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VACUUM BOOSTER PUMPS

ZRS 500

FEATURES AND BENEFITS


• Suitable for applications where high pumping speeds are • The proven shaft-seal arrangement ensures that no oil
required in the pressure region of 0.01 to 50 mbar/0.0075 enters the pumping stator, and the absence of internal
to 37.5 Torr. and external by-pass lines and valves which may corrode
• Operating at relatively low pressures makes it or stick minimizes maintenance requirements.
highly reliable. • The design of the shaft seals is optimized to ensure that
• The ZRS pumps have a high quality, oil-free pumping no lubricants can migrate into the pumping mechanism.
mechanism. This offers: This maintains booster pump performance in applications
which demand the highest standard of cleanliness.
• Quiet, vibration free operation.
In addition, this prevents the build-up of trapped particles
• Rugged and corrosion resistant. on the rotor lobes and end-faces which have very
• Advanced shaft-seal technology with no oil close tolerances.
contamination of the process chamber. • The dynamically balanced rotors and precision ground
gears contribute to the smooth, quiet operation of the
pumps, as demanded by manufacturers of advanced
technology equipment.

TECHNICAL SPECIFICATIONS ZRS 500


50 Hz 60 Hz

Displacement (swept volume) 505 m3h-1 / 300 cfm 605 m3h-1 / 335 cfm
Effective pumping speed with backing pump GVS 100/GVD 80 400 m3h-1 / 236 cfm @ 50 Hz
Effective pumping speed with backing pump GVS 150/GVD 175 440 m3h-1 / 259 cfm @ 50 Hz
Pressure differential across pump 0-110 mbar / 0-83 Torr 0-90 mbar / 0-68 Torr
Inlet connection ISO100
Outlet connection ISO63
Rotational speed 0-2900 rpm 0-3500 rpm
Operating continuous inlet pressure 0-1000 mbar / 0-760 Torr
Maximum outlet pressure 1000 mbar / 760 Torr
Motor power 2.2 kW / 3 hp
Ambient temperature range (operating) 5 to 40°C / 40 to 104°F
Maximum operating humidity 90% RH
Oil capacity (coupling cover) 1.5 litre / 1.6 qt
Oil capacity (shaft seal reservoir) 0.125 litre / 0.25 qt
Weight 106 kg / 234 lb

Motors conform to EN 60034 and are energy efficient.


APPLICATIONS
• Vacuum packaging • Low density wind tunnels
• Drying and de-gassing • Space simulation

6996 0027 00 © 2014, Atlas Copco Vacuum Solutions Division. All rights reserved. Designs and specifications are subject to change without notice or obligation. Read all safety instructions in the manual before usage.
• Vacuum metallurgy • Vacuum impregnation
• Vacuum distillation • Freeze drying
• Thin film coating

DIMENSIONS
HYDROKINETIC DRIVE / GEARBOX
SHAFT-SEAL RESERVOIR VENTED
OIL FILLER PLUG
OIL FILLER PLUG EXTERNAL
LIFTING EYE BOLT AIR 179 EVACUATION
INLET POINT
241

265
212
148
118
78

OIL SIGHT GLASS 301


12
EXTERNAL (SHAFT SEAL RESERVOIR)
EVACUATION 355 A AIR
POINT OIL SIGHT GLASS 791 OUTLET
(HYDROKINETIC DRIVE / GEAR BOX)
DIRECTION OF ROTATION
VIEW A SIGHT GLASS HYDROKINETIC DRIVE / GEARBOX
OIL DRAIN PLUG
MOUNTING HOLE 22,5°
M10x15 90° (3x) MOUNTING HOLES
M8x15 (4x) Ø 145 P.C.D
45° EQUISPACED
Ø 110 P.C.D
EQUISPACED
305
115

177
95,5

197
57,5

159
12,5

300 DN100 ISO-F


222 196 12,5
406 131
DN63 ISO-F

PERFORMANCE CURVES

Available motor voltages:


• 400 V 50 Hz • 200/380 V 50 Hz
• 460 V 60 Hz • 200/380 V 60 Hz

www.atlascopco.com/vacuum

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