102-170 Tecnai FEG200v15.

qxd 12-08-2004 2:41 PM Page 1

P R O D U C T D ATA

Tecnai™ G2 F20 Series

The versatile Nano-Analysis system

The Tecnai™ G2 F20 series are reliable and proven

(scanning) transmission electron microscopes, with
a unique and unrivalled task-oriented user interface.
The accessories that may be fitted to these systems have
largely been embedded into this user interface, meaning
that operators can utilize the full functionality of the
Understanding decreasing total microscope system through one coherent interface,
dimensions allowing all the capabilities of the system to be easily
controlled by operators of different experience levels.

High performance in TEM imaging,
STEM imaging and Nano-Analysis
Ultra clean vacuum
High spatial coherence due to an
ultra-stable FEI Schottky source
State-of-the-art, superior stability,
high-tension circuitry results in an
energy spread of less than 0.7 eV
Computerized stage with unique
eucentric specification for
- the highest resolution
tomography capabilities
- maximized tilts
- maximum stability
The field emission Tecnai micro-
scopes are a culmination of the best
electron optical designs based on
resolution performance, stability,
specimen movement, as well as mode
flexibility. The lens types that are
available for the Tecnai G F20 series
2
allow you to choose the optimal
combination of tilt/resolution and
analytical performance required for
your application (see Table 1).
The F20 series allow the high tension
to be switched between 200 kV and
any other value with one click of a
mouse, and allow imaging with an
aligned column/GIF in any mode
(TEM or STEM) at any other pre-
aligned chosen voltage. Typically in
a standard installation, the TEM/GIF
is aligned at two kV values. Upon
request, additional alignments (at
other voltages) can be carried out.
An unlimited number of user
alignments (including field emission
gun presets) can be stored on the
microscope. This allows for rapid
switching and optimization for
different users.
The PC digitally controls all
microscope functionality through
a Temserver service, which can be
remotely accessed and which can be
intergrated with special service soft-
ware for remote diagnosis. Mode
changes of the microscope system are
trivial, it is straightforward to go
from a high resolution TEM image to
a high resolution STEM image in sec-
onds, and vice versa in the same
time. Tecnai series microscopes have,
in addition, a very large selection of
application software developed by
FEI, such as automated focus recon-
struction (TrueImageTM), automated
tomography (Xplore3DTM) as well as
a Low-Dose package that sets the
standard for imaging dose-sensitive
samples. When fitted with a mono-
chromator, energy resolutions down
to 0.15 eV, previously only available
on synchrotron sources, can be
obtained routinely for fine Energy
Loss spectroscopy work.
102-170 Tecnai FEG200v15.qxd 12-08-2004 2:41 PM Page 2

OBJECTIVE LENS TYPES

P R O D U C T D ATA TWIN S-TWIN X-TWIN U-TWIN
TEM Point Res. 0.27 nm 0.24 nm 0.25 nm 0.19 nm
TEM Line Res. 0.144 nm 0.102 nm 0.102 nm 0.102 nm
Obj. Lens Cs 2.0 mm 1.2 mm 1.3 mm 0.5 mm
Essential specs Obj. Lens Cc 2.0 mm 1.2 mm 1.3 mm 1.0 mm

Electron Source Obj. Lens Focal Length 2.7 mm 1.7 mm 1.7 mm 2.2 mm
• Schottky Field emitter Information Limit 0.16 nm 0.14 nm 0.14 nm 0.12 nm
• High maximum beam current (> 100 nA) Extended Resolution (TrueImage) 0.18 nm 0.16 nm 0.16 nm 0.14 nm
Minimum Focus step 3 nm 1.8 nm 1.8 nm 0.35 nm
• High current in probe (0.5 nA or more in
Magnification range TEM 25x - 750kx 25x - 1030kx 22x - 930kx 25x - 1000kx
1 nm probe)
Probe Cs 2.0 mm 1.2 mm 1.0 mm 0.5 mm
• Small energy spread (0.7 eV or less)
Probe Cc 2.0 mm 1.2 mm 1.2 mm 1.0 mm
• High stability and long life
STEM HAADF Res. 0.24 nm 0.19 nm 0.18 nm 0.14 nm
Imaging Camera Length 50 mm - 7 m 30 mm - 4.5 m 30 mm - 4.5 m 45 mm - 4.3 m
• Patented TWIN, S-TWIN, X-TWIN and Diffraction Angle 20° 26° 24° 32°

U-TWIN objective lenses Magnification range STEM 150x - 230Mx 150x - 230Mx 150x - 230Mx 150x - 230Mx
• Unsurpassed information limit EDS: Solid Angle 0.13 sr 0.13 sr 0.3 sr 0.13 sr
Tilt Angle (double-tilt holder) 70° 40° 30° 24°
(0.12 nm achievable)
Tilt Angle: Tomography holder 70° 70° 70° n/a
• Coma-free alignment for high-resolution
objective lens centering Table 1. Selected Specifications of the F20 Series

• Rotation-free magnification and

Specimen stage • Oil-free pumping system available
diffraction series
• Fully computer-controlled, (S-TWIN, X-TWIN)
• Magnification reproducible within 1.5%
eucentric side-entry, high stability • Liner tubes pumped by additional Ion
• Embedded CCD/energy filter
CompuStage Getter Pump
STEM • Maximized tilts for any X, Y, Z, α, β • Ultra-high vacuum for contamination-free
• Bright Field and Annular Dark Field mode combination observation
• Ultra-high resolution STEM HAADF • Choice of a variety of specimen • Vacuum levels: specimen chamber
detector holders including lowbackground 2.7 x 10-5 Pa; gun 5 x 10-7 Pa
double-tilt holder • Plate camera exchange without switching
Micro-analysis
• X, Y movement 2 mm, specimen off high tension or emitter.
• Excellent EDX in-hole performance
size 3 mm
(<1% hole count) Operation / automation
• Specimen recall reproducibility ≤ 0.1
• Low system background in EDX • Advanced User Interface:
µm (x, y) and ≤ 0.1° (α tilt) attainable
(<1% spurious peaks) constantly updated and improved
• Drift < 0.5 nm/minute with a
• Embedding of EDX, PEELS and • Operating system: industry standard
standard holder
energy filter Windows® 2000
• Spectrum imaging with multiple detectors Vacuum • Remote operation available
• Fully interlocked differentially • Motorized apertures available
pumped column • Scripting software (SW) module available
0 1 2 3 3.75 • Clean vacuum system with turbo • Advanced filtering SW available
0 Location area
Transformer

HT
generator
C mains supply
molecular pump, prepumping • Ready for LAN networking
Mains

Power
200kv Min. 2 meter suply

Location SERVICE ROOM

unit
column, gun and specimen airlock • 2nd data monitor available
er
et

area HT tank
m

B D
.2

1
in
M

Min. 1.5 meter

FEI Company
Flow meter rack
er World Headquarters and
et
m Location area
A .3
M
in power unit North American Sales
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sole e
Tel: +1 503 726 7500 Tel: +31 40 27 66 768
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3

e-mail: sales@feico.com Asia-Pacific Sales

ANTECHAMBER www.feicompany.com Tel: +65 351 7671
4 Minimal floorplan www.tecnai.com Fax: +65 354 0644

©2004. We are constantly improving the performance of our products, so all 032-DS00511 08/04
specifications are subject to change without notice. The FEI logo, TrueImage,
Xplore3D, Tecnai and Tools for Nanotech are trademarks of FEI Company.
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and other countries.