overcome the manufacturing
lation approach alternate to a homogenization-based difficulties by introducing flexure hinges. The optimum
method. In this technique, the material property is as- parameter of flexure hinges is selected by comparing their
sumed as constant in all the elements of the discretized structural behavior. The structural behaviors of the
initial design domain. Element relative density is as- microgripper are investigated through the FEM. The de-
sumed as a variable and raised to some power times. formations of microgripper design for the various param-
The heuristic optimization algorithm has been used to eters are also verified using experimental techniques. Lat-
optimize the relative density of the element based on er, microgripper jaws and a plunger are designed accord-
the objectives and constraints considered. The output of ing to the requirements.
the topologically optimized mechanism design provides
a location of flexure hinges, and these locations are
spotted as senseless regions. Senseless regions are
identified as the regions which are highly impossible 2 Design of the microgripper
to manufacture. These regions are replaced by means
of flexure hinges during the post-processing stage [12]. 2.1 Topology optimization
Investigations on the effect of flexure hinge parameters
of a microgripper design are an important area where The topology optimization process has been performed by
the researchers are identifying the optimum hinge pa- means of the SIMP approach. In this approach, the mate-
rameters [13]. Flexure hinges are differentiated majorly rial properties of the domain are assumed as constant for
through its contours such as rectangular or leaf, circu- each element of the discretized design domain. The opti-
lar, elliptical, etc. [4]. These various contour profiles mization variable considered in this research work is the
are contributing uniqueness in the structural behavior element relative density. A MATLAB program for topol-
of the compliant mechanism. During handling of ogy optimization developed by Sigmund et al. [8] is mod-
microobjects, releasing is more complicated than grasp- ified according to the initial design domain and the nec-
ing it. This is due to the fact that surface forces such essary boundary conditions.
as surface tension, van der Waals forces, and electro- The initial domain is chosen according to the design re-
static forces in microobjects are significantly greater quirement of the microgripper. Figure 1 shows the initial de-
than volumetric forces like gravitational force [14]. In sign domain; input force f1in is introduced at one end, and
recent years, various approaches have been proposed to three output forces—f1out, f2out, and f3out—are demanded at
ov erc ome the su rfa ce f orc es de ve lope d in th e the other end. Forces f2out and f3out will be used to move the
microobjects during handling. Appropriate selection of microgripper jaws and the force f1out is required for moving
microgripper geometry and materials can reduce adhe- the plunger. Hence, there are four forces acting on it and cause
sion between the gripper and the object [14]. van der four displacements—u1in, u1out, u2out, and u3out—which are
Waals forces can be reduced by providing rough sur- expected in the design domain.
faces in the fingertip of the gripper or coating with Hence, the output displacement uout is computed as fo1Tu1 +
proper materials [15]. Recently, a technique known as fo2 u1 −fo3Tu1.
T
Min ðxÞ :
− uout ðxÞ ¼ − f o1 T u1 − f o2 T u1 þ f o3 T u1
N
X
¼ ðxe Þp −u1oe T k 0 u1e − u1oe T k 0 u1e þ u1oe T k 0 u1e
e¼1
V ðxÞ
Subject to : ≤ f;
V0
: KU ¼ F;
: 0 < xmin ≤ x ≤ 1
Table 2 Mechanical
properties of stainless Mechanical properties
steel type 316
Density (kg/mm3) 8.0×10−6
Poisson’s ratio 0.30
Elastic modulus (MPa) 193×103
Fig. 4 (continued)
Yield strength (MPa) 205
108 Int J Adv Manuf Technol (2017) 93:103–112
(a) (d)
20.00 15.6
Equivalent strain x104
Deformation x103(mm)
15.4
15.00
(mm/mm)
15.2
10.00 15
14.8
5.00
14.6
0.00 14.4
0 1 2 3 0 1 2 3
Web thickness (mm) Web thickness (mm)
(b) (e)
15.00
Strain Energy x105(mJ)
10.00
5.00
0.00
0 1 2 3
Web thickness (mm)
(c)
Though the flexure hinges are having more advantages in Actuation load of the microgripper is applied as displacement
microcomponents, few limitations must be considered during (10 μm) at the input port. Static structural analysis is carried
the design stage. The range of motion, the amount of axis drift, out to find the structural behavior of the microgripper for the
the ratio of off-axis stiffness to axial stiffness, and the stress given displacement. Equivalent stress, equivalent strain, de-
concentration effects are important criteria dominating the formation, strain energy, and reaction forces are calculated
precision motion of the compliant mechanism [26]. from the FE technique. Figure 4c shows the flexure hinges
Topologically optimized model boundaries are traced act as pin joints through its vector contour plot. Figure 4d–f
through AutoCAD software to develop the 2D geometric shows the distribution of von Mises stress, von Mises strain,
model. This developed CAD model as shown in Fig. 4a is and strain energy in the geometric model where the stresses,
imported into ANSYS workbench to carry out the FE strains, and strain energy are possessing higher magnitudes at
analysis. Material properties considered for this analysis the flexure hinge regions. These higher magnitudes signify
are shown in Table 2. that other than flexure hinges, the geometric regions behave
The FE model of the microgripper geometry is generated like a rigid link. The reaction force plot (Fig. 4g) indicates
with six noded triangular elements as illustrated in Fig. 4b. that the amount of input force required for obtaining the pre-
The elements at the hinge portions are refined to a finer level. scribed displacement.
Int J Adv Manuf Technol (2017) 93:103–112 109
50 16
45 14
(a) (d)
30.00 4
Equivalent Strain x105 (mm/mm)
3.5
25.00
3
(b) (e)
15.3
15.25
Deformaon x103 (mm)
15.2
15.15
15.1
15.05
15
14.95
14.9
14.85
0 1 2 3 4 5
Varying web Parameters (mm)
(c)
Fig. 6 a–e Structural behavior of the microgripper design with varying flexure hinge parameters
2.2.1 Effect of flexure hinge web thickness variation Flexure hinges with rectangular or straight beams are consid-
ered for this analysis. The numerical results for various web
The effect of flexure hinges on the structural behavior of the thicknesses are illustrated in Fig. 5a–e.
gripping mechanism is studied by varying the web thickness Figure 5a shows that the increasing web thickness increases
of the flexure hinges (t) from 0.4 to 2 mm in steps of 0.2 mm. the equivalent stresses at the flexure hinges. As the web
110 Int J Adv Manuf Technol (2017) 93:103–112
15.5
Deformaon x10-3(mm)
15
14.5
14
13.5
13
0 0.5 1 1.5 2 2.5
Rectangular flexure hinges In rectangular flexures, a con- Circular flexure hinges In this research work, another attempt
stant web thickness is considered and the web length varies has also been made to evaluate the characteristic of the
from 1 to 4 mm with an increment of 0.5 mm. The structural microgripper by introducing circular flexure hinges at the
behavior of the microgripper design is studied for all the web senseless regions. The radius (r) of the circular contour hinges
lengths using finite element analysis (FEA) simulations. is varied from 1 to 4 mm in steps of 0.5 mm. From Fig. 6, the
Figure 6a shows the equivalent stress distribution and is found circular contour flexure hinges behave similarly to the rectan-
to be linearly decreased with the increase in web length. At gular flexure hinges. On the other hand, the trend of the per-
certain locations, the percentage of variation is very less. The formance curves is similar but offset with the curves obtained
behavior of the equivalent strain and the strain energy param- from the rectangular hinge curve. Equivalent stresses, equiva-
eter decreases linearly as the web length increases. The strain lent strain, strain energy, and reaction forces developed at the
energy decreases due to the presence of stiffness of the flexure input port of the circular hinges are higher than those of the
hinges which decreased as web length increases. Deformation rectangular hinges. Deformations found in the microgripper
of the microgripper increases linearly while increasing the with circular hinges are lower than those in the microgripper
15.4 reveals that increasing the web thickness of the flexure hinges
15.2 reduces the output deformation of the microgripper. This is
Deformaon x10-3 (mm) 15 due to an increase in stiffness which restricts flexibility.
14.8 Figure 10 shows the deformation for various contours for
14.6
varying web parameter. Rectangular contours are finding
14.4
maximum deformation among other contours due to a high
14.2
flexibility value. The trend of the graph obtained through
experimental results is similar to the FEA results, and the
14
012345 error percentage was found to be less than 10 %. The results
Varying web Parameters (mm) show that up to 3.0 mm, the percentage of variation in
Circular Ellipcal Rectangular deformation is steadily increasing and after that, the
variation is very minimum, which confirms that 3.0 mm is
Fig. 10 Experimentally measured deformation for various flexure hinge best for this kinematic configuration.
parameters
Elliptical flexure hinges Elliptical flexure hinges are impor- In this work, a logical methodology is developed to design a
tant from the structural stability point of view. In this research compliant mechanism. Topology optimization is performed to
work, the ratio of the minimum and maximum radii of the obtain the conceptual design of a microgripper mechanism.
elliptical contour is taken as a constant of 1.5. Web length is The optimized structure of the MATLAB program had many
maintained as constant, and the minimum radius of the ellipti- senseless regions. These senseless regions are replaced with
cal contour is considered from 1 to 4 mm to compare the other suitable elastic pivot or flexure hinges. Appropriate flexure
types of flexure hinge contours discussed earlier. From Fig. 6, hinges for this mechanism are found by performing structural
the curves are observed to be offset to other flexure hinge analysis for various geometric parameters such as web thick-
contour curves and the structural behavior of elliptical contour ness (t) and the contour profile (straight beam, circular, and
hinges is found to be the same as that of the other types of elliptical) through FEA and experimental technique. The total
contours considered in this research work. The equivalent deformation of the microgripper with rectangular flexure
stresses and equivalent strain developed in elliptical hinges hinges is greater than that of the other types of flexure hinges.
are lower than the respective values of the rectangular and However, the stress developed at the corner is higher than that
circular hinges. Similarly, the strain energy and the reaction at the other segments of the flexure hinges. The stress distri-
forces developed in the elliptical hinges are lower than those bution in the elliptical flexure hinges is more uniform and
of the circular hinges and rectangular hinges. The deformations better compared to that of the other types of contours. Circular
of the elliptical hinges are lesser than those of the rectangular hinges are more precise compared to the other flexure hinge
hinges and higher than those of the circular hinges. This behav- contours because the axis center of rotation (axis drift or par-
ior is due to the stiffness value lying between the stiffness of the asitic motion) varies greatly in the other flexure hinge con-
rectangular and circular hinges. tours. Since the stress concentration is high at the sharp cor-
ners of the rectangular hinges, elliptical hinges are preferable.
Elliptical contour flexure hinges are suitable for this
3 Experimental verification microgripper with a plunger. The tips of the plunger are de-
signed as curved so that the minimum area of contact should
Numerically investigated flexure hinge parameters of the de- act on the microobject, a point contact. The electrostatic forces
sign are also required to be evaluated through an appropriate at the tip of the plunger are negligible.
experimental technique [27]. In this research work, the exper-
imental setup is developed with shape memory alloy (SMA)
wire actuation as shown in Fig. 7. A digital microscope is
utilized to capture the motion of the microgripper, and the
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