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Close-Packed Arrays of Plasma Jets Emanating From Microchannels in a

Transparent Polymer

Article  in  IEEE Transactions on Plasma Science · November 2012

DOI: 10.1109/TPS.2012.2218130

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2946
Close-Packed Arrays of Plasma Jets Emanating From
Microchannels in a Transparent Polymer
P. P. Sun, Student Member, IEEE, J. H. Cho, C.-H. Park,
S.-J. Park, Senior Member, IEEE, and J. G. Eden, Fellow, IEEE
Abstract—Close-packed arrays of microplasma jets, propagat-
ing into atmospheric air with uniform plume length and lumi-
nosity, have been generated in cylindrical microchannels and
characterized. Arrays as large as 8 × 8 with a packing density
of ∼160 cm−2 have been demonstrated to date. Fabricated in
a molded flexible polymer that is transparent deep into the ul-
traviolet (λ  250 nm), microchannel devices  350 μm in
diameter generate plasma in He feedstock gas with a backing
pressure of 760–900 Torr and flow rates up to 4.6 standard liters
per minute. Chemical kinetics of the He (21,3 S) and He2 (a3 Σ+u)
excited species interacting with laboratory air has been examined
by optical emission spectroscopy. The maximum jet length for a
5 × 5 array is 3.8 ± 0.2 mm when the He backing pressure
is 840 ± 20 Torr. Relative to previous jet array designs, this
technology increases the jet packing density by more than an order
of magnitude and yet jet–jet interactions are not observed.
Index Terms—Jet arrays, microchannel, microplasma jet.
I. I NTRODUCTION
I NTERACTIONS of low-temperature plasma, generated in
a flowing gas stream, with a surface provide considerable
versatility in processing. Radicals and excited species produced
within the feedstock gas itself or through mixing of the plasma
with the surrounding medium can be tailored so as to pro-
mote a process of benefit to either medical therapeutics or
materials growth, for example. Furthermore, such atmospheric-
pressure glows offer a broad spectrum of chemical reactions
downstream while maintaining a stable discharge at the source,
thereby facilitating the formation of targeted radicals or tran-
sient molecules with exceptional throughput. Since the pio-
neering work of several groups in the late 1990s [1]–[4], the
physics of nonequilibrium plasma in the form of atmospheric-
pressure jets has been studied extensively [4]–[9], and the
potential of both pulsed and continuous jets for disinfection and
wound healing appears to be particularly promising. These and
other prospective applications suggest that scaling the cross-
sectional area of the jet is desirable but virtually all of the
Manuscript received April 26, 2012; revised August 13, 2012; ac-
cepted August 22, 2012. Date of current version November 6, 2012. This
work was supported by the U.S. Air Force Office of Scientific Research
(H.R. Schlossberg) under Grant FA9550-10-1-0456.
P. P. Sun, J. H. Cho, S.-J. Park, and J. G. Eden are with the Laboratory for
Optical Physics and Engineering, Department of Electrical and Computer Engi-
neering, University of Illinois, Urbana, IL 61801 USA (e-mail: peter.pengsun@
gmail.com; chchoyi@gmail.com; sjinpark@uiuc.edu; jgeden@illinois.edu).
C.-H. Park is with the Department of Otorhinolaryngology—Head and Neck
Surgery, College of Medicine, Hallym University Medical Center, Chuncheon,
Korea (e-mail: hlpch@paran.com).
Color versions of one or more of the figures in this paper are available online
at http://ieeexplore.ieee.org.
Digital Object Identifier 10.1109/TPS.2012.2218130
0093-3813/$31.00 © 2012 IEEE
IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 40, NO. 11, NOVEMBER 2012
atmospheric-pressure jets introduced to date are single plasma
flow designs offering limited scalability. Several groups [10]–
[13] have pursued the alternative of multijet assemblies but the
configurations reported are generally bulky and offer packing
densities below 10 cm−2 .
Multijet plasma arrays, produced in microchannels fabri-
cated in a monolithic polymer housing (“head”) and propagated
in laboratory air, are described here. Molded into a transpar-
ent, lightweight, and flexible polymer, the array comprises as
many as 64, ∼350-μm-diameter microchannels in an 8 × 8
configuration. This approach to atmospheric-pressure plasma
jets features a single gas input line but also provides a hand-
held capability and jets that are uniform in cross section and
length to within ±10%. Relative to previous jet array designs,
the jet packing density offered by this technology is larger
by at least an order of magnitude. Recently, Ma et al. [14]
reported preliminary data for microjet arrays as large as
5 × 2 and fabricated in a moldable polymer. An advanced
version of the design in [14] is reported here. A distributed
electrode assembly (as opposed to planar grids), the provision
of an auxiliary electrode, and a modified fabrication procedure
have resulted in plasma jets that are considerably more uniform
than those available previously.
II. A RRAY S TRUCTURE AND FABRICATION P ROCEDURE
Two diagrams of a representative multijet array design are
presented in Fig. 1. The upper panel shows the array, viewed
from the front of a monolithic polymer structure (the array
“head”) from which plasma jets are emerging into laboratory
air. Plasma is ejected from cylindrical microchannels in which
uniform glow discharges are produced by application of a time-
varying potential to wire electrode arrays buried within the
silicone polymer. Each of the three electrode arrays is oriented
in a plane transverse to the plasma microchannels. Electrical
connections for the electrode arrays are accessible on both
sides of the polymer head, and one possible connection pattern
is indicated in Fig. 1 but it should be emphasized that other
electrode configurations also function well. Panel (b) of Fig. 1
is a side-view illustration of the array structure.
Fig. 2 is a sequence of diagrams illustrating the process
of fabricating the microchannel array in a flexible transparent
polymer. The process begins with a mold [Fig. 2(a)] into which
are machined arrays of slots or holes that serve as a jig for
assembling and supporting the electrode array. It should also
be mentioned that, for the sake of clarity, two sidewalls of the
mold have been removed in Fig. 2(a)–(d). Part (b) of Fig. 2
 This article has been accepted for inclusion in a future issue of this journal. Content is final as presented, with the exception of pagination.

SUN et al.: CLOSE-PACKED ARRAYS OF PLASMA JETS EMANATING FROM MICROCHANNELS 2947

Fig. 1. Diagrams illustrating the structure of a microplasma jet array in

(a) perspective and (b) side view. The diameter of the glass tube connection Fig. 2. Process sequence for fabricating close-packed array of microplasma
to the array head is 4 mm (o.d.). Also, the electrical connections shown jets operating in atmospheric-pressure gas flows. Installation of the gas flow
(i.e., first electrode row grounded) are for illustrative purposes only—other tube to the array head is not shown. The specific electrode/microchannel
configurations function well and are under investigation. assembly illustrated here is that for a 5 × 5 jet array.

illustrates the installation of the electrode wires (typically

copper) and, in Fig. 3(c), the ∼350-μm-diameter metal rods
that will define the microchannels have been inserted into the
hole pattern at the base of the mold. Oriented orthogonal to
the electrode wires, every row of metal rods is parallel to the
electrode axes and lies between two electrodes that are adjacent
to each other in a horizontal plane. In other words, the rows
of rods are interlaced with columns of electrodes [Fig. 3(c)].
After the mold is filled with a heat-curable silicone polymer,
removing trapped air is essential for reliability and, specifically,
to prevent premature electrical breakdown of the device. The Fig. 3. Magnified view of a portion of a microjet array, illustrating the dimen-
polymer is subsequently cured at 80−100 ◦ C for a period up sions of the electrodes and their positioning relative to the plasma channels.
to 1 h and the entire assembly is then removed from the mold
(or, alternatively, the mold is disassembled). Once the polymer microchannel is 355 ± 5 μm, the surface of an electrode is
is cured a second time at 80−100 ◦ C, the metal rods can be re- ∼195 μm from the nearest section of the wall of a microchan-
moved without scarring the interior walls of the microchannels. nel. For all of the experiments reported here, the microchannel
Assembly of the jet array is completed by cutting the polymer pitch is also 1 mm. Consequently, the array packing density in
head to a finished thickness of 5 mm and attaching a 4-mm-o.d. the exit plane is ∼162 cm−2 or more than an order of magnitude
tube to the array. A specific silicone polymer (GE RTV615) larger than values typical of previous arrays.
was chosen for these experiments because it is transmissive
throughout the visible and well into the deep ultraviolet (UV;
III. E XPERIMENTAL R ESULTS
λ ∼ 250 nm), thus permitting optical probing of the plasma as
it propagates inside the microchannels. A 20-kHz sinusoidal voltage provided the electrical drive for
More detailed specifications regarding the copper electrode the arrays and He served as the feedstock gas at mass flow
wires and their positions relative to the cylindrical microchan- rates up to ∼5 slm. The electrode connections were those of
nels are provided by Fig. 3. Having a length of 1.9 cm, the Fig. 1 in which the planar set of wire electrodes closest to the
electrodes are 255 μm in diameter (30 AWG) and are separated gas inlet was grounded. For all of the experiments reported
in a vertical plane by 1 mm. Because the diameter of the here, measurements of jet-to-jet variations in jet luminosity
 This article has been accepted for inclusion in a future issue of this journal. Content is final as presented, with the exception of pagination.
2948
Fig. 4. Photograph of a 3 × 3 array of microjets operating with a He backing
pressure of 860 Torr.
and length (for example) were made by optical imaging of
the array emission with a telescope and a CCD camera. The
spatial resolution for this imaging arrangement is estimated to
be ±46 μm.
Fig. 4 is a photograph of a 3 × 3 array of microjets,
propagating into laboratory air and produced with a He backing
pressure of 860 Torr. One earmark of the array structure and
fabrication processes described earlier is that, despite the jet
pitch of only 1 mm, the plasma plumes are uniform in length
and luminosity. Regardless of the size of the array investigated
in these experiments, no evidence of the perturbation of one jet
by any of its neighbors is observed. Furthermore, all jets ignite
simultaneously, and the variation in visible emission intensity
from jet to jet is < ±10% over a wide range in gas backing
pressure and driving voltage. As expected, similar results were
obtained when viewing the arrays end-on or transverse to the
jet axes.
Waveforms representative of those observed for a single jet
are given in panel (a) of Fig. 5 for a He backing pressure of
800 Torr and an rms driving voltage of 0.77 kV. The peak
current density is ∼0.11 A · cm−2 , and the power deposited
into this plasma jet is 2.7 mW. Breakdown occurs when the
instantaneous voltage reaches ∼0.88 kV and an analysis of
the electrical (V −I) data indicates that array operation is
characteristic of the abnormal glow regime. Strong visible and
UV fluorescence is observed from the jets but the most intense
emission is produced in a ∼500-ns FWHM pulse that lies early
in the positive half cycle of the voltage waveform (∼3 μs
after zero crossing). Following the initial spike in intensity, a
secondary, slowly-decaying (τ ∼ 4 μs) emission pulse occurs.
Similar behavior is observed in the negative half cycle of the
voltage waveform except that the peak emission intensity is
∼40% lower than the corresponding value for the positive half
cycle and both maximum current and visible emission intensity
occur ∼4.5 μs after zero crossing. However, increasing the ar-
ray size modifies both the current and fluorescence waveforms
substantially, as exemplified by the data in Fig. 5(b) for a 5 × 5
array driven at V = 1.1 kV (rms). One notices immediately that
the breadth of the fluorescence pulse has grown to ∼12 μs (an
increase of a factor of > 20 relative to a single jet) and two
IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 40, NO. 11, NOVEMBER 2012
Fig. 5. Representative electrical and optical emission waveforms for (a) a
single microplasma jet device and (b) a 5 × 5 array. The driving voltage for
the 5 × 5 array is a 20-kHz sinusoid having a magnitude of 1.1 kV (rms).
undulations in the emission intensity follow the initial peak.
The latter two local maxima in the intensity waveform appear to
be associated with the initiation and propagation of two plasma
bullets and the details of gated intensified CCD array detector
measurements of the plasma temporal history will be described
in detail elsewhere.
Fig. 6 illustrates the dependence of the plasma plume length
on the gas feedstock pressure for a 1 × 5 array driven with
rms voltages ranging from 1 to 2.5 kV. Deduced from images
of the jet emission spatial profile, the lengths are given for He
backing pressures between 760 and 900 Torr. The initial rise in
the length of the plasma plume is the result of increasing gas
flow velocity but the apparent saturation of the length at 3.8 ±
0.2 mm for Vrms = 1.8 kV and 840 Torr of backing pressure
is likely due to turbulence at the interface between the 4-mm-
o.d. gas input tube and the polymer head. Improved design of
the gas flow in this region is expected to yield increased plume
lengths for a given backing pressure and excitation voltage.
Extensive measurements of the fluorescence spectra pro-
duced by the plasma jets in the UV, visible, and near infrared,
recorded with a spectrometer/diode array having a resolution
in first order of 0.35 nm, show the presence of ionic and
neutral emitters reported previously [14]. The most prominent
 This article has been accepted for inclusion in a future issue of this journal. Content is final as presented, with the exception of pagination.
SUN et al.: CLOSE-PACKED ARRAYS OF PLASMA JETS EMANATING FROM MICROCHANNELS
Fig. 6. Variation of the microplasma plume length with the backing pressure
of the He feedstock gas. Data are presented for rms voltages of 1.0 kV (◦),
1.8 kV (•), and 2.5 kV (), and estimated uncertainties are indicated for
several measurements. Notice that zero for the ordinate has been suppressed.
of these are the (v  , v  ) = (0, 0) and (1, 1) transitions of the hy-
droxyl radical (OH) A2 Σ+ → X 2 Π band, peaking at 306.4 and
 2 + 
312.2 nm, respectively, the B2 Σ+ u (v = 0) → X Σg (v =
0, 1) transitions of N2 at 391.4 and 427.8 nm, the 3p2 5 P2 →
+
3s 5 S2 transition of atomic oxygen at 777.3 nm, and the 706.5
and 471.3 nm lines of He (3 3 S1 → 2 3 P0 and 4 3 S1 → 2 3 P0,2 ,
respectively). Fig. 7 illustrates the dependence on He backing
pressure of the relative emission intensities for most of these
spectral features when the driving voltage is fixed at 1.8 kV rms.
Of these four emitters, N+ 2 is the most intense in the 300–
2 + 
500-nm region, owing to the N+ 2 (B Σu (v = 0)) radiative
lifetime but also to the rate constant for the collisional pro-
−
cess: He(23 S1 ) + N2 → N+ 2 +
2 (B Σu )+He + e +ΔE. Penning
3
ionization of N2 by the He(2 S1 ) metastable is well known
[15] and was the basis for the electron-beam-pumped N+ 2 laser
reported in 1974 [16]. The linear variation of the N+ 2 fluores-
cence intensity with He pressure (Fig. 7) is consistent with
Penning ionization being the dominant process for populating
the N+ 2 +
2 (B Σu ) state. Similarly, the linear dependence of both
the He (43 S1 → 23 P) and O (3p 5 P2 → 3s 5 S2 ) intensities
on the He pressure is also expected because the He (23 S1 )
metastable is the precursor to the production of both the
O (3p 5 P2 ) and He (43 S1 ) excited atoms. A conspicuous and
fascinating aspect of the data in Fig. 7, however, is the quadratic
increase in the OH (A → X) intensity as the He pressure (pHe )
is raised from 760 Torr to at least 800 Torr. This behavior
suggests that OH (A) is generated predominantly from the
He2 (a3 Σ+ u ) excited dimer which is itself produced from the
He (23 S1 ) metastable species by a three-body collision. It is
the latter that is responsible for the OH (A) fluorescence inten-
sity rising as the square of pHe . The internal energy of the He2
(a) molecule (18 eV) is more than ample to shear the HO–H
bond of water (present in laboratory air) with sufficient energy
remaining to promote the OH radical to the A2 Σ+ electronic
excited state. When pHe is increased beyond ∼800 Torr, the
onset of saturation is observed which may be a result of the
2949
Fig. 7. Dependence on the jet backing pressure of the relative intensities for
several prominent emitters: OH (A → X) (), O (777 nm) (), N+ 2 (B →
X) (•), and He (43 S1 → 23 P0,2 , 471 nm) (◦). Results are shown for a 1 ×
5 jet array viewed orthogonal to the jet axes at a distance of 5 mm from the
channel apertures. Data are also given for the OH (A → X) transition at 306.4
and 312.2 nm when the emission is viewed end-on to the plasma plume.
rising influence of collisional quenching of OH (A) by water
vapor or N2 .
Most of the data in Fig. 7 were acquired by viewing a
1 × 5 array of jets along an axis orthogonal to the path of the
jets. If, however, any of the five plasma plumes are observed
“end-on,” the rapid rise of the OH (A → X) emission (cf.
Fig. 7) for 760  pHe  800 Torr vanishes. Rather, as indicated
by the open squares () of Fig. 7, the OH (A → X) intensity
is essentially constant for pHe up to (and beyond) 800 Torr. It
must be emphasized that only the OH (A → X) transition and
the 706-nm line of He (33 S1 → 23 P) exhibit this behavior. All
other emission features exhibit a dependence on He backing
pressure when viewed end-on that is virtually identical to that
observed at a right angle to the plasma flow. We interpret the
behavior of the “end-on” OH (A → X) data of Fig. 7 as the
result of the limited ability of He2 (a3 Σ+ u ), the precursor to
OH (A2 Σ+ ), to diffuse radially out of the plasma plume. When
the jets are observed orthogonal to their axes, the emission
detected (solid triangles () of Fig. 7) is apparently produced
primarily at the perimeter of the cylindrical plasma where He2
(a3 Σ+u ) excimers, generated near the edge of the jet, interact
with H2 O molecules supplied by the surrounding air. When
viewing the plasma plume end-on, however, the OH emission
remains essentially constant because He2 (a) dimers produced
in the interior of the expansion are quenched (deactivated
nonradiatively) before diffusing outward sufficiently to reach
the air/plasma interface. Therefore, a photodetector situated
along the axis of the jet observes the entire cross-sectional area
of the jet, of which little is involved in producing OH (A) by the
reaction:
   2 +
u + H2 O → OH A Σ
He2 a 3 Σ+ + H + 2 He. (1)
As a final note, we have succeeded in fabricating 8 × 8 arrays
of microplasma jets, and Fig. 8 is a photograph of such an
 This article has been accepted for inclusion in a future issue of this journal. Content is final as presented, with the exception of pagination.
2950
Fig. 8. Array of 64 plasma jets in an 8 × 8 configuration and operating with a
He backing pressure of 780 Torr. The amplitude of the 20-kHz voltage driving
the array is 0.88 kV rms.
array operating with a He backing pressure of 780 Torr and a
(20-kHz) driving voltage of ∼0.88 kV (rms). Experience gained
with this fabrication technology over the past year suggests
that arrays comprising > 1000 jets in a cross-sectional area of
∼10 cm2 are feasible.
IV. S UMMARY AND C ONCLUSIONS
The fabrication and operational characteristics of a close-
packed array of microplasma jets have been described. Fab-
ricated in a transparent moldable polymer, these arrays offer
packing densities (up to ∼160 cm−2 to date) that are more than
an order of magnitude higher than those reported previously.
Not only are the plasma plumes, emanating from microchannel
arrays as large as 8 × 8, uniform in both luminosity and length
but also no evidence of interactions among the jets is observed
for a jet-to-jet pitch of 1 mm. Lengths of the plasma plumes
reach 3.8 ± 0.2 mm for a He backing pressure of 840 Torr, and
strong emission is observed from N+ 2 + 2 +
2 (B Σu ) and OH (A Σ ),
as well as several familiar lines of atomic oxygen and He.
Experiments examining the dependence of emitter intensity on
He feedstock gas pressure indicate that OH (A) is produced
predominantly at the perimeter of the jets due to collisions
of He2 (a3 Σ+u ) with H2 O at the interface between the jet and
surrounding air.
The improved jet packing densities available with the tech-
nology described here, in combination with the small weight
and size of the array, suggest that the utility of this microplasma
array design will be broad, influencing applications as diverse
as medical therapeutics (such as disinfection and wound heal-
ing) and materials processing.
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Authors’ photographs and biographies not available at the time of publication.