Fit_Model_attempt_analysis Page 1 of 2

Response height after

Singularity Details
Intercept = 0.00142*Bias Voltage + 0.00106*ICP Power + 3.55e-5*(Bias Voltage-180)*(ICP Power-740) =
- 0.00238*Bias Voltage + 0.14286*O2 + 0.00476*(Bias Voltage-180)*(O2-9.5) = 0.00022*Bias Voltage +
0.04804*Time - 0.00022*(Bias Voltage-180)*(Time-19) = - 0.00638*RIE Power + 0.1301*O2 +
0.01276*(RIE Power-47.2)*(O2-9.5) = 0.00058*RIE Power + 0.04863*Time - 0.00058*(RIE
Power-47.2)*(Time-19) = - 0.01667*ICP Power + 1.33333*O2 + 0.03333*(ICP Power-740)*(O2-9.5) = -
0.01667*ICP Power + 0.66667*Time + 0.01667*(ICP Power-740)*(Time-19) = 0.05128*O2 +
0.02564*Time - 0.05128*(O2-9.5)*(Time-19)

Actual by Predicted Plot

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height after Actual

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height after Predicted P=0.6009 RSq=0.77
RMSE=91.734

Summary of Fit
RSquare 0.769195
RSquare Adj -0.03862
Root Mean Square Error 91.73377
Mean of Response 124.94
Observations (or Sum Wgts) 10

Analysis of Variance
Sum of
Source DF Squares Mean Square F Ratio
Model 7 56089.177 8012.74 0.9522
Error 2 16830.167 8415.08 Prob > F
C. Total 9 72919.344 0.6009

Parameter Estimates
Term Estimate Std Error t Ratio Prob>|t|
Intercept Biased 1619.467 1004.764 1.61 0.2483
Bias Voltage Biased 0.454614 7.586421 0.06 0.9577
RIE Power Biased -1.972068 24.2652 -0.08 0.9426
ICP Power Biased -0.054793 0.71817 -0.08 0.9461
O2 Biased 2.8357734 26.64234 0.11 0.9249
Time Biased -70.29939 34.23456 -2.05 0.1764
(Bias Voltage-180)*(RIE Power-47.2) -0.040579 0.028103 -1.44 0.2856
(Bias Voltage-180)*(ICP Power-740) Zeroed 0 0 . .
(Bias Voltage-180)*(O2-9.5) Zeroed 0 0 . .
(Bias Voltage-180)*(Time-19) Zeroed 0 0 . .
(RIE Power-47.2)*(ICP Power-740) -0.020371 0.033388 -0.61 0.6039
(RIE Power-47.2)*(O2-9.5) Zeroed 0 0 . .
(RIE Power-47.2)*(Time-19) Zeroed 0 0 . .
(ICP Power-740)*(O2-9.5) Zeroed 0 0 . .
(ICP Power-740)*(Time-19) Zeroed 0 0 . .
(O2-9.5)*(Time-19) Zeroed 0 0 . .
Fit_Model_attempt_analysis Page 2 of 2

Response height after

Sorted Parameter Estimates
Term Estimate Std Error t Ratio Prob>|t|
Time Biased -70.29939 34.23456 -2.05 0.1764
(Bias Voltage-180)*(RIE Power-47.2) -0.040579 0.028103 -1.44 0.2856
(RIE Power-47.2)*(ICP Power-740) -0.020371 0.033388 -0.61 0.6039
O2 Biased 2.8357734 26.64234 0.11 0.9249
RIE Power Biased -1.972068 24.2652 -0.08 0.9426
ICP Power Biased -0.054793 0.71817 -0.08 0.9461
Bias Voltage Biased 0.454614 7.586421 0.06 0.9577
(Bias Voltage-180)*(ICP Power-740) Zeroed 0 0 . .
(Bias Voltage-180)*(O2-9.5) Zeroed 0 0 . .
(Bias Voltage-180)*(Time-19) Zeroed 0 0 . .
(RIE Power-47.2)*(O2-9.5) Zeroed 0 0 . .
(RIE Power-47.2)*(Time-19) Zeroed 0 0 . .
(ICP Power-740)*(O2-9.5) Zeroed 0 0 . .
(ICP Power-740)*(Time-19) Zeroed 0 0 . .
(O2-9.5)*(Time-19) Zeroed 0 0 . .

Prediction Profiler
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Bias 47.2 740 9.5 19
Voltage RIE Power ICP Power O2 Time