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810 IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL, VOL. 67, NO.

4, APRIL 2020

Single-Crystal High-Frequency Intravascular


Ultrasound Transducer With
40-μm Axial Resolution
Xiaowen Ma and Wenwu Cao

Abstract — Intravascular ultrasound (IVUS) is one of the single-element transducer or an array transducer, with their
most useful tools available today to assist intravascular center frequency (FC) ranging from 20 to 40 MHz. Their
stenting procedures. Having higher resolution is very impor- spatial resolution is usually 70–200 μm in the axial direction
tant for helping doctors to evaluate the nature of atheroscle-
rotic plaques. The current commercial IVUS systems have and 200–400 μm in the lateral direction [5]–[7]. In order
a spatial resolution of 70–200 µm in the axial direction and to improve the accuracy of clinical diagnosis with higher
200–400 µm in the lateral direction, which are insufficient for spatial resolution, many trial designs have been explored,
accurate diagnosis. We report here a three-matching-layer such as single-crystal, composite transducers referred to as
IVUS transducer design using a 0.72Pb(Mg1/3Nb2/3 )O3 − pc-MUT [8], ultrahigh-frequency IVUS [9], optical coher-
0.28PbTiO3 single crystal, which can improve the axial
resolution to 40 µm without sacrificing the penetration ence tomography (OCT)-integrated IVUS [10], and the newly
depth. Wire phantom imaging and in vitro porcine coronary released 60-MHz composite transducer-based IVUS catheter
artery imaging show noticeably better axial resolution and (OPTICROSS HD, Boston Scientific). However, the pc-MUT
similar penetration depth compared with a commercial IVUS and ultrahigh-frequency transducer technologies introduce sig-
transducer. nificant difficulties in the fabrication process that lower the
Index Terms — Broad bandwidth, high-frequency
manufacturing yield. For example, the kerf edge straightness
transducer, intravascular ultrasound (IVUS),
three-matching-layer. of pc-MUT composite is difficult to be ensured during the deep
dry etching process. For ultrahigh-frequency (over 80 MHz)
I. I NTRODUCTION IVUS transducers, the piezocrystal needs to be lapped down
to a thickness of less than 30 μm, which is difficult to achieve
C ARDIOVASCULAR diseases are the leading cause of
human death globally. According to WHO’s report, more
than 17.9 million deaths per year occurred in 2015 due to
[11]. For IVUS-OCT dual-modality catheters, several designs
have demonstrated the feasibility of this technology, which
cardiovascular diseases alone, and the death toll is expected allows more accurate plaque characterization than using IVUS
to increase to more than 23.6 million by 2030. In the United or OCT alone [12]–[14]. However, some technical and cost
States, coronary heart disease is the leading cause (43.8%) issues still remain to be solved for this complex hybrid system,
of death among cardiovascular diseases, followed by stroke such as increasing the imaging speed and the coregistration
(16.8%), heart failure (9%), high blood pressure (9.4%), dis- accuracy between IVUS and OCT [15]. The new commercial
eases of the arteries (3.1%), and other cardiovascular diseases 60-MHz IVUS catheter is made of 1–3 piezocomposites; it
(17.9%) [1]. Atherosclerosis is the main cause of coronary is very difficult to use the low-cost dice-and-fill technology
heart disease. Effective diagnosis of atherosclerotic coronary due to the strict kerf width requirement (less than 4 μm)
disease by identifying and quantifying atherosclerotic lesions [16] at such high frequencies. Moreover, the penetration depth
has been one of the main clinical issues [2]. The most of the 60-MHz transducer is inferior to the low-frequency
effective method is intravascular ultrasound (IVUS), which has (40 MHz) transducer, so the increased spatial resolution is at
been used for many years in clinical applications to visualize the cost of shallower penetration depth. Besides the technolo-
the inner structure of coronary arteries and detect high-risk gies mentioned above, dual-frequency [17] or multi-frequency
coronary plaque characteristics [3], [4]. [18] IVUS transducers were also designed for enhancing
The currently available commercial IVUS catheters include the spatial resolution while retaining satisfactory penetration
a high-frequency ultrasound transducer, either a rotating depth. However, the accurate alignment of dual/multiple trans-
ducers is very critical for image co-registration. Ma et al.
Manuscript received July 29, 2019; accepted November 21, 2019. Date [18] tried back-to-back configuration for dual-frequency trans-
of publication November 28, 2019; date of current version March 25,
2020. This work was supported by the Shanghai Science and Tech- ducers to avoid the dimension limit issue and the image co-
nology Committee through the Shanghai Sailing Program under Grant registration problem during the catheter pulling back process,
17YF1405300. (Corresponding author: Wenwu Cao.) but greater effort is needed to ensure the parallelism of two
X. Ma is with the School of Life Science and Technology, Harbin Institute
of Technology, Harbin 150080, China. transducers.
W. Cao is with the School of Life Science and Technology, Harbin The three-matching-layer design of ultrasonic transducers is
Institute of Technology, Harbin 150080, China, and also with the Depart- beneficial for widening the bandwidth [19], which is helpful
ment of Mathematics and Materials Research Institute, The Pennsylvania
State University, University Park, PA 16802 USA ( e-mail: dzk@psu.edu).
. .
for improving the spatial resolution. However, there is usually
Digital Object Identifier 10.1109/TUFFC.2019.2956603 a significant ring-down in the pulse echo signal and notches
0885-3010 © 2019 IEEE. Personal use is permitted, but republication/redistribution requires IEEE permission.
See http://www.ieee.org/publications_standards/publications/rights/index.html for more information.
. .

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MA AND CAO: SINGLE CRYSTAL HIGH-FREQUENCY IVUS TRANSDUCER 811

TABLE I
P ROPERTIES OF T RANSDUCER M ATERIALS

Fig. 1. Schematic of the three-matching-layer transducer.

in the power spectrum, when the matching layers are not


properly designed. Manh et al. [19] tried a three-matching-
layer design, wherein they fabricated a silicone matching layer
by micromachining technology with the acoustic impedance
of the first matching layer close to 20 MRayl. Such an
acoustic impedance is inappropriate, resulting in a long 300-ns
pulse length, much longer than that of the two-matching-
layer design, although the bandwidth reached over 90%. So,
the bandwidth alone is not a good measure of the axial
resolution; we must also check the pulse length in the time
domain. In addition, the inappropriate design may also lead
to high time-sidelobes in the impulse response, causing image
degradation [20], [21].
In this investigation, we carefully designed and made a
single-crystal, high-frequency ultrasound transducer using a Fig. 2. Pulse-echo simulation result of the three-matching-layer IVUS
transducer.
three-matching-layer methodology to improve the resolution
while maintaining the short pulse length. The single-element-
transducer is embedded in a 1.5-m-long, 3.5-Fr catheter made B. Acoustic Design and Simulation
of PE material. The pulse-echo performance is evaluated. The PiezoCAD (Sonic Concepts, Inc., Bothell, WA, USA) based
wire phantom imaging and in vitro imaging through 360◦ on the KLM equivalent circuit model and Field II modeling
rotational scanning showed much improved spatial resolution software [25] are used to simulate the acoustic waveform and
than that of a similar frequency commercial transducer without the lateral resolution, respectively. The acoustic impedance
sacrificing the penetration depth. and the thickness of materials of the three-matching-layer
transducer are given in Table I.
II. M ATERIALS AND M ETHODS According to the pulse echo performance simulation shown
in Fig. 2 by PiezoCAD, the −6-dB bandwidth of the three-
A. Transducer Specification matching-layer transducer is close to 70% and the −20-dB
Our IVUS transducer is composed of three matching layers, pulse length is less than 50 nS, as listed in Table II.
one 0.72Pb(Mg1/3Nb2/3 )O3 − 0.28PbTiO3 (PMN-28%PT) A key factor for clinical imaging is the spatial resolution,
single-crystal (CTS Corporation, Bolingbrook, IL, USA) ele- which is determined by the transducer frequency and the effec-
ment, and a conductive backing. The schematic diagram of tive aperture [26]. Based on the Field II software pulse-echo
the transducer is shown in Fig. 1. The high piezoelectric field simulation, the lateral resolution (−6-dB beamwidth) of
charge constants of the PMN-28%PT single crystal without the three-matching-layer transducer at the depth of 3 mm is
grain boundaries are suitable for high-frequency applications about 210 μm, as illustrated in Fig. 3.
[22], [23].
The transducer has an effective aperture of
C. Transducer Fabrication and Characterization
0.4 mm × 0.5 mm, which has a proper and regular
size for balancing the catheter fitness, electrical impedance, We have taken into account the bandwidth and the pulse
and spatial resolution for IVUS application, and the FC is length in the design optimization, the optimized acoustic
designed to be 45 MHz, aiming to have an enhanced spatial impedance and the thickness of the three matching layers are
resolution [18], [24]. given in Table I.

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812 IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL, VOL. 67, NO. 4, APRIL 2020

TABLE II
P ULSE -E CHO S IMULATION OF THE T HREE -M ATCHING -L AYER
T RANSDUCER

Fig. 4. IVUS transducer stack profile (before Parylene C coating).

Fig. 3. Lateral resolution simulation result at 3-mm depth.

To avoid the bond-line effect on the acoustic performance


[27], the second matching and backing layers were cast and
then lapped down to the specified thickness. The detailed
fabrication process is as follows. Fig. 5. Electrical impedance plot of the IVUS transducer stack.
1) The single-crystal material with 5 mm × 5 mm aperture
is lapped down to 150 μm. For the electrodes, a 0.1-μm matching layer is lapped down to 11 μm. To minimize
Ni–Cr layer is coated on both sides followed by a gold the oxidation of silver particles, 0.1-μm Ni–Cr and
coating layer of 0.2 μm in thickness. 0.2-μm gold layers are sputtered on the surface of
2) The backing material E-Solder 3022 conductive epoxy the second matching layer.
(VonRoll Isola, New Haven, CT, USA) is cast on one 6) Before connecting to the coaxial cable, the stack is
side of the single crystal. The backing is cured overnight diced orthogonally using a Disco Dicing Saw DAD322
at 40 ◦ C in a forced convection oven. Then, the backing (Disco Corporation, Tokyo, Japan) into multiple indi-
material is lapped down to 500 μm thickness. vidual pillars having an aperture of 0.4 mm × 0.5 mm.
3) The single crystal is lapped down to the specified thick- Each layer is clearly shown in Fig. 4. The transducer
ness of 40 μm and the exposed single crystal surface electrical impedance without cable is measured using
is plated with 0.1-μm Ni–Cr and 0.2-μm gold layers as an Agilent 4294A Impedance Analyzer (Keysight Tech-
the electrode. nologies, Santa Rosa, CA, USA). Because of multiple
4) After this, the first matching layer of aluminum alloy matching layers, the impedance magnitude shows some
is bonded on the plated single crystal surface using wiggling around 30 , instead of a clear resonance and
301-2 epoxy (Epoxy Technology, Inc., Billerica, MA, antiresonance, as shown in Fig. 5.
USA) and cured overnight in a forced convection oven 7) Finally, the IVUS transducer is connected to a
at 40 ◦ C. Then, the matching layer is lapped down to 46-AWG coaxial cable (TE Connectivity, Schaffhausen,
the specified thickness of 30 μm. The thickness of the Switzerland) of 50- characteristic impedance. Then,
current stack is 570 μm and is recorded as the reference a 12-μm Parylene C layer is coated on the transducer
for the second matching layer processing. surface as the third matching layer and also serves as
5) The second matching layer is composed of 2–3-μm the protective layer. The whole transducer is embedded
silver particles (Sigma-Aldrich, Inc., St. Louis, MO, in a 1.5-m-long, 3.5-Fr catheter shown in Fig. 6.
USA) mixed with Insulcast 502 & Insulcure 9 epoxy
(American Safety Technologies, Roseland, NJ, USA)
and cured overnight in a forced convection oven at D. Setup and Testing Method
40 ◦ C. The ratio of the epoxy to the silver particle 1) Pulse Echo Setup: The acoustic waveform is obtained by
is 1:2.4 by weight and the thickness of the second the pulse-echo test method. A stainless steel block is used as

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MA AND CAO: SINGLE CRYSTAL HIGH-FREQUENCY IVUS TRANSDUCER 813

Fig. 6. Photograph of the three-matching-layer IVUS catheter.

the target and the transducer is excited by a spike pulse from


a DPR500 pulser/receiver (JSR SONIX Ultrasonics, Pittsford,
NY, USA) with 2000-Hz pulse repetition frequency, 8-μJ
energy per pulse, 10-dB gain, 5–500-MHz bandpass filters,
and 50- damping. The reflected waveform is received and
digitized by a 500-MHz oscilloscope (MDO3052, Tektronix Fig. 7. Two-wire resolution phantom test configuration of (a) axial
Corporation, Beaverton, OR, USA) with 2.5 Gs/s sampling rate resolution and (b) lateral resolution.
and 50- coupling. The echo signal data are transferred from
the oscilloscope to a computer and the waveform displayed
in the time and frequency domain plots were generated by a
customized MATLAB code. The loop sensitivity (LS), the FC,
and the fractional bandwidth (BW) are defined as follows:
 
Vreceive
LS = 20 × log10 (1)
Vtransmit
Fl + Fu
FC = (2)
2
Fu − Fl
BW = × 100% (3)
FC
where Vreceive is the peak-to-peak voltage in V of the echo
from the target and Vtransmit is the DPR500 pulser out-
put voltage. Fl and Fu are defined as lower and upper Fig. 8. Pulse-echo performance of the three-matching-layer IVUS
−6-dB frequencies, respectively, at which the magnitude of transducer.
the frequency spectrum is 50% (−6 dB) of the maximum.
2) Spatial Resolution and Imaging Test Setup: The spatial
resolution was measured and in vitro imaging was obtained by
connecting the three-matching-layer IVUS transducer to a cus-
tomized IVUS imaging platform. A DPR500 pulser/receiver
was used to drive the transducer for pulse generation and
echo detection. RF data were digitized using a 12-bit data
acquisition board (Gage Applied Technologies, Lockport, IL,
USA) with a sampling rate of 200 MHz. The 500 A-lines
were acquired during each revolution and the scanning pro-
cedure was controlled using a customized LabVIEW program
(National Instruments, Austin, TX, USA). The RF data were
saved and post-processed for the image display with a 50-dB
dynamic range.
Two tungsten wires of 10-μm diameter are used as the phan- Fig. 9. Pulse-echo performance of the commercial IVUS transducer.
tom for both axial and lateral spatial resolution measurements.
The phantom testing configuration is shown in Fig. 7. k33 mode [28], but based on the pulse-echo performance
comparison between results in Figs. 8 and 9, the measured
III. E XPERIMENTAL R ESULTS waveform of the three-matching-layer, single-crystal IVUS
Transducer performance evaluation results are given below, transducer has much broader bandwidth and comparable LS
including the acoustic waveform test, spatial resolution mea- compared with the commercial IVUS transducer.
surement, and in vitro artery imaging.
B. Spatial Resolution Measurement
A. Pulse-Echo Test Due to the broad bandwidth and short pulse length, the axial
The measured results are given in Figs. 8 and 9 and resolution of the three-matching-layer transducer reached
in Table III. Since the piezoelectric single crystal in the 40 μm. As can be seen in Fig. 10, two tungsten wires with the
transducer works in the kt plate mode instead of the k33 separation of 40 μm marked by the yellow circle can easily
rod mode, the bandwidth is not as high as that of the be distinguished. While the commercial IVUS transducer

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814 IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL, VOL. 67, NO. 4, APRIL 2020

TABLE III
C OMPARISON OF M EASURED P ULSE -E CHO P ERFORMANCE
OF THE T HREE -M ATCHING -L AYER T RANSDUCER AND
THE C OMMERCIAL T RANSDUCER

Fig. 12. Lateral resolution measurement of the three-matching-layer


transducer.

Fig. 10. Axial resolution measurement of the three-matching-layer


transducer.

Fig. 13. Lateral resolution measurement of the commercial transducer.

Fig. 14. Resolution comparison between the three-matching-layer


Fig. 11. Axial resolution measurement of the commercial transducer. transducer and the commercial transducer. (a) Axial and (b) lateral
envelops.

(Boston Scientific SR Pro2) cannot distinguish such 40-μm target is linearly scanned to determine the axial and lateral
separation, as shown in Fig. 11. resolutions with a distance of 3 mm from the transducer
According to the Field II simulation results, the lateral reso- surface. The comparison of PSF echo signals between the
lution of the three-matching-layer transducer is about 210 μm. three-matching-layer transducer and the commercial one is
So, two tungsten wires with 220-μm spacing are positioned displayed in Fig. 14(a) and (b).
at 3 mm from the transducer for lateral resolution verification. From Table IV, the axial resolution of the
Based on the comparison between Figs. 12 and 13, one can three-matching-layer transducer is only half of that of the
see that the three-matching-layer transducer can distinguish commercial transducer, which is a noticeable improvement for
the two wires, while the commercial product cannot. IVUS application, and the lateral resolution is also improved
In order to get more accurate values, the point spread slightly, which verified the Field II simulation results.
functions (PSFs) of a wire phantom are used to calculate the Fig. 15(a) shows a tissue-mimic gelatin phantom used for
axial and lateral resolutions. A 10-μm-diameter tungsten wire the penetration depth comparison test. The experimental con-

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MA AND CAO: SINGLE CRYSTAL HIGH-FREQUENCY IVUS TRANSDUCER 815

TABLE IV
S PATIAL R ESOLUTION C OMPARISON

Fig. 17. Coronary artery imaging using the three-matching-layer


transducer.

Fig. 15. (a) Tissue-mimic gelatin phantom. (b) B-mode image of the
three-matching-layer transducer. (c) B-mode image of the commercial
transducer. Fig. 18. Coronary artery imaging using the commercial IVUS transducer
(Boston Scientific SR Pro2).

vitro imaging performance evaluation of the three-matching-


layer IVUS transducer. A commercial IVUS catheter (Boston
Scientific SR Pro2) is used for the imaging quality comparison.
From the comparison between Figs. 17 and 18, one can
see that the spatial resolution of the three-matching-layer
IVUS transducer is better than that of the commercial IVUS
transducer, while the penetration depth is comparable.

IV. C ONCLUSION
A three-matching-layer transducer has been designed and
Fig. 16. Healthy porcine heart for the i n vitro imaging test.
successfully fabricated using the PMN-28%PT single crystal.
figuration is the same as the two-wire spatial resolution setup. Pulse-echo waveform measurement, spatial resolution mea-
As shown in Fig. 15(b) and (c), both transducers can detect surement, and in vitro imaging were performed using this
the signals reflected at the depth of 5 mm, which is a standard transducer. Compared with the standard commercial product,
depth of penetration requirement in IVUS applications [29]. our three-matching-layer transducer has 38% broader band-
So, the three-matching-layer IVUS transducer has a compara- width, which can produce better resolution for clinical IVUS
ble penetration but much superior spatial resolutions compared applications. By connecting to a customized IVUS imaging
with the commercial transducer. platform, the axial and lateral resolutions of our transducer
have reached 41.6 and 214.7 μm, respectively. Such high res-
olution is potentially capable of detecting a thin fibrous cap of
C. In vitro Imaging Evaluation less than 60-μm thickness. It is known that the thickness of the
The transducer-embedded catheter is inserted into the coro- fibrous cap is one of the main parameters for doctors to distin-
nary artery of a healthy porcine heart (see Fig. 16) for the in guish vulnerable plaques [30]. Clinically, 60 μm is considered

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816 IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL, VOL. 67, NO. 4, APRIL 2020

a critical thickness for doctors to determine if the patient [19] T. Manh, A.-T. T. Nguyen, F. T. Johansen, and L. Hoff, “Microfab-
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cular ultrasound images,” Physiolog. Meas., vol. 17, no. 4, pp. 259–265, medical engineering from Shanghai Jiaotong
Nov. 1996. University, Shanghai, China, in 2008, and the
[7] B. ME et al., “Assessing atherosclerotic plaque morphology: Compari- M.S. degree in electronic and communication
son of optical coherence tomography and high frequency intravascular engineering from Fudan University, Shanghai, in
ultrasound,” Heart, vol. 77, pp. 397–403, 1997. 2012. He is currently pursuing the Ph.D. degree
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[9] X. Li et al., “80-MHz Intravascular Ultrasound Transducer Using PMN- His current research interests include the
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focused transducer for intravascular ultrasound tissue imaging using the Wenwu Cao received the B.S. degree in physics
third harmonic,” Sensors, vol. 18, 2018, Art. no. 2290. from Jilin University, Changchun, China, in
[12] X. Li, J. Yin, C. Hu, Q. Zhou, K. K. Shung, and Z. Chen, “High- 1982, and the Ph.D. degree in condensed mat-
resolution Coregistered intravascular imaging with integrated ultrasound ter physics from Pennsylvania State University,
and optical coherence tomography probe,” Appl. Phys. Lett., vol. 97, State College, PA, USA, in 1987.
Sep. 2010, Art. no. 133702. He is currently a Professor of mathematics and
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vol. 16, 2011, Art. no. 060505. als Research Institute, Pennsylvania State Uni-
[14] C. V. Bourantas et al., “Hybrid intravascular imaging: Current applica- versity. He has published more than 630 articles.
tions and prospective potential in the study of coronary atherosclerosis,” He has coauthored five books with over 17000
J. Amer. College Cardiol., vol. 61, pp. 1369–1378, 2013. citations. He has conducted both theoretical and experimental research
[15] D. Maresca, S. Adams, B. Maresca, and A. F. van der Steen, “Map- in condensed matter physics, materials science, medical ultrasound,
ping intravascular ultrasound controversies in interventional cardiology and device engineering, including theories on proper- and improper-
practice,” PLoS ONE, vol. 9, no. 5, 2014, Art. no. e97215. ferroelastic phase transitions, static and dynamic properties of domains
[16] J. Yuan, S. Rhee, and X. Jiang, “60 MHz PMN-PT based 1-3 composite and domain walls in ferroelectric and ferroelastic materials, measure-
transducer for IVUS imaging,” in Proc. IEEE Int. Ultrason. Symp., ments on second and third order elastic constants, linear and nonlinear
Nov. 2008, pp. 682–685. dielectric constants and piezoelectric constants in single crystals and
[17] J. Ma et al., “Design factors of intravascular dual frequency transducers ceramics, static and dynamic behavior of piezoelectric ceramic-polymer
for super-harmonic contrast imaging and acoustic angiography,” Phys. composites, simulation design of piezoelectric sensors, transducers and
Med. Biol., vol. 60, no. 9, pp. 3441–3457, 2015. actuators for underwater acoustics and medical ultrasonic imaging,
[18] T. Ma, M. Yu, Z. Chen, C. Fei, K. K. Shung, and Q. Zhou, “Multi- and ultrasonic NDE. In recent years, his research has extended to
frequency intravascular ultrasound (IVUS) imaging,” IEEE Trans. Ultra- sonodynamic therapy to treat cancers, an emerging new noninvasive
son., Ferroelectr., Freq. Control, vol. 62, no. 1, pp. 97–107, Jan. 2015. cancer treatment modality.

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