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Large Area Electronics Using Printing Methods

RADOSLAV PARASHKOV, EIKE BECKER, THOMAS RIEDL, HANS-HERMANN JOHANNES,


AND WOLFGANG KOWALSKY

Invited Paper

After the demonstration of the first organic FET in 1986, a new work on larger but cheaper substrates. In the case of organic
era in the field of electronic began: the era of organic electronics. electronics, that is the favorable way. The tool for achieving
Although the reported performance of organic transistors is still large area patterning is by printing methods. Printing on in-
considerably lower compared to that of silicon transistors, a new
market is open for organic devices, where the excellent performance expensive substrates like glass, plastic, laminates, and metals
of silicon technology is not required. Several commercial applica- is possible. Using high-resolution printing methods (down
tions for organic electronics have been suggested: organic RFID to 100 nm) like microcontact printing CP [6], and other
tags, electronic papers, imagers, sensors, organic LED drivers, etc. more conventional printing techniques like ink-jet, screen,
The main advantage of organic technologies over silicon technolo- and offset printing, low-cost large area flexible electronics
gies is the possibility of making low-cost, large area electronics. The
main processes which allow patterning with suitable resolution on a can be produced. In this paper, we will review the existing
large areas are printing methods. Here we will provide an overview technologies for the production of electronics based on
of methods that can be useful in the low-cost production of large printing methods. Examples for devices using microcontact,
area electronics. ink-jet, screen, offset, and thermal line-patterning printing
Keywords—Ink-jet printing, laser printing, microcontact are presented.
printing, offset printing, organic circuits, organic FETs, screen
printing, thermal imaging.
II. CP
I. INTRODUCTION
Large areas with high-resolution chemical patterns can
After the demonstration of the first organic transistor by be patterned by CP. The technique is easily applicable
Tsumura and Koezuka [1], the last decade has seen tremen- to flexible or rigid substrates. The process is based on the
dous progress in the field of organic electronics. All-organic selective transfer of an organothiol or silane to a substrate
and all-polymer transistor circuits with a performance via a flexible polymer stamp, thus resulting in exposed
suitable for certain applications have been demonstrated and covered regions of the substrate [7]. The resolution of
[2]–[5], [13]. One of the advantages of organic electronics the method depends entirely on the previously patterned
compared to silicon technologies is the prospect of low-cost master. Stamps are fabricated from poly (dimethyl) siloxane
devices. In general, there are two major ways to lower the (PDMS), polyimide, or phenol-formaldehyde polymer. The
cost of electronics. The first one is to increase the packaging stamps are produced by using a previously patterned master.
efficiency of the ICs, which is defined by ratio of all devices Masters can be lithographically patterned or commercially
on system-level board compared to the area of the board. available templates. The stamp is usually fabricated by
Another very efficient way to increase cost effectiveness is to casting an elastomer solution on the master. After curing,
the elastomeric stamp is peeled from the master, giving
a negative replica of its surface topography. In a typical
Manuscript received August 4, 2004; revised February 11, 2005.
R. Parashkov was with the Institute for High-Frequency Engineering, experimental procedure, a photolitographically produced
Technical University of Braunschweig, Braunschweig 38092, Germany. master is placed in a Petri dish, and a 10 : 1 ratio (w : w
He is now with the Laboratoire de Photonique Quantique et Moleculaire, or v : v) mixture of SYLGARD silicone elastomer 184
Ecole Normale Superieure de Cachan, Cachan Cedex, France (e-mail:
Radoslav.Parashkov@lpqm.ens-cachan.fr). and SYLGARD silicone elastomer 184 curing agent (Dow
E. Becker, T. Riedl, H.-H. Johannes, and W. Kowalsky are with the Corning GmbH, Wiesbaden, Germany) is poured over it.
Institute for High-Frequency Engineering, Technical University of Braun- The elastomer is allowed to sit for approximately 30 min
schweig, Braunschweig 38092, Germany (e-mail: e.becker@tu-bs.de;
t.riedl@tu-bs.de; h-h.johannes@tu-bs.de; w.kowalsky@tu-bs.de). at ambient conditions to degas. Afterwards, it is cured for
Digital Object Identifier 10.1109/JPROC.2005.850304 1–2 h at 60 C [8].

0018-9219/$20.00 © 2005 IEEE

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Fig. 1. Schematic of CP patterning processes. (a) CP followed by etching: a1) PDMS stamp
with raised regions covered with SAM; a2) PDMS stamp is brought in contact with substrate surface
in order to transfer SAM; a3) patterned SAM layers; a4) formation of gold drain and source contacts
after etching of the regions not covered with thiol. (b) CP followed by electropolymerization: steps
from b1–b3 are identical with those from process (a); b4) formation of polymer drain and source
contacts after one-step electrodeposition (the electropolymerization occurs in the regions not covered
with SAM). (c) CP followed by electroless deposition: steps from c1–c3 are identical with those
from process (a); c4) electroless deposition occurs only on the hydrophilic regions not covered with
SAM. (d) CP followed by electroless deposition: steps from d1–d3 are identical with those from
process (a); d4) electroless deposition occurs only on the hydrophobic regions covered with SAM.

There are three major ways for patterning flexible elec- defined by metal etching. It is a very convenient technique
tronics by means of CP: CP followed by etching; CP for generating patterned self-assembled monolayer (SAM)
followed by electroless plating; and CP followed by area- of alkanethiolates on evaporated films of Au, Ag, and Cu
selective electropolymerization. [8]–[10]. High resolution organic active matrix backplane
Metal etching has been the first approach demonstrated for circuits for large mechanically flexible sheets of electronic
patterning of organic electronics by CP [7]. The schematic paper have been produced similarly by CP followed by in-
of the method is shown in Fig. 1(a). To define the contacts dium–tin–oxide (ITO) etching [12].
of the thin-film transistor (TFT), a metal layer is deposited Several approaches for process automation have been re-
by evaporation, then CP is used to deposit an organothiol alized. A possibility for using a revolving elastomeric stamp
self-assembled monolayer as an etch resist. The patterns are to generate patterned SAM with a feature size suitable for

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substrates has been proposed [19]. Five-stage pentacene ring
oscillators with a signal propagation delay as low as 170 s
per stage have been demonstrated.
CP followed by area-selective electropolymerization is
based on area-selective electrodeposition performed on met-
alized substrates with a previously patterned SAM layer
which can be used as a template in the subsequent deposi-
Fig. 2. Cross section of the wave printing prototype. 1: tion of organic TFT drain and source contacts. The SAM
Stamp-backplate assembly. 2: Substrate. 3: Working gap
 
( 100 m). 4: Vacuum supply. 5: Pressure supply ( 2 kPa). 6: blocks the electron transfer during electropolymerization,
Valves switched to pressure supply, thereby creating the wave 7. which occurs only in the exposed regions [Fig. 1(b)]. The
8: Grooves-plate. (Fig. 2 is from: Materials Res. Soc. Symp. Proc., nature of the electrolyte and the applied potential during
vol. EXS-2, pp. M4.9.1-M4.9.3, 2004. Reproduced with permission
of Prof. M. Decre.) electropolymerization plays a crucial role in this patterning
process [20]. One of the first examples of area-selective
electrodeposition defined by CP is polypyrrole patterning
on a gold electrode. After deposition, the patterns have
a “reel-to-reel” production process have been investigated. been transferred to an insulating flexible PDMS substrate
A PDMS stamp is fixed to a cylindrical rod by a thin layer [21]. Structures with a resolution of 10–100 m and con-
of solid adhesive on its surface, and then rolled across the ductivity of 1–5 S/cm have been reported. The advantage
surface of a substrate to generate patterned SAM. Rolling of the design is that conducting polymers can be easily
speeds of 2 cm/s have been reported [14]. Automated large electrochemically switched between a conducting and an
area patterning with CP can also be achieved using the insulating or even semiconducting state [22]. The effect of
novel “wave printing” technique developed by Philips Re- the SAM structure on the kinetics of the electrochemical
search. With the “wave printing” technology, commonly en- deposition process of polypyrrole and polyaniline has been
countered problems, such as strong stamp substrate adhesion, studied in detail [27].
squeezing of the pattern, and low large area alignment accu- Other “soft-lithographic” techniques based on CP could
racy have been solved [30], [31]. The first fully functional be also applicable for organic electronics patterning. A
prototype microcontact wave printer has multilayer align- method based on CP for direct patterning of a metal layer
ment capabilities better than 2 m over 150-mm wafers. The is described [32]. During the process, a metal layer coated
wave printing concept is shown in Fig. 2. The flexible PDMS on the prepatterned PDMS stamp has been transferred to the
stamp is mounted on a glass backplate. The stamp–backplate polymer film substrate. Under heating and slight pressure, a
assembly (1) is maintained on a thick grooves-plate (8) by contact can be formed between the metal layer coated onto
vacuum in the grooves (4). The substrate (2) is brought into PDMS stamp and the surface of the polymer substrate. When
constant working distance (3) of 100 10 m from the stamp. the stamp is removed, the metal on the raised regions of the
Every groove is controlled by a valve that can switch between stamp adheres to the polymer substrate and a metal pattern is
vacuum (4) and mild pressure (5) of about 2 kPa. When a few formed. The method is called metal transfer printing (MTP)
grooves (6) are fed with low-pressure air, the flexible back- [32]. A similar process is flexible letterpress stamping
plate stretches slightly and brings the stamp into contact with (FLEPS). FLEPS has been used to fabricate amorphous
the substrate. Proper control of the valves generates a “wave” silicon TFTs with a bottom-gate structure [33]. The FLEPS
along the stamp. method has also been applied to pattern films of polystyrene
Electroless plating of both metals and conducting and other thermoplastic polymers with micrometer-scale
polymers is a subject of continuing interest. Selective feature sizes. The procedure is highly suitable to transfer
electroless metal deposition for IC fabrication has been patterns on rigid or flexible and flat or curved substrates.
studied in detail [15]. Electroless deposition of metals in So-called micromolding in capillaries (MIMIC) has been
general is defined as the deposition and subsequent reduc- used to pattern an aluminum film by forming polyurethane
tion of metallic ions from a solution onto a surface in the lines high enough to divide an evaporated aluminum film
absence of an external electric current source. This depo- into electrically separated lines [34]. The process works
sition technique requires the immersion of a catalytically by putting a stamp in conformal contact with the substrate,
activated surface in a plating bath containing complexed thereby forming microchannels. The capillaries are then
metal ions and a reducing agent. The bath needs careful filled with a polyurethane which is subsequently curred.
control with respect to its chemistry, stirring, temperature, Finally the elastomeric stamp is peeled off. Organic tran-
and pH value for reliable and high-quality plating [16]. sistors have been produced using the MIMIC technique to
As an example, a hydrophobic silane SAM is patterned by pattern polyaniline and carbon structures [35], [36]. The
CP onto a hydrophilic substrate. Consequently, electroless conductivity of the PANI electrodes has been reported to be
plating can occur only in the regions covered with the SAM 5 S/cm. Transistors that use microfluidic source and drain
[17], [18] [Fig. 1(d)] or not covered with the SAM [19] electrodes have been demonstrated [37]. The method for
[Fig. 1(c)] depending on the chosen process parameters. fabrication can be associated with the MIMIC technique.
A manufacturing approach for the production of flexible The CP concept has been extended to nanoscale di-
organic circuits with CP nickel gate electrodes on plastic mensions in an additive process referred as nanotransfer

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Table 1
Summary of Methods for Patterning of Organic Elecronics Based on CP Techniques

Fig. 4. Focused acoustic beam used to expel droplets from a


free-liquid surface (Fig. 4 is from J. Appl. Phys., pp. 3441–3447,
vol. 65, no. 9, 1989. Copyright 1989 AIP.)

Fig. 3. Diagram of the piezo drop-on-demand ink-jet printing method, patterning with feature sizes approaching 100 nm
system. In the print head, a piezocrystal expands in response to an and an edge resolution of less than 15 nm is feasible.
electrical driving signal, deforming a membrane, causing a pressure Table 1 summarizes the results obtained after patterning
impulse within the ink chamber, expelling a single droplet from
the orifice. The chamber is refilled through the inlet by capillary various materials with different “soft-lithographic” tech-
action at the orifice. niques. It is seen from Table 1 that CP is a strong candidate
printing (nTP) [38], [39]. nTP involves the transfer of for industrial patterning of organic electronics. Suitable
metallic structures directly onto a substrate surface. By this resolution for patterning of organic TFTs in the range of

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Table 2
Summary of Methods for Patterning of Organic Elecronics Based on Ink-Jet Printing Techniques

1–10 m is easily achievable with all kinds of soft-litho-


graphic techniques. Functional transistors and inverters
have been produced using selective electropolymerization,
diffusion electropolymerization, and various methods based
on CP. All described methods can be useful alternatives to
vacuum deposition and photolithographic patterning of the Fig. 5. Principle of the screen-printing process.
various functional layers and are also suitable for reel-to-reel
or sheet-to-sheet production schemes [14], [31]. from an orifice one at a time as it is moved in two dimensions
approximately 1 mm above a substrate. Each droplet takes a
III. INK-JET PRINTING ballistic trajectory to the substrate on command by a pressure
impulse, often by a deformable piezocrystal from within a
Ink-jet printing technologies provide opportunities both small chamber attached to the orifice (Fig. 3). The pattern of
for significant cost reduction in existing organic devices and droplets left behind on the substrate constitutes the printed
for new device configurations [40]. Ink-jet methods based output. TFTs with top-gate configuration have been realized
on printing with two types of ink-jet heads: namely, the by ink-jet printing of the source and drain electrodes from a
piezoelectric and acoustic types are most commonly used solution of the conductive polymer PEDOT. High-resolution
for fabrication of organic electronics. Thermal-type ink-jet patterning of an all-polymer TFT with ink-jet printing has
printheads also exist. The structure of the thermal-type been achieved by using polyimide stripes as channel sepa-
head is much simpler than that of the piezoelectric device. rators formed previously by photolithography and oxygen
Thermal-type heads use a small electrical heater to heat the plasma etching. In such a way, ink-jet printed circuits have
ink in a cavity above its boiling point. A bubble is created also been reported. Enhancement-load and resistor-load type
that pushes ink out from the nozzle. This type of ink-jet head inverters have been demonstrated. For the enhancement-load
is not used in the case of organic electronics because heat inverter, a via-hole in the insulator has been created by
damage of the functional organic material is possible. With deposition of solvent drops onto the isolator using an ink-jet
the use of ink-jet printing techniques, the deposition of all head. The authors suggest that after optimization ICs with
parts of the transistor device, contact electrodes, semicon- printed TFTs are expected to operate at a frequency higher
ducting layers, and insulating materials is possible. than 1 kHz [44], [45].
In order to reduce the number of process steps in metallic A step toward all-ink-jet printed electronics is the develop-
contact fabrication, direct printing methods for patterning of ment of methods for semiconducting layer printing. An ex-
metallic transistor contacts have been explored. Low-tem- ample of the possibility to print not just the contact electrodes
perature copper-rich deposits have been successfully pat- in the electronic devices but also the semiconducting layer
terned on glass substrates by using a so-called piezoelectric is already demonstrated [46]–[48]. The ink-jet printing tech-
drop-on-demand ink-jet print head [41]. In this process an nology used for deposition of the polymeric organic semi-
organometallic liquid is used, which after thermal curing conductors is acoustic ink-jet printing [47], [48]. In Fig. 4,
converts into solid copper. The piezo drop-on-demand ink-jet the technology concept is shown. A high-frequency trans-
printing system is used to build three-dimensional (3-D) ducer attached to the back of an acoustic lens launches an
micromechanical systems (MEMS) and electrical circuitry acoustic wave through the lens. The lens focuses the acoustic
from nanopartical metal colloids [42]. An ink-jet printer energy, forming a pressure wave that overcomes the surface
patterns material by expelling tiny droplets of liquid ink tension of the liquid just above the lens and expels a drop

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Table 3
Summary of Methods for Patterning of Organic Elecronics Based on Screen Printing and
Other Techniques

from the surface. The nozzleless design minimizes the clog- [55]. Thermally evaporated parylene and pentacene have
ging of the ejector, a common problem with thermal or piezo been used as gate dielectric and semiconductor, respectively.
ink-jet printers. The ink-jet printing technologies allow also Garnier et al. reported on fabrication process for organic
deposition of the dielectric materials. A process for the fabri- transistors that includes two screen-printing steps [56]. Gate,
cation of high-quality ink-jet printed conducting and dielec- drain, and source electrodes have been screen printed with
tric films has been reported [51]. graphite-based polymer ink separately on each side of a
Table 2 shows the results achieved after patterning of sheet of 1.5- m-thick polyester film which acts at the same
different inorganic and organic materials by ink-jet printing time as the dielectric layer and substrate.
techniques. Ink-jet printing is a promising technique for There are some other methods suitable for the production
printing large area electronics due to its flexibility. Printing of flexible electronics, which cannot be classified among the
of contacts, semiconductors, and dielectrics on large sub- methods described above. Among them are thermal imaging,
strates is easily possible by ink-jet printing. The only line patterning, and offset printing.
drawback of the technique is the relatively low achievable Table 3 shows the results achieved after patterning of
lateral resolution in the range from 50 to several hundred different inorganic and organic materials by methods men-
micrometers. However, high-resolution patterning (5 m) tioned above. Due to its low resolution, screen printing could
by ink-jet printing has been reported, but with the help be used for deposition of dielectric materials. Alternative
of previously prepared polyimide stripes [43]–[45]. This printing methods suitable for patterning of large areas can be
additional process could affect negatively the costs of the definitely thermal imaging and the different kinds of offset
devices. A promising technique seems to be acoustic ink-jet printing techniques.
printing; drops with diameter of only 5 m are reported [48].
V. CONCLUSION
IV. SCREEN PRINTING
There are a lot of printing methods which are suitable
Screen printing is a conventional low-cost printing tech- for large area patterning of low-cost electronics. CP can
nique (Fig. 5). With screen printing, patterning of both in- be identified as the printing method most promising for pat-
organic and organic layers is possible. The screen-printing terning of source and drain electrodes with high resolution.
process for deposition of inorganic composites is well in- The resolution of the method depends entirely on the resolu-
vestigated [52]–[54]. The achievable resolution using this tion of the previously patterned master (and subsequently on
method is too low for printing drain-source contacts (approx- the method used for the preparation of this master). Resolu-
imately 100 m), although several groups have reported the tions in the range of 100 nm are achievable. A wave printer
fabrication of organic TFTs [55]–[58]. has been demonstrated, which makes CP usable in auto-
A compatibility study of various organic gate dielectrics mated sheet-to-sheet process. Several suggestions for reel-to-
with screen-printed electrodes for pentacene-based TFTs reel processes have also been made. However, a problem in
has been performed. Transistors with top source–drain the automation of CP could be the elastic modulus of the
configuration have been prepared on a flexible substrate PDMS stamp and, as a result, the limited applicable pressure

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1989. transistors from the Technical University of
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precursor,” in Materials Res. Soc. Symp. Proc., vol. 769, 2003, pp. Since April 2005, he has been a Senior Re-
H11.7.1/L12.7.1–H11.7.6/L12.7.6. searcher at the Laboratory for Quantum and
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Eike Becker received the Diploma degree in
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Y Ba Cu O screen printed thick films,” J. Appl. Phys., vol. 70, Dr.Ing. (Ph.D.) degree in electrical engineering
no. 3, pp. 1575–1579, 1991. at the Technical University of Braunschweig.
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printed source layers,” J. Appl. Phys., vol. 78, no. 9, pp. 5493–5498, His research interests include organic electronic
1995. devices, in particular their integration with addi-
tional functionalities like displays and sensors.

1328 PROCEEDINGS OF THE IEEE, VOL. 93, NO. 7, JULY 2005

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Thomas Riedl was born in Augsburg, Ger- Wolfgang Kowalsky received the Diploma and
many, in 1970. He received the Diploma degree Dr.Ing. (Ph.D.) degrees in electrical engineering
in physics from the University of Stuttgart, from the Technical University of Braunschweig,
Stuttgart, Germany, in 1997 and the Dr.rer.Nat. Braunschweig, Germany, in 1982 and 1985,
(Ph.D.) degree in physics for his work on respectively. His Ph.D. dissertation investigated
InP/GaInP self-assembled quantum dot lasers electron transfer effect in the InGaAsP systems.
from the Technical University of Braunschweig, From 1984 to 1986, he was a Research
Braunschweig, Germany, in 2002. Scientist in the Heinrich-Hertz-Institut f̈r
He is now a Senior Researcher and Head of the Nachrichtentechnik GmbH, Berlin, Germany.
Organic Laser Group at the Institute for High- From 1986 to 1990, he was a Research Associate
Frequency Engineering, Technical University of at the Institute for High-Frequency Engineering,
Braunschweig. His current research interests include organic (opto-)elec- Technical University of Braunschweig. From 1990 to 1993, he was a
tronic devices and inorganic wide-bandgap semiconductors. Professor for Optoelectronic in the Faculty for Engineering Sciences in
Dr. Riedl is a Member of the German Physical Society (DPG). University of Ulm, Ulm, Germany. Since 1994, he has been a Professor
and Head of the Institute for High-Frequency Engineering, Technical
University of Braunschweig. His current research interests are in the fields
of organic LEDs, organic FETs, organic displays, ZnO devices, sensors,
Hans-Hermann Johannes received the Diploma photodetectors, etc.
degree in organic chemistry and the Dr.rer.Nat. Prof. Kowalsky received the Leibnitz Award of the German Research
(Ph.D.) degree in organic chemistry for his Foundation in 2000 for his work in the field of organic LEDs. He is a
work on direct functionalization, oligomeriza- Member of the Scientific Society of Braunschweig.
tion, linear, and nonlinear optical properties
of cyanines from the Technical University of
Braunschweig, Braunschweig, Germany, in 1993
and 2000, respectively.
From 1993 to 1995, he was a Researcher at
the Technical University of Braunschweig. He is
currently a Senior Researcher and Head of the
OLED and Sensors Group at the Laboratory for Electrooptics, Institute for
High-Frequency Engineering, Technical University of Braunschweig. His
current research is focused on the synthesis and integration of new organic
materials for electrooptical and sensor devices.
Dr. Johannes is a Member of the German Chemical Society (GDCH) and
the Chamber for Engineering of Lower Saxony, Germany.

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