CHAPTER | INTEGRATED CIRCt 7.4 INTRODUCTION An integrated circuit consists of a single-crystal chip of silicon, containing both active and passive elements and their interconnections. ‘This chapter, concerned with the basic study of integrated circuit, covers the following topics: Basic Monolithic Integrated Circuit Fabrication process of monolithic circuit e Epitaxial growth © Oxidation process: wet oxidation, dry oxidation © Masking and etching © Diffusion of impurities e Ion implantation © Thin film deposition: evaporation, sputtering, pn junction diode fabrication Monolithic integrated transistor and discrete pl: chemical vapour deposition janar epitaxial transistor 7.2 BASIC MONOLITHIC INTEGRATED CIRCUIT led because it is formed on a ‘The monolithic integrated circuit is so call sformation of a circuit into its single silicon chip. Figure 7.1 shows the trans monolithic form. (@)Sing inte (08 ‘at eatin nae asown Fe 72 2 Dine Pgrs 12 (he wa oe with CREED rts pn ne mrt. 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