Procedural Standards for we TestingNATIONAL ENVIRONMENTAL BALANCING BUREAU a Procediral Standards for fr Certified Testing of Cleanrooms © Copyright NEBB, 1988 FIRST EDITION—October, 1988 ‘This book may not be reproduced in any form without written Permission, Developed under the guidance of the ~ NEBB CLEANROOM COMMITTEE Lonnie Mosley, Chairman Kevin McCann, SEMI = TESTCO Clean Room Sciences, Inc. Spring Valley, California Phoenix, Arizona 4 Robert Cherrington Buff Ohnhaus BTB Co. T&B Services, Inc. cS Mest Valley City, Utah Albuquerque, New Mexico ° Gary Rott Clean Room Sciences, inc. Phoenix, Arizona Mike Wieder 4 ij Micro Clean Co. Riegelsville, Pennsyivania iupS OME gine. ces SRE sia Daneenichs Nees Co aamiartior . 2 ‘ett abivaio bi Vienna, Virginia inedue on 2i oii This marital was'tavelpeOGshig Kjercinecrng princi obtained framsharutacticersustrs, Wettig laboraiories and others having specialized experience. The manual is vy SUbject to ré¥ision2dg Turia orbériokes bi . which complies with this manual, will not nsessarily be acceptable if, when examined and tested, is found to have other features which ‘impair ult contemplated by these Procedures. Further ancing Burasiy absorigeroedhonenace and accepts no li contained in this manual W. David Bevirt, PE.Table of Contents NE[BB Committee Foreword Table of Contents References and Documents Introduction Section 1 Certification Requirements 14 1.2 The Cleanroom Performance Testing Supervisor 1.3. The Certified Contractor Section 2 Cleanroom Systems and Components 24 Cleanrooms 2.2 Classes of Cleanrooms 2.3 Cleanroom Airflow Section 3 Cleanroom Design 34 Cleanroom Considerations 32 Systems & Controls 33 Air Filtration 3.4 Typical Cleanroom Systems 35 Cleanroom Testing Section 4 Laboratory and Health Fa 44 Laboratory Systems 42 Laboratory Supply Air Systems: 43 Laboratory Exhaust Air Systems 44 Laboratory Fume Hoods 45 Biological Safety Cabinets 468 P83 Laboratories 47 Energy Conservation 48 Health Facilities Section 5 Instruments & Accuracy 54 Cleanroom Testing Instruments 5.2 Airflow Measuring Instruments 5.3 Rotation Measuring Instruments NEBB Cleanroom Performance Testing Certification ProgramSection 10 10.1 10.2 10.3 Section 11 11.4 12 113 Section 12 122 123 Section 13 ‘Temperature Measuring Instruments Electrical Measuring instruments Aerosol and Smoke Generators Particle Detection Equipment Optional Testing Equipment General Test Requirements and Procedures Cleanroom Test Conditions Air Systems—Preliminary TAB Procedures Field Test Equipment Validation Procedures and Operations Cleantoom Safety Programs Airflow Test Procedures Airflow Velocity and Uniformity Filter Face Velocity and Uniformity Room or Work Zone Velocity and Uniformity Airflow Parallelism Tests Temperature Uniformity and Humidity Tests HEPA Filter installation Leak Testing High Efficiency Particulate Air (HEPA) Filters Aerosol/Photometer Challenge Method Ambient Particle Aerosol Challenge Method Aerosol Total Leakage Method Particle Counts ‘Airborne Particles and New Technology Particulate Control Airbome Particle Count Recovery Test (Optional) Particle Fallout Count (Optional) Room/Enclosure Leak Testing Cleanroom Pressurization Enclosure Induction Leak Test Cleanroom Pressurization Test Lighting Testing (Optional) Mlumination Levels ‘Average Light Values Lighting Level Tests ‘Sound Level Testing (Optional) Sound Measurement Relationships Measurement Conditions ‘Sound Level Tests Glossary 6.10 bao? LLLL209 2am Saneke 10.4 10.1 10.2 102 W4 11.3 113 124 124 128 129 13.4Section 14 144 14.2 143 14.4 145 Section 15 16.1 ‘Section 16 Section 17 Section 18 Engineering Data and Equivalents HVAC Equations in US Units HVAC Equations in Metric Units Metric Units & Equivalents Sound Design Equations Lighting Conversions ‘Sample Reporting Format & Symbols Cleanroom Test Reports Index Publication List Registration Form 144 14.4 145 149 14.11 14.15 15.4 15.1 16.1 174 18.14] e A. American Conference of Governmental Hygienists PO. Box 16153 Lansing, Michigan 48901 Al ACGIH, 1988 “Industrial Ventilation, A Manual of Recommended Practice." Contains information on the design and installation of industrial ventilation systems and exhaust systems and hoods, B. American Society of Heating, Air Conditioning and Refrigerating Engineers 1791 Tlie Circle Northeast, Atlanta, Georgia 30329 B41 1987 ASHRAE Handbook “HVAC Systems and Applications" Chapter 23—"Health Facilities” Chapter 30—"Laboratories” B.2 ASHRAE Standard 52-76 “Method of Testing Air-Cleaning Devices Used in General Ventilation for Removing Particulate Matter" This standard defines unified test procedures and apparatus for evaluating filers with effi- ciencies below that of HEPA filters. C. American Society for Testing and Materials 1916 Race St. Philadelphia, Pennsylvania 19103 Ca ASTM—F 24 “Measuring and Counting Particulate Contamination on Surfaces ‘A method for size distribution analysis of particulate contamination, 5 micrometers and larger, either on, or washed from, surfaces of small electronic device components, C2 ASTM—F 25 “Standard Method for Sizing and Counting Airborne Particulate Contamination in Clean looms and Other Dust-Contralled Areas Desdigned for Electronics and Similar Applications” Procedures are given for membrane filter sampling and microscope counting in clean areas. C3 ASTM—F50 “Standard Practice for Continuous Sizing and Counting of Airborne Particles in Dust-Con- trolled Areas Using Instruments Based upon Light Scattering Principles” Methods are given for sampling, particle counting, and data evaluation using light-scattering particle counters in cleanrooms.C4 ASTM—F 51 “Sizing and Counting Particulate Contaminant in and On Clean Room Garments” ‘A membrane flter/microscope method for determining detachable particulate contaminants, 5 micrometers and larger, on cleanroom garments. C5 ASTM—F91 “'Standard Recommended Practice for Testing for Leaks in the Filters Associated with Laminar Flow Clean Rooms and Clean Werk Stations by the Use of a Condensation Nuclei Detector” Provides a method of testing the integrity of HEPA fiter installations in laminar flow cleanrooms and clean work stations. ©6 ASTM—F 328 “Standard Practice for Determining Counting and Sizing Accuracy of an Airborne Particle Counter using Near-Monodisperse Spherical Particulate Materials" Counting and sizing accuracy determination procedures are given for certifying operation of an optical airbome particle counter. ©.7 ASTM—F 649 “Standard Practice for Secondary Calibration of Airborne Particle Counter Using Comparison Procedures" Procedures are given for fine-turning the response of an airborne particle counter to match ‘Thal of a standard instrument for defining atmospheric dust, following calibration with monodisperse latex particles. C8 ASTM—F 681 “Standard Practice for Particle Count and Size Distribution Measurements in Batch Samples for Filter Evaluation Using an Optical Particle Counter" Procedures are given for sample handling, sample evaluation, and particle count and size analysis in batch samples for use.in an optical single particle counter. The method is directed at samples obtained in fier testing, but can be used for any samples D. Institute of Environmental Sciences 940 East Northwest Highway, Mount Prospect, Iinois 60056 DA 1ES-RP-CC-001-85 “Recommended Practice for HEPA Filters” Recommends basic provisions for HEPA filters for use in.clean air devices and cleanrooms. Five levels of performance and two grades of construction are included, D.2 1ES-RP-CC-002-86 “Recommended Practice for Laminar Flow Clean Air Devices" Covers definitions, procedures for evaluating performance, and major requirements of laminar flow clean air devices. Sixteen test and performance criteria are considered. D.3_ IES-RP-CC-006-84-T “Recommended Practice for Testing Clean Rooms" Describes test methods for characterizing the performance of cleanrooms. Performance tests are recommended for three types of cleanrooms at three operational phases. D.4 IES-CC-009-84 ‘Compendium of Standards, Practices, Methods and Similar Documents Relating to Contam- ination Control” Listing of documents.D5 IES-RP-CC-013-86-T “Recommended Practice for Equipment Calibration or Validation Procedures” This Recommended Practice. covers definitions and procedures for calibrating instruments used for testing clean rooms and clean air devices, and for determining intervals of calitsration. E. National Environmental Balancing Bureau 18224 Old Courthouse Rd., Vienna, VA 22180 1 “Environmental Systems Technology” ‘Aull length, hard-back “collectors type" textbook in a distinctive Victorian style incorporating HVAC system history and fundamentals, engineering principles; system design, equipment, ‘components and installation, testing and balancing, controls, acoustics, and an extensive glossary and set of engineering tables. £2 “Procedural Standards for Testing, Adjusting, and Balancing of Environmental Systems” ‘A “how-to” set of procedural standards that provide systematic methods for testing, acjust- ing, and balancing (TAB) of HVAC systems includes sections on TAB instruments and cali- bration, report forms, sample specification, and engineering tables and charts. E.3. “Procedural Standards for Measuring Sound and Vibration” The manual includes tables, charts and data on sound and vibration measuring instruments, field Inspections and procedures, forms, and a sample specification. 1st Edition —1977, E.4 “Testing, Adjusting, Balancing Manual for Technicians” This manual was written to be not only a basic educational text on testing, adjusting and balancing work, but to be a comprehensive reference manual that will be carried to every TAB project along with the necessary tools and instruments. “Sheet Metal and Air Conditioning Contractors National Association 8224 Old Courthouse Rd., Vienna, VA 22180 Fl “Energy Conservation Guidelines” Guidelines to familiarize the HVAC Contractor with the potential energy savings that can be made in new and existing buildings. Energy conservation information combined with good industry practice that an owner or systems designer should consider prior to selecting building ‘equipment and systems. 2 “Energy Recovery Equipment and Systems Air-to-Air” This comprehensive manual is an “A to Z State-of-the-Art” publication which has been developed by leading experts in the energy recovery industry 60 that anyone with a technical background can obtain a complete understanding of energy recovery equipment and sys- tems. 3 “HVAC Systems—Duct Design” ‘A newly revised, larger fundamental duct syste design manual for commercial, and light industrial heating, ventilating and air conditioning systems which has been structured to offer the designer options in design methods, materials, and constructién in order to cope with and solve the increasingly complex problems presented by energy conservation and costs. 4 “HVAC Systems—Applications” This manual, new the “HVAC Systems Library”, contains information and data needed by the designer and installer of more specialized HVAC systems used in commercial and institutional buildings.5 “HVAC Systems—Testing, Adjusting and Balancing” The manual is a “state-of-the-art” publication on air and hydronic balancing and adjusting, ‘A contractor using the methods and principles described can properly supervise the bal- ancing of any system. F6 “Indoor Air Quality” ‘A“’state-of the-art" manual on indoor air pollutants and how to solve the problems they cause. F7 “Retrofit of Building Energy Systems and Processes” ‘This comprehensive publication has been developed as a guide to the total building retrofit job and building systems with emphasis on energy conservation. It provides state-of-the-art information and options. G. United States of America, Agencies & Departments 1. Air Force Headquarters, AFCL/DAPD Wright-Patterson AFB, Ohio 45433 Ga AFM 88-4 Chapter 5 ' “Criteria for Air Force Clean Facility Designs and Construction": Prescribes criteria for the design and construction of Air Force clean facilities. It specifies the real property standards for meeting the requirements of Air Force T.O. 00-25-203, G.2 TO. 00-25-203 “Contamination Control of Aerospace Facilities, U.S. Air Force” This document specifies cleanroom design, operating, and test procedures. It also includes recommended cleanliness levels for typical operations. 2. Department of Energy, Nuclear Standards Management Center, Pak Ridge National Laboratory, Bldg. 9204.1, Room 321, M/S10, PO. Box ¥, Oak Ridge, Tennessee 37830 G3 NE: F3-41 “In-Place Testing of HEPA Filter Systems by the Singlé-Particle, Particle-Size Spectrometer Method" Procedures are described for in-space testing of single and tandem HEPA filter installations with DOP challenge and an optical particle counter with sensitivity to 0.1 micrometer. 3, Marshall Space Flight Center, NASA ~ Marshall Space Flight Center, Alabama 35812 G4 NHB 5340.2 “NASA Standards for Clean Rooms and Work Stations for the Microbially Controlled Environ- ment” Establishes standard classes of air conditions (both total particles and viable particles) within cleanrooms and clean work stations for the microbially controlled environment. 4, National Technical Information Service U.S, Department of Commerce, 5285 Port Royal Road, Springfield, Virginia 22161 G.5_ NTISINASA SP-5045, “Contamination Controt Principles" Broad overview and guidelines to those designing or planning cleanroom facilitiesG6 NTISINASA SP-5074 “Clean Room Technology" Considerable information on history, need, nature, and type of cleanrooms with details of cleanroom environment and operation, : G7 _NTISINASA SP-5076 “Contamination Control Handbook" Extensive detail on contaminants and their control and cleaning methods. ‘The Naval Publications and Forms Center ‘5801 Tabor Ave., Philadelphia, Pennsylvania 19120 G.8 NPFC/MIL-HDBK-406 ‘Contamination Control Technology—Cleaning Materials for Precision Precleaning and Use in Clean Rooms and Clean Work Stations” Extensive information on selection and use of cleaning materials developed by DOD. G9 NPFC/MIL-HDBK-407 “Contamination Control Tachnology—Precision Cieaning Methods and Procedures” Extensive information on cleaning methods used by the military services for gross and Precision cleaning of work processed under controlled environment conditions, G10 NPFC/MIL-STD-45622 “Calibration Systems Requirements" Prescribes requirements for establishment and maintenance of a calibration system used to ccontrol the accuracy of measuring and trest equipment G1 NPFC/MIL-F-0051068 “Military Specification: Fitter, Particulate, High-Etficiency, Fire Resistant” Covers design, construction, and performance of HEPA filters in six sizes and seven types. Gi2_ NPFC/MIL-F-51079 “Military Specification: Filter Medium, Fire-Resistant, High-Efficiency" Provides requirements and test methods for determining compliance for one grade of HEPA filter medium, . G43 NPFC/MIL-F-51477 “Military Specification: Filters, Particulate, High-Efficiency, Fire Resistant, Biological Use” Covers general requirements for particulate fitters for use in aif cleaning or ar fitration systems involving chemical, carcinogenic, radiogenic, or hazardous biological particles. an “Federal Standard 2090" ‘Document provides standardization of definitions and air cleanliness classes for cleanrooms and clean work stations,