Chart for Averages Chart for Standard

Deviations Chart for Ranges

Factors for Factors for
Observations Factors for
Control Limits
in Center Line Factors for Control Limits Center Line Factors for Control Limits
Sample, n 4
Factors A As 1c B3 B4 Bs B6 d2 1/d2 d3 D2 D D
1.880 2.659 0.7979 1.2533 3.267
APPENDIX 3.267 0 2.606
1.128 0.8865 0.853 0 3.686 0
for 1.023 1.954 0.8862 1.1284 0 2.568 1.693 0.5907
2.276 0.888 0 4.358 0 2.574
0.729 1.628 0.9213 1.0854 2.266 2. 088 2.059 0.4857 0.880 0 4.698 2.282
0.2
0.688
0.728
0.775
0.750
0.802
0.832
0.866 0.577 427 0.9400 1.0638 0 2.089 0 1.964 2.326 0.4299 0.864 0 4.918 0 2.114
0.905
0.949
1.000
1.061
1.134
1.500
707
1.225
1.342
1.732
121 0.483 1.287 0.9515 1.0510 0.030 1.970 0.029 1.874 2.534 0.3946 0.848 0 5.078 0 2.004
Constructing
0.419 1.924
1.182 0.9594 1.0423 0.118 1.882 0.113 1.806 2.704 0.3698 0.833 0.204 5.204 0.076
V1
373 1.099 0.9650 1.0363 0.185 1.815 0.179 1.751 .847 0.3512 0.820 0.388 5.306 0.136 1.864
9 0.337 1.032 0.9693 1.0317 0.239 1.761 0.232 1.707 2.970 0.3367 O.808 0.547 5.393 0.184 1.816
10 0.308 0.975 0.9727 I.0281 0.284 1.716 0.276 1.669 3.078 0.3249 0.797 0.687 5.469 0.223 1.777
11 Variables
0.285 0.927 0.9754 1.0252 0.321 1.679 0.313 1.637 3.173 0.3152 0.787 0.811 5.535 0.256 1.744
12 0.266 0.886 0.9776 1.0229 0.354 1.646 0.346 1.610 3.258 0.3069 0.778 0.922 5.594 0.283 1.717
13 0.249 0.850 0.9794 1.0210 0.382 1.618 0.374 1.585 3.336 0.2998 0.770 1.025 5.647 0.307 1.693
14 0.235 0.817Control0.9810 1.0194 0.406 1.594 0.399 1.563 3.407 0.2935 0.763 1.118 5.696 0.328 1.672
15 0.223 0.789 0.9823 1.0180 0.428 1.572 0.421 1.544 3.472 0.2880 0.756 1.203 5.741 0.347 1.653
0.212 0.763 0.9835 1.0168 0.448 1.552 0.440 .526 3.532 0.2831 0.750 1.282 5.782 0.363 1.637
16
0.203 0.739 0.9845
Charts 1.0157 0.466 1.534 0.458 1.511 3.588 0.2787 0.744 1.356 5.820 0.378 1.622
17
0.9854 1.0148 0.482 1.518 0.475 1.496 3.640 0.2747 0.739 1.424 5.856 0.391 1.608
18 0.194 0.718
0.9862 1.0140 0.497 1.503 0.490 1.483 .689 0.2711 0.734 1.487 5.891 0.403 1.597
19 0.187 0.698
0.9869 1.0133 0.510 1.490 0.504 1.470 3.735 0.2677 0.729 1.549 5.921 0.415 1.585
20 0.671 0.180 0.680
0.173 0.663 0.9876 1.0126 0.523 1.477 0.516 1.459 3.778 0.2647 0.724 1.605 5.951 0.425 1.575
21 0.655
0.9882 1.0119 0.534 1.466 0.528 1.448 3.819 0.2618 0.720 1.659 5.979 0.434 .566
22 0.640 0.167 0.647
0.633 0.9887 1.0114 0.545 1455 0.539 1.438 3.858 0.2592 0.716 1.710 6.006 0.443 1.557
23 0.626 0.162
0.9892 1.0109 0.555 1.445 0.549 1.429 3.895 0.2567 0.712 1.759 6.031 0.451 1.548
24 0.612 0.157 0.619
0.9896 1.0105 0.565 1.435 0.559 1.420 3.931 0.2544 0.708 1.806 6.056 0.459 1.541
25 0.600 0.153 0.606

For n > 25.

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f XAMPLE 6. 1
A hard-bake process (see Section 5.3. l) is used in conjunction
with photolithography in semiconductor manufacturing. We
wish to establish statistical control of the flow width of the
resist in this process using .x and R charts. Twenty-five samples,
each of size five wafers, have been taken when we think the
process is in control. The interval of time between samples or
subgroups is one hour. The flow width measurement data (in
microns) from these samples are shown in Table 6.1 .
( continued)
,---
,,,.
_...--

charts
. bles contro1
Chapter 6 • Varas
232
• TAB LE 6 · 1 (microns) for the Bal!·Bake J>roceSS
Flow Width Measurements

Sample 2 3 4
Wafers

5 Xi
---
R;
Number 1 1.6914 1.5119 0.3679
I.6744 1.4573
1.3235 1.4128 1.6109 1.4951 0.2517
1 t.6075 1.4666
1.4314 1.3592 I.5674 1.4817 0.139()
2 1.4324
1.4871 1.4932
3 1.4284 1.5507 1.4712 0.3521
1.3841 I.2831
4 1.5028 1.6352 1.4882
1.4363 I.6441 0.3706
1.2735 1.5265
5 1.5604 1.4198 1.4492 0.2674
1.3574 I.3281
6 1.5955 1.5451
I.4177 1.5144 1.5805 0.4189
1.6274 1.5064 1.8366
7 1.5519 1.5343 0.2447
1.4303 1.6637 1.6067
8 1.4190
1.5355 1.5176 I.3688 1.5076 0.3589
9 l.3884 1.7277
1.5089 1.4627 1.5220 1.5134 0.2658
10 1.4039 1.6697
I.7667 1.4278 1.5928 1.4181 1.5242 0.3509
11 1.4158
12 1.5821 1.3355 1.5777 1.3908 1.7559 1.5284 0.4204
13 1.2856 1.4106 1.4447 1.6398 l.1928 1.3947 0.4470
14 1.4951 1.4036 1.5893 1.6458 1.4969 1.5261 0.2422
15 1.3589 1.2863 1.5996 l .2497 1.5471 l.4083 0.3499
16 1.5747 1.5301 1.5171 l. 1839 1.8662 1.5344 0.6823
17 1.3680 1.7269 1.3957 1.5014 1.4449 1.4874 0.3589
18 1.4163 1.3864 1.3057 1.6210 1.5573 1.4573 0.3153
19 1.5796 1.4185 1.6541 1.5116 1.7247 1.5777 0.3062
20 1.7106 1.4412 1.2361 1.3820 1.7601 1.5060 0.5240
21 1.4371 1.5051 1.3485 1.5670 1.4880 1.469 1 0.2185
22 1.4738 1.5936 1.6583 1.4973 1.4720 1.5390 0.1863
23 1.5917 1.4333 1.5551 1.5295 1.6866 1.5592 0.2533
24 1.6399 1.5243 1.5705 1.5563 1.5530 1.5688 0.1156
25 1.5797 1.3663 1.6240 1.3732 1.6887 1.5264 0.3224
-· - - --- , _____ - -
Ix; = 37.6400 LRj = 8.1302
=
X = 1.5056 R = 0.32521

S OLUTION _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ __

When setting up x and R control charts, it is best to begin

with the R chart. Because the control limits on the x chart I that .D3
•ts Vfor (he R
For samples of n = 5 we find from Append'IX Table
depend on the process variability, unless process variability
is in control, these limits will not have much meaning. Using
°
-- 0 and D 4 = 2.114.' Therefore, the contrllil1ll
chart are, using equation (6.5),
is in Table 6.1, we find that the center line for the R
the data
chart

25
= 0.32521(0) =0
LCL = RD3
68749
LR; UCL= RD4 = 0.32521(2.114) = O. ·nfig.
R. == i =25
J ::: ~
25
::: 0.32521 Th . ntr0I charts I (he t
6 2e R chart IS shown in Fig. 6.2b. Both co vcL for 'Jllal
· Were constructed by Minitab. Note that tbe rnore deC'
· 'tab uses
· reported as 0.6876, because Mint
chart is
.,,..,--------- ----

6.2 Control Charts for x and R 233

in the calculation than we did. When the 25 sample and
places are plotted on the R chart in Fig. 6.2b there is no indi-
ranges
. of an out-of-contro l cond 1t1on.
". LCL = '.f - A2 .R = 1.5056 - (0.577)(0.32521) = 1.31795
cauon . . . . .. . .
Since the R chart md1cates th~t process vanab1hty 1s m con- The x chart is shown in Fig. 6.2a. When the preliminary sam-
we may now construct the x chart. The center line is
}
tr0, ple averages are plotted on this chart, no indication of an out-
25 of-control condition is observed. Therefore, since both the i
L X; and R charts exhibit control, we would conclude that the
l = i= l = 37 .6400 =1.5056 process is in control at the stated levels and adopt the trial
25 25
control limits for use in phase II, where monitoring of future
To find the control limits on the x chart, we use A2 = 0.577 production is of interest.
from Appendix Table VI for samples of size n = 5 and equa-
tion (6.4) to find
UCL= '.t + A2 R = 1.5056 + (0.577)(0.32521) = 1.69325

1.7 L. ' UCL = 1.693

' '
l5 1.6 ~ I
~

t '-5[ ~
i --.... 1
L
l~ Mean = 1.506
! -........::=:;_-=.=:;::----J-
E -
· ~ ~-+-- A-- A
- -'---/ /
Y
(./) 1.4 !
i

1.3 :- ~ - - -~ - - - - -·- . LCL= 1.318

Subgroup 0 5 10 15 20 25
(a)

0 .7 - - - - - - - - - - ---11--- - - - ~ UCL = 0 .6876

'2) o.6 r1
~ 0.5 t-
t~~ 1- 0.4 L.
0.3 ' --J' --">..-
7 - ~ - -r-'"c-:r-- ~ 'rr"'
- - ~ [I R- = 0 .3 2 52
CO 0 .2 1- I
0.1 t--
r.n
0 .0 ' 1... . ... , - -
------ - - -
- ~
- - · ·- - ---=====- -7
..... . .... - .. ... .
I

LCL = 0

(b)

■ FIGURE 6 . 2 x and R charts (from Minitab) for flow width in the hard-bake
process.