MICSYS

SERIES 549 High-accuracy, Non-contact 2D Encoder

SPECIFICATIONS
Order No. 549-701A
FEATURES
Model MICSYS-SA1 • Simultaneous, non-contact measurement of
Detection method Laser speckle image correlation X-Y position.
Effective range ±100μm (2D) • Nano-resolution measurement.
Resolution 1 nm
Accuracy (20°C) ±100 nm • Suitable for applications such as stage
Data update period 20Hz position repeatability, strain measurement,
deflection measurement, etc.
Applications • Applies the image correlation of a speckle
1. Evaluation of stages used in manufacturing equipment and inspection systems pattern.
Measure displacement caused by
temperature, humidity, voltage
fluctuation or other factors
• No scales needed—can detect on any
Actuator
optically rough surface.
• Detector can be completely removed from
surface and replaced to continue reading.
•Drawings are available on request.
a) Evaluation of position repeatability b) Evaluation of standstill stability and drift

2. Highly accurate positioning of workpieces

Setting and removal

Actuator

3. Measurement of minute displacement

Load
Measure displacement caused by
Structure (beam) temperature or humidity fluctuations or
other factors and displacement caused during
a material attachment process, etc.

a) Measurement of minute displacement of a structure b) Measurement of minute displacement of a workpiece

DIMENSIONS
Detector Mass : 300g

Standard target Mass : 10g

.63”(16)

1.89”(48)

1.10”(28) 2-ø3.4, through hole

.39”(10) .35”(9) ø6.5Countersunk,depth3
.19”(5)

.39”(10)

1.61”(41)
.59”(15) .59”(15) .59”(15) 2-M4x0.7, depth 6 Measuring surface .79”(20) ±0.2 .15”(4)
.62”(16)
(ø5.8)
.23”
1.62”(41.2)

.24”(6.1)
.06”(1.6)
.54”(39)

.31”(8) .55”(4) ±0.1

1.18”(30)

.39”(10)±0.2

.06”(1.6)

39”(1000) 0.1
(10 ±0.2)
.39”

1.82”(46.3)

Standard target
I/F unit Mass : 1700g
8.5”(216)
7.87”(200) 8.03”(204)
2.83”(72)

3.05”(77.6)

H-18