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Journal of Materials Science & Technology 97 (2022) 254–263

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Journal of Materials Science & Technology


journal homepage: www.elsevier.com/locate/jmst

Research article

Controllable resistive switching of STO:Ag/SiO2 -based memristor


synapse for neuromorphic computing
Nasir Ilyas a,c, Jingyong Wang a, Chunmei Li a, Hao Fu c,∗, Dongyang Li a, Xiangdong Jiang a,
Deen Gu a, Yadong Jiang a,b, Wei Li a,b,∗
a
School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China
b
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
c
School of Physics, University of Electronic Science and Technology of China, Chengdu 610054, China

a r t i c l e i n f o a b s t r a c t

Article history: Resistive random-access memory (RRAM) is a promising technology to develop nonvolatile memory
Received 2 February 2021 and artificial synaptic devices for brain-inspired neuromorphic computing. Here, we have developed a
Revised 20 April 2021
STO:Ag/SiO2 bilayer based memristor that has exhibited a filamentary resistive switching with stable en-
Accepted 22 April 2021
durance and long-term data retention ability. The memristor also exhibits a tunable resistance modula-
Available online 12 July 2021
tion under positive and negative pulse trains, which could fully mimic the potentiation and depression
Key words: behavior like a bio-synapse. Several synaptic plasticity functions, including long-term potentiation (LTP)
Ag/STO:Ag/SiO2 /p++ -Si memristor and long-term depression (LTD), paired-pulsed facilitation (PPF), spike-rate-dependent-plasticity (SRDP),
Filamentary resistive switching and post-tetanic potentiation (PTP), are faithfully implemented with the fabricated memristor. More-
Resistance/weight modulation over, to demonstrate the feasibility of our memristor synapse for neuromorphic applications, spike-time-
Synaptic plasticity dependent plasticity (STDP) is also investigated. Based on conductive atomic force microscopy observa-
Normomorphic computing
tions and electrical transport model analyses, it can be concluded that it is the controlled formation and
rupture of Ag filaments that are responsible for the resistive switching while exhibiting a switching ratio
of ~103 along with a good endurance and stability suitable for nonvolatile memory applications. Before
fully electroforming, the gradual conductance modulation of Ag/STO:Ag/SiO2 /p++ -Si memristor can be re-
alized, and the working mechanism could be explained by the succeeding growth and contraction of Ag
filaments promoted by a redox reaction. This newly fabricated memristor may enable the development of
nonvolatile memory and realize controllable resistance/weight modulation when applied as an artificial
synapse for neuromorphic computing.
© 2021 Published by Elsevier Ltd on behalf of Chinese Society for Metals.

1. Introduction Therefore, emerging computing systems with novel architectures


have been in high demand for achieving parallel networks which
Biological brains can effectively handle complicated neural tasks can mimic the biological brain, leading to large-scale and energy-
through an energy-efficient and fault-tolerant manner due to in- efficient computation [2,6–8]. Recently, to realize the essential stor-
trinsic fusion of storage and computation [1,2]. In the brain, mem- age and computation functions in parallel, a two-terminal resistive
ory and information processing tasks are associated with activated random-access memory (RRAM) device known as “memristor” has
biological connecting points known as "synapses" between neurons been proposed as an artificial synapse, in which electrical signal
[3]. Therefore, brain-like (neuromorphic) computing is a promis- transduction and synaptic weight change can be realized [9–12].
ing idea as a new computing system that has the potential to Generally, the resistive switching of memristors can be clas-
overcome the limitations of traditional von Neumann computa- sified into two modes: digital and analog [13]. The analog resis-
tional architecture. The classical von Neumann computing archi- tive switching has attracted research attention due to the gradual
tecture is typically composed of very-large-scale integration (VLSI) change of the resistance, resembling the adaptive learning process
chips containing digital processing cores with dedicated memory and mimicking the synaptic functions [14]. By using mixed-signal
structures [4,5] that do not directly emulate real neural systems. (digital and/or analog) in a single device, neuromorphic engineer-
ing researchers have being developed novel hardwares to imple-
ment neural and synaptic dynamics, resulting in the reduction of

Corresponding authors. manufacturing complexity. It is noted that an analog neuromorphic
E-mail addresses: fuhao@uestc.edu.cn (H. Fu), wli@uestc.edu.cn (W. Li).

https://doi.org/10.1016/j.jmst.2021.04.071
1005-0302/© 2021 Published by Elsevier Ltd on behalf of Chinese Society for Metals.
N. Ilyas, J. Wang, C. Li et al. Journal of Materials Science & Technology 97 (2022) 254–263

computing system with a crossbar-based analog memristor and a (RF) magnetron sputtering at room temperature with a SiO2 target.
digital-assisted noise-eliminating training circuit has been realized Then, a 70 nm thick pure STO layer and a 70 nm thick Ag-doped
recently by Liu et al. [15]. Nevertheless, a memristor with both STO (STO:Ag) layer were deposited separately by using RF mag-
analog and digital resistive switching in a single cell is rarely re- netron sputtering (pure STO layer) or co-sputtering (STO:Ag layer)
ported [16,17]. from pure SrTiO3 ceramic target without or with Ag slices. Finally,
It is known that both analog and digital are fundamentally dif- while attaching a shadow mask containing circles with a diameter
ferent types of switching, and various physical models have been of 100 μm, a 50 nm thick Ag film patterning was sputtered with
suggested to explain these behaviors in memristors. For example, an Ag target and completed after removing the mask. All the de-
the memristor could behave through (i) the migration of ions or position processes were carried out at room temperature. The Ag
the carrier trapping-releasing process [18–20], (ii) the resistance film was used as the top electrode (TE), and the cleaned p++ -Si
modification of the metal/insulator interface [21], and (iii) the for- substrate with a low resistivity of 0.0 01–0.0 05 Ω cm was used as
mation of localized metal-atom chains which are bridging elec- a bottom electrode in our devices.
trode materials [22]. Various device engineering and experimen-
tal methods have been proposed to realize both analog and digital 2.2. Characterization methods
switching with the ability to exhibit synaptic features in the same
single cell device, such as Ag/NiO/Pt [23], Ag/CH3 –NH3 PbI3 x Clx /FTO For the structural characterization and energy-dispersive X-ray
[24], Ni/Ta2 O5 /Si [25] etc.,. SrTiO3 (STO) and SiO2 have also been spectroscopy (EDS) analysis, a cross-sectional TEM sample was pre-
widely employed in memristors as active resistive switching oxides pared by a focus ion beam method utilizing an FEI Quanta 3D FEG
with promising results [26–30]. These two materials show excel- dual-beam instrument and then conducted/observed by JEOL JEM-
lent wafer-scale uniformity and have conformity with conventional 2100F TEM. Conduction atomic force microscopy (C-AFM, JEOL,
metal-oxide-semiconductor (CMOS) technology. In these two kinds JSPM-5200) was taken to investigate the sample surface after a
of material systems, during the resistive switching process, asso- high voltage was applied. All the electrical characterizations were
ciated physical mechanisms are related to the formation of con- carried out using a prob-system hooked with a Keithley 2636B
ducting nanofilaments, either due to the reduction (i.e., Si atoms power source at room temperature.
from SiOx and Ti atoms from STO) or due to the drift/diffusion
of the metallic electrode through the oxide layer. However, it is 3. Results and discussion
found that the porous structure of STO material could facilitate the
accumulation of metal ions in the memristive layer and decrease Fig. 1(A) shows the graphical illustration of the fabricated
the diffusion rate, giving rise to a significantly reduced initial re- Ag/STO:Ag/SiO2 /p++ -Si memristor. The two-terminal circuit con-
sistance and hence resulting in a small on/off ratio [31,32]. It is re- figuration of the memristor indicates that Ag TE is biased posi-
ported that a multilayer structure as a memristor storage medium tively or negatively, and p++ -Si BE is always grounded. The cross-
can achieve stable and controllable resistive switching performance sectional TEM image is shown in Fig. 1(B), indicating that both
than a single layer approach [33,34]. These multilayer structures STO:Ag and SiO2 layers have a uniform distribution of physical
can improve the switching uniformity by mitigating the stochas- thickness. Additionally, the TEM-EDS mapping was employed fur-
tic nature of filament and the controllability of attaining synap- ther to confirm the thickness and chemical composition of bilayer
tic characteristics. Up to now, although many multilayer material films. Fig. 1(C) shows the elemental composition across the cross-
structures have been reported [35–38], the possibility of using the section of layers, including STO:Ag, SiO2 , TE, and BE of the yellow
STO/SiO2 -based memristor as the artificial synapse has not been region shown in Fig. 1B, indicating the elemental percentage inside
investigated yet. the formed STO:Ag and SiO2 films. From each elemental composi-
In this work, we have proposed a STO:Ag/SiO2 bilayer based tion and its related distribution, the memristive film thickness can
memristor using Ag as a top electrode (TE) and p++ -Si as a bottom also be well identified in the structure of Ag/STO:Ag/SiO2 /p++ -Si
electrode (BE). It is demonstrated that the switching characteristics device, each of which is approximately ~70 nm. The TEM-EDS el-
and the resistance of Ag/STO:Ag/SiO2 /p++ -Si device can be tuned emental mappings shown in Fig. 1(D-H) for Si, O, Sr, Ti, and Ag
under both positive and negative pulse trains, respectively, which correspond to the deposited layers, further confirming the physical
are beneficial to obtain a reliable "analog" switching behavior to thickness and elemental distributions.
mimic bio-synaptic functions. It has also shown that long-term Based on the analysis from Fig. 1(B-H), it can be concluded
potentiation (LTP), long-term depression (LTD), spike-rate depen- that a bilayer STO:Ag/SiO2 film with a total physical thickness of
dent plasticity (SRDP), paired-pulse facilitation (PPF), post-tetanic ~140 nm can be obtained using the sputtering method and that
potentiation (PTP), and spike-time-dependent plasticity (STDP) well elemental distributions with uniform interfacial states can
have been successfully demonstrated in our Ag/STO:Ag/SiO2 /p++ - also be realized.
Si memristors. Analog and/or digital switching can easily be deter- As for comparison, the resistive switching properties of single-
mined depending on the applied voltage under both DC sweep and layered SiO2 and single-layered STO memristors are also studied.
pulse train conditions. The physical mechanism of the device could Firstly, the representative I-V curves of Ag/SiO2 /p++ -Si structure (il-
mainly be attributed to Ag ion migration and formation/rupture lustrated in the inset of Fig. 2(A)) by applying a voltage sweep (i.e.,
of conductive filaments inside the memristor. The present work 0 V → 5.0 V → 0 V → −5.0 V → 0 V) with a compliance current
would promote a more accurate mix of analog/digital switching in (Icc ) of 10 mA are shown in Fig. 2(A). The voltage scan rate for
memristor for use in neuromorphic computing. both set and reset processes is 100 mV/s. After applying forward-
biased sweep, the obtained I-V curves show that the device ex-
2. Experimental details hibits an abrupt resistance change from a high-resistance state
(HRS) to a low-resistance state (LRS) known as the “set” state, the
2.1. Fabrication of a RRAM device same as that has been shown in Ag/SiO2 /Pt memristor [39]. In con-
trast, the reverse-biased sweep switches the device to attain the
Both the Ag/STO:Ag/SiO2 /p++ -Si and Ag/STO/SiO2 /p++ -Si de- HRS again (“reset” state). Secondly, the representative I-V curves of
vices were fabricated as follows. A commercially available p++ - Ag/STO/p++ -Si structure (illustrated in the inset of Fig. 2(D)) by ap-
Si substrate was used for device fabrication. First, a 70 nm thick plying a voltage sweep (i.e., 0 V → 5.0 V → 0 V → −5.0 V → 0 V)
SiO2 layer was deposited on a p++ -Si substrate via radio frequency with a compliance current (Icc ) of 1 mA are shown in Fig. 2(D).

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N. Ilyas, J. Wang, C. Li et al. Journal of Materials Science & Technology 97 (2022) 254–263

Fig. 1. (A) Schematic model of the Ag/STO:Ag/SiO2 /p++ -Si memristor. (B) Cross-sectional TEM image of the Ag/STO:Ag/SiO2 /p++ -Si memristor. (C–H) TEM-EDS spectrum and
elemental-mapping images of the region indicated by yellow square for Sr, Ti, Ag, O and Si, respectively.

Fig. 2. (A, D) I-V curves of Ag/SiO2 /p++ -Si and Ag/STO/p++ -Si devices, respectively, the insets are the demonstrating structures differently. (B, C) Cumulative distribution of
resistance values at HRS/LRS and histogram of Ag/SiO2 /p++ -Si device for set and reset of consecutive 100 sweep cycles drawn from Fig. S1. (E, F) Cumulative distribution of
resistance values at HRS/LRS and histogram of Ag/STO/p++ -Si device for set and reset of consecutive 100 sweep cycles drawn from Fig. S1.

The device also exhibits the resistance transition from HRS to LRS quires a higher reset voltage [40,41]. Compared to a reset voltage
when Ag TE is positively biased and from LRS to HRS when Ag of ~ −1.8 V in the Ag/STO/p++ -Si device, a higher reset voltage of
TE is negatively biased. Both devices exhibit obvious I-V hysteresis ~ −2.2 V is required in the Ag/SiO2 /p++ -Si device, confirming the
phenomenon at the positive and negative voltage regions. It is wor- formation of a more robust filament in a single-layered SiO2 de-
thy of notice, however, that the I-V hysteresis of the Ag/SiO2 /p++ -Si vice.
device is larger than that of the Ag/STO/p++ -Si device, attributing Meanwhile, to verify the performance endurance of the above
a smaller set voltage and a larger flux caused by the large diffusion two devices, multiple cycles of DC sweeping are also carried out,
coefficient of Ag+ ions in SiO2 compared to those in STO, resulting as shown in Fig. S1 (Supporting Information). The cumulative dis-
in a high volume of Ag filaments as well as a lower LRS. Fig. 2(D) tribution of resistance values for LRS and HRS are extracted at
shows that the reduced initial current and the low LRS/HRS ra- a read voltage of 0.5 V and shown in Fig. 2(B, E). The average
tio with smaller I-V hysteresis might have resulted from the slow value (μ) and relative fluctuation of LRS and HRS are 0.79 V/35%
growth of Ag-filaments in the STO layer. It has been reported that and −1.23 V/38% for Ag/SiO2 /p++ -Si device, and 0.79 V/25% and
a more robust filament, which is challenging to be ruptured, re- −1.23 V/20% for Ag/STO/p++ -Si device, respectively. These high

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N. Ilyas, J. Wang, C. Li et al. Journal of Materials Science & Technology 97 (2022) 254–263

Fig. 3. (A) I-V curves of Ag/STO:Ag/SiO2 /p++ -Si memristor, the inset shows the electroforming of Ag/STO/SiO2 /p++ -Si device. (B) Evolution of resistance values at HRS and LRS
upto 50 0 0 consecutive set/reset cycles. (C) I-V curves of the Ag/STO:Ag/SiO2 /p++ -Si device under different compliance currents. (D) Retention characteristics of 5 resistance
states for over 103 s. (E, F) Cumulative distribution of HRS and LRS values and histograms of the reset/set operating voltage in 100 randomly selected devices.

variabilities in the above filamentary switching devices might re- atoms inside the STO:Ag acts as a Ag ion reservoir for filament for-
sult from the random rupture/formation of the filaments. Fig. S1 mation in Ag/STO:Ag/SiO2 /p++ -Si device.
shows large fluctuations in cyclic reliability test after 100 consec- Interestingly, as in Fig. 3(B), different from single-layer
utive sweeps. Again, a gradual decrease of the LRS/HRS ratio in devices, a uniform resistive switching can be obtained in
Ag/STO/p++ -Si device can be easily seen, and the slow diffusion Ag/STO:Ag/SiO2 /p++ -Si device by repeated I-V sweeps. In addition,
of Ag+ ions might cause it. Similar phenomena have also been re- the stability and endurance of STO:Ag/SiO2 bilayer devices are fur-
alized in Cu-based and oxygen-based devices [42]. ther tested under robust cyclic operation. The LRS and HRS are
The histogram and statistical chats in Fig. 2(C, F) show that the measured at a read voltage of 0.5 V after set and reset opera-
set and reset voltages for 100 sweeps range from 0.8 V to 3.2 V and tions. It can be seen in Fig. 3(B) that after repeated 50 0 0 I-V cycles,
from −1.4 V to −4.8 V in the single-SiO2 -layered memristor, but the ratio of LRS/HRS named as switching window shows no degra-
those from 1.8 V to 4.0 V and from −1.5 V to −3.2 V in the single- dation. It has early been reported that different Icc could modify
STO-layered memristor, respectively. These widespread resistance the growth of Ag filaments, including their morphology, size, and
states and operating voltage ranges could be considered from ran- density, leading to a multiple controlled resistance at LRS of the
domly originated Ag conductive filaments in the two single-layered device [23,45]. The stability and reliability of multilevel resistance
memristor devices. In fact, to realize a better switching perfor- states are further verified as shown in Fig. 3(D), in which the re-
mance in filamentary resistive switching devices, a controlled dy- tention time curves of different resistance levels at LRS last over
namic of metal filaments (here in our recent study, Ag filaments) is 103 s. Fig. 3(C) shows several I-V curves resulted from a higher Icc
highly required. Therefore, a new material system with a collabo- as 4 mA, 6 mA, 8 mA and 10 mA, indicating that a more robust
rated manipulation of Ag+ ions dynamics and a controlled growth filament might be obtained at LRS.
of Ag filaments is required to address these challenges. Several The device-to-device variation of switching parameters from
studies have published several studies, including in situ TEM ob- randomly selected 100 devices is also analyzed to confirm the uni-
servation. The dynamic process of forming and dissolving Ag fila- formity. The I-V characteristics of all of the devices shown in Fig.
ments in the dielectric layer can clearly be observed [43]. It has S2 display a remarkable uniformity. Fig. 3(E, F) demonstrates the
also been reported that different diffusion rates of Ag+ ions in di- cumulative distributions of resistance states (i.e., HRS and LRS) and
verse dielectric materials could modify the growth and status of statistical analysis of operational voltages. It is shown in Fig. 3(E)
Ag filaments, including their morphology, size, and density, finally that both LRS and HRS values are tightly distributed regardless
resulting in a controlled device resistance [44]. of the random selection of the devices. The histogram plotted in
Here, to modify the Ag filament dynamics for realizing a con- Fig. 3(F) shows that operating voltages are mainly in the range of
trolled filamentary resistive switching, STO:Ag/SiO2 layers are in- 0.9 V to 3.1 V (set) and −0.7 V to −2.7 V (reset), respectively. Here,
troduced between Ag TE and p++ -Si BE, as shown in Fig. 1(B). This a set or reset voltage is defined as the voltage at which the ab-
bilayered memristor device with Ag/STO:Ag/SiO2 /p++ -Si structure solute value of current increases or decreases. The standard devia-
shows a stable I-V hysteresis phenomenon at both negative and tion (SD) of the switching voltages is also calculated. The statistical
positive voltage ranges, and none of forming processes is required chart in the inset of Fig. 3(F) indicates that there is a less scattered
for the switching behaviors, as shown in Fig. 3(A). As can be seen statistical data and that the average standard deviation of operat-
in the inset of Fig. 3(A), however, the memristor device structured ing voltages of −0.466 V/0.148 V (set) and 1.113 V/0.574 V (reset)
as Ag/STO/SiO2 /p++ -Si still requires an electroforming process for is obtained. These narrow distributions suggest a better uniformity
resistive switching. It demonstrates here that the presence of Ag of resistive switching in all the devices.

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Fig. 4. Schematic illustration, C-AFM current mapping images and I-V analysis in double logarithmic scale for physical mechanism involve in resistive switching behavior. (A)
Pristine Ag/STO:Ag/SiO2 /p++ -Si memristor. (B, C) The electroforming (SET) and RESET by Ag atoms migrated from the top electrode to the bottom electrode and vice versa.
(D-F) C-AFM current mapping images (read voltage: 0.5 V; SET voltage: 10 V; RESET voltage: −8.0 V). The insets show the profile lines of the current maps. The scanned
area is 5 μm × 5 μm. (G, H) Fitting results for set and reset from replotted I-V curve in double logarithmic scale. (I) Temperature effect of LRS state and linear fitting of
obtained data.

In the ECM device, the resistance switching of the memristor is porous nature of STO could facilitate the accumulation of more Ag
based on the formation and rupture of metallic (Ag, Cu, etc.) con- atoms and thus slow down the mobility of Ag cations. If the TE
ductive filaments inside the dielectric layer. As mentioned previ- is negatively biased, shown in Fig. 4(C), rapid dissolution of Ag-
ously, random growth and dissolution of conductive filaments in filaments by Joule heating could switch the resistance state to LRS
the ECM device will result in a broad operation distribution of again.
resistance states and operational voltages [34,46–48]. Here, how- For experimental confirmation of the growth/dissolution of Ag
ever, our newly proposed memristor devices based on STO:Ag/SiO2 metallic filaments, the C-AFM observations of both pristine and
bilayer exhibit relatively uniform switching behaviors, and it is, electroformed devices are performed, in which the size and po-
therefore, crucial to understand the resistive switching behavior sition of the conductive filaments are well confirmed. For the C-
in Ag/STO:Ag/SiO2 /p++ -Si devices in which the formation and rup- AFM mapping investigation, another device with SiO2 /STO:Ag/Ag/c-
ture of conducting Ag filaments could be the most plausible ex- Si structure was fabricated according to the above-mentioned ex-
planation in this kind of ECM devices [40,49]. Fig. 4(A) shows perimental details. Fig. S3 shows the schematic diagram of the
a schematic diagram of a pristine Ag/STO:Ag/SiO2 /p++ -Si device. testing process for C-AFM measurements. First, the C-AFM scan-
When the Ag TE is biased positively, the oxidation occurs on ning probe tip is grounded while a positive biased voltage is ap-
the electromagnetically active Ag metal and generates Ag+ cations plied to Ag BE to realize the electroforming of the device. Fig. 4(D,
(Ag → Ag+ +e− ), as shown in Fig. 4(B). These cations are accumu- E) shows C-AFM images of an as-deposited device (HRS) and fully
lated near the TE interface and subsequently drifted toward p++ -Si electroformed device (LRS), respectively. Here, as in Fig. 4(E), the
BE through STO:Ag/SiO2 bilayers and then deoxidated to Ag atoms electroforming voltage is about 8.0 V, which is higher than that
(Ag+ +e− → Ag). The further increase in electrical bias could grow of 4.0 V (Fig. 3(A)), possibly due to the high energy barrier and
the Ag-filaments, bridge the TE and the BE, and finally switch the non-uniform electric field caused by the C-AFM scanning probe.
device to LRS from HRS abruptly. In this case, given a growth of During the C-AFM measurements, the tip of the scanning probe
Ag-filaments near the interface between TE and STO:Ag film, the is biased positively with 0.5 V. The scanning area in the pristine

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Fig. 5. (A) Device response, (B) endurance test result and (C) retention property under a pulsed stimulation mode. The device is stimulated by a pulse bias of height +3.0 V
for set and −3.0 V for reset, and the response current is measured at +0.3 V.

device shows a uniformly low current of ~0.1 nA, as shown in to ensure long-term data retention. It can be seen from Fig. 5(C)
Fig. 4(D), owing to a uniform surface morphology of the amor- that the LRS and HRS are stable and holding a good long-term data
phous film. When the device is fully electroformed with 8.0 V, the retention ability (>104 s at room temperature) during the set and
C-AFM image in Fig. 4(E) shows a highly localized conductive re- reset pulse bias stimulation process with a continuous read voltage
gion of 5.0 μA with many other small current spikes less than 0.5 of 0.3 V. Based on above results, it can be concluded that the de-
nA, indicating the growth of high-volume Ag conductive filaments. vice exhibits a large on/off ratio of about ~103 with a rapid forma-
In contrast, when the tip of the scanning probe is negatively bi- tion of conducting filaments at a relatively high operating voltage,
ased with 4.0 V, the size of conducting spot is decreased and the showing out a potential for nonvolatile memory applications.
scanning current is 0.1 μA, indicating the dissolution of conductive In addition to nonvolatile memory applications, our newly pro-
Ag-filaments from the weakest part near to the p++ -Si BE shown posed RRAM device structured as Ag/STO:Ag/SiO2 /p++ -Si can also
as in Fig. 4(F). The simultaneously current testing and microstruc- be used as an artificial synapse for neuromorphic computation,
tural mapping provide well the direct evidence of formation and and hence analog conductance modulation is needed to simulate
dissolution of the confined conduction path in STO:Ag/SiO2 layers. the incremental synaptic weight transfer in the biological synapse
As shown in Fig. 4(G, H), the charge transport behavior is al- [51]. In our device, the direct current (DC) switching properties
ways taken into account to confirm the physical mechanism by fit- have been studied and optimized to implement bi-directional ana-
ting the positive and negative regions of the I-V curve as plotted in log resistance transition before evaluating synaptic characteristics
the semilogarithmic scale. In the positive region (Fig. 4(G)), it can in detail. First, the gradual set and reset processes on the device
be seen from the fitted results in HRS that the charge transport using non-identical consecutive sweeps are studied. Fig. 6(A, B)
behavior follows the trap-controlled space charge limited conduc- shows a noticeable increase and decrease in current flow under
tion (SCLC) mechanism, consisting of the Ohmic (slope ~1.1) region, repeated positive (1st -9th ) and negative (10th -18th ) voltage sweeps,
the Mott-Gurney law (slope ~2.2) region, and the steep current respectively. Initially, the memristor device is gradually set to an
(slope ~8.5) region [40]. The SCLC, Poole–Frenkel and Ohmic con- LRS when applied a sweep bias of 1.6 V. After that, a consecutive
duction will be realized sequentially in LRS if the trap-filled SCLC set process is followed with a suitable sweep voltage ranging from
dominates the HRS conduction mechanism. However, the fitted re- 1.6 V to 2.8 V using an increment of 0.2 V. This set process in-
sults show that the current decreases linearly with the decreas- creases the response current gradually, leading to multiple resis-
ing voltage, and no steep drop in current is observed, indicating tance states of LRS. The repeated negative sweep results in a grad-
the Ohmic characteristics. Fitting results in Fig. 4(H) for the nega- ual increase in the effective gap between the Ag filament tip and
tive region demonstrate that the charge transport changes from the BE while decreasing the cross-sectional area of Ag filaments. Af-
Ohmic conduction to the trap-filled SCLC. The resistance in LRS is ter that, a gradual reset process from predefined LRS is realized
measured as a function of temperature (300 to 400 K) when the using repeated negative sweep biases in the range of 1.0 V-2.6 V
memristor is being electroformed with a Icc =10 mA, as in Fig. 4(I). using a step voltage of 0.2 V. This type of resistance modulation in
It is observed that the resistance of the device is increased lin- multiple intermediate states indicates the existence of analog-type
early with temperature indicating a typical charge transport be- switching [52], distinguishing it from the digital-type of switch-
havior of metals. The temperature coefficient (α ) is then calculated ing. As mentioned above, the abrupt change in resistance between
as 0.9 × 10−3 K − 1 from the linearly fitted data, close to the α HRS and LRS similar to digital-type switching could be realized
value for Ag nanowire [50]. The above results confirm that the by rapid formation/rupture of conductive Ag filament. However, to
Ag-filament is responsible for the switched LRS of electroformed bridge the TE and BE completely, a repeated sweep bias ranging
Ag/STO:Ag/SiO2 /p++ -Si device consistent with the ECM hypothesis from 1.6 V to 2.6 V is not enough. The increasing voltage for each
and the dissolution of the Ag-filament occurs at the weakest part sweep pushes more Ag atoms between the Ag/STO interface, led
near the BE interface there then the HRS recovers back. to a decreased effective gap between TE and BE. Therefore, un-
For the potential applications in data memory, the resistance der repeated biases with a 0.2 V increment, the filament gap be-
states of the Ag/STO:Ag/SiO2 /p++ -Si device should be examined by tween electrodes might be decreased, and the corresponding lat-
applying a pulse programming mode. Herein, an alternate pulse eral size of Ag filament might also be increased, finally leading to
programming with a + 5 V (set) bias and a −3.5 V (reset) bias is an increase in current flow through the device. Based on these ex-
carried out on the device, and the corresponding current response perimental results, the down-up and up-down conductance mod-
subjected to set and reset pulses is shown in Fig. 5(A). The resis- ulation of the memristor device has been demonstrated, which is
tance of the device is measured by a read pulse of +0.3 V after the much similar to the transition of weight changes in a biological
stimulation process. Fig. 5(B) shows that the device presents a sta- synapse, simply by a limited but repeated DC voltage sweeping on
ble and good endurance behavior, keeping enough ratio of LRS/HRS the device. Notably, the I-V curve traces the former left off slope,
over more than 103 cycles under pulse programming biases. More- showing a typical phenomenon in a memristor for analog resistive
over, the resistance states of the testing device are also measured switching [53].

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N. Ilyas, J. Wang, C. Li et al. Journal of Materials Science & Technology 97 (2022) 254–263

Fig. 6. (A) Gradual set and (B) reset processes by repeated sweeping positive and negative voltage respectively, ranging from 1.6 V to 2.6 V with step voltage of 0.2 V. (C, D)
Response to the pulses with +2.0 V for potentiation and −2.0 V for depression of the Ag/STO:Ag/SiO2 /p++ -Si device.

In order to confirm the gradual change of conductance in our cleft between TE and BE terminals, where the applied pulse signal
device, the resistance is also tuned by pulse programming. Fig. 6(C) is transmitted. As mentioned above, the incremental conductance
shows the voltage applied as black and the corresponding current modulation of Ag/STO:Ag/SiO2 /p++ -Si device under pulse program-
response as a red line along with the pulse trains and numbers. ming is realized similar to the synaptic weight modulation in the
The pulse amplitude for the potentiation process is fixed to 2.0 V biological synapse. Again, in Fig. 6(D), the memristor device shows
and for the depression process, the pulse amplitude is fixed to potentiation and depression under repeated pulse biases, gener-
−2.0 V, and both the width and the delay time for the repeated ally known as LTP and LTD phenomena in the electronic synapse,
pulse are fixed at 5.0 ms. It can be seen that the resulting con- where the synaptic weight changes and transfer efficiencies could
ductance responds to either potentiating or depressive stimuli re- be determined by dynamical changes in connection strength be-
gardless of pulse polarity, which is the same for weight modulation tween electrodes through continuous pulse stimulations. The per-
as in biological synapses. Fig. 6(D) shows that the conductance of formance of electronic synapse could be determined by linearity in
our device is tunable gradually regardless of positive or negative synaptic weight change during LTP and LTD [56]. It can be found
pulse bias. Therefore, the STO:Ag/SiO2 based RRAM device exhibit- that the gradual conductance change with better linearity dur-
ing nonlinear I-V characteristics has the potential to emulate the ing potentiation and depression processes in Ag/STO:Ag/SiO2 /p++ -
biological functions faithfully with suitable pulse-assisted stimuli. Si device has demonstrated a potential for neuromorphic comput-
Similar to bio-synapses, the selected synaptic features in ing.
Ag/STO:Ag/SiO2 /p++ -Si memristor device are examined to mimic Besides essential long-term synaptic plasticity functions (i.e.,
the synaptic plasticity modulation the human brain. Fig. 7(A, B) LTP and LTD), SRDP, PPF, and PTP are common short-term plas-
illustrates the synaptic weight change between the axon (presy- ticity functions. It is known that frequency-dependent stimulation
naptic neuron) and the dendrite (postsynaptic neuron) and a corre- influences synaptic weight control in biological synapses. Thus, the
sponding fabricated memristor. In the human brain, the hippocam- STO:Ag/SiO2 based device is stimulated by different pulse pro-
pus is shown in Fig. 7(A), which controls memory [54]. In a bi- gramming exhibiting the same pulse number and different fre-
ological synapse, the synaptic weight is adjusted between presy- quencies. The response of Ag/STO:Ag/SiO2 /p++ -Si device, when
naptic and postsynaptic neurons via releasing Ca2+ or K+ influx stimulated with a pair of presynaptic and postsynaptic pulses,
in synaptic cleft when the axon receives an action potential [55]. is shown in Fig. 7(C). It can be found that the first stimulated
As in the biological synapse, the conductance of STO:Ag/SiO2 di- pulse increases the current response, and before recovery time,
electric layers can artificially be modulated by the migration of Ag the second pulse reinforces the current response. The interval be-
filaments (drift in or drift out) under DC pulse programming. In tween the stimulated pulses significantly affects the modulation
the electronic synapse, the STO:Ag/SiO2 layers act as the synaptic of synaptic weight depending on the recovery time of Ag+ ions

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N. Ilyas, J. Wang, C. Li et al. Journal of Materials Science & Technology 97 (2022) 254–263

Fig. 7. (A) Schematic diagram of biological synapse and synaptic modulation between presynaptic and post-synapse with the migration of Ca2+ or K+ ions when an action
potential is received. (B) Schematic diagram of STO:Ag/SiO2 -based device and its conductance modulation at pulse bias stimulation. (C, D) PPF and fitting results of current
response with pulse intervals. (E, F) Illustration of programming for pulse interval of 5 ms, 10 ms, 15 ms and 20 ms, and the current responses.

in STO:Ag/SiO2 layers. This type of synaptic effect is known as increase in current flow through the device. The high current re-
PPF [57]. It can also be found in Fig. 7(D) that decreasing the sponse at PTP can be attributed to the limited recovery time and
pulse interval will increase the current response of the device, more robust Ag filament formation during high-frequency stimula-
i.e., the shortest interval induces the highest PPF (%) when com- tion (limited to pulse interval). In contrast, a longer recovery time
pared to the longest interval stimuli. Here, the relative change between the facilitating pulses forming a weaker Ag filament, re-
in synaptic weight at consecutive pulses is calculated as PPF sulting in the lowest response of current enhancement.
(%)=100 × (I2 −I1 )/I1 . These results indicate the dependence on the Moreover, the synaptic weight change can be determined by the
time difference between presynaptic and postsynaptic stimulation temporal order of presynaptic and postsynaptic spikes, known as
processes, showing a resemblance to that in the biological synapse. spike-time-dependent-plasticity (STDP). STDP is one of the critical
Similarly, in the biological synapse, the synaptic weight change can Hebbian learning rules of biological synapses [59], and the success-
be realized for a short interval as a result of Ca2+ ions released ful demonstration of STDP is essential to determine the plausibil-
upon the neural pulse. Simultaneously, another stimulation dur- ity of the fabricated electronic synapses for neuromorphic appli-
ing the recovery time of Ca2+ reinforces the synaptic change to be cations. Therefore, a suitable pulse scheme is designed to demon-
more extensive than that of the first stimulus [57]. strate the STDP on our Ag/STO:Ag/SiO2 /p++ -Si device for stimula-
The influence of pulse rate on current change (I) is further tion. Herein, Ag TE is considered for presynaptic stimulation, and
evaluated with pulse trains comprised of the same pulse numbers p++ -Si is considered for postsynaptic stimulation. If the presynap-
but different frequencies by adjusting the pulse interval of consec- tic pulse precedes the postsynaptic pulse (t > 0), it will result
utive pulses. Fig. 7(E) illustrates the four sets of pulse trains with in LTP. However, if the postsynaptic pulse precedes the presynaptic
the same height (i.e., 1.5 V) and width (i.e., 0.5 ms) but different pulse (t < 0), it then will result in LTD. The difference between
pulse intervals. The current change (I) with the change in pulse presynaptic and postsynaptic pulse time is calculated as t=tpre -
rate or frequency is shown in Fig. 7(F). The total change in cur- tpost . A schematic illustration of both presynaptic and postsynap-
rent after stimulation with different pulse frequencies is measured tic pulses can be seen in the inset of Fig. 8, and the correlated
as I=[(IN −I1 )/I1 ]. The gradual increase in synaptic strength upon pulse parameters are designed as follows. For a presynaptic pulse,
consecutive presynaptic stimulations for a longer time is termed pulse height is 1.2 V with a width of 5 ms, but for a postsynap-
as post-tetanic potentiation (PTP) phenomenon. It can be seen tic pulse, pulse high is −1.2 V with a width of 5 ms. The synaptic
that the current response in the device shows an apparent depen- weight change (W) after presynaptic and postsynaptic stimula-
dence on pulse frequency during the stimulation process. The con- tion for both t > 0 and t < 0 can be calculated as [60]:
ductance changes faster with lowering pulse interval (higher fre-
W = A+ e−t/τ+ if t > 0 (1)
quency). These results indicate that the pulse rate can influence
synaptic weight in our Ag/STO:Ag/SiO2 /p++ -Si device. W = A− e−t/τ− if t < 0 (2)
Interestingly, with the increase in pulse interval, the memristor
conductance reaches a saturated state rapidly at last. It is known In these equations Eqs. (1) and (2), A+ and A− refer to the scal-
that the synaptic weight change could be increased and further ing factor, τ +, and τ − correspond to the decaying constant. In the
strengthened with continuous learning in a biological synapse and case of t > 0, the synaptic weight change (W) is increased with
that due to an intrinsic enforced restriction to modulate the Heb- decreasing timing difference (t)., indicating the presence of LTP
bian rule, the synaptic weight has a limited value so that the con- behavior. In contrast, when t < 0, W is decreased with an in-
ductance could be reached at saturation state [58]. As mentioned crease t, again reflecting the existence of LTD behavior. Herein,
above, in our Ag/STO:Ag/SiO2 /p++ -Si device, the gap between elec- when shorter t between the stimulating spikes, a larger response
trodes might be decreased, and the cross-sectional size of Ag fila- of the device conductance changes due to a larger change in synap-
ments can be increased under repeated stimulations, leading to an tic weight. These results confirm that our Ag/STO:Ag/SiO2 /p++ -Si

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N. Ilyas, J. Wang, C. Li et al. Journal of Materials Science & Technology 97 (2022) 254–263

Supplementary materials

Supplementary material associated with this article can be


found, in the online version, at doi:10.1016/j.jmst.2021.04.071.

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