Equipment requirement specification for

EB Welder #2

Document reference:
MXM– ES – LVDT – 201201

ISSUE : 8
DATE : 2013/10/23
AUTHOR : Andy Guo
 TABLE OF CONTENTS
FRONT PAGE 1
REVISION RECORD SHEET 2
INDEX 3
1 PURPOSE 4
2 APPLICATION SCOPE AND KEY PARAMETERS OF EBW 4-6
3 EQUIPMENT TECHNICAL SPECIFICATION AND PARAMETERS 6-21
4 SAFETY AND ENVIRONMENT 21
5 EQUIPMENT ON-SITE USING CONDITIONS 21
6 COMMISSIONING AND TRAINING 21
7 DOCUMENTATION 22
8 WARRANTY AND QUALITY ASSURANCE 22-23
9 APPENDIX:KEY TECHNICAL PARAMETERS/ASPECTS OF EBW 24-26
 Vietnam 第二台电子束焊机技术方案
Vietnam2nd EBW Technical Agreement
1. 目的 Purpose
越南 MEGGITT 第二台电子束焊机主要用于航空发动机传感器及未来延伸产
品的电子束焊接需求。
The second equipment is to be used for the welding of aero engine sensors
including speed probes,LVDTs, RTDs and other future products.
2. 系统适用范围及主要技术参数
Application Scope and Key Parameters of EBW
对 于 LVDT 产 品 ， 该 设 备 必 须 能 用 于 焊 接 定 义 于 附 件 “ MXM EBW
Specification” 4.3 和 7 章节中的所有部件，不论何种尺寸、材料及焊接端面
（轴向或径向）。并符合定义于 XSC109C 文件中的焊接接受标准。
For LVDT products, this equipment must be able to weld all parts described
in section 4.3 and 7 of appendix “MXM EBW Specification” whatever the
dimensions, materials, welding axis (radial or axial), and comply with the
welding acceptance criteria set out in Document XSC109C.
对于 Hispano-Suiza Speed Probe 产品，该设备必须能用于焊接定义于
MXM EBW 焊接参数表中的所有部件，不论何种尺寸、材料及焊接端面
（轴向或径向）。并符合定义于 MXM WI-8017 文件中的焊接接受标准。
For Hispano-Suiza Speed Probe products, this equipment must be able to
weld all parts described in MXM EBW XDS whatever the dimensions,
materials, welding axis (radial or axial), and comply with the welding
acceptance criteria set out in MXM WI-8017.

该设备主要由以下部分组成：
This Equipment comprising:
*电子枪及高压开关电源 3KW-85KV
Electron beam gun and High voltage power supplies 3KW-85KV
 *电气总控制系统 The electrical control system
*真空系统 Vacuum system
*真空焊接室 Work chamber
500mm(L)×500mm(W)×600mm(H)
* X 动枪系统 X gun motorized system
*带多功能旋转工作台+尾座，带两幅三爪卡盘。可满足抽一次真空，焊接
双头/四头 LVDT 产品的圆焊缝的要求。
Multifunctional rotary manipulator + tailstock and 2 sets of three-jaw
chuck. The manipulator can meet the duplex and quadruple round welds
welding requirement in one vacuum cycle.
*电子束 X-Y 偏转扫描系统，最大偏转角±3 °
Electron beam X-Y deflection and scanning function, the maximum
deflection angle ±3 °
*具有编程偏转扫描功能，可利用此功能焊接平面圆焊缝或其他平面曲线。
Deflection and scanning function with programming, using this feature to
weld circle seam or other surface curve
*工业电视观察系统 CCDTV viewing system
*闭环冷却水循环系统 Cooling system
*备品备件 Spare parts

3. 设备技术规格与参数
Equipment Technical Specification and Parameters
3.1 电子枪与高压电源 EB GUN AND HIGH VOLTAGE UNIT
3.1.1 电子枪 EB GUN
 三级枪，直热式，带电合轴和机械合轴功能，穿透能力≥18mm（不锈钢），焊接深宽
比
≥13：1；
Direct heating, Electrical and mechanical co-axial function, Welding Depth ≥18mm
(stainless steel), Depth: width≥13：1；
主要参数如下: Key parameters are as below:
*最大功率 Power: 3KW@85KV
*加速电压 Accelerating voltage: 0~85KV
*加速电压稳定性/重复性 Accelerating voltage stability/reproducibility: ±0.2%
*束流 Beam current: 0~35mA
*最小束流调节精度 Beam current accuracy: 0.1 mA
*工作束流稳定性/ 重复性 Beam current stability/reproducibility: ±0.5%
*示踪或小束流范围 Tracer or low beam current range: 0 to 10 mA
* Slope in 上升梯度: 可调 Adjustable
* Slope out 下降梯度: 可调 Adjustable
*设备在上升时间 1.4s，焊接时间 1.1s 的条件下，要求焊接束流在焊接时间开始时就
能达到设定值。

3.1.2 高压电源 High Voltage Unit

High voltage power supply 高压供电方式:
IGBT 高压逆变电源 IGBT high-voltage inverter power supply
加速电压 0~85KV（1KV 为调整台阶），高频开关型，频率约 20KHz，SIEMENS IGBT 控
制。
Accelerating voltage 0~85 KV (1kv step), High-frequency switching power supply type,
frequency about 20KHz, controlled by the SIEMENS IGBT.
带快速截止保护与恢复功能。With cut-off protection and rapid recovery.
当电网电压在±10% 范围内波动时，高压和束流误差在±0.2%。
When the power grid stage in ± 10% fluctuations, high-voltage and beam errors in ± 0.2%.
High voltage power supply ripple 高压供电纹波干扰: 0.5%
Power supply frequency 供电频率: 20KHZ
3.1.3 聚焦电流 Lens current
聚焦电流范围 Lens Current Range: 0 to 400mA
最小聚焦电流调节精度 Lens current accuracy: 0.1 mA
稳定性/重复性 Stabilization/ Reproducibility: ±0.1 %
聚焦系统工作范围 Focus system working range:40~450mm
焦点位置稳定性可通过电合轴进行对中性调整 The position stability of focal spot can be
adjusted by electrical centering
采用纯铁替代低碳钢制做透镜,确保聚焦稳定性 Use pure steel to make focus lens
instead of low-carbon steel to ensure the focus stability.
采用铝合金替代尼龙制做透镜骨架 Use Aluminum alloy to make the frame of focus lens
instead of Nylon.
3.1.4 电子束偏转扫描 BEAM DEFLECTION AND SCANNING
X Deflection X 偏转: ±3°
Y Deflection Y 偏转: ±3°
Bandwidth 带宽: 1KHZ
偏转线圈将由现有的漏磁偏转电子束改进成主磁场偏转电子束，该结构和法国泰克米特
的偏转线圈构造相接近，以实现双头和四头 LVDT 产品的焊接。
Improve the deflection coil from magnetic flux leakage deflection to main magnetic filed
deflection which is similar with TECHMETA deflection structure to achieve duplex and
quadruple LVDT welding.
 Program deflection and scanning 编程偏转扫描功能：
可利用此功能焊接平面圆焊缝或其他平面曲线。预先将所需焊接的曲线焊缝类型编好程
序储存在设备中，每次使用时将程序调用出来。可焊接大约 40mm*40mm 范围内任意
平面曲线。根据工件焊接试验结构，新设备在偏转程序中对一个圆进行 16 点以上模拟
和计算，保证电子束偏扫出来的圆更接近理论圆。
可以同时具备 AC（扫描控制）和 DC（偏转控制）的功能。可以产生正弦波、方波。
Deflection and scanning function with programming. To use this function to weld circle
seam or other flat surface curve, programming the weld seam of curve and storing in
equipment, and welding flat curve in 40mm*40mm area by using stored program.
According to test piece when welding trial, 2nd EBW will take simulation and calculation
above 16 points in deflection program to ensure the scanning ring close to the
theoretical round.
AC (scanning control) and DC (deflection control) functional simultaneously which can
produce wave of sine and square.

3.1.5 具备编程扫描功能，焊接如下工件：
With programmable scanning function, the following workpieces are welded:
3.1.6 枪真空系统 Gun vacuum system
采用 FB-150 分子泵机组，工作真空优于 7.5*10-3Pa
Molecular pump using FB-150 , working vacuum better than 7.5 * 10-3Pa
电子枪抽真空时间小于 8 分钟（从大气抽至 7.5×10-3Pa）。
Pumping time is less than 8 min (from the air to 7.5×10-3Pa）
电子枪带真空隔离阀，焊接室放大气时电子枪保持高真空状态不需重抽。
Electron gun with a vacuum isolation valve
分子泵为中科科仪产品，前级直联泵采用莱宝产品。
Molecular pump made by China local, pre-pumping is Leybold pumps.
3.1.7 CCD 工业电视观察系统 CCDTV viewing system
带 C.C.D 工业电视观察系统，图象放大倍数 8 倍，带十字对中和防蒸镀污染功能，带可调亮
度的 LED 光源 8X image magnification of CCDTV viewing system, with a cross center on the
screen and anti-pollution features, with variable brightness LED.
 焊接观察液晶显示系统 LCD VIEWING

3.2 焊接室及其真空系统 Chamber and vacuum system

3.2.1 焊接室 Welding chamber
尺寸：500mm(L)×500mm(W)×600mm(H) 带铰链门
材料：不锈钢，带防 X 射线观察窗，以方便焊接时观察。
真空室厚度大于 28mm 以防止 X 射线泄漏（国家安全标准）
Size: 500mm(L)×500mm(W)×600mm(H) with hinged door
Material: Stainless steel, with viewing window.
Vacuum chamber Thickness greater than 28mm to prevent leakage of X-ray
(Chinese National Safety Standard).

3.2.2 加长管 Extension tube

位于焊接室底部和右侧的加长管 Extension tube on bottom and right side: 位于焊接室
底部和右侧的加长管各 1 个，长度 400mm，直径 150mm , 2 extension tube length
400mm diameter 150mm at the bottom and right side of welding chamber.
位于焊接室左侧的加长管用于 Speed probe CFM-N1 的焊接 Extension tube on left
side for Speed probe CFM-N1 welding：延伸焊接室左侧真空管道长度至 800mm，并
使用三通管道抽真空,如下图所示 ,但该左侧的延长管需做成可拆卸的，如下图中红线
 所标示。 Extend the length of vacuum pipe on left side to 800mm and use “T” shape
for vacuum, as below picture shown. And this extension tube on left side should be
able to disassemble, shown as red line in below picture.

3.2.3 真空系统 Vacuum system

高低真空两种工作方式，由如下莱宝泵组成 The high and low level of vacuum, composed by
below Leybold pumps:
*旋片泵 A rotary vane pump Leybold SV300
*罗茨泵 A roots pump Leybold WA/WAU(H) 1001
*扩散泵 DIP8000 A diffusing Leybold DIP8000 pump
*Vacuum pipe line re-design to meet the 150s vacuum time requirement
真空管路：优化管路结构，减少弯头，选择合适的管径，除了转角阀门外，将管道由直
角更改成圆弧过渡
Ultimate Vacuum Level 极限真空度: 10-3 Pa range
Pump Down Time in a clean, dry and empty chamber to beam-on (Low 100 Pa) 抽到低真
空的时间 (低于 100 Pa): 6X100Pa ----45 seconds 真空度 到达 6X100Pa 的抽真空时间----
45 秒(不带加长管条件下)
Pump Down Time High Vacuum （High 10-2 Pa ）抽到高真空的时间(高于 10-2 Pa)：
 8.0×10-2Pa<70s 真空度 到达 8.0×10-2Pa 的抽真空时间<70s(不带加长管条件下)
Vacuum leak rate: 5*10-4Pa*M3/s at least. 真空泄漏率至少为 5*10-4Pa*M3/s
可“手动”与“自动”操作 "Manual" and "automatic" operation
3.2.4 真空测量系统 Vacuum measurement instruments
枪室及真空室采用相互独立的测量系统。
The gun and the chamber using independent measurement instruments.
采用两台 ZDF-3 数字双量程真空计。
带触点输出功能, 放气时自动关断测量管以保护测量极
采用国产真空规管
Using two sets of ZDF-3 digital dual range vacuum meters and vacuum gauges.
With contact output function; turn off the measuring gauge automatically in atmosphere
to protect the gauge from damage.
3.2.5 增加 KF25 检漏接口及前级真空截止阀
Additional KF25 vacuum leakage testing connector and valve
3.2.6 扩散泵增加油温外部温控
Additional diffusion pump oil temperature controller

3.3 运动系统 Work Handling System

包括如下部分： includes below parts:
*电动拖板：电子枪能在 X 方向电动移动用于瞄准焊接点，行程 ±75mm, 由 Panasonic 伺服
系统控制。电子枪移动重复定位精度： ±0.1 毫米；最大速度：500 毫米/分钟. 拖板采用不锈
钢制作而不用碳钢以降低磁场对电子束的干扰。
X gun moving: the gun can be moved in the X direction for aiming welding point, the stroke
is ±75mm controlled by the Panasonic SERVO system. The position repeatable accuracy of
X-gun moving is ±0.1mm ； Max. speed is ： 500mm/min. The X gun moving device is made
of stainless steel instead of carbon steel to reduce the magnetic impact.

*多功能旋转工作台+尾座
Multifunctional rotary manipulator + tailstock .
 多功能旋转工作台由一套 2 个同步三爪组合的旋转工作台组成，采用同步带，两段同步旋
转以改变工件旋转主轴角度，连续可调的伺服电机带动精密的行星齿轮减速器驱动主轴，
主轴通过同步轮带动转台和尾座三爪卡盘同步旋转，可焊最大工件直径 150mm。
2 个同步三爪距离大于 120mm，中间孔 Φ25mm，定位孔的跳动：≤±0.05mm，尾座和转台
中心高偏差：≤±0.1mm。整套工作台安装在真空室门对面壁上，旋转工装的高度要不大于
120mm.
三爪建议采用台湾鹰牌、千岛或同等级的产品，以保证精度
卡盘之间最大间隙 120mm，卡盘外径约 130mm，内孔直径约 30mm，尾座上的三爪卡盘
应
当可快速拆装，以便于焊接比较长的产品
三爪卡盘的最大载重量为：10 公斤
三爪卡盘的最高转速：5~100rpm 任选。
三爪旋转的角度精度：±0.5 度；和重复定位精度：±0.5 度。
需加配一套带顶尖尾座，尾座可快速放平和复位，便于部分产品装夹。详情请参考稍后设
计。
Additional one fixture with center tailstock to meet part of products clamping easily
requirement. Details refer to further design.

The universal rotary manipulator system is fitted at rear face of the welding chamber. It
includes :

  Two synchronized chucks hold by the central frame

    One continuously variable AC servo-motor and planetary gear box is used to

drive the shaft;
    The shaft is used to drive chuck and tailstock rotating through a belt;

      Maximum size of work piece : Dia 150 mm

       Maximum length between the two chucks : >120 mm

       The centre bore of two jaw chucks: Φ25mm

Radial and axial run out of positioning hole: ≤±0.05mm

 Height difference of the rotary headstock and tailstock: ≤±0.1mm

   The total height of universal rotary manipulator system is less than 120mm.
(refer to below picture and drawings)
 • Rotating accuracy of rotary manipulator and repeatable accuracy :
±0.5°Vertical moving repeatable accuracy: ±0.1mm

*需要 X-Y 工作台，台面尺寸为 250×250，行程为 X 轴：100，Y 轴：100。X-Y 轴工作台需

要可拆卸。XY 轴精度：+/- 0.02mm。采用 FANUC CNC 控制 XY 轴
XY table is movable, The table size is 250mm×250mm, the X axis stroke is: 100mm, and the
Y axis stroke is 100mm. Accuracy X and Y axes: +/- 0.02mm.FANUC CNC control XY
axises.

3.4 PLC 与工业触摸屏总控制系统 PLC and touch screen control system

总控制系统控制如下部份 The total control system controls the followings：
*焊接室真空过程控制 *电子枪真空过程控制
*电子枪隔离阀的控制 *电子枪电源的控制
*安全连锁控制 *自动诊断系统
*急停报警系统 *人机对话，设备的操作及焊接参数的设置和调整
*焊接参数如束流、高压、灯丝、聚焦、偏转扫描等开/关控制
*工作台运动控制 *增加远程诊断监控功能
* Vacuum process control
* EB gun vacuum process control
* Gun control isolation valve
* EB gun power supply control
* Safety interlock control
* Automatic diagnosis system
* Emergency stop alarm system
* Man-machine dialogue, equipment operation and to set and adjust the welding parameters
* Welding parameters such as beam, Accelerating voltage, filament current, focusing,
deflection scanning on / off control
* Table motion control
* Add the remote diagnostic monitoring
由可编程逻辑控制器（PLC）和工业触摸屏组成，主要实现以下功能
Composed by the PLC and touch-screen components to achieve the following functions:
主要参数的测量值或给定值均可显示在工业触摸屏上或数显表上，其中包括：
The main parameters of the measured value can be displayed on the touch screen or digital
display, including:
电子枪真空度 真空室的真空度 加速电压 焊接束流
聚焦电流 偏压 灯丝电流 束流上升时间
焊接时间 束流下降时间 移枪速度 旋转工作台速度
XY 偏转幅度 XY 扫描频率
EB gun vacuum chamber vacuum accelerating voltage beam current
Focusing current bias voltage filament current beam current rise time
welding time, beam current fall time gun moving speed rotary table speed
XY deflection scanning frequency and range
操作台增加空调 Air conditioner for Operating panel console

3.5 更换灯丝改善措施 Filament replacement improvement

3.5.1 Design a special filament replacement fixture to improve the position accuracy and
consistency of filament on Electron beam emitting surface. As below picture shown:
使用专用更换灯丝的夹具，使灯丝在更换后的位置精度进一步提高。提高电子束发射面
的位置精度。如图：
3.5.2 Shorten the length of filament holder to reduce the heating position deviation when
filament cooling installation. As below picture shown:
缩短灯丝支架长度，减低灯丝加热工作时与冷态装配时的位置误差。如图：

3.5.3 Use the dedicated beam-forming electrode for low beam current to have smaller beam
focus and reduce the welding width. As picture shown:
使用专用的小束流聚束极，使束斑更小。降低焊接宽度。如图：
3.5.4 Use the lower anode and small anode hole structure to reduce the electron Scattering
volume of beam. As below picture shown:

使用较低阳极和小阳极孔结构，降低电子束散射电子数量。如图：

3.6 备品备件 Spare parts

阴极 Cathode 100 阴极绝缘磁座 Cathode Insulation Block 1
阳极 Anode 1 光学观察镜片 Glass for CCD 1
观察窗玻璃 Glass for observation window 2 动密封圈 Moving sealing ring 2
套
其它密封圈 Other sealing ring 1套 高真空规管 High vacuum gauge 2
低真空规管 Low vacuum gauge 2 阴极装夹工具 Filament mounting tool 1

阴极装夹工具 Filament mounting tool

3.7 设备配置冷水机提供冷却水循环系统供给扩散泵冷却用，同时配置电气控制柜空调供
电控柜散热用
Closed loop re-circulating water chiller must be equipped for diffusion pump cooling.
Air conditioner must be equipped for electrical control cabinet cooling.
3.8 气动元件选择 SMC 或同等品牌，电控元件选择施耐德或同等品牌
Pneumatic components---SMC or same level brand, electrical components---Schneider
or same level brand

4 安全与环境 Safety and Environment

焊机应有充分保证设备运行和人员操作时的安全措施，其噪声、辐射、烟尘排放等应符合国
家环保法规，设备的安全性能符合我国的相关行业标准。
The machine should be sufficient to ensure equipment operation and personnel safety , the
noise, radiation, dust emissions shall comply with Chinese national environmental laws and
regulations, equipment safety performance in line with China's relevant industry standards.

5 设备现场使用条件 Equipment on-site using conditions

*电网:380 v±10% 3 相 50Hz 25KVA
*压缩空气 Compress air:0.5~0.6 Mpa
*接地电阻 earth≤3Ω 欧姆
*湿度 Humidity：≤85%；温度 temperature：5～40℃。
*设备实际占地 occupy area：3.5M*4.5M

6 验收与培训 Commissioning and Training

培训将就下面内容进行
*设备操作
*机械与真空系统设备维护
*电控系统维护
*培训时间：预验收和终验收时
*验收根据技术协议(MXM-ES-LVDT-201201)及美捷特（厦门）电子束焊接过程工艺验证计
划及验证程序(MXM-CP-LVDT-201201)进行，验收必须符合美捷特（厦门）电子束焊接过程
工艺验证的要求。美捷特（厦门）电子束焊接过程工艺验证计划及标准详见附件。
Training content will be below
* Equipment operation
* Machinery and vacuum system maintenance
* Electronic Control System Maintenance
* Training time: pre-inspection and final acceptance
* Commissioning under the technical agreement(MXM-ES-LVDT-201201) and MXM EBW
process validation plan(MXM-CP-LVDT-201201), the
 equipment must meet the requirement of MXM EBW process validation plan as attached.

7 技术文件 Documentation
*设备操作与维护手册 3套 *设备电路图与机械图 2套
*外购件说明书 1套 *设备场地布置图 2套
*装箱单与合格证 1套 *射线检验证书 1套
* Equipment operation and maintenance manuals 3 sets
* Electrical schematics and mechanical drawings, 2 sets
* Purchased parts manual 1 set
* Site layout 2 set
* Packing list and certificate 1 set
* Ray inspection certificate 1 set

8 质量保证 Warranty and Quality Assurance

整机 12 个月的质保期，质保期后乙方也负责维修，乙方承诺甲方提出服务要求后 12 小
时内响应厦门的问题并电话支持，3 天内到达现场进行技术支持和维护。质保期内维修费
用由乙方承担，质保期外维修成本费用由甲方承担。质保期内所更换部件保修期从更换
日期起重新计算。
The one year warranty period after sale, out of warranty period EBW manufacturer is also
responsible for maintenance, commitment to technical support via phone within 12hrs and
on-site service within 3days after requests raised. Warranty period of the replaced parts is
from the date of replacement.
Appendix 1:
Key technical parameters/aspects of EBW
电子束焊机技术方案关键参数/规格

No.
Key Technical Parameters/Aspects Guilin THD
序
关键技术参数/规格 桂林狮达
号

ELECTRON BEAM GUN

1 　
电子枪
ACCELERATING VOLTAGE
1.1 　
加速电压
Accelerating Voltage Range (in steps of 1 kV)
　 10 to 85 kV
加速电压范围（1KV 递增）

　 Stabilization 稳定性 ±0.2 %

　 Reproducibility 重复性 ±0.2 %
1.2 BEAM CURRENT 束流 　
　 Beam Current Range 束流范围 0 to 35 mA
Tracer or Low Beam Current Range
　 0 to 10 mA
示踪或小束流范围
　 Slope in 上升梯度 Adjustable
　 Slope out 下降梯度 Adjustable
　 Stabilization 稳定性 ±0.5 %
　 Reproducibility 重复性 ±0.5 %
Maximum Beam Power
　 3KW @ 85KV
最大电子束功率
1.3 LENS CURRENT 聚焦电流 　
Lens Current Range 聚焦电流范围 0 to 400mA
　 Stabilization 稳定性 ±0.1 %
　 Reproducibility 重复性 ±0.1 %
　 Focus Coil 聚焦线圈 Y
BEAM DEFLECTION AND SCANNING 电子束
1.4 　
偏转扫描
　 X Deflection X 偏转 ±3°
　 Y Deflection Y 偏转 ±3°
　 Bandwidth 带宽 1KHZ
　 X/Y Deflection Coil X/Y 偏转线圈 Y
Realized by scanning function with
Program deflection and scanning
　 programming(details refer to technical
编程偏转扫描功能
solution)
1.5 SPOT POSITION 下束点位置 　
Stability Spot Position in the Panel
Perpendicular to the beam axis at a focal
　 Can be adjusted by electrical centering
distance of 12"
下束点位置稳定性
1.6 GUN MOVE DISTANCE ±75mm
1.7 HIGH VOLTAGE UNIT 高压源 　

　 Oil filled tank Y

HIGH VOLTAGE POWER SUPPLY

　 IGBT high-voltage inverter power supply
高压供电方式

HIGH VOLTAGE POWER SUPPLY RIPPLE

　 　0.5%
高压供电纹波干扰

　 Power supply frequency 供电频率 20KHZ

2 VACUUM SYSTEM 真空系统 　

 VACUUM - WORK CHAMBER
2.1 　
焊接室真空
　 Ultimate Vacuum Level 极限真空度 10-5 mbar range

Pump Down Time in a clean, dry and empty

6X10-2mba
　 chamber to beam-on(Low 10-1-10-2mba) 抽到
45 seconds
低真空的时间(10-1-10-2mba)

Pump Down Time High Vacuum （High 10- 8.0X10-4mbar

　 4
mba ）抽到高真空的时间(10-4mba) 70 seconds
VACUUM - ELECTRON GUN
2.2 　
电子枪真空
　 Ultimate Vacuum Level 极限真空度 10-6 mbar range
　 Operating Vacuum Level 工作真空度 10-5 mbar range

VACUUM INSTRUMENTS Local gauge head to the EB column for high

2.3
真空计及规管 and low vacuum, and to the chamber

VACUUM COOLING SYETEM

2.4 Closed loop re-circulating water chiller
真空冷却系统
500mm “X”
500 mm “Y”
3 WORK CHAMBER 焊接室 600mm “Z”
>28mm Stainless steel chamber with hinged
door
4 EXTENSION TUBE 加长管
1 extension tube length 400mm
Extension tube on bottom or right side 位于 diameter 150mm
4.1
焊接室底部和右侧的加长管 at the bottom and right side of welding
chamber
Extension tube on left side for Speed probe
Extend the length of vacuum pipe on left side
4.2 CFM-N1 welding 位于焊接室左侧的加长管用于
to 800mm and use “T” shape for vacuum
Speed probe CFM-N1 的焊接
5 VIEWING SYSTEM 观测系统 　
5.1 CCDTV Y(8X)
5.2 Conventional Optics 显微镜目镜 　
WORK HANDLING SYSTEM
6 　
工装夹持系统
6.1 Universal rotary manipulator system Y（details refer to technical solution）
MACHINE CONTROL & HMI 设备控制与 PLC+
7 Touch screen
人机界面
8 FILAMENT 阴极 Ribbon