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VHX-7000 Series
3
Digital Microscope History 2nd Generation
1990 - Introduction of 3D
Observation
VH-6000
VH-6300
VH-7000
VH-8000
VHX-100
1st Generation
VHX-200
New design eliminates
eye pieces
Adopted by over
20,000 companies worldwide
VHX microscopes make observation simple and easy. KEYENCE has developed our new model to
meet the needs of our customers. With the goal of developing the ideal digital microscope, we will
continue to pursue the advancement of microscope technology.
4
5th Generation
NEW VHX-7000N
4th Generation
Introduction of advanced
focus and lighting techniques
VHX-500
VHX-600
VHX-900
VHX-1000
VHX-2000
3rd Generation
VHX-5000
Introduction of
high dynamic range
(16-bit colour gradation) VHX-6000
5
VIEW
CAPTURE
MEASURE
6
Observation with an optimal balance of Large depth of field Hand-held observation
brightness and clarity
Images can be saved and shared easily Easily save and recall images Automatically generate reports
shared.
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Optical Shadow Effect Mode makes subtle contours stand out and enhances uneven surfaces and stains with the push of a button.
8
High-speed
auto-focus stage
Focus view
camera
Motorised
eucentric stage
The focus view feature paired with the motorised stage make focusing intuitive, and magnification can be changed by operating the handheld
controller.
With a 4K CMOS image sensor and a newly-developed optical system, this VHX Series combines a large depth of field with high resolution to deliver
a new level of observation.
9
Optical Shadow Effect Mode
Conventional
Microscopes
10
Optical
Shadow
Effect
Mode
Fracture surface (50x)
Illumination
Illumination
*The image above is an illustration showing the Optical Shadow Effect Mode principle.
11
Controls are now even
simpler and more convenient
to operate
High-speed
auto-focus stage
Focus view
camera
Motorised
eucentric stage
12
Advanced Operability
Even first-time users can perform observation perfectly on the desired area, with no stress at all.
13
Lighting and Observation Functions
Optimal lighting patterns are captured automatically
Multi-lighting
14
PCB flux (150x)
By capturing multiple images with different lighting, an image free of glare can
Ring removal
be obtained. It has historically been difficult to remove the ring-shaped
Eliminating glare reflections that can appear on the target surface. With the VHX-7000N, these
rings can be removed at the click of a button.
IC (1500x)
15
Depth Composition and Image Stitching
Always view your target fully in focus
Real-time composition
interface
Depth compositing
A fully-focused image is created
16
BGA (100x)
Up to 50,000 pixels
High-magnification
observation range is now
800 times larger
Up to 50,000 pixels
When you press the Image Stitching button, 1536
the image is automatically stitched together. pixels
Stitching can be performed quickly over
large areas, and can be used to create a
high resolution image of a wide area. 2048 pixels
Image stitching can handle up to
50 thousand pixels vertically by
50 thousand pixels horizontally.
3D image stitching
By capturing multiple images while the
stage is moving, 3D data capture and
stitching can be performed
simultaneously. This makes it possible
to view and analyse the overall
contours of the target. Surface
irregularities can also be measured.
17
Applications: Observation
Microneedles (200x)
Switch (30x)
Data can be recorded at Don't just save the image: save the capture settings
Saving data
Report function
You can install Excel on your VHX system
just like on a PC. By setting up templates in
advance, you can easily convert observed
Network
images and measurement results into
reports.
Other factories Overseas offices
Failure Report
Customer Information
Failure
Custom
Compan
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Report
Date of Issue:
9/27/2018 3:38:03 PM
Cus
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Re port
Settings used at the time of image capture can also be recorded for easy reproduction at a later date
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20
Even the measurement
Automatic recognition
magnification is
automatically recorded Lens connection
Lens type
One-push calibration
Traceability
Certification is available for our dedicated
National Institute
calibration scale, providing confidence in JCSS Coordinate Calibration
of Advanced Reference
accredited measuring scale
your operation. Industrial Science scale
manufacturer device OP-88592
and Technology
21
Measurement Functions
Measure as you view
2D measurement
22
Easy measurement of
everything from 3D
contours to surface
roughness
3D measurement
Roughness analysis
23
Measurement Functions
Full automation ensures that even novice users can perform complex measurement correctly
Contamination analysis
compliant with
ISO 16232 and VDA 19
Contamination analysis
24
One-click
Particle analysis Starch (400x) Crystal grain size Metal structure (800x) Maximum area measurement Probe mark (1000x)
measurement
25
Applications: Measurement
0°
15° 0°
30° 15°
30°
45°
45°
45° 45°
60°
Easy to adjust
Cable holder
60°
Eliminates vibration by
securing cable. Also
reduces abrasion and wear.
75°
90°
90°
0°
120°
High-stability frame
Vibration-proof rubber
90°
60°
LED-transmitted illumination is provided as standard, The built-in rotation sensor identifies the rotation The handheld controller makes it easy to move the
enabling clear observation throughout the range from position from the stage. Even when rotated, the stage stage on the XY axes and on the Z axis.
low to high magnification. moves in the direction shown on the screen.
28
100 × 100 mm large In response to customer
requests, this system is now
XYZ motorised stage compatible with several
XY measurement system
compliant with traceability
standards
VH-M100E
Measurement module
delivering even greater
This XY measurement system
ease of use
ensures highly-reliable
measurements based on a
VHX-H3M3
traceability system underpinned by
Wide range of measurements Real-time screen display
Japan's national standards. Display unit Includes distance between Displays XYZ measurement
Additionally, the manual stage can OP-84483 2 points, radius, angle and results on the monitor in
be moved to extend the other measurements. real time.
This is useful when the
measurement range beyond the travel range cannot be
maximum 100 × 100 mm field of viewed on the main unit
view. screen.
Backlighting unit
OP-84484
Clearly projects the
edges of the target.
29
A new Fully-Integrated Head offering
the highest picture quality
in the VHX Series
Newly-developed
imaging engine
NEO REMAX
4K CMOS
image sensor
High-NA (0.9)
HR lens
Motorised revolver
30
4K Fully-Integrated Head
3000 pixels
and low noise. This mobilizes the full image-capture
1600 pixels
6the times
accuracy
4K display
power of the 4K monitor and High resolution lens,
Approx. 12.22 megapixels
1200 pixels
100x to 500x
Combining resolution high enough to support 4K
image quality with a large depth of field, these new
dedicated lenses for digital microscopes push the
envelope of optical performance.
magnification
Observation can be carried out automatically at
magnifications from 20x to 6000x without changing
the lens. Magnification-switching can also be carried
out quickly using either the mouse or the handheld
controller.
High
magnification
31
Lens KEYENCE optical lenses are continuously evolving
VHX-7100 Fully-Integrated camera and High resolution lens delivering the highest image
quality at magnifications from 20 to 6000x
With four dedicated objective lenses and built-in lighting (motorised aperture), this unit combines high (NA 0.9)
resolution with a large depth of field and is designed for even more outstanding operability.
Image capture
H (Horizontal) 15.24 10.16 7.62 6.10 3.81 3.05 H (Horizontal) 3.05 2.03 1.52 1.02 0.76 0.61
range (mm)
range (mm)
V (Vertical) 11.4 7.6 5.7 4.56 2.85 2.28 V (Vertical) 2.28 1.52 1.14 0.76 0.57 0.46
D (Diagonal) 19.05 12.7 9.53 7.62 4.76 3.81 D (Diagonal) 3.81 2.54 1.91 1.27 0.95 0.76
Observation distance (mm) 30 (22.9*1) Observation distance (mm) 24
VHX-E500 VHX-E2500
High-Resolution, High- High-Resolution, Highest-
Magnification Objective Lens 500 2500 Magnification Objective Lens 2500 6000
VHX-E500 VHX-E2500
Model VHX-E500 Model VHX-E2500
Magnification 500x 700x 1000x 1500x 2000x 2500x Magnification 2500x 4000x 5000x 6000x
Image capture
Image capture
H (Horizontal) 0.61 0.44 0.31 0.20 0.16 0.12 H (Horizontal) 0.12 0.08 0.06 0.05
range (mm)
range (mm)
V (Vertical) 0.46 0.33 0.23 0.15 0.11 0.09 V (Vertical) 0.09 0.06 0.05 0.04
D (Diagonal) 0.76 0.54 0.38 0.25 0.19 0.15 D (Diagonal) 0.15 0.1 0.08 0.06
Observation distance (mm) 6 Observation distance (mm) 1
using various optical adapters. *1 Magnification with a 1/2-inch CCD camera, on a 15-inch monitor
*2 Because of the flared shape, coaxial illumination undergoes circular polarisation.
32
High-Performance, Low-Range Zoom Lens VH-Z00R/Z00T 0.1 50
Image capture
H (Horizontal) 3200 640 320 61 30.5 10.2 6.1
With a magnification range from 0.1x to 50x,
range (mm)
V (Vertical) 2400 480 240 45.5 22.8 7.6 4.6
this lens allows observation of anything from
an entire-target image to enlarged detail. D (Diagonal) 4000 800 400 76.2 38.1 12.7 7.6
Observation Approx. Approx. Approx.
Featuring click-style magnification 95
distance (mm) 7700 1500 720
adjustment, an aperture mechanism and an
*Magnification with a 1/2-inch CCD camera, on a 15-inch monitor
observation distance upwards of 95 mm, this
macro lens delivers high performance and
excellent operability.
Delivers high-resolution observation at Magnification*1 20x 30x 50x 100x 150x 200x
Image capture
magnifications of 20x to 200x, making it ideal H (Horizontal) 15.24 10.16 6.10 3.05 2.03 1.52
range (mm)
for general-purpose use. V (Vertical) 11.40 7.60 4.56 2.28 1.52 1.14
D (Diagonal) 19.05 12.70 7.62 3.81 2.54 1.91
Depth of field (mm)*2 34 15.5 6.0 1.6 0.74 0.44
Observation distance (mm) 25.5
condition, colouring and other factors can be Observation distance (mm) 6.5
Bright-field Dark-field
TRIPLE R-compliant lenses are fitted with automatic lens- and magnification-recognition units. 33
Base
Model
Advanced Microscope Functions in an Easy-to-Use Package.
Base model
VHX-970FN
Functions for viewing, capturing, and
measuring are easy-to-use so that even novice
users can operate the VHX-970FN.
Provides 20 times the depth-of-field compared with optical microscopes. Tilt and adjust the position of the lens and camera to easily view an object
from any angle.
View, Capture, and Measure with just One Device Depth Composition and 3D Display Functions
By integrating the optics, camera, electronics, and software; users can Capture fully-focused images, even for targets with uneven surfaces.
perform complete inspection and analysis with a single device.
34
Free-angle observation system
VH-S30F/S30B
Easy Adjustment
0°
Easy X-Y stage movement and rotation.
Our eucentric design ensures that the target 15° 0°
15°
stays centred in the field of view even if the lens 30°
unit is tilted or rotated.
45°
45° 30°
Easy to adjust
Quick Setup Marks
60° 45°
45°
The lens setting positions, which vary between
lenses, are indicated by guide marks. This
enables quick lens changes. 60°
Cable Holder
75°
Eliminates vibration transmitted from the cable.
Also secures cable, decreasing abrasion and 90°
wear on cable. 90°
Vibration-Proof Rubber
magnifications. High-stability
frame
High-Stability Frame
90°
35
System Configuration Diagram: VHX Series System Lineup HR Lens
High-Resolution
20x Low-Magnification lens
to 100x VHX-E20
High-Resolution
100x Medium-Magnification lens
to 500x VHX-E100
High-Resolution
500x High-Magnification lens
to 2500x VHX-E500
High-Resolution
VHX-7100
2500x Highest-Magnification lens
to 6000x
VHX-E2500
RZ Lens*1
Dual-Objective
20x zoom lens
VHX-7000N to 2000x VH-ZST
High-Resolution
VHX-A70*11 500x zoom lens
Bayonet
standard to 5000x VH-Z500R/
attachment Z500T
OP-51478/
OP-66871*6
VHX-7020 *9 Dual-light high-magnification
250x zoom lens
to 2500x VH-Z250R/Z250T
VHX-7020 *9
100x Wide-range zoom lens
to 1000x VH-Z100R/Z100T
Lens joint
VHX-J00T/
J20T/J20UT/
J50T/J100T/
Universal zoom lens
J250T/J500T/
VHX-A97F*12 100x (100x to 1000x)
JZST
to 1000x VH-Z100UR/Z100UT
Joint holder*10
OP-88338
Ultra-small high-performance
20x zoom lens
to 200x VH-Z20R/Z20T
VHX-970FN
High-performance low-range
0.1x zoom lens
to 50x VH-Z00R/Z00T
Long-Range,
50x high-performance zoom lens
to 500x VH-Z50L/Z50T
Fiberscope Lens*4
VH-B55 VH-B100
VH-BA
Bayonet
C-mount VH-B18 VH-B27 VH-B40
attachment
OP-51479
Camera lens
(C-mount)
Fibrescope*5
VH-F
*7
36
❚ Stages
Multi-diffuse adapter
OP-35469
*1 VH-Z00T/Z20T/Z20UT/Z50T/Z100UT/Z100T/Z250T/Z500T/ZST TRIPLE R-compliant lenses are fitted with automatic lens-magnification recognition units and connection recognition mounts. *2 For coaxial lighting,
OP-72407 and OP-72406 are required. *3 Included as standard with the VH-Z20UR/Z20UT. *4 The real-bore cable (OP-87201) is required. *5 The dedicated light-guide attachment (OP-88332) is required. *6 When the
VH-Z00R or Z20R is used, the OP-66871 is required. *7 A C-mount adapter suitable for the microscope is required. *8 for the VH-Z100R, use the OP-72407. For the VH-Z100T/VH-Z100UR/VH-Z100UT, use the OP-87800.
*9 The lighting unit (OP-88329) is required for mounting the VH-ZST, VH-Z500T, VH-Z250T or VH-Z100T on the VHX-7020. *10 When mounting the RZ lens on the VHX-S750E/770E, the OP-88338 (joint holder) is required.
*11 Models may vary according to the instrument language. VHX-A70 (Japanese) / VHX-A70E (English) / VHX-A70D (German) / VHX-A70C (Simplified Chinese) / VHX-A70W (Traditional Chinese) / VHX-A70F (French) /
VHX-A70K (Korean) / VHX-A70M (Spanish) / VHX-A70T (Thai) / VHX-A70I (Italian) / VHX-A70Z (Czech) / VHX-A70H (Hungarian) / VHX-A70P (Polish). *12 Models may vary according to the instrument language.
VHX-A97F (Japanese) / VHX-A97FE (English) / VHX-A97FD (German) / VHX-A97FC (Simplified Chinese) / VHX-A97FW (Traditional Chinese) / VHX-A97FF (French) / VHX-A97FK ( Korean) / VHX-A97FM (Spanish).
37
Specifications
38
❚ Other Functions
Model VHX-7000N VHX-970FN
Auto-focus function Yes Yes
Focus view function Yes No
Lighting switch function
Observation Yes (Full, Partial, Lateral, Dark-field, Bright-field, Mixed Lighting) Yes (Full, Partial, Lateral, Dark-field, Bright-field, Mixed Lighting)
(uneven surface enhancement)
functions
Multi-lighting function Yes No
Optical Shadow Effect Mode function Yes No
Camera-shake correcting function Yes Yes
Full-screen display function Yes Yes
Display Split-screen function Functions for tiling screens horizontally, vertically, into quarters, into ninths, and interlocking display Functions for tiling screens horizontally, vertically, into quarters, into ninths, and interlocking display
function Real-time digital zoom 1.0x to 10.0x 1.0x to 10.0x
Comment display function Yes Yes
Glare removal function Yes Yes
Image
Ring-reflection removal function Yes No
enhancement
HDR function Yes No
function
Fine-Shot function Yes Yes
2D image stitching Yes No
Stitching
3D image stitching Yes No
function
Navigation function Yes No
Real-time depth composition function Yes No
Quick composition & 3D function Yes Yes
High-quality depth composition Yes Yes
3D function
3D display function Yes Yes
3D shape correction function Yes (Slope/Sphere/Cylinder) Yes (Slope/Sphere/Cylinder)
3D comparison function Yes (Combination/Comparison/Difference display mode) Yes (Combination/Comparison/Difference display mode)
Report output (Excel) Yes Yes
Capture condition reproduction function Yes Yes
Recording Timer capture function Yes Yes
function
Video recording/ Max speed: 50 FPS; *Video size when using VHX-7020 Max. speed: 30 FPS; Video size
playback function (2880 × 2160, 2048 × 1536, 800 × 600, 640 × 480) (2048 × 1536, 800 × 600, 640 × 480)
Distance, angle, radius, area etc. Yes, various Yes, various
Automatic edge detection Yes Yes
Scale display Yes, various Yes, various
Automatic count, area measurement function Yes (length/area can be measured using brightness/colour extraction) Yes (length/area can be measured using brightness/colour extraction)
Automatic area measurement Yes No
Grain size analysis Yes No
Contamination analysis Yes No
Measuring One-click measurement Yes No
functions Auto-measurement teaching Yes No
Auto measurement Yes No
Automatic lens/zoom recognition
Yes Yes
function (Triple 'R)
Auto-calibration Yes (numerical input not required) Yes (numerical input not required)
One push calibration function Yes (scale position adjustment not required) No
39
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The information in this publication is based on KEYENCE’s internal research/evaluation at the time of release and is subject to change without notice. 01WW-2072
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