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Unit 3
H1 HP, 9/25/2021
Fabrication Steps
N-type Si Substrate with required crystal
orientation and resistivity
Wet/Dry Oxidation
Application of resist
Metallization
SiO2 Removal for Contacts
Creation
P-n Junction
Resist Removal Complete View
after processes
10/18/2021 Dr. P. K. Tiwari 6
p-n Junction Current Voltage Characteristics
Forward Bias: Current increases rapidly
with applied voltage. The applied voltage
under forward bias is usually less than 1V
Reverse Bias:
Current is very small and does not
increase significantly with bias voltage
KE
Potential Energy (PE) of an Electron
EC
PE −𝑞𝑉 = 𝐸 − 𝐸
As:
1 𝑑𝐸
𝐸=
𝑞 𝑑𝑥
𝑘𝑇
Now, we know that 𝐷 =
𝑞
𝜇
( ) 𝑑𝑝 𝑝 𝑑𝐸 𝑑𝐸
= −
𝑑𝑥 𝑘𝑇 𝑑𝑥 𝑑𝑥
10/18/2021 Dr. P. K. Tiwari 10
p-n Junction under Thermal Equilibrium
Thus, the total hole current density For zero net current, the Fermi Level has
to be constant.
1 𝑑𝐸 𝑑𝑝
𝐽 = 𝑞𝜇 𝑝 − 𝑘𝑇𝜇
𝑞 𝑑𝑥 𝑑𝑥
Built in Potential
1 𝑑𝐸 𝑝 𝑑𝐸 𝑑𝐸 𝑉
𝐽 = 𝑞𝜇 𝑝 − 𝑘𝑇𝜇 −
𝑞 𝑑𝑥 𝑘𝑇 𝑑𝑥 𝑑𝑥
𝑑𝐸
𝐽 = 𝑝𝜇
𝑑𝑥
Similarly, the total electron current density The total electrostatic potential
difference between p-side and n-side
𝐽 = 𝑛𝜇
𝑑𝐸 neutral regions at thermal equilibrium
𝑑𝑥 is called the built in potential
10/18/2021 Dr. P. K. Tiwari 11
Built in Potential
1
𝜓 =− 𝐸 −𝐸
𝑞 𝑘𝑇 𝑁 𝑘𝑇 𝑁
Similarly, 𝑉 = 𝑙𝑛 + 𝑙𝑛
( ) 𝑞 𝑛 𝑞 𝑛
𝑘𝑇 𝑁
Using 𝜓 = 𝑙𝑛
𝑞 𝑛
𝑑 𝜓 𝑞𝑁
=−
𝑑𝑥 𝜖
To maintain the charge neutrality, total charge per unit area in p-
The Poisson’s Equation side depletion region must be equal to the total charge per unit
𝑑 𝜓 𝜌 area in n-side, thus
=−
𝑑𝑥 𝜖 𝑁 𝑥 =𝑁 𝑥
where 𝜌 is charge density and 𝜖 is the material
permittivity Total depletion region width is
𝑑𝜓 𝑞𝑁 𝑞𝑁
𝐸=− =− 𝑥−𝑐 𝐸=− 𝑥 = −𝐸
𝑑𝑥 𝜖 𝜖
𝑑 𝜓 𝑞𝑁 𝑞𝑁 𝑞𝑁
=− 𝐸= 𝑥−𝑥 = −𝐸 + 𝑥
𝑑𝑥 𝜖 𝜖 𝜖
Integrating the above equation
𝑑𝜓 𝑞𝑁
=− 𝑥+𝑐 Now, built in voltage can be also determined
𝑑𝑥 𝜖
by Electric Field Equation as
Electric Field in 0 < 𝑥 ≤ 𝑥
𝑑𝜓 𝑞𝑁 𝑉 =− 𝐸 𝑑𝑥 = − 𝐸 𝑑𝑥 − 𝐸 𝑑𝑥
𝐸=− = 𝑥−𝑐
𝑑𝑥 𝜖
At 𝑥 = 0, 𝐸 = −𝐸 , 𝑞𝑁 𝑞𝑁
𝑉 =− − 𝑥+𝑥 𝑑𝑥 − 𝑥 − 𝑥 𝑑𝑥
𝜖 𝜖
Thus 𝑐 = 𝐸
𝑞𝑁 𝑥 𝑞𝑁 𝑥
Further at 𝑥 = 𝑥 , 𝑐 = 𝑥 𝑉 =− −𝑥 −− −𝑥
𝜖 2 𝜖 2
10/18/2021 Dr. P. K. Tiwari 16
Depletion Region Width (Abrupt Junction)
𝑞𝑁 𝑥 𝑞𝑁 𝑥 Using Charge neutrality equation
𝑉 = + 𝑁 𝑥 = 𝑁 𝑥 in the above
2𝜖 2𝜖
equation
Area under the electric field curve is
also equal to built in voltage, thus 1 𝑞𝑁 𝑁
𝐸 𝑊= +1 𝑥
2 2𝜖 𝑁
1
𝐸 𝑊=𝑉
2
Now, using 𝑥 = 𝐸 to eliminate 𝑥
Thus the depletion width
1 𝑞𝑁 𝑁 𝜖 𝐸
𝐸 𝑊= +1
2𝑉 2 2𝜖 𝑁 𝑞𝑁
𝑊=
𝐸
Further, Solving the above equation, we get
𝑁 𝜖 𝐸
1 𝑞𝑁 𝑥 𝑞𝑁 𝑥 𝑊= +1
𝐸 𝑊= + 𝑁 𝑞𝑁
2 2𝜖 2𝜖
Now eliminating 𝐸 using 𝑊 =
10/18/2021 Dr. P. K. Tiwari 17
Depletion Region Width (Abrupt Junction)
Electric Field in one-sided
Now eliminating 𝐸 , using 𝑊 = , we get junction is
𝑞𝑁 𝑞𝑁
𝐸= 𝑥 − 𝑊 = −𝐸 + 𝑥
2𝜖 1 1 𝜖 𝜖
𝑊= + 𝑉 where, 𝑊=𝐸
𝑞 𝑁 𝑁
𝑥
Thus, 𝐸 = −𝐸 1−
𝑊
One sided Junction
Now, the potential profile
If 𝑁 ≫ 𝑁 , 𝑥 ≪ 𝑥 , The total
𝜓 𝑥 =− 𝐸 𝑥 𝑑𝑥
depletion width can be given as
𝑥
=𝐸 𝑥− +𝑐
2𝜖 1 2𝑊
𝑊≅𝑥 = 𝑉 Iet us consider that potential is zero in neutral p region
𝑞 𝑁
𝑉 𝑥 𝑥
𝜓 𝑥 = 2−
𝑊 𝑊
10/18/2021 Dr. P. K. Tiwari 18
Impact of the Bias Voltage
The depletion width in one sided p-n junction,
under bias voltage
2𝜖 1 𝑉 = 0, in Equilibrium
𝑊= (𝑉 −𝑉) 𝑉=𝑉 in Forward Bias
𝑞 𝑁
𝑉=𝑉 in Reverse Bias
𝑉 + 𝑑𝑉
p n
Considering an abrupt one-sided junction
Charge Density
𝑑𝑄
Position
-𝑑𝑄
2 × 10 × 8 × 10 Similarly,
𝑉 = 0.0259 × 𝑙𝑛
9.65 × 10
= 0.906𝑉 2𝜀 (𝑉 −𝑉)
𝑊 =
𝑞𝑁
2𝜀 𝑉
𝑊 =
𝑞𝑁 2 × 11.9 × 8.85 × 10 × 4.906
=
1.6 × 10 × 8 × 10
2 × 11.9 × 8.85 × 10 × 0.906
= = 0.899µm
1.6 × 10 × 8 × 10
= 0.386µm 𝜀
𝐶 = = 1.172 × 10 F/cm
𝑊|
10/18/2021 Dr. P. K. Tiwari 21
Varactor Diode
Many circuits utilize voltage variable property of
reverse bias p-n junction
𝐶 ∝ 𝑉 +𝑉
or, 𝐶 ∝ 𝑉 for 𝑉 ≫ 𝑉
Carrier Concentration
𝑘𝑇 𝑁 𝑁
𝑉 = 𝑙𝑛
𝑞 𝑛 𝑝
𝑛
𝑘𝑇 𝑝 𝑛
𝑉 = 𝑙𝑛
𝑞 𝑛 𝑝
𝑛
𝑘𝑇 𝑛 𝑘𝑇 𝑝 𝑛 =𝑛 𝑒
𝑉 = 𝑙𝑛 = 𝑙𝑛
𝑞 𝑛 𝑞 𝑝
𝑝 =𝑝 𝑒
10/18/2021 Dr. P. K. Tiwari 24
Current-Voltage (I-V)
Characteristics
Charges under non-equilibrium
𝑛 =𝑛 𝑒
𝑝 =𝑝 𝑒
𝑛 𝑛 𝑒
=
𝑛 𝑛
𝑒
Under low level injection 𝑛 = 𝑛 , thus
FB RB
𝑛 =𝑛 𝑒
10/18/2021 Dr. P. K. Tiwari 25
Current-Voltage (I-V)
Characteristics
Thus excess minority carrier concentration at 𝑥 = −𝑥 is
∆𝑛 = 𝑛 − 𝑛 =𝑛 𝑒 −1
∆𝑝 = 𝑝 − 𝑝 =𝑝 𝑒 −1
∆𝑛 𝑥 = 𝑛 𝑒 −1 𝑒
∆𝑝 𝑥 = 𝑝 𝑒 −1 𝑒
where, 𝐿 = 𝐷 𝜏 and 𝐿 = 𝐷 𝜏
𝑑𝑝 𝑞𝐷 𝑝
𝐽 𝑥=𝑥 = −𝑞𝐷 = 𝑒 −1
𝑑𝑥 𝐿
𝑑𝑛 𝑞𝐷 𝑛
𝐽 𝑥 = −𝑥 = −𝑞𝐷 = 𝑒 −1
𝑑𝑥 𝐿
𝐽 = 𝐽 (𝑥 = −𝑥 ) + 𝐽 (𝑥 = 𝑥 )
𝐽=𝐽 𝑒 −1
𝐽=𝐽 𝑒 −1
At T=300K, for every 1 decade change in the current, the voltage change is 60mV.
𝐼=𝐼 𝑒 −1 +𝐼 𝑒 −1
𝐼≅𝐼 𝑒 −1
Under low forward bias voltage, generation
recombination current dominates, thus
At very high forward bias voltage, low level injection condition is violated and diode
behaves like a resistor. Voltage drop across the neutral regions are significant and injected
carriers will also drift. Total current will be determined by resistance of p and n regions as
well 10/18/2021
as contacts. Dr. P. K. Tiwari 29
Diffusion Capacitance
Under forward bias condition, minority charges
accumulated in the neural regions, next to depletion
region, give rise to the diffusion capacitance ( . The
diffusion capacitance in one-sided junction (p+-n) can be
given as
𝑑𝑄
𝐶 =
𝑑𝑉
Where, 𝑄 = 𝑞 ∫ 𝑝 −𝑝 𝑑𝑥
𝑄 = 𝑞∫ 𝑝 𝑒 −1 𝑒 𝑑𝑥 = 𝑞𝐿 𝑝 𝑒 −1 =𝜏 𝐽 𝑥
Now, 𝑑𝑄 𝑞 𝐿 𝑝
𝐶 = = 𝑒
𝑑𝑉 𝑘𝑇
10/18/2021 Dr. P. K. Tiwari 30
Small-Signal Model
𝑑𝐼 𝐴𝑑𝐽 𝑞𝐴 𝑞𝐼 𝐼
𝐺= = = 𝐽 𝑒 = =
𝑑𝑉 𝑑𝑉 𝑘𝑇 𝑘𝑇 Φ
𝑄 =
𝜏 𝐼
=
𝑡 𝐼 : Average Current Flowing during the
𝐴 𝐴
turn-off period
𝐼
𝑡 =𝜏
𝐼
10/18/2021 Dr. P. K. Tiwari 32