Thermal Conductivity Gauges

Pirani Gauge

The most widespread thermal conductivity gauge is

the Pirani gauge.

A thin filament is heated up to a constant temperature

of approx. 120°C. The gas molecules around the filament
carry energy away from the filament.

The electrical energy, which is necessary to keep the filament

on its temperature, is proportional to the quantity of molecules.

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Thermal Conductivity Gauges
Basic Diagram

heated filament (app. 120° C)

„cold“ tube
„warm“ molecules
„cold“ molecules
electrical connection

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Thermal Conductivity Gauges
Measurement range

The measurement range of thermal conductivity gauges is limited

when the mean free path becomes so short, that not more energy
can be transported (upper limit) or when the energy loss on the
electrical contacts and due to radiation is higher than energy
transported by gas molecules (lower limit).

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Thermal Conductivity Gauges
Dependence of heat loss and pressure

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Thermal Conductivity Gauges
Measurement range

The measurement of electrical power by constant filament

temperature, optimized filament design and improved
temperature compensation extend the measurement range
of thermal conductivity gauges from 1 x 10-3 to 100 mbar with
an uncertainty of app. 15%.

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Thermal Conductivity Gauges
Influence of Gas Type 1

The pressure is equivalent the

particle number density, but not
the mean free path.

“Small” molecules can carry more

energy.

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 Thermal Conductivity Gauges
Influence of Gas Type 2

N2; O2; Air

1,0E+03
Ar
Xe
1,0E+02
He
1,0E+01
True Pressure [mbar]

H2
1,0E+00

1,0E-01

1,0E-02

1,0E-03

1,0E-04
1,0E-04 1,0E-03 1,0E-02 1,0E-01 1,0E+00 1,0E+01 1,0E+02 1,0E+03
Output Signal [mbar]

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Thermal Conductivity Gauges
Characteristics

„ Specified measuring range 1 x 10-3 to 100 mbar

„ Displayed range 5x 10-4 to 1000 mbar
„ Small, sturdy, fast, cheap
„ Gas type dependent

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Thermal Conductivity Gauges
Application Comments

„ Prevent depositions, vapour and dust, because

it will influence the temperature transition from the
filament to the gas molecules and cause an increasing
measuring error
„ Prevent vibrations, shocks and strong gas flow,
because it will stress the filament and reduce the lifetime

9 / Thermal Conductivity Gauges / © Leybold Vacuum – Proprietary and Confidential