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Phase-locked ultrashort pulses in the rich terahertz spectral tunnelling microscopy (THz-STM)15, where local currents are
range1–18 have provided key insights into phenomena as induced by few-terahertz field transients.
diverse as quantum confinement7, first-order phase tran- Here, we use EOS of multi-terahertz pulses to directly trace the
sitions8,12, high-temperature superconductivity11 and carrier scattered electric near field with a 10 fs gate pulse, revealing the
transport in nanomaterials1,6,13–15. Ultrabroadband electro- dynamics of the dielectric function at a nanowire surface with
optic sampling of few-cycle field transients1 can even reveal 10 nm spatial resolution. Our experiment marks the first field-
novel dynamics that occur faster than a single oscillation resolved pump–probe spectroscopy on the nanoscale and introduces
cycle of light4,8,10. However, conventional terahertz spec- sub-nanoparticle spatial resolution to sub-cycle multi-terahertz
troscopy is intrinsically restricted to ensemble measurements studies. We apply our new technique to InAs nanowires, a proto-
by the diffraction limit. As a result, it measures dielectric func- typical sample for conventional terahertz spectroscopy1,6,13,14.
tions averaged over the size, structure, orientation and density Nanowires based on III–V semiconductors have been shown to
of nanoparticles, nanocrystals or nanodomains. Here, we operate as efficient terahertz sources13, active elements in one-
extend ultrabroadband time-resolved terahertz spectroscopy dimensional field-effect transistors27 or nanoscale infrared
to the sub-nanoparticle scale (10 nm) by combining sub- lasers28,29. Such nanodevices rely on a detailed knowledge of femto-
cycle, field-resolved detection (10 fs) with scattering-type second carrier dynamics and surface charge distributions. Field-
near-field scanning optical microscopy (s-NSOM)16–26. We resolved terahertz nanoscopy of InAs nanowires allows us to directly
trace the time-dependent dielectric function at the surface of resolve these ultrafast local effects for the first time and sets the stage
a single photoexcited InAs nanowire in all three spatial dimen- for future sub-cycle near-field experiments in a wide range
sions and reveal the ultrafast (<50 fs) formation of a local of nanosystems.
carrier depletion layer. Our set-up is based on state-of-the-art, ultrastable, Er:fibre laser
Combining time-resolved terahertz spectroscopy with nano- technology30, which was used to generate the pump, probe and
metre spatial resolution promises exciting possibilities for studying electro-optic gate pulses (see Methods), as summarized in Fig. 1a.
ultrafast dynamics in single nanoparticles. Few-terahertz (0.1– The transient dielectric response of an InAs nanowire was probed
10 THz, far-infrared) to multi-terahertz (10–100 THz, mid-infrared) with phase-stable, 2.5-cycle multi-terahertz pulses (Fig. 1b,c) fol-
frequencies are home to many low-energy elementary excitations in lowing photoinjection of free carriers by near-infrared pump
condensed matter1,2, including collective lattice, charge and spin pulses. The terahertz pulses were focused onto the apex of a metallic
excitations. One valuable feature of terahertz spectroscopy is atomic force microscope (AFM) tip, where they were strongly con-
electro-optic sampling (EOS), which measures the oscillating elec- fined in the optical near field. Nanoscale information was retrieved
tric field of light1–4. It provides the absolute phase and amplitude from the scattered pulses when the evanescent field extending
information of a broadband polarization response with time resol- from the tip apex was modified by the sample. To isolate the
ution faster than a single optical oscillation cycle3,4,10. However, near-field response from background scattering, the tip was
although some nanoscale information can be inferred1, the spatial operated in tapping mode and the scattered electric-field waveform
resolution of far-field terahertz spectroscopy is intrinsically E3(t) or the scattered intensity I3 was measured at the third
limited to the scale of the probing wavelength (λ = 3–3,000 µm). demodulation order of the tapping frequency18–21,23–26. The field
Ultrafast terahertz spectroscopy beyond the diffraction limit has transient E3(t) was mapped out by EOS and I3 was detected using
been a longstanding goal. It has been demonstrated that coupling a time-integrating mercury cadmium telluride (MCT) photodiode,
terahertz pulses to sharp metallic tips encodes subwavelength which was also used to perform standard Fourier transform infrared
spatial information onto the scattered fields16–26, which have been (FTIR) spectroscopy26.
detected either by intensity-resolving measurements in the multi- The particular InAs nanowire investigated is shown in the AFM
terahertz range19–26 or EOS in the few-terahertz window16–18. topography image in Fig. 1d. Near-field intensity maps of the nano-
None of these studies, however, has probed photoinduced dynamics wire (Fig. 1e) were measured as a function of the relative arrival time
in single particles with nanometre lateral dimensions. Conversely, (tpp) between the near-infrared pump and terahertz probe at the
time-integrated intensity detection has been used to measure sample. Upon photoexcitation, scattering from the central axis of
multi-terahertz pulses scattered from photoexcited graphene26 the nanowire surface is strongly enhanced (tpp = +50 fs). This
with a temporal resolution of 200 fs, limited by the duration of increased scattering is short-lived. At tpp = +150 fs the nanowire
the terahertz probe pulse. Following a different scheme, ultrafast has dimmed significantly in the near-field image. In
charging dynamics in single nanoparticles have recently been Supplementary Discussion 1 we show differential images, which
measured electronically on the 1 nm scale using terahertz scanning act as maps of the photoinduced carrier density. Line scans over a
Department of Physics, University of Regensburg, 93040 Regensburg, Germany, 2 NEST, CNR – Istituto Nanoscienze and Scuola Normale Superiore, 56127
1
Pisa, Italy; †These authors contributed equally to this work. * e-mail: rupert.huber@physik.uni-regensburg.de
Height (nm)
1 150
100
y (μm)
s-NSOM 50
0
tip
M
AF 0
Amp 1
0.0 0.5 1.0 1.5 2.0 2.5 3.0
Pump
x (μm)
Femtosecond Er:fibre oscillator
e 1
tpp = −2 ps
I3 (a.u.)
Amp 2
THz
0
DFG
FTIR
tpp = 50 fs
Amp 3
y (μm)
1
Amp 4
tpp = 150 fs
Gate
EOS MCT
0
0.0 0.5 1.0 1.5 2.0 2.5 3.0
x (μm)
b 1
c f 1
1 2π MCT
I3 (a.u.)
EOS
Phase φ (rad) 10 nm
E (a.u.)
E (a.u.)
0
0
150
Height (nm)
~
100
50
−1 0 0 0
−200 −100 0 100 200 20 30 40 50 0 100 200 300 400
EOS delay time tEOS (fs) Frequency (THz) x (nm)
Figure 1 | Set-up for single-nanowire terahertz spectroscopy. a, Schematic of the experimental set-up. A femtosecond Er:fibre oscillator seeds four separate
Er:fibre amplifiers, which are used to produce the near-infrared (1.56 µm) pump pulses (Amp 1), near-infrared (1.3 µm) electro-optic gate pulses (Amp 4)
and phase-stable multi-terahertz probe pulses (Amp 2 and Amp 3) via difference frequency generation (DFG). The terahertz transients are focused onto the
atomic force microscope (AFM) tip of an s-NSOM and the scattered electric near field is detected by electro-optic sampling (EOS) with sub-cycle temporal
resolution. Alternatively, a mercury cadmium telluride (MCT) photodiode records the time-integrated scattered intensity and enables Fourier transform
infrared (FTIR) spectroscopy (>60 fs time resolution). b, Electric field of a terahertz reference pulse focused onto the s-NSOM tip, detected by EOS.
c, Amplitude (black curve) and absolute phase (red curve) of the terahertz reference waveform. d, Topography of the InAs nanowire (on diamond) studied
in the experiments, measured by AFM. e, Ultrafast terahertz nano-movie frames of nanowire photoexcitation. Free carriers are photoinjected into the InAs
nanowire by near-infrared pump pulses and time-resolved near-field terahertz intensity images are measured as a function of pump–probe delay time tpp.
The pump fluence is 1.0 mJ cm−2 and the tapping amplitude is 130 nm. f, Scattered near-field intensity over a rough silver test sample recorded directly by
the MCT photodiode (black curve, top) and extracted by spectrally integrating and squaring electric-field waveforms measured at each x-position by EOS
(red curve, top). Bottom: corresponding topography. The black dashed line is a guide to the eye. Black arrows highlight the position of the 10-nm-wide edge.
metal test sample are shown in Fig. 1f, demonstrating 10 nm to ascertain the local dielectric function over timescales shorter
edge resolution. than an oscillation cycle of the probe pulse. An ultrashort gate
Pump–probe intensity scans (I3(tpp), Fig. 2a) were taken at pulse samples the instantaneous terahertz electric field, and an
specific positions on the nanowire, as identified in Fig. 1d. The entire effective waveform is recorded with sub-cycle time resol-
dynamics are found to be highly dependent on tip position. In ution1–4 by scanning the terahertz-gate delay (tEOS) while keeping
the centre of the nanowire (Position 1) the evolution of I3(tpp) is the pump-gate delay (tpg) fixed (Supplementary Discussion 2).
characterized by a large peak at tpp = +50 fs, followed by a decay To perform such two-time measurements on a single nanowire,
with two distinct time constants. The first decay occurs over the complete near-field terahertz waveform must be recorded at the
∼100 fs, close to the time resolution of the pump–probe intensity third harmonic of the tip tapping frequency. High sensitivity is a
measurements (∼60 fs). In contrast, at the extremities of the nano- prerequisite, as this signal corresponds to only 50 photons per tera-
wire the peak height is reduced (Positions 2 and 3). No pump–probe hertz pulse. Using optimized EOS in GaSe, we detected electric field
dynamics are present on the diamond substrate (Reference position). transients from a 10-nm-wide area on the surface of the nanowire
To investigate the origin of the observed intensity dynamics we with a noise floor of less than one coherent photon per pulse, as
extend time-resolved multi-terahertz spectroscopy to the sub-nano- shown in Fig. 2b (black curves). We can even resolve changes to
particle scale. The initial 100 fs decay of I3(tpp) is of particular inter- the transients triggered by sample photoexcitation. For tpg > 0 fs, a
est, as it is faster than typical carrier recombination or trapping phase shift emerges in the latter half of the transient and the pulse
times in semiconductors. Using EOS, we show that it is possible rings for multiple oscillation cycles, indicating a pump-induced
Using only the carrier density Nc and scattering time τ as free para-
1.0 Position 2 meters, we reproduced the time evolution of both the amplitude
(Fig. 3a,b) and the absolute phase (Fig. 3c,d) of Ẽ3 . Within this fra-
0.5 mework f0 ≈ ωp/2π, where ωp ∝ Nc is the plasma frequency of free
Reference position carriers in the nanowire. Thus, f0 directly tracks the local carrier
0 300 600 900 0 300 600 900 density following photoexcitation. The resonance position is
Pump–probe delay tpp (fs)
plotted as a function of tpg in Fig. 3e, and the carrier densities
extracted from the point-dipole model are shown in Fig. 3f. The
b two distinct time constants observed in the intensity dynamics
tpg = −5 ps also appear in the dynamics of f0 and Nc. At early times, both
quantities drop rapidly, with time constants significantly faster
than the resolution-limited decay observed in the intensity measure-
ments. In fact, the time constant of the decay of f0 extracted directly
Scattered electric field E3 (a.u.)
0.2
E3 (a.u.)
200
0.0
layer). Surprisingly, the pump–probe intensities at tpp = +50 fs
400 coincide for all tapping amplitudes (Fig. 4c), indicating that the
−0.2 carrier distribution is homogeneous immediately following photo-
600
excitation. For a comprehensive picture, we directly traced the evol-
800 ution of f0 for low (50 nm) and high (130 nm) tapping amplitudes
1,000 (Fig. 4d). The data confirm that the fast initial decay of f0 corre-
−100 0 100 200 300
sponds to the formation of the depletion layer. For sufficiently
EOS delay tEOS (fs)
small tapping amplitudes (50 nm) a built-in surface field31,32 accel-
erates photoinduced carriers out of our probing volume (estimated
Figure 2 | Dynamics of the oscillating electric near field. a, Pump–probe thickness of ∼10 nm). After 200 fs the depletion layer is fully
intensity scans (in arbitrary units (a.u.)) measured at various sites on the formed, leading to a ∼10% difference in average carrier density
nanowire (Positions 1–3, Fig. 1d) and on the diamond substrate (Reference between the probing volumes for low and high tapping amplitudes.
position). The rise time of the sharp peak is ∼60 fs. b, Terahertz electric- The carrier densities subsequently decay on approximately the same
field waveforms measured by electro-optic sampling (EOS) in the centre of timescale for low and high tapping amplitudes (2 ps) due to carrier
the nanowire (Position 1) at different pump–gate delay times (black curves). trapping into defect states. Measurements of surface depletion layer
All waveforms were recorded by scanning the terahertz-gate delay (tEOS) formation at the end of the nanowire (Position 3, Fig. 1d) are shown
with fixed pump–gate delay (tpg). The scattered waveform at negative delay in Supplementary Discussion 7, as is an estimate of the surface field.
time (tpg = −5 ps, top) is strongly altered by sample excitation, as can be In summary, we have combined ultrabroadband field-resolved
seen in the differential waveforms E3(tpg) − E3(−5 ps) (red curves). c, Two- detection of multi-terahertz pulses with scattering-type near-field
time map of the scattered electric near field at the centre of the nanowire. scanning optical microscopy (s-NSOM) to enable single-nanoparti-
Black dashed lines are guides to the eye. For all data the pump fluence is cle terahertz spectroscopy with simultaneous 10 nm spatial resol-
1.1 mJ cm−2 and the tapping amplitude is 130 nm. ution and sub-cycle, 10 fs temporal resolution. Our novel system
has been applied to probe the photoinduced dynamics in single
resonance in our frequency bandwidth. Electric-field changes caused InAs nanowires, where we have also developed femtosecond
by photoexcitation are plotted as red curves in Fig. 2b. The corres- tomography to observe ultrafast depletion layer formation. Multi-
ponding two-time electric-field plot (Fig. 2c) shows the full evolution terahertz spectroscopy of single nanoparticles with both sub-cycle
of the scattered waveform as a function of tpg , including a clear shift of time resolution and three-dimensional local field sensitivity opens
the oscillating polarization response (Fig. 2c, dashed lines) relative to up a new world for terahertz spectroscopy far below the diffraction
the driving terahertz field with increasing tpg. limit (λ3/109). Nanoscale experiments completely free of effective
Field-resolved detection of the scattered terahertz waveform medium theories can now be envisioned for virtually any physical,
provides access to both the absolute phase and amplitude in the fre- chemical and biological process appropriate for time-resolved
quency domain (Fig. 3). The resonance manifests itself as a dip in spectroscopy in the multi-terahertz range.
a b c Experiment
e
Experiment Theory
tpg 40
4π
150 fs
tpg
Phase φ (rad)
36
f0 (THz)
−5 ps
2π 32
0 fs
1,050 fs
50 fs 28
Amplitude E 3 (a.u.)
100 fs 0
27 30 33 36 39 0 300 600 900 1,200
~
Phase φ (rad)
150 fs 4.0
450 fs 3.5
2π
550 fs 3.0
1
750 fs
1,050 fs 2.5
0 1,050 fs 0
25 30 35 40 25 30 35 40 27 30 33 36 39 0 300 600 900 1,200
Frequency (THz) Frequency (THz) Frequency (THz) Pump–gate delay tpg (fs)
Figure 3 | Sub-cycle spectral dynamics. a, Amplitude spectra (in arbitrary units (a.u.)) of terahertz electric-field waveforms measured in the centre of the
nanowire (Position 1, Fig. 1d) as a function of pump–gate delay (tpg). b, Theoretical scattered amplitudes simulated with the point-dipole model and a
dielectric function given by the Drude model. See Supplementary Discussion 3 for simulation details. c, Absolute phases of scattered waveforms measured
by EOS. A phase shift of ∼2.5 rad is observed at the resonance. d, Theoretical phases extracted from the point-dipole model. Blue points in a–d mark the dip
frequencies f0 in a, and blue curves serve as guides to the eye. e, Resonance frequency f0 extracted from a as a function of tpg , plotted on a semi-logarithmic
scale. A crossover between fast (40 fs) and slow (∼4 ps) dynamics occurs at tpg = +200 fs, pointing towards two distinct physical mechanisms in the
temporal evolution of the carrier density. Error bars are estimated based on the spectral resolution and the widths of the minima. f, Carrier density Nc
extracted from the simulations in b and d plotted on a semi-logarithmic scale. The corresponding scattering rates are shown in Supplementary Discussion 4.
As in f0(tpg), a crossover is observed between two different time constants (20 fs and 2 ps) at tpg = +200 fs. Red dashed lines in e and f are exponential
decays included as guides for the eye. Pump fluence, 1.1 mJ cm−2; tapping amplitude, 130 nm.
a b 34
30
length (nm)
32
1/e decay
f0 (THz)
20
30
10
28
40 80 120 160 40 80 120 160
Tapping amplitude (nm) Tapping amplitude (nm)
c d 36
130 nm
1.0 100 nm 34
80 nm
f0 (THz)
50 nm
I3 (a.u.)
32
30
0.5
28
−100 0 100 200 300 400 500 600 −100 0 100 200 300 400 500 600
Pump–probe delay tpp (fs) Pump–probe delay tpp (fs)
Figure 4 | Femtosecond tomography. a, Decay distance (1/e) of scattered intensity as a function of tapping amplitude (TA) extracted from retraction scans
over a gold reference sample. The grey dashed line is a linear fit. We estimate the probing depth into the nanowire to be the free-space decay length divided
by the index of refraction of InAs. Error bars correspond to 95% confidence intervals. b, Resonance frequency f0 as a function of TA at tpp = +300 fs
(Position 1, Fig. 1d), reflecting changes to the carrier density as a function of probing depth. Grey dashed lines are guides to the eye. c, Pump–probe dynamics
of the scattered intensity (in arbitrary units (a.u.)) showing a strong dependence on TA. Scans are normalized to the unpumped baseline at tpp = −5 ps to
account for changes to scattering efficiency with TA. d, Resonance frequencies extracted from measured FTIR spectra as a function of time after
photoexcitation for TA = 130 nm (black points) and TA = 50 nm (red points) plotted on a semi-logarithmic graph. The resonance frequency is reduced for
low TA when a depletion layer is present. Grey dashed lines are exponential guides to the eye. Error bars in b and d are estimated as in Fig. 3e. Pump
fluence, 0.75 mJ cm−2. Similar f0 dynamics are shown in Supplementary Discussion 6 for pump fluences of 0.5 mJ cm−2 and 1.0 mJ cm−2.