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IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 38, NO.

7, JULY 2010 1651

A Compact Repetitive Unipolar Nanosecond-Pulse


Generator for Dielectric Barrier
Discharge Application
Tao Shao, Member, IEEE, Dongdong Zhang, Yang Yu, Cheng Zhang, Jue Wang, Ping Yan, Member, IEEE,
and Yuanxiang Zhou, Member, IEEE

Abstract—Dielectric barrier discharge excitated by pulsed pulse voltage, and it is much more efficient in some applicable
power is a promising approach for producing nonthermal plasma fields. Currently, the applications are involved with ozone for-
at atmospheric pressure, but pulsed power generators vary widely mation, exhaust gas treatment, ultraviolet or vacuum ultraviolet
in performance and should be chosen according to applica-
tion requirements. In this paper, a repetitive unipolar nanosec- radiation generation, surface modification, plasma jet produc-
ond-pulse generator is constructed using resonant charging and tion, medical sterilization, and so on [4]–[12]. Therefore, a
one-stage magnetic compression circuits, where IGBT and mag- high repetition rate, high reliability, and long lifetime pulsed
netic switches are the key units, respectively. The generator is power generator is one of the key factors for various DBD
capable of providing repetitive pulses with a voltage of up to 30 kV applications.
and duration of 70 ns at a 300 Ω resistive load. Output pulse
voltage can be adjusted by varying ac input voltage or trigger Typically, pulsed-power generators can be divided into ca-
pulse-width. This compact and convenient generator has been used pacitive and inductive energy storage types, and the generator
successfully to produce stable dielectric barrier discharge. performance mainly depends on the switching units [13], [14].
Index Terms—Dielectric barrier discharge (DBD), gas dis- For the industrial application, compact all-solid-state switched
charge, homogeneous DBD, magnetic compression, nanosecond generators are convenient and desirable [13]–[19]. However,
pulse, non-thermal plasma, pulsed power, repetition rate. these generators vary widely in performance and should be cho-
sen according to load requirements [13]. For DBD applications,
I. I NTRODUCTION the generator performance is required to meet the demand of
a pulsed voltage of dozens of kilovolts, a power of hundreds
A TMOSPHERIC pressure nonthermal plasma produced
by atmospheric pressure glow discharge and dielectric
barrier discharge (DBD) has attracted significant attention in
to thousands of watts, and a repetition-rate order of kHz or
higher. In this paper, an all-solid-state repetitive nanosecond-
pulse generator with one-stage magnetic pulse compression is
the past two decades [1]–[4]. Generally, DBD generated by an
described, which can provide repetitive high-voltage pulses of
ac source of periodic sine waves has a relatively low energy
up to 30 kV, a rise time of 40 ns, and a full width at half
input because only spike-like currents imposed on the ac current
maximum of 70 ns. In addition, some test results and excitation
waveform can enter into the reacting plasma field [3]. Com-
of DBD using the generator are presented.
pared with ac DBD, more powerful plasma can be generated
by unipolar pulsed high-voltage, especially by nanosecond-

II. D ESIGN OF NANOSECOND -P ULSE G ENERATOR


Manuscript received March 22, 2010; revised April 15, 2010; accepted
April 15, 2010. Date of publication May 24, 2010; date of current version
Fig. 1 shows the schematic circuit diagram of the pulsed
July 2, 2010. This work was supported in part by the National Natural power generator, which consists of two units: the low-voltage
Science Foundation of China under Grant 50707032 and 50907068, the unit and the high-voltage unit [18]. The former achieves a
Knowledge Innovation Program of Chinese Academy of Sciences under
Grant KGCX2-YW-339, and the State Key Laboratory of Control and Simula-
resonant charging performance and IGBT provides the primary
tion of Power System and Generation Equipment in Tsinghua University under switch. The latter increases the pulse voltage and compresses
Grant SKLD09KZ05. the pulse width. The demonstrations of each unit are explained
T. Shao is with the Institute of Electrical Engineering, Chinese Academy
of Sciences, Beijing 100190, China, and also with the State Key Laboratory
in the following paragraphs. The voltages are measured by
of Control and Simulation of Power Systems and Generation Equipments, a high-voltage probe (Tektronix, P6015, 1000:1) and currents
Department of Electrical Engineering, Tsinghua University, Beijing 100084, are measured by a current transformer (Pearson, Model 4100,
China (e-mail: st@mail.iee.ac.cn).
D. Zhang, Y. Yu, C. Zhang, J. Wang, and P. Yan are with the Institute of 1 A/V). All measured signals of the measurement are recorded
Electrical Engineering, Chinese Academy of Sciences, Beijing 100190, China by a 1 GS/s, 200 MHz digital oscilloscope (Tektronix, DPO
(e-mail: pingyan@mail.iee.ac.cn). 2024). Fig. 2 shows a picture of the generator.
Y. Zhou is with State Key Laboratory of Control and Simulation of
Power Systems and Generation Equipments, Electrical Engineering Depart- First, in the low-voltage unit, capacitor C1 (2.2 mF) is
ment, Tsinghua University, Beijing 100084, China (e-mail: zhou-yx@mail. charged by a rectifier circuit from an ac variac power source,
tsinghua.edu.cn). and the primary energy storage capacitor C2 (2 μF) is charged
Color versions of one or more of the figures in this paper are available online
at http://ieeexplore.ieee.org. to about 600 V via diode D1, inductors L1 (500 μH) and L2
Digital Object Identifier 10.1109/TPS.2010.2048724 (4 μH). When the trigger signal produced by the trigger
0093-3813/$26.00 © 2010 IEEE
1652 IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 38, NO. 7, JULY 2010

Fig. 1. Schematic circuit diagram of the pulsed power generator.

Fig. 2. Picture of the pulsed power generator.

modulator reaches the IGBT switch unit, the IGBT turns on,
and then C2 discharges and a pulse voltage is fed to the primary Fig. 3. Positive and negative Uload waveforms (Uin = 250 V, Td = 8 μs).
side of pulse transformer PT (1 : 40). After C2 discharges and
IGBT turns off, the remaining energy is recycled to C2 by diode discharge in series through inductor L3 (200 μH) and the load
D2 and L2. When the voltage of C2 is less than that of C1, C1 unit. Because L3 is much larger than the saturation inductance
will continue to charge C2 via L1 and L2. In order to protect of MS, most of the discharge current passes through the load
the IGBT, an absorption circuit is used, and it consists of diode and an inductive voltage appears across the load. Accordingly,
D3, resistor R1 (12 Ω), and capacitor C3 (0.2 μF). It should the output load of a resistor with low inductance can result in
be noted that for DBD application, R1 should be a large-power a stable output pulse voltage. In addition, the high-voltage unit
resistor due to peak currents, which is attributed to the repetitive including PT and MS is located in the oil-filled box to prevent
occurrences of the start and quenching of DBD. In the case, the overheating and the repetition rate of the generator can be up
power rating of R1 is about 100 W. Furthermore, the polarity to 1 kHz.
of the unipolar pulse voltage can be changed to positive or
negative only by exchanging the wiring points “A” and “B”
III. T EST R ESULTS
in Fig. 1.
As for the high-voltage unit, the electrical energy from the Via the exchange of the wiring points “A” and “B” in
low-voltage unit is compressed and the voltage is amplified. Fig. 1, the generator can output positive or negative pulses.
One-stage magnetic pulse compression is the key circuit and For a repetition rate of 1 kHz, Fig. 3 shows single positive
composed of a saturation pulse transformer PT and a magnetic and negative voltage waveforms across the load (Uload ) at a
switch MS (20 windings). The PT is a type of non-crystalline resistive load of 300 Ω. It can be seen that the width and rise
magnetic alloy, and the MS is a kind of Mn-Zn Ferrite core [18], time of Uload are about 70 ns and 40 ns, respectively, and the
[19]. In the secondary side of PT, capacitors C4 (500 pF) and amplitude is 26 kV. Under the same conditions, the envelope
C5 (500 pF) are regarded as a parallel circuit. Therefore, C4 and mode of acquisition is also employed to characterize signal
C5 are charged in parallel to almost equal voltage via PT by the stability, and the overlap measured waveforms have shown the
primary pulse. When C5 is fully charged, PT saturates and the reproducibility of Uload and the shot-to-shot difference is minor
voltage polarity of C5 reverses. After the polarity reversion of except for the first output pulse. Fig. 4 shows the effect of
C5 is finished, MS is also saturated. Accordingly, C4 and C5 repetition rate on Uload . It is found that Uload stays around
SHAO et al.: COMPACT REPETITIVE UNIPOLAR NANOSECOND-PULSE GENERATOR 1653

Fig. 4. Dependence of Uload on repetition rate at a fixed load resistor of 300 Fig. 6. Dependence of Uload on Uin and Td (The solid symbols show the data
Ω (Uin = 250 V, Td = 8 μs). of positive pulses and the hollow symbols show the data of negative pulses).

Fig. 7. Typical DBD voltage and current waveforms (the upper is the wave-
form of no discharge, and the lower is single mode of discharge waveforms at
a repetition rate of 500 Hz).
Fig. 5. Uload waveforms at different Uin (Td = 36 μs).
It can be seen that Uload increases with increasing Uin and Td .
the constant value. The output voltages are measured after 10 s Each data point has a mean value of 3 measurements.
continuous run at single pulse and different repetition rates of
10–1000 Hz, and each Uload at a repetition rate is repeated by
IV. A PPLICATION OF D IELECTRIC BARRIER D ISCHARGE
3 measurements.
Because the voltage applied to the load results from the Differing from a resistive load, DBD is a nonlinear load, and
discharge of C4 and C5 via MS, the load determines Uload . the gas gap will be intermittently bridged. Therefore, in order to
Therefore, this type of generator based on magnetic pulse apply the pulse voltage to the DBD circuit, the DBD chamber
compression system can adjust Uload by changing the load [15], is connected in parallel with a carbon ceramic resistor with
[17]. However, in the DBD application, adjusting Uload via the low inductance R2 (300 Ω, 200 W). Typical DBD voltage and
load is troublesome. There are two methods to change Uload current waveforms are shown in Fig. 7, where the experimental
due to the use of IGBT switch in the design. On the one hand, conditions in atmospheric air in both the electrodes are covered
adjusting the output voltage of the variac can change Uload . with 10 mm × 10 mm glass sheets 2 mm thick and 2 mm
Fig. 5 shows the Uload waveforms at different variac output gap spaces. When only a single pulse is applied, DBD current
voltages (Uin ). It can be found that the rising edge of Uload is only presents a displacement current following applied pulse
consistent when Uin increases from 160 V to 250 V, and pulse voltage as shown in the upper waveforms in Fig. 7 and there
width is also amplified. On the other hand, the IGBT switch is no discharge. However, after repetitive pulses of 500 Hz are
is triggered by the trigger modulator by a 15-V pulse signal of applied, DBD occurs and the peak value of discharge current
8–36 μs width. Adjusting the trigger pulse width (Td ) can als is much larger than that of thr displacement current. Applied
change Uload , which occurs since more charge can be drained voltage and discharge current are shown in the lower waveforms
from C2. Fig. 6 shows the variation of Uload with Uin and Td . in Fig. 7. It can be seen that though the applied voltage is
1654 IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 38, NO. 7, JULY 2010

stage magnetic compression and pulse sharpening unit such


as semiconductor opening switch [15]–[17]. Further work will
concentrate on digital control of the generator and compression
of output pulse voltage, as well as on improving the reliability
and stability of long-time operation.

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SHAO et al.: COMPACT REPETITIVE UNIPOLAR NANOSECOND-PULSE GENERATOR 1655

Tao Shao (M’10) was born in Hubei, China, in Jue Wang was born in AnQing, AnHui, China, in
1977. He received the B.Sc. degree from the Wuhan 1972. He received the B.Sc. and M.Sc. degrees from
University of Hydraulic and Electrical Engineering, Xi’an Jiaotong University of Electrical Engineering,
Wuhan, China, in 2000, the M.Sc. degree in electri- Xi’an, China, in 1996 and 2002, respectively.
cal engineering from Wuhan University, Wuhan, in He is currently with the Institute of Electri-
2003, and the Ph.D. degree in electrical engineering cal Engineering, Chinese Academy of Sciences,
from the Graduate University, Chinese Academy of Beijing, China. His current research interests focus
Sciences, Beijing, China, in 2006. on pulse generator, high-voltage insulation, and di-
He is currently with the Institute of Electrical electric wall accelerator.
Engineering, Chinese Academy of Sciences. Since
2009, he has been a Senior Visiting Scholar with
the State Key Laboratory of Control and Simulation of Power Systems and
Generation Equipments, Tsinghua University, Beijing. His current research
interests focus on high-voltage insulation, gas discharge, plasma application,
and measurement.
Dr. Shao is a member of the Dielectrics and Electrical Insulation Society of
IEEE and a Senior Member of the Chinese Society of Electrical Engineering
since 2010.

Dongdong Zhang was born in Daixian, Shanxi, Ping Yan (M’04) was born in Beijing, China, in
China, in 1980. He received the B.Sc. and M.Sc. 1965. She received the B.Sc. degree from the Depart-
degrees in electrical engineering from the Dalian ment of Electrical Engineering, Tsinghua University,
University of Technology, Dalian, China, in 2002 Beijing, China, in 1988, and the Ph.D. degree from
and the Ph.D. degree in electrical engineering from Akita University, Akita, Japan, in 2000.
the Graduate University, Chinese Academy of Sci- She is currently with the Institute of Electrical
ences, Beijing, China, in 2008. Engineering, Chinese Academy of Sciences, Beijing.
He is currently with the Institute of Electrical Her main research fields are high-voltage insulation,
Engineering, Chinese Academy of Sciences. His cur- pulsed power, and biodielectrics.
rent research interests focus on pulsed power source.

Yang Yu was born in Zibo, Shandong, China, in


1985. He received the B.Sc. degree in electrical
engineering from Shandong University of Technol-
ogy, Zibo, China, in 2008. He is currently working
toward the M.Sc. degree in electrical engineering in
the Graduate University of the Chinese Academy of
Sciences, Beijing, China.
His current research interests focus on nanosecond
pulse dielectric barrier discharge. Yuanxiang Zhou (M’04) was born in Fujian
Province, China, in 1966. He received the B.E. de-
gree from Tsinghua University, Beijing, China, in
1988, the M.E. degree from the Electrical Power
Research Institute, Beijing, in 1991, and the Ph.D.
Cheng Zhang was born in Wuxi, Jiangsu, China, degree from Akita University, Akita, Japan, in 1999.
in 1982. He is currently working toward the Ph.D.
From 1999 to 2000, he did research for the Na-
degree in electrical engineering in the Graduate Uni-
tional Institute for Resources and Environment, Na-
versity of the Chinese Academy of Sciences, Beijing,
tional Institute of Advanced Industrial Science and
China. Technology, Japan, as a New Energy and Industrial
His current research interests focus on gas dis-
Technology Development Organization Fellow. He
charge and application.
is currently a Professor with Tsinghua University. His interests include organic
and inorganic dielectrics, high-voltage technology and environmental protec-
tion, electrical equipment, and on-site detection and diagnosis.
Dr. Zhou is the Deputy Secretary-General of China Electrotechnical Society.

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